JP2005328682A5 - - Google Patents

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Publication number
JP2005328682A5
JP2005328682A5 JP2004146641A JP2004146641A JP2005328682A5 JP 2005328682 A5 JP2005328682 A5 JP 2005328682A5 JP 2004146641 A JP2004146641 A JP 2004146641A JP 2004146641 A JP2004146641 A JP 2004146641A JP 2005328682 A5 JP2005328682 A5 JP 2005328682A5
Authority
JP
Japan
Prior art keywords
coil
stage
constituting
driving
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004146641A
Other languages
English (en)
Japanese (ja)
Other versions
JP4418710B2 (ja
JP2005328682A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004146641A priority Critical patent/JP4418710B2/ja
Priority claimed from JP2004146641A external-priority patent/JP4418710B2/ja
Priority to US11/126,365 priority patent/US7388307B2/en
Publication of JP2005328682A publication Critical patent/JP2005328682A/ja
Publication of JP2005328682A5 publication Critical patent/JP2005328682A5/ja
Application granted granted Critical
Publication of JP4418710B2 publication Critical patent/JP4418710B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004146641A 2004-05-17 2004-05-17 ステージ装置 Expired - Fee Related JP4418710B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004146641A JP4418710B2 (ja) 2004-05-17 2004-05-17 ステージ装置
US11/126,365 US7388307B2 (en) 2004-05-17 2005-05-11 Stage apparatus, plane motor, and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004146641A JP4418710B2 (ja) 2004-05-17 2004-05-17 ステージ装置

Publications (3)

Publication Number Publication Date
JP2005328682A JP2005328682A (ja) 2005-11-24
JP2005328682A5 true JP2005328682A5 (enExample) 2009-08-13
JP4418710B2 JP4418710B2 (ja) 2010-02-24

Family

ID=35308747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004146641A Expired - Fee Related JP4418710B2 (ja) 2004-05-17 2004-05-17 ステージ装置

Country Status (2)

Country Link
US (1) US7388307B2 (enExample)
JP (1) JP4418710B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006287014A (ja) * 2005-04-01 2006-10-19 Canon Inc 位置決め装置およびリニアモータ
US7420299B2 (en) * 2006-08-25 2008-09-02 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7592760B2 (en) * 2006-09-11 2009-09-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US8492934B2 (en) * 2009-03-23 2013-07-23 Nikon Corporation Coil variations for an oval coil planar motor
JP5918965B2 (ja) 2011-10-25 2016-05-18 キヤノン株式会社 加工機システム及び加工機の配置方法
KR101471130B1 (ko) * 2013-07-16 2014-12-11 숭실대학교산학협력단 평면 모터 장치 및 이를 이용한 공정 장치
DE102018117953B3 (de) * 2018-07-25 2019-11-07 Beckhoff Automation Gmbh Statoreinheit
DE102018117981A1 (de) * 2018-07-25 2020-01-30 Beckhoff Automation Gmbh Statoreinheit und Statormodul

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3958138A (en) * 1971-09-10 1976-05-18 Tracked Hovercraft Limited Linear induction motors
US5925956A (en) * 1995-06-30 1999-07-20 Nikon Corporation Stage construction incorporating magnetically levitated movable stage
US5959415A (en) * 1996-08-13 1999-09-28 Richard D. Sedgewick Linear motor with improved coil design and heat removal
US6445093B1 (en) * 2000-06-26 2002-09-03 Nikon Corporation Planar motor with linear coil arrays
US6452292B1 (en) * 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays
JP2002112526A (ja) 2000-06-26 2002-04-12 Nikon Corp 平面モータ、ステージ位置決めシステム、露光装置
JP4689058B2 (ja) * 2001-02-16 2011-05-25 キヤノン株式会社 リニアモータ、ステージ装置および露光装置ならびにデバイス製造方法
EP1276016B1 (en) * 2001-07-09 2009-06-10 Canon Kabushiki Kaisha Exposure apparatus

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