JP2005317854A5 - - Google Patents
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- Publication number
- JP2005317854A5 JP2005317854A5 JP2004135995A JP2004135995A JP2005317854A5 JP 2005317854 A5 JP2005317854 A5 JP 2005317854A5 JP 2004135995 A JP2004135995 A JP 2004135995A JP 2004135995 A JP2004135995 A JP 2004135995A JP 2005317854 A5 JP2005317854 A5 JP 2005317854A5
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- JP
- Japan
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Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004135995A JP4495509B2 (en) | 2004-04-30 | 2004-04-30 | Transfer robot |
| TW094112246A TW200540085A (en) | 2004-04-30 | 2005-04-18 | Transfer robot |
| KR1020050033948A KR101149952B1 (en) | 2004-04-30 | 2005-04-25 | Transfer robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004135995A JP4495509B2 (en) | 2004-04-30 | 2004-04-30 | Transfer robot |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005317854A JP2005317854A (en) | 2005-11-10 |
| JP2005317854A5 true JP2005317854A5 (en) | 2007-04-12 |
| JP4495509B2 JP4495509B2 (en) | 2010-07-07 |
Family
ID=35444936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004135995A Expired - Fee Related JP4495509B2 (en) | 2004-04-30 | 2004-04-30 | Transfer robot |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4495509B2 (en) |
| KR (1) | KR101149952B1 (en) |
| TW (1) | TW200540085A (en) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101192751B1 (en) | 2005-12-29 | 2012-10-18 | 엘지디스플레이 주식회사 | manufacturing device for flat panel display and method thereof |
| JP5190303B2 (en) * | 2008-06-04 | 2013-04-24 | 東京エレクトロン株式会社 | Conveying device and processing device |
| JP2010023195A (en) * | 2008-07-22 | 2010-02-04 | Nidec Sankyo Corp | Industrial robot |
| JP5338365B2 (en) * | 2009-02-18 | 2013-11-13 | 凸版印刷株式会社 | Robot hand for glass substrate transfer |
| JP5821251B2 (en) * | 2011-04-08 | 2015-11-24 | セイコーエプソン株式会社 | Robot hand |
| KR101703767B1 (en) * | 2011-09-23 | 2017-02-23 | 주식회사 원익아이피에스 | Substrate processing system, buffer module, and loadlock module therefor |
| KR101870293B1 (en) * | 2011-11-09 | 2018-06-22 | 엘지디스플레이 주식회사 | Rubbing system and substrate transporting robot therefor |
| CN103128185B (en) | 2011-11-25 | 2015-03-11 | 鸿富锦精密工业（深圳）有限公司 | Carrying device and stamping device adopting the same |
| JP5480340B2 (en) | 2012-07-26 | 2014-04-23 | ファナック株式会社 | Take-out robot system using roller device |
| KR101410246B1 (en) * | 2013-03-18 | 2014-06-20 | 주식회사 로보스타 | Triple arm robot for transmitting panel |
| CN105014655A (en) * | 2014-04-16 | 2015-11-04 | 扬州兴乐电镀设备有限公司 | PLC module control manipulator grab-release device |
| CN104108605B (en) | 2014-07-08 | 2016-08-17 | 深圳市华星光电技术有限公司 | A kind of fetching device of glass substrate |
| TWI614114B (en) * | 2015-08-21 | 2018-02-11 | 寧波弘訊科技股份有限公司 | Displacement and acquisition device and method thereof |
| CA3026002C (en) * | 2016-09-06 | 2021-04-20 | Advanced Intelligent Systems Inc. | Mobile work station for transporting a plurality of articles |
| TWI674231B (en) * | 2017-06-01 | 2019-10-11 | 孫建忠 | Substrate storage system |
| JP6777665B2 (en) | 2018-02-26 | 2020-10-28 | ファナック株式会社 | Robot hand, robot and how to adjust the hand width of the robot hand |
| CN110202565A (en) * | 2019-05-30 | 2019-09-06 | 上海海事大学 | Micro-wave oven high temperature food grabs mechanical device |
| TWI733141B (en) * | 2019-07-16 | 2021-07-11 | 亞智科技股份有限公司 | Fork type substrate transportation device and method |
| CN110587635A (en) * | 2019-08-02 | 2019-12-20 | 湖南海纳赋能科技有限公司 | Intelligent storage manipulator for locker |
| KR20220164688A (en) * | 2020-04-06 | 2022-12-13 | 니폰 덴키 가라스 가부시키가이샤 | Glass plate manufacturing method and manufacturing apparatus |
| CN113213055B (en) * | 2021-05-27 | 2022-12-20 | 深圳市库宝软件有限公司 | Cross-region task processing method, device, equipment, warehousing system and storage medium |
| CN113414779B (en) * | 2021-06-29 | 2022-08-12 | 河南职业技术学院 | Manipulator based on computer control |
| WO2023074962A1 (en) * | 2021-10-29 | 2023-05-04 | 주식회사 라온테크 | In-chamber wafer conveyance robot |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS611391U (en) * | 1984-06-06 | 1986-01-07 | 富士通株式会社 | robot finger |
| JPH074788B2 (en) * | 1989-04-14 | 1995-01-25 | 株式会社安川電機 | Work gripping device |
| JPH0724330Y2 (en) * | 1989-12-15 | 1995-06-05 | セントラル硝子株式会社 | Plate-shaped transfer device |
| JPH0679573A (en) * | 1992-09-03 | 1994-03-22 | Makino Milling Mach Co Ltd | Pallet transfer device on carrier |
| JP3249309B2 (en) * | 1994-09-13 | 2002-01-21 | 東京エレクトロン株式会社 | Substrate transfer apparatus, substrate transfer method, and coating and developing processing apparatus |
| JPH0933589A (en) * | 1995-07-14 | 1997-02-07 | Tokyo Electron Ltd | Inspection instrument |
| JPH11168128A (en) * | 1997-12-03 | 1999-06-22 | Mecs Corp | Robot for transferring thin-type substrate |
| JPH11188670A (en) * | 1997-12-26 | 1999-07-13 | Daihen Corp | Two-arm type conveying robot |
| JP4346765B2 (en) * | 2000-01-04 | 2009-10-21 | 株式会社アルバック | Substrate transfer robot |
| JP3443398B2 (en) * | 2000-11-08 | 2003-09-02 | 川崎重工業株式会社 | Reverse stacking device |
| JP2002172570A (en) * | 2000-12-05 | 2002-06-18 | Kawasaki Heavy Ind Ltd | Double arm and robot having the same |
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2004
- 2004-04-30 JP JP2004135995A patent/JP4495509B2/en not_active Expired - Fee Related
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2005
- 2005-04-18 TW TW094112246A patent/TW200540085A/en not_active IP Right Cessation
- 2005-04-25 KR KR1020050033948A patent/KR101149952B1/en not_active IP Right Cessation