TWI674231B - Substrate storage system - Google Patents

Abstract

The invention relates to a substrate storage and conveying system, which includes a body. A side of the body is provided with a preparatory conveying space. The side of the preparatory conveying space is adjacent to an elevating lifting chamber. An input section is located adjacent to the interior of the lifting capacity room, and a load frame with a plurality of capacity spaces is provided inside the load frame. The multiple array substrate carriers are loaded from the input section to the load-bearing sections, respectively. In this way, the space occupied by the substrate carrier placement can be fully saved, and only the mobile device that can be extended into the conveying operation room needs to be used as a tool to take out the space, and the space can be fully and effectively used and the cost can be saved.

Description

   Substrate storage and delivery system   

The present invention relates to a storage and transportation system, and more particularly to a system capable of storing substrate carriers and moving the substrates.

The previous technology is used in the substrate manufacturing process, such as in the manufacture of semiconductor wafers, or in the operation of IC packaging equipment. The substrate is operated in the IC packaging equipment during the manufacturing process or after completion. It is often placed inside a substrate carrier. The substrate carrier The utility model comprises a hollow box body. The box body has a containing chamber inside, and one side of the box body has an opening communicating with the containing chamber. The inside of the containing chamber is provided with a partition frame, and the partition frame is provided with a plurality of laminated plates. And a set of robotic arms are used to clamp the substrates in each layer of the interlayer frame and move to different process positions.

However, in the substrate carrier used in the substrate manufacturing process of the prior art, the substrate carrier must be arranged in a side-by-side manner in cooperation with the substrate transportation, such as parallel or left-right arrangement. However, in the substrate manufacturing process, whether in semiconductor wafer manufacturing or operation of IC packaging equipment, if the substrate carrier uses the placement design of the previous technology as the substrate transportation, it will occupy a considerable amount of placement space, Or the substrate carriers that can be placed in the substrate processing area with limited space will also be limited, which will also reduce the substrate moving efficiency, which will greatly affect the substrate production efficiency and cost.

In addition, in the substrate carrier used in the prior art, since the compartment of the substrate carrier is continuously set up from the bottom plate of the substrate carrier, there is not much operating space in the substrate carrier. The robot arm only It can be operated in a limited space, and there are restrictions on the operation and movement of the substrate. There is not much space to move the substrate in other types. And the user's use in the substrate production process equipment or IC packaging equipment operation will also be greatly limited, because in the prior art, the compartment is continuously set from the bottom of the substrate carrier, and the substrate is transported in the manner It can only be operated by this robotic arm method, so users must design the robotic arm conveying equipment when constructing the process or packaging factory, and once they are designed as the robotic arm conveying equipment, they cannot change other ways to convey the substrate. This will cause the user to lack the configuration of the adjustment space. Later, if there is a need for a substrate conveying method, other methods of conveying will need to be changed, such as conveying by belts or rollers. The user must dismantle the original equipment and plant, which will also increase Cost of the process.

In view of the problems of the prior art, the inventor believes that there should be an improved structure. In addition to eliminating the problem of occupying space on the substrate carrier, at the same time, there can be at least one or more choices in the method of substrate transportation, and it can be used simultaneously In substrate manufacturing, such as wafer fabrication in semiconductor factories, and operation of IC packaging equipment.

Therefore, a substrate storage and conveying system is designed, which includes a body, one side of the body is provided with a preparatory conveying space, one side of the preparatory conveying space is adjacent to an upright lifting chamber, and the preparatory conveying space is adjacent to the elevating container. An input unit is provided, and a load frame with a plurality of container spaces is provided inside the lifting capacity room. The load frame is provided with a plurality of longitudinal bearing portions, and the load frame is connected by a lifting unit and the plurality of bearing portions are integrally lifted. The group substrate carrier is loaded from the input part to the load-bearing parts of the load frame.

Each substrate carrier is framed by two side plates, a bottom plate, a rear plate and a top plate. Each substrate carrier has a receiving chamber inside, and one opening of one side of each substrate carrier communicates with the receiving chamber. A compartment section is provided in the interior of the container, and a plurality of spacer elements are provided on the periphery of the compartment section to make the center hollow, so as to provide a container capable of inputting and outputting the substrate carrier to and from the substrate carrier, such as a wafer. Substrates such as sheets, glass, or thin plate-like articles, a transport operation room is provided below the compartment portion, and a mobile device can be inserted into the transport operation room, so that the mobile device can be relatively removed in response to the lifting operation of the lifting unit The substrate in the spacer element of the spacer portion is moved for transportation.

Since the present invention is designed to have the lifting capacity room on one side of the machine body, the lifting capacity room provides a load frame provided with a plurality of capacity room spaces, the load frame is provided with a plurality of longitudinal bearing portions, and the load frame is shared by a lifting unit. The loading and unloading of the supporting parts are integrated, so that the space occupied by the substrate carrier placement can be fully saved, and only need to cooperate with the mobile equipment that can be extended into the conveying operation room as a tool for conveying the substrate, and can Make the most effective use of space and save costs.

Furthermore, the substrate carrier of the present invention is provided with a transport operation room below the compartment portion, and the transport operation room can be used for mobile equipment to move with the transport of the substrate in the matched substrate carrier, so the user can have more The choice of the moving method of the conveying substrate and the flexible configuration of the manufacturing process, and the invention can also be used in the operation of the IC packaging equipment. For example, the user can install a telescopic roller set or move the conveying substrate in the manner of a conveyor belt, and can also choose to have The equipment of the robotic arm is used for conveying and moving the substrate. Thus, the present invention can also provide users with more options for operating the substrate conveyance and movement, as well as the use of production processes and IC packaging equipment operations.

(1) ‧‧‧ substrate carrier

(10) ‧‧‧Room

(11) ‧‧‧Side panel

(12) ‧‧‧Floor

(13) ‧‧‧ rear panel

(14) ‧‧‧Top plate

(15) ‧‧‧ compartment

(151) ‧‧‧Spacer

(152) ‧‧‧Transfer operation room

(18) ‧‧‧Opening

(2) ‧‧‧ substrate

(3) ‧‧‧Mobile device

(3A) ‧‧‧Mobile device

(31) ‧‧‧Base

(31A) ‧‧‧Base

(32) ‧‧‧Telescopic roller assembly

(32A) ‧‧‧Robot

(4) ‧‧‧Body

(40) ‧‧‧Preparation of transportation space

(41) ‧‧‧Lifting room

(42) ‧‧‧Lifting unit

(43) ‧‧‧Door panel

(431) ‧‧‧window

(44) ‧‧‧Prepared conveyor table

(441) ‧‧‧Platform

(45) ‧‧‧Input Department

(46) ‧‧‧Baffle

(47) ‧‧‧Frame

The first figure is a perspective view of the present invention

The second figure is a schematic diagram of the separated state of the door panel of the present invention

The third view is another perspective view of the present invention

The fourth figure is a schematic perspective view of the present invention provided with a preliminary conveyor table

The fifth figure is a perspective view of the substrate carrier of the present invention

The sixth figure is an exploded view of the substrate carrier of the present invention

The seventh diagram is a schematic diagram of the state of the present invention with a telescopic roller assembly

The eighth diagram is a schematic diagram of the state of the mechanical reclaiming group according to the present invention.

The structure, contents and embodiments of the present invention will be described below with the aid of drawings, so that your examiners will have a better understanding of the present invention.

Please refer to the first figure and cooperate with the second and fourth figures, the present invention relates to a substrate storage and conveying system, which includes a body (4), a side of the body (4) is provided with a preliminary conveying space (40), One side of the preparatory conveying space (40) is adjacent to the elevating capacity chamber (41), and an input section (45) is provided adjacent to the preparatory conveying space (40) and the elevating capacity chamber (41) so that the The preparatory conveying space (40) is in communication with the lifting capacity chamber (41). Inside the lifting capacity chamber (41), a load frame (47) with a plurality of capacity space is provided, and the load frame (47) is provided with a plurality of longitudinal bearing capacity. In this embodiment, each of the supporting portions is a partition formed by a partition (46) for each substrate carrier (1) to stably place the supporting portion of each of the supporting frames (47). In addition, the load-bearing portion can also be formed by a mesh body, or it can be surrounded by a frame. The input portion (45) is a perforation that communicates between the preparatory conveying space (40) and the lifting volume chamber (41), and the input portion (45) communicates with one volume space of the plurality of volume space, and one of them The partition plate (46) is connected with a platform (441) provided at the bottom of the preliminary conveying space (40) in a lifting state, and a substrate carrier (1) can be smoothly connected.

The preliminary conveying space (40) is provided with a preliminary conveyer table (44). The preliminary conveyer table (44) can be a mechanical arm with a height and a horizontal pushing, in order to increase automation and achieve the convenience of consistent operations.

The loading frame (47) is connected in common by a lifting unit (42) and integrally lifts the plurality of loading parts. The substrate carriers (1) are respectively placed in the preparatory conveying space (40), and are input to the carrier frames (47) of the lifting and lowering chamber (41) through the input section (45), and are fixed to the carrier section. on. As shown in the third figure, viewed from another angle, the longitudinally stacked load frames (47) are connected together by a lifting unit (42), so that each load bearing portion can be lifted and lowered integrally.

Since the present invention is designed to provide the lifting volume chamber (41) on one side of the body (4), the lifting volume chamber (41) provides a load frame (47) with a plurality of volume space, and the load frame (47) consists of A lifting unit (42) is connected in common so that a plurality of load-bearing sections thereof can be lifted and lowered integrally, so that the storage space of the substrate carrier (1) can be fully saved, and the cost can be fully and effectively reduced. Furthermore, when it is to be transported, this equipment can also be used, and the substrates (2) in the substrate carrier (1) can be sequentially obtained regardless of manual or any mechanical operation.

As shown in the fourth figure, a preliminary conveyor table (44) is provided in the preliminary conveying space (40) of the body (4). In this embodiment, the preliminary conveyor table (44) may have a height and a horizontal direction. The robot arm is pushed to increase the automation and achieve the convenience of consistent operation. Through the preparatory conveyor table (44), the substrate carriers (1) can be conveyed and placed in the preparatory conveyance space (40). The input portion (45) (as shown in the first figure) communicating with the lifting and lowering chamber (41) is transported to the load frames (47) and is fixed on the load portion. Of course, if the user cannot set the conveyor table due to the limitation of the working space or the cost of equipment installation, the substrate carrier (1) can also be manually moved to the preliminary conveyor table (44).

In addition, the lifting chamber (41) is opened and closed by a door panel (43) to facilitate the disassembly and maintenance of the equipment. And the door panel (43) is provided with a window (431) for observation.

Matching the three-dimensional schematic and exploded views of the substrate carriers (1) shown in the fifth and sixth figures, the substrate carriers (1) are two side plates (11), a bottom plate (12), and a rear plate (13). ) And a top plate (14) frame each other.

In conjunction with the fifth, sixth, and seventh figures, each substrate carrier (1) has a container (10) inside, and each substrate carrier (1) has an opening (18) and the container on one side. The chamber (10) communicates with each other, and a compartment (15) is provided inside the compartment (10). A plurality of spacer elements (151) are provided on the periphery of the compartment (15) so that the center is a hollow part to provide the compartment. The substrate (2) can input and output the container (10) of each substrate carrier (1), for example, a wafer, a glass, or a thin plate-like article.

Please refer to the fifth figure, a transport operation room (152) is provided under the compartment portion (15), and a mobile device (3) (such as the seventh figure) can be inserted into the transport operation room (152). (Shown), so that the mobile device (3) can move in response to the substrate (2) in the compartment (15). Therefore, the user can have more choices of the movement mode for conveying the substrate (2) and the application of the substrate manufacturing process or the operation of the IC packaging equipment.

Please refer to the seventh figure, in order to match the state of the telescopic roller assembly, wherein the mobile device (3) is a telescopic roller group, the telescopic roller group includes a base (31), and the base (31) is disposed on The substrate carrier (1) is outside, and the base (31) extends a telescopic roller assembly (32) into the conveying operation room (152). The telescopic roller assembly (32) faces the spacer elements. (151) A hollow portion for conveying the substrate (2) in the substrate carrier (1).

In addition, the present invention utilizes the lifting capacity chamber (41) provided on one side of the body (4), because the lifting capacity chamber (41) is designed with the plurality of longitudinally stacked load frames (47) and is connected with the lifting unit (42) ) Are connected together and lifted together. Therefore, the present invention can transport each substrate carrier (1) to each bearing part of the carrier frame (47) of the lifting chamber (41), so that the substrate can be made. The carrier (1) reduces the occupied space, and only needs to cooperate with the lifting unit (42) to make the carrier frame (47) move linearly up and down, and cooperate with the mobile equipment that can be extended into the conveying operation room (152). (3) As a tool for conveying the substrate (2), it is possible to fully and effectively utilize space and save costs.

In addition, a belt may be sleeved on the outer edge of the telescopic roller assembly (32), so that the telescopic roller assembly is a conveyor belt (not shown).

Please refer to the eighth figure, which is a schematic diagram of the state of the mechanical picking group, one of the options for the substrate processing system and the conveying type. The mobile device (3A) can also be a mechanical picking group. The mechanical picking group includes a base A base (31A), and the base (31A) is provided outside the substrate carriers (1), and the base (31A) operatively extends a robot arm (32A) into the transport operation room (152) For conveying the substrate (2) in the spacer element (151). The lifting unit (42) connected to the carrier frame (47) makes it perform linear movements of ascent and descent, so that each substrate carrier (1) ascends and descends relatively to the height of the robot arm (32A), To carry the substrate (2) of the substrate carrier (1).

To sum up, the present invention is indeed in line with industrial applicability, and was not seen in publications or public use before application, nor was it known to the public. .

However, what has been described above is a preferred embodiment of the present invention. For example, all equal changes made in accordance with the scope of patent application of the present invention are within the scope of this case.

Claims (8)

A substrate storage and conveying system includes a body, a side of the body is provided with a preparatory conveying space, the side of the preparatory conveying space is adjacent to an elevating lifting chamber, and the preparatory conveying space is provided adjacent to the elevating lifting chamber. The input part is provided with a plurality of load-carrying frames inside the lifting capacity room. The load-carrying frame is provided with a plurality of longitudinal load-bearing parts. The preparatory conveying space is perforated to communicate with the lifting volume chamber, and the input portion is communicated with one of the volume space of the plurality of volume space. A plurality of array substrate carriers are loaded by the input portion to the respective carriers of the loading frame. The lifting room is opened and closed by a door panel, and the door panel is provided with a window, wherein each load-bearing part is separated by a partition, and one of the partitions is in a lifting state with the bottom of the preparation conveying space. Set up a platform connection. According to the substrate storage and conveying system described in item 1 of the scope of patent application, a preliminary conveyor table is provided in the preliminary conveying space, and the preliminary conveyor table is a mechanical arm having a height and a horizontal pushing. The substrate storage and conveying system according to item 1 of the scope of the patent application, wherein the load-bearing portions are separated by a mesh body. The substrate storage and conveying system according to item 1 of the scope of the patent application, wherein each of the supporting portions is surrounded by a frame. The substrate storage and delivery system according to item 1 of the scope of the patent application, wherein each substrate carrier is framed by two side plates, a bottom plate, a rear plate and a top plate, and each of the substrate carriers has a container chamber. There is an opening on one side of each substrate carrier which communicates with the accommodating chamber. The interior of the accommodating chamber is provided with a partition portion. A plurality of spacer elements are provided around the periphery of the partition portion, and the center is a hollow part relative to the frame. A conveying operation room is provided below the floor part, and a mobile device is provided for extending into the conveying operation room, so that the mobile device can be relatively taken out in response to the lifting action of the lifting unit. The substrate in the spacer element of the spacer portion is moved for transportation. The substrate storage and delivery system according to item 5 of the scope of patent application, wherein the mobile device is a telescopic roller set, the telescopic roller set includes a base, and the base is disposed outside the substrate carriers, and The base extends a telescopic roller assembly into the conveying operation room of the substrate carrier, and the telescopic roller assembly faces the hollow part of each spacer element for carrying the substrate in the spacer element of the spacer part. According to the substrate storage and conveying system described in item 6 of the patent application scope, a belt is sleeved on the outer edge of the telescopic roller assembly, so that the telescopic roller assembly is a conveyor belt. The substrate storage and delivery system according to item 5 of the scope of the patent application, wherein the mobile device is a mechanical picking group, the mechanical picking group includes a base, and the base is provided on the outer side of the substrate carriers And, the base extends a robotic arm into the inside of the conveying operation chamber of the substrate carrier for conveying the substrate in the spacer element of the interlayer part.