TW201902801A - Substrate storage and conveyance system capable of fully and effectively utilizing space and saving costs - Google Patents

Abstract

The present invention relates to a substrate storage and conveyance system, which includes a machine body, wherein a preparatory conveying space is provided on one side of the machine body, one side of the preparatory conveying space is adjacent to an upright lifting chamber. An input portion is provided at a position where the preparatory conveying space is adjacent to the lifting chamber. A carrying frame having a plurality of chamber spaces is provided inside the lifting chamber, wherein the carrying frame is provided with a plurality of longitudinal carrying portions, and the carrying frame is jointly connected with a lifting unit to lift and lower the plurality of carrying portions as a whole. A plurality of substrate carriers are respectively loaded onto the carrier portions by the input portion. In this way, the space occupied by the substrate carriers can be fully saved. In addition, the present invention can fully and effectively utilize space and save costs by merely using a mobile device that can be extended into a conveyance operation room as a tool for picking up parts.

Description

 Substrate storage system  

The present invention relates to a storage and transportation system, and more particularly to a system for storing substrate carriers for transporting substrates.

The prior art is applied to a substrate process, such as wafer fabrication in a semiconductor, or in the operation of an IC package device. The substrate is operated in an IC package device after the manufacturing process or after completion, and is often placed inside a substrate carrier. The utility model comprises a hollow box body, wherein the box body has a chamber inside, the one side of the box body has an opening communicating with the chamber, and the chamber is provided with a partition frame, and the partition frame is provided with a plurality of laminated boards. And using a set of mechanical arms to clamp the substrate in each layer of the shelf, and move to different process positions.

However, in the substrate carrier used in the prior art in the substrate process, the placement of the substrate carrier must be arranged in a side-by-side manner, such as parallel or left-right alignment. However, in the substrate processing, whether in the semiconductor wafer fabrication or in the operation of the IC packaging device, if the substrate carrier is transported as a substrate by the prior art arrangement design, the space will occupy a considerable space. Or the substrate carrier that can be placed in the process area of the substrate with limited space is limited, and the transport efficiency of the substrate is also reduced, thereby greatly affecting the substrate production efficiency and cost.

In addition, in the substrate carrier used in the prior art, the spacer of the substrate carrier is continuously disposed from the bottom plate of the substrate carrier, so that there is not much operation space in the substrate carrier, and the robot arm only It can operate in a limited space, and there is no limit to the operation and movement mode of the substrate, and there is not much space for moving the substrate by another type. Moreover, the user's operation in the substrate manufacturing process equipment or in the operation of the IC packaging equipment is also greatly limited, because in the prior art, the spacer rack is continuously disposed from the bottom of the substrate carrier, and the manner of transporting the substrate is performed. The robot can only be operated by the robot arm. Therefore, the user must design the mechanical arm type conveying device when constructing the manufacturing process or the packaging factory, and once the robot arm type conveying device is designed, the other method can not be changed. Therefore, the user lacks the configuration of the modulation space. If the demand for the substrate transportation method is changed by other means for transportation, for example, by belt or roller, the user must remove the original equipment and the factory, and thus increase The cost of the process.

In view of the problems of the prior art, the inventors believe that there should be an improved structure, in addition to releasing the space problem in the substrate carrier placement, and at the same time, the substrate can be transported in at least one or more ways, and can be simultaneously used. In substrate manufacturing, for example, wafer fabrication at semiconductor plants, and operation of IC packaging equipment.

Therefore, a substrate storage system is designed, comprising a body, a side of the body is provided with a preliminary conveying space, and one side of the preliminary conveying space is adjacent to the standing lifting chamber, and the preliminary conveying space is adjacent to the lifting chamber. An input portion is provided, and a loading frame having a plurality of chamber spaces is disposed in the interior of the lifting chamber, the carrier frame is provided with a plurality of longitudinal bearing portions, and the carrier frame is jointly connected by a lifting unit and the plurality of carrying portions are integrally lifted and lowered, The group substrate carriers are respectively loaded by the input unit to the respective carrier portions of the carrier frame.

The substrate carriers are formed by two side plates, a bottom plate, a rear plate and a top plate. The substrate carriers have a chamber inside, and each substrate carrier has an opening communicating with the chamber. A compartment portion is disposed inside the chamber, and a plurality of spacer elements are disposed around the partition portion to make the center hollow, so as to provide a substrate capable of inputting and outputting the substrate carriers, for example, a wafer. a substrate such as a sheet, a glass or a sheet-like article, a conveying operation chamber below the partition portion, and a moving device for extending into the conveying operation chamber, so that the mobile device is relatively taken out according to the lifting movement of the lifting unit The substrate in the spacer portion of the spacer portion is transported.

The present invention is designed to provide the lifting chamber on one side of the body, the lifting chamber providing a carrier frame having a plurality of chamber spaces, the carrier frame being provided with a plurality of longitudinal bearing portions, the carrier frame being shared by a lifting unit In addition, the load-bearing portions are integrally raised and lowered, so that the space occupied by the substrate carrier can be sufficiently saved, and only the mobile device that can be inserted into the transport operation room can be used as a tool for transporting the substrate, and Make full use of space and save costs.

Furthermore, the substrate carrier of the present invention is provided with a transport operation chamber below the partition portion, and the transport operation chamber can be used for the movement of the mobile device in accordance with the transport of the substrate in the mating substrate carrier, so that the user can have more The moving mode selection and the process elastic configuration of the transporting substrate can also be applied to the operation of the IC packaging device. For example, the user can install the telescopic roller set or transport the substrate in the manner of the conveyor belt, and can also select to have The device of the robot arm is used to transport the moving substrate, and thus the invention can also provide the user with more choices for operating the substrate transport movement and the operation of the production process and the operation of the IC packaging device.

(1)‧‧‧Substrate carrier

(10) ‧ ‧ ‧ room

(11)‧‧‧ side panels

(12) ‧‧‧floor

(13) ‧‧‧ After board

(14) ‧‧‧ top board

(15) ‧‧‧ compartment

(151)‧‧‧ spacer elements

(152) ‧‧‧Transportation room

(18) ‧ ‧ openings

(2) ‧‧‧Substrate

(3) ‧‧‧Mobile devices

(3A)‧‧‧Mobile devices

(31) ‧ ‧ pedestal

(31A) ‧ ‧ pedestal

(32)‧‧‧ Telescopic roller assembly

(32A)‧‧‧ Robotic arm

(4) ‧‧‧ body

(40) ‧‧‧Prepared transport space

(41) ‧‧‧ Lifting room

(42)‧‧‧ Lifting unit

(43) ‧‧‧ door panels

(44) ‧‧‧Prepared conveyor

(45)‧‧‧ Input Department

(46) ‧ ‧ partition

(47) ‧ ‧ ‧ frame

The first figure is a perspective view of the present invention

The second figure is a schematic diagram of the separation state of the door panel of the present invention.

The third figure is another perspective view of the present invention

The fourth figure is a three-dimensional schematic diagram of the present invention with a preparatory conveyor table

The fifth figure is a perspective view of the substrate carrier of the present invention.

The sixth figure is an exploded view of the substrate carrier of the present invention.

The seventh figure is a schematic diagram of the state of the telescopic roller assembly of the present invention

The eighth figure is a schematic diagram of the state of the mechanical picking unit of the present invention

The construction, content and embodiments of the present invention will be described with the aid of the drawings, which will enable the reviewers to further understand the present invention.

Referring to the first drawing, together with the second and fourth figures, the present invention relates to a substrate storage system including a body (4) having a preparatory conveying space (40) on one side thereof. One side of the preliminary conveying space (40) is adjacent to the upright lifting chamber (41), and the preliminary conveying space (40) is provided with an input portion (45) adjacent to the lifting chamber (41) to make the The preliminary conveying space (40) is in communication with the lifting chamber (41), and the lifting chamber (41) is internally provided with a carrier frame (47) having a plurality of chamber spaces, and the carrier frame (47) is provided with a plurality of longitudinal loads. In this embodiment, each of the carrying portions is formed with a partition by a partition plate (46) for each substrate carrier (1) to stably place the bearing portions of the respective carriers (47). In addition, the carrier portion can also be formed by a mesh body or can be surrounded by a frame.

The preliminary conveying space (40) is provided with a preliminary conveyor table (44), which can be a robot with high and low and lateral pushing to increase automation and achieve convenient operation.

The carrier frame (47) is united by a lifting unit (42) and the plurality of carrying portions are integrally lifted and lowered. The substrate carriers (1) are respectively placed in the preliminary transport space (40), and the input frame (45) is input to the carrier frames (47) of the lift chamber (41) and is stabilized on the load bearing portion. on. As seen in the third figure, from another perspective, the longitudinally stacked carrier frames (47) are united by a lifting unit (42) and enable each of the carrying portions to be lifted and lowered.

Since the present invention is designed to provide the lifting chamber (41) on one side of the body (4), the lifting chamber (41) provides a carrier frame (47) having a plurality of chamber spaces, the carrier frame (47) being A lifting unit (42) is united and the plurality of carrying portions can be integrally lifted and lowered, so that the space for storing the substrate carrier (1) can be sufficiently saved, and the cost can be sufficiently reduced. Furthermore, when it is to be transported, the apparatus can also be used to sequentially obtain the substrate (2) in the substrate carrier (1) regardless of the manual or any mechanical operation.

As shown in the fourth figure, a preliminary conveyor table (44) is disposed in the preliminary conveying space (40) of the body (4). In the embodiment, the preparatory conveyor table (44) can have a height and a lateral direction. The robot arm is pushed to increase the automation to achieve the convenience of continuous operation, and the substrate carrier (1) can be transported and placed in the preliminary transport space (40) through the preliminary conveyor table (44), and The input portion (45) (shown in the first figure) through which the lifting chamber (41) communicates is transported to the respective carriers (47) and secured to the carrier. Of course, if the user cannot set the conveyor table due to the limitation of the working space or the cost of the equipment setting, the substrate carrier (1) can be manually moved to the preparatory conveyor table (44).

Moreover, the lifting chamber (41) is movably opened and closed by a door panel (43) to facilitate the disassembly and maintenance of the device.

A schematic perspective view and an exploded view of each substrate carrier (1) shown in FIG. 5 and FIG. 6 are used. The substrate carriers (1) are two side plates (11), one bottom plate (12), and one rear plate (13). ) framed with a top plate (14).

As shown in FIG. 6 and FIG. 7 of the fifth figure, each substrate carrier (1) has a chamber (10) therein, and each substrate carrier (1) has an opening (18) on the side thereof. The chamber (10) communicates with a partition portion (15) inside the chamber (10), and a plurality of spacer elements (151) are disposed around the partition portion (15) to make the center a hollow portion to provide the The substrate (2) can input and output a chamber (10) of each of the substrate carriers (1), for example, a substrate such as a wafer, a glass, or a thin plate-shaped article.

Referring to the fifth figure, a transport operation room (152) is disposed under the partition portion (15), and a mobile device (3) is provided for extending into the transport operation room (152) (as shown in the seventh figure). As shown, the mobile device (3) is configured to move in cooperation with the substrate (2) in the compartment (15). Therefore, the user can have more mobile mode selection for transporting the substrate (2) and operation of the substrate process or IC package device operation.

Referring to the seventh figure, in order to cooperate with the state of the telescopic roller assembly, the mobile device (3) is a telescopic roller set, the telescopic roller set includes a base (31), and the base (31) is disposed on Each of the substrate carriers (1) is outside, and the base (31) extends a telescopic roller assembly (32) into the interior of the transport operation chamber (152), and the telescopic roller assembly (32) faces the spacer elements The hollow portion of (151) is for transporting the substrate (2) in the substrate carrier (1).

And the present invention utilizes the lifting chamber (41) provided on one side of the body (4), since the lifting chamber (41) is designed with the plurality of vertically spaced frames (47) and the lifting unit (42) Cooperating and extending the whole body, therefore, the present invention can place the substrate carriers (1) on the respective carrying portions of the carrier frame (47) of the lifting chamber (41), so that the substrate can be made The carrier (1) reduces the occupied space, and only needs to cooperate with the lifting unit (42) to linearly move the carrier frame (47) and cooperate with the mobile device that can be inserted into the conveying operation room (152). (3) As a tool for transporting the substrate (2), it is possible to sufficiently utilize the space and save costs.

Moreover, the outer edge of the telescopic roller assembly (32) may also be sleeved with a belt to make the telescopic roller set a conveyor belt (not shown).

Please refer to the eighth figure, which is a schematic diagram of the state of the mechanical reclaiming group, one of the options of the substrate processing system and the conveying type, wherein the mobile device (3A) can also be a mechanical reclaiming group, and the mechanical reclaiming group includes a base. a base (31A), wherein the base (31A) is disposed outside the substrate carrier (1), and the base (31A) operatively extends a robot arm (32A) into the interior of the transport operation chamber (152) For transporting the substrate (2) in the spacer element (151). The lifting frame (42) of the carrier frame (47) is configured to perform a linear action of ascending and descending, so that the substrate carriers (1) are lifted and descended relatively in accordance with the height of the robot arm (32A). The substrate (2) for transporting the substrate carrier (1) is carried out.

In summary, the present invention is indeed in line with industrial utilization, and is not found in publications or publicly used before application, nor is it known to the public, and has non-obvious knowledge, conforms to patentable requirements, and patents are filed according to law. .

However, the above description is a preferred embodiment of the industry of the present invention, and all the equivalent changes made by the scope of the patent application of the present invention are within the scope of the claim.

Claims (9)

 A substrate storage system includes a body, a side of the body is provided with a preliminary conveying space, and one side of the preliminary conveying space is adjacent to the upright lifting chamber, and the preliminary conveying space is adjacent to the lifting chamber. The input part has a carrier frame of a plurality of chamber spaces, wherein the carrier frame is provided with a plurality of longitudinal bearing portions, and the carrier frame is jointly connected by a lifting unit and the plurality of carrying portions are integrally lifted and lowered, and the multi-array substrate carries Each of the carrying portions that are loaded by the input portion to the carrier frame.    The substrate storage system according to claim 1, wherein the preliminary conveying space is provided with a preliminary conveyor table, wherein the preliminary conveyor table is a robot arm having a height and a lateral pushing.    The substrate storage system of claim 1, wherein each of the load-bearing portions is partitioned by a partition.    The substrate storage system according to claim 1, wherein the load bearing portions are separated by a mesh body.    The substrate storage system of claim 1, wherein the load bearing portions are surrounded by a frame.    The substrate storage system of claim 1, wherein the substrate carriers are formed by two side plates, a bottom plate, a rear plate and a top plate, and each of the substrate carriers has a chamber inside. Each of the substrate carriers has an opening communicating with the chamber, and a compartment portion is disposed inside the chamber, and a plurality of spacer elements are disposed around the partition portion, and the central portion is a hollow portion opposite to the frame. A transport operation room is disposed under the layer portion, and a mobile device is provided for extending into the transport operation room, so that the mobile device relatively removes the substrate in the spacer element of the partition portion due to the lifting action of the lifting unit. Move for transport.    The substrate storage system of claim 6, wherein the mobile device is a telescopic roller set, the telescopic roller set includes a base, and the base is disposed on an outer side of the substrate carriers, and The pedestal extends a telescopic roller assembly into the transport operation chamber of the substrate carrier, and the telescopic roller assembly faces the hollow portion of the spacer member for carrying the substrate in the spacer member of the spacer portion.    The substrate storage system of claim 7, wherein the outer edge of the telescopic roller assembly is sleeved with a belt to make the telescopic roller set a conveyor belt.    The substrate storage system of claim 6, wherein the mobile device is a mechanical reclaiming group, the mechanical reclaiming group includes a pedestal, and the pedestal is disposed outside the substrate carrier And the pedestal extends a robot arm into the interior of the transport operation chamber of the substrate carrier for transporting the substrate in the spacer element of the spacer portion.