CN2487193Y - Base board transfer device of organic electroluminescence element production - Google Patents
Base board transfer device of organic electroluminescence element production Download PDFInfo
- Publication number
- CN2487193Y CN2487193Y CN01228874U CN01228874U CN2487193Y CN 2487193 Y CN2487193 Y CN 2487193Y CN 01228874 U CN01228874 U CN 01228874U CN 01228874 U CN01228874 U CN 01228874U CN 2487193 Y CN2487193 Y CN 2487193Y
- Authority
- CN
- China
- Prior art keywords
- processing procedure
- transfer device
- organic electroluminescence
- base plate
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
The utility model discloses a base board transfer device of organic electroluminescence display process which comprises a base board location conversion cavity with buffer effect and arranged at the front of a process platform. The design can protect the base board from the atmospheric pollution resulting from keeping vacuum or filling in the gas which can protect the base board during the transmission, and make the workshop collocation of each process equipment have more space benefits due to the fact that the process of each module can be independently operated and the operation elasticity of the process is improved.
Description
Technical field
The design belongs to a kind of conveyer, is meant a kind of base plate transfer device of display of organic electroluminescence processing procedure especially.
Background technology
The manufacturing of photoelectricity and photoelectron information Related product is one of the fiercest industry of competition at present, thus processing procedure to improve, raise the efficiency, reduce cost be the quite problem of concern of industry.Display of organic electroluminescence (organic electroluminesent display wherein, OEDL) because of have self-luminous, high brightness, high contrast, wide visual angle, driving voltage is low and advantage such as high-speed responsive, is the flat-panel screens of being placed high hopes most in the display of new generation at present.Yet because technology is new, development is compared to other display evening, technology is full maturity not as yet, at present the whole world only has Japanese Pioneer to have undersized product to release, and it is to be overcome to show that OEDL also has many obstacles to have in the commercialization process, particularly for the technology of mass production.
Known display of organic electroluminescence processing procedure facilities Allocation as shown in Figure 1, the both sides of transmitting district 91 in a belt base plate are arranged with pretreatment unit 921,921 ＇, display floater prepare unit 922,922 ＇, luminescent material film coating unit 923,923 ＇, negative electrode film coating unit 924,924 ＇ and encapsulation unit 925,925 ＇ etc. are sealing area independently.Before substrate is sent into by inlet 93, need that whole base plate is transmitted district 91 and be evacuated to vacuum state, push pretreatment unit 921 then, and cooperate the gaseous environment of this unit and adjust its vacuum degree, or spray into purified gases such as the nitrogen or the argon gas of protectiveness, carry out as cleaning supervisor; After preliminary treatment finishes, need make whole base plate transmit district 91 again and present vacuum state, just substrate be released pretreatment unit 921, and deliver to display floater and prepare unit 922; Finish whole processing procedure so in regular turn.When the major defect of these facilities is that substrate moves to another unit by a unit, often need that whole base plate is transmitted the district and be evacuated to vacuum state, then may need adjust its vacuum degree or vacuum breaker and the atmosphere that exposes to the sun again, not only cause substrate to be subjected to air pollution and to expend power easily, the spatial configuration of each unit also is subject to flow process, and may cause for the unit of different operating time and to procrastinate or accumulate, and the maintenance of equipment is difficult for.
Summary of the invention
The design's purpose is at the base plate transfer device that a kind of display of organic electroluminescence (OEDL) processing procedure is provided, by wherein having the substrate drive cavity of mobility, and, can make apparatus, operation and the factory building space planning of processing procedure have more elasticity.
Another purpose of the design can make substrate exempt from now to suffer ambient atmosphere to pollute in transport process, and reduce expending of power at the base plate transfer device that a kind of display of organic electroluminescence (OEDL) processing procedure is provided.
A kind of for achieving the above object base plate transfer device of display of organic electroluminescence processing procedure, main
Comprise:
One substrate drive cavity, this substrate drive cavity forms a confined space by a housing, and its inside can ccontaining substrate, and another is provided with opening this housing, and this opening has a gate;
At least one processing procedure district, this processing procedure district forms a confined space by a housing, and this housing is provided with an opening in addition, and this opening has a gate, this inside, processing procedure district still comprises a process work bench; And
One in order to move to this substrate drive cavity the mobile unit of this process work bench, and this substrate drive cavity moves opening corresponding to this process work bench aperture position;
One in order to be connected the unit that is connected that this substrate drive cavity moves opening and this process work bench opening; And
One in order to control the environment control unit of this substrate drive cavity confined space and/or this processing procedure district confined space internal environment.
Comprise that pretreatment unit, display floater prepare unit, luminescent material film coating unit, negative electrode film coating unit and encapsulation unit in the general display of organic electroluminescence processing procedure.Yet each unit may be operated in the gas with various environment, and therefore in the substrate transport process, the substrate drive cavity need be adjusted to the environmental condition as each process work bench earlier, carries out the transmission of substrate again.
The substrate drive cavity that the design mainly comprises, a processing procedure district, a mobile unit, are connected a unit and an environment control unit, and its form and function then division are as follows.
The substrate drive cavity forms a confined space by a housing, and its inside can ccontaining substrate, and this housing then is provided with the opening of tool gate.The design's substrate drive cavity world situation itself is provided with wheel and can move freely, so that this substrate drive cavity moves to this process work bench, and can make opening that this substrate drive cavity the moves aperture position corresponding to this process work bench.The housing of substrate drive cavity still can be provided with the cleaning door that takes out or insert substrate for personnel, or sets up a plurality of gates, to transmit substrate by different directions, also can establish a form to inspect internal state.And the substrate drive cavity gets corresponding suitable setting element such as vacuum adapter or the fastener of being provided with process work bench, makes fluid-tight engagement each other.
Above-mentioned processing procedure district also forms a confined space by a housing, and this housing also is provided with the opening of tool gate.The inside in this processing procedure district comprises an at least one process work bench and a substrate access unit.Wherein this process work bench is in order to carry out the specific program in the display of organic electroluminescence manufacturing process; And this substrate access unit is generally a mechanical arm, is transmitted between this substrate drive cavity and this process work bench in order to the substrate with the display of organic electroluminescence processing procedure.
Be connected the unit in order to the opening that is connected this substrate drive cavity and the opening of this process work bench, impel the confined space of this substrate drive cavity to communicate and keep airtight with the confined space of this process work bench.This is connected unit can only be similar setting element as fastener or vacuum adapter etc., also can be provided with a substrate orientation and change the chamber, and the one end is fixed in outside the gate in processing procedure district, the other end then be provided with setting element in case with substrate drive cavity fluid-tight engagement.
Above-mentioned environment control unit can be in order to the internal environment of the confined space in the confined space of controlling this substrate drive cavity and/or this processing procedure district; it generally includes an aspiration pump, a gas loader and an environment detector, in order to the content of the environment in control basal plate drive cavity or the processing procedure district such as pressure, temperature, oxygen, moisture and protective gas.But this gas loader is in order to the not contaminated gas of nitrogen, argon gas or other protective substrates of input protection gas such as purifying; This environment detector also can be set up controlled function except that can detecting pressure, oxygen and moisture equal size, when this environment detector is located at this substrate drive cavity inside, can adjust its environment at any time with protective substrate; This environment control unit can be the special use of substrate drive cavity, also can be with process work bench shared.Said apparatus can optionally be located at the appropriate location, as being located at processing procedure district periphery separately, or in not influencing processing procedure and transmitting function, and under the acceptable situation of overall weight, be placed in substrate drive cavity or the substrate orientation conversion chamber.
By the design's base plate transfer device, substrate is transmitted before, can adjust substrate drive cavity internal environment to as each process work bench with environment control unit earlier, open the gate of the two again, carry out the transmission of substrate with substrate access unit such as mechanical arm then; After transmission is finished, optionally import apparatus with protective gas input substrate drive cavity inside again, and move to next process unit with gas.But the design, can make substrate exempt from ambient atmosphere and pollute because of keeping vacuum or being full of the gas of protective substrate in transport process, but and because the processing procedure independent operation of each module, benefit makes the factory building configuration of each process apparatus have more elasticity.
Description of drawings
Specify below in conjunction with drawings and Examples, wherein:
Fig. 1 is the configuration schematic diagram that known substrate transmits related facility,
Fig. 2 is the vertical view of the design embodiment 1,
Fig. 3 is the schematic perspective view of the design embodiment 2.
Embodiment
Embodiment 1:
See also the vertical view of the base plate transfer device of Fig. 2 the design processing procedure, as shown in the figure, processing procedure district 30 forms a confined space by a housing, this housing is provided with an opening in addition, and this opening can be opened and closed by second gate 31, this inside, processing procedure district comprises three process work bench, 34,34 ＇ and 34 ＂, in order to carrying out the specific program in the display of organic electroluminescence processing procedure, as: pretreatment unit, display panel unit, luminescent material film coating unit, negative electrode film coating unit or encapsulation unit.In addition, this processing procedure district still comprises one by process work bench 34,34 ＇ and the shared mechanical arm 33 of 34 ＂.Substrate drive cavity 10 in the present embodiment can slide against on the track 80, and before moving to the button process work bench, it is inner and be equipped with environment and detect along device 60 and go to electrostatic ionic source 70.One substrate orientation conversion chamber 20 is fixed in second gate, 31 outsides in processing procedure district 30, and 21 of its openends are exposed to atmosphere.Aspiration pump 40 and gas loader 50 are located at 30 front sides, processing procedure district, and are connected to substrate orientation conversion chamber 20 with pipeline.
Openend 21 both sides in substrate orientation conversion chamber 20 are provided with hook setting element 221,222 among the figure, when column type setting element 121,122 fastenings of substrate drive cavity 10, so that the two closely links to each other.Promptly can aspiration pump 40 after the two fastens substrate orientation being changed chamber 20 vacuumizes.Starting gate 11 then, continue the environment of substrate drive cavity 10 with substrate orientation conversion 20 inside, chamber is adjusted to as processing procedure district 30, and confirm its pressure, oxygen and water content by the environment detector 60 that is set in substrate orientation conversion chamber 20.
Then open second gate 31 in processing procedure district 30 again, make the mechanical arm 33 of being located at processing procedure district 30 substrate can be sent to substrate drive cavity 10 by process work bench 34,34 ＇ or 34 ＂ through substrate orientation conversion chamber 20.
After substrate transmitted and finishes, second gate 31 in processing procedure district 30 gives earlier closed, and imported nitrogen to substrate drive cavity 10 by gas loader 50 through substrate orientation conversion chamber 20.After the nitrogen pressure in the substrate drive cavity 10 reaches level pressure, stop to import nitrogen and close first gate 11.After the hook typing element 121,122 that substrate orientation is changed 20 both sides, chamber broke away from the column type setting element 121,122 of substrate drive cavities 10, substrate drive cavity 10 just can separate fully with substrate orientation conversion chamber 20, and followed track 80 and move to another processing procedure district 30 ＇.
Embodiment 2:
Present embodiment as shown in Figure 3, present embodiment roughly with embodiment 1 with, but second gate 31 in processing procedure district 30 can directly fasten with setting element 121,122 and 321,322 with first gate 11 of substrate drive cavity 10; And substrate drive cavity 10 is provided with wheel and can passes arbitrarily, and all is provided with gate 11,11 ＇ before and after it, and in order to transmitting substrate by different directions, 14 inner of baseplate carriers can move to suitable height by lifting unit 15.Before aspiration pump 40, gas loader 50 and environment detector 60 are located at processing procedure district 30, and with the pipeline limit to substrate drive cavity 10.
The design's base plate transfer device, but the processing procedure district independent operation of substrate drive cavity and each handling procedure movably especially wherein, and, can make substrate in transport process, exempt from ambient atmosphere and pollute, and reduce expending of power because of its process keeps vacuum and seal.
Claims (13)
1, a kind of base plate transfer device of display of organic electroluminescence processing procedure is characterized in that, this device mainly comprises:
One substrate drive cavity, this substrate drive cavity forms a confined space by a housing, and its inside can ccontaining substrate, and another is provided with opening this housing, and this opening has a gate;
At least one processing procedure district, this processing procedure district forms a confined space by a housing, and this housing is provided with an opening in addition, and this opening has a gate, this inside, processing procedure district still comprises a process work bench; And
One in order to move to this substrate drive cavity the mobile unit of this process work bench, and this substrate drive cavity moves opening corresponding to this process work bench aperture position;
One in order to be connected the unit that is connected that this substrate drive cavity moves opening and this process work bench opening; And
One in order to control the environment control unit of this substrate drive cavity confined space and/or this processing procedure district confined space internal environment.
2, the base plate transfer device of display of organic electroluminescence processing procedure as claimed in claim 1 is characterized in that, wherein this base plate transfer device comprises a substrate access unit.
3, the base plate transfer device of display of organic electroluminescence processing procedure as claimed in claim 2 is characterized in that, wherein this substrate access unit is a mechanical arm.
4, the base plate transfer device of display of organic electroluminescence processing procedure as claimed in claim 1 is characterized in that, wherein this mobile unit is a dragging track.
5, the base plate transfer device of display of organic electroluminescence processing procedure as claimed in claim 1, it is characterized in that, wherein this linking unit is substrate orientation conversion chamber, one end in this substrate orientation conversion chamber is fixed in the gate outside in processing procedure district, the other end be provided with can with the setting element of substrate drive cavity fluid-tight engagement.
6, the base plate transfer device of display of organic electroluminescence processing procedure as claimed in claim 5 is characterized in that, wherein this setting element is a fastener.
7, the base plate transfer device of display of organic electroluminescence processing procedure as claimed in claim 1 is characterized in that, wherein this linking unit is a setting element.
8, the base plate transfer device of display of organic electroluminescence processing procedure as claimed in claim 7 is characterized in that, wherein this setting element is a fastener.
9, the base plate transfer device of display of organic electroluminescence processing procedure as claimed in claim 1 is characterized in that, wherein this environment control unit comprises a gas loader.
10, the base plate transfer device of display of organic electroluminescence processing procedure as claimed in claim 1 is characterized in that, wherein this environment control unit comprises an aspiration pump.
11, the base plate transfer device of display of organic electroluminescence processing procedure as claimed in claim 1 is characterized in that, wherein this environment control unit comprises an environment detector.
12, the base plate transfer device of display of organic electroluminescence processing procedure as claimed in claim 1 is characterized in that, wherein this environment detector is located in this substrate drive cavity.
13, the base plate transfer device of display of organic electroluminescence processing procedure as claimed in claim 1 is characterized in that, wherein this environment control unit comprises the electrostatic ionic source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN01228874U CN2487193Y (en) | 2001-07-17 | 2001-07-17 | Base board transfer device of organic electroluminescence element production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN01228874U CN2487193Y (en) | 2001-07-17 | 2001-07-17 | Base board transfer device of organic electroluminescence element production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2487193Y true CN2487193Y (en) | 2002-04-17 |
Family
ID=33643854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN01228874U Expired - Lifetime CN2487193Y (en) | 2001-07-17 | 2001-07-17 | Base board transfer device of organic electroluminescence element production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2487193Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018119726A1 (en) * | 2016-12-26 | 2018-07-05 | 武汉华星光电技术有限公司 | Ultraviolet irradiation device for light emitting diode package |
| TWI674231B (en) * | 2017-06-01 | 2019-10-11 | 孫建忠 | Substrate storage system |
-
2001
- 2001-07-17 CN CN01228874U patent/CN2487193Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018119726A1 (en) * | 2016-12-26 | 2018-07-05 | 武汉华星光电技术有限公司 | Ultraviolet irradiation device for light emitting diode package |
| US10193105B2 (en) | 2016-12-26 | 2019-01-29 | Wuhan China Star Optoelectronics Technology Co., Ltd. | Ultraviolet irradiation device for package of light-emitting diode |
| TWI674231B (en) * | 2017-06-01 | 2019-10-11 | 孫建忠 | Substrate storage system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101842304B (en) | Method and apparatus for the contamination-free treatment of shock-sensitive glass plates in ultra clean rooms | |
| US6410455B1 (en) | Wafer processing system | |
| CN103147053B (en) | Multi-functional continuous magneto-controlled sputter coating device | |
| CN1326227C (en) | Substrate conveying device and conveying method, and vacuum disposal device | |
| CN101956175A (en) | Vacuum continuous coating system and method for assembling and disassembling masks by using same | |
| KR20240018677A (en) | A method for maintenance of an industrial printing system | |
| US6393716B1 (en) | Method and apparatus for transporting substrates in OLED process | |
| CN106956290A (en) | Mechanical arm and its operating method, robot arm device and display panel production equipment | |
| CN2487193Y (en) | Base board transfer device of organic electroluminescence element production | |
| CN109455529A (en) | A kind of high-precision Palletised carry system | |
| CN211709336U (en) | Object appearance detection device | |
| CN101488469A (en) | Turnover device and method for turning substrate over | |
| CN104514891A (en) | Gate valve and substrate processing apparatus | |
| CN101220452A (en) | Novel mask system of organic electroluminescent device and method for manufacturing the same | |
| KR20110091687A (en) | In/out door for a vacuum chamber | |
| CN208450851U (en) | Producing line laser scribing device | |
| CN208453944U (en) | A kind of workpiece tracking capture apparatus and transloading equipment | |
| JP3221313U (en) | Environmental maintenance system used for precision manufacturing | |
| Pan et al. | Conceptual design of EAST multi-purpose maintenance deployer system | |
| CN101222025A (en) | Novel packaging device of organic EL device and its packaging method | |
| CN102034725B (en) | Automatic substrate positioning and loading device | |
| CN201778107U (en) | Coated substrate preprocessing device | |
| CN115973811A (en) | Material conveying system with atmosphere protection, and inflating method and ventilating method thereof | |
| US20180212206A1 (en) | Sintering apparatus, packaging system for organic light emitting diode device and sintering method | |
| CN203473933U (en) | Vacuum conveying system for glass substrates |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20110717 Granted publication date: 20020417 |