JP2005307225A5 - - Google Patents

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Publication number
JP2005307225A5
JP2005307225A5 JP2004121954A JP2004121954A JP2005307225A5 JP 2005307225 A5 JP2005307225 A5 JP 2005307225A5 JP 2004121954 A JP2004121954 A JP 2004121954A JP 2004121954 A JP2004121954 A JP 2004121954A JP 2005307225 A5 JP2005307225 A5 JP 2005307225A5
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JP
Japan
Prior art keywords
raw material
material powder
powder
particle size
pressurized container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004121954A
Other languages
English (en)
Japanese (ja)
Other versions
JP4591749B2 (ja
JP2005307225A (ja
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Publication date
Application filed filed Critical
Priority to JP2004121954A priority Critical patent/JP4591749B2/ja
Priority claimed from JP2004121954A external-priority patent/JP4591749B2/ja
Publication of JP2005307225A publication Critical patent/JP2005307225A/ja
Publication of JP2005307225A5 publication Critical patent/JP2005307225A5/ja
Application granted granted Critical
Publication of JP4591749B2 publication Critical patent/JP4591749B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004121954A 2004-04-16 2004-04-16 Ｍｏターゲット材の製造方法 Expired - Lifetime JP4591749B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004121954A JP4591749B2 (ja) 2004-04-16 2004-04-16 Ｍｏターゲット材の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004121954A JP4591749B2 (ja) 2004-04-16 2004-04-16 Ｍｏターゲット材の製造方法

Publications (3)

Publication Number Publication Date
JP2005307225A JP2005307225A (ja) 2005-11-04
JP2005307225A5 true JP2005307225A5 (cg-RX-API-DMAC7.html) 2007-04-26
JP4591749B2 JP4591749B2 (ja) 2010-12-01

Family

ID=35436327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004121954A Expired - Lifetime JP4591749B2 (ja) 2004-04-16 2004-04-16 Ｍｏターゲット材の製造方法

Country Status (1)

Country Link
JP (1) JP4591749B2 (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5550328B2 (ja) * 2009-12-22 2014-07-16 株式会社東芝 Ｍｏスパッタリングターゲットおよびその製造方法
JPWO2013038668A1 (ja) * 2011-09-13 2015-03-23 株式会社アルバック Ｍｏ−Ｗターゲット及びその製造方法
US9334565B2 (en) * 2012-05-09 2016-05-10 H.C. Starck Inc. Multi-block sputtering target with interface portions and associated methods and articles
WO2019188713A1 (ja) * 2018-03-29 2019-10-03 株式会社アライドマテリアル モリブデン素材およびその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61141674A (ja) * 1984-12-13 1986-06-28 東京タングステン株式会社 タングステンシリサイド合金焼結体及びその製造方法
JP3244167B2 (ja) * 1998-01-19 2002-01-07 日立金属株式会社 タングステンまたはモリブデンターゲット
JP3748221B2 (ja) * 2001-10-23 2006-02-22 日立金属株式会社 Ｍｏ系スパッタリング用ターゲットおよびその製造方法

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