JP2005306523A - Electronic component inspection device - Google Patents

Electronic component inspection device Download PDF

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Publication number
JP2005306523A
JP2005306523A JP2004123078A JP2004123078A JP2005306523A JP 2005306523 A JP2005306523 A JP 2005306523A JP 2004123078 A JP2004123078 A JP 2004123078A JP 2004123078 A JP2004123078 A JP 2004123078A JP 2005306523 A JP2005306523 A JP 2005306523A
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Japan
Prior art keywords
electronic component
suction
rotary table
suction nozzle
holder
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Pending
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JP2004123078A
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Japanese (ja)
Inventor
Takeshi Yamauchi
威 山内
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NIPPON GAATAA KK
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NIPPON GAATAA KK
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Priority to JP2004123078A priority Critical patent/JP2005306523A/en
Priority to TW093115179A priority patent/TW200535420A/en
Priority to KR1020040039134A priority patent/KR20050101519A/en
Publication of JP2005306523A publication Critical patent/JP2005306523A/en
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/88—Separating or stopping elements, e.g. fingers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503—Stacked arrangements of devices
    • H01L2225/06596—Structural arrangements for testing

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electronic component transferring device enabling higher speed reciprocating action of a suction nozzle for carrying the electronic component from an electronic component alignment feeder to a suction chuck of a rotation table. <P>SOLUTION: The electronic component inspection device has the electronic component transferring device (15) for reciprocating the attraction nozzle (28) while drawing a circular track between the component alignment feeder (11) and the suction chuck (12) of the rotation table (13) while maintaining the vertical attitude. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、微細な発光ダイオードのような電子部品を検査するための検査装置、特に部品整列送り装置から検査装置に電子部品を受け渡すための電子部品移載装置に関する。   The present invention relates to an inspection apparatus for inspecting an electronic component such as a fine light-emitting diode, and more particularly to an electronic component transfer apparatus for delivering an electronic component from a component alignment feeder to an inspection apparatus.

電子部品である発光ダイオードはその輝度、色調、電気特性等のための測定検査を受ける。このような電子部品の検査は、回転テーブルにその円周上に等間隔に取り付けられた吸着チャックに電子部品を吸着させ回転テーブルを所定角度間欠的に回転させて、電子部品を種々の検査ステーションに順次位置させることによって行われる。部品整列送り装置と回転テーブルの吸着チャックとの間を上下・左右方向に往復移動する吸着ノズルが設けられ、この吸着ノズルが部品整列送り装置から電子部品を１個ずつ吸い付けて回転テーブルの吸着チャックに向かって運び、そしてその吸着チャックに受け渡す。吸着ノズルの上下・左右方向の往復運動はモータによって回転されるカム機構によって行われる。   Light emitting diodes, which are electronic components, undergo measurement and inspection for their brightness, color tone, electrical characteristics, and the like. Such electronic components are inspected at various inspection stations by adsorbing the electronic components to suction chucks mounted at equal intervals on the circumference of the rotary table and rotating the rotary table intermittently at a predetermined angle. This is done by sequentially positioning them. A suction nozzle that reciprocates vertically and horizontally between the component alignment feeder and the suction chuck of the rotary table is provided, and this suction nozzle sucks the electronic components one by one from the component alignment feeder and sucks the rotary table. Carry to the chuck and transfer to the chuck. The reciprocating motion of the suction nozzle in the vertical and horizontal directions is performed by a cam mechanism that is rotated by a motor.

電子部品のより高速な検査が要求される中で、最も問題になるのは吸着ノズルの往復運動を如何に速めるかである。カム機構では、回転負荷が変動するため、カム機構の高速駆動に限界があり、そのため吸着ノズルの１サイクル即ち１往復動作は現在のところ０．５秒に制限されている。
本発明の目的は、吸着ノズルのより高速な往復動作（１サイクル（１往復動作）０．２秒）を可能にする電子部品移載装置を提供することにある。
本発明の他の目的は、吸着ノズルを、その垂直姿勢を維持しながら、部品整列送り装置と回転テーブルの吸着チャックとの間で円弧軌道を描いて往復動させる電子部品移載装置を提供することにある。
本発明の更に他の目的は、部品整列送り装置から回転テーブルの吸着チャックへの吸着ノズルの移動に先立って、部品整列送り装置のストッパー装置を下降させて吸着ノズルに吸着された電子部品がストッパー装置と干渉するのを防止した、電子部品移載装置を提供することにある。 Among the demands for faster inspection of electronic components, the most important issue is how to accelerate the reciprocating motion of the suction nozzle. In the cam mechanism, since the rotational load fluctuates, there is a limit to the high-speed driving of the cam mechanism. Therefore, one cycle of the suction nozzle, that is, one reciprocating operation is currently limited to 0.5 seconds.
An object of the present invention is to provide an electronic component transfer device that enables a higher speed reciprocating operation of a suction nozzle (one cycle (one reciprocating operation) 0.2 seconds).
Another object of the present invention is to provide an electronic component transfer device that reciprocates a suction nozzle by drawing an arc orbit between a component alignment feeder and a suction chuck of a rotary table while maintaining its vertical posture. There is.
Still another object of the present invention is to lower the stopper device of the component alignment feeding device before moving the suction nozzle from the component alignment feeding device to the suction chuck of the rotary table, so that the electronic component sucked by the suction nozzle is stopped. An object of the present invention is to provide an electronic component transfer device that prevents interference with the device.

本発明によれば、電子部品整列送り装置と、円周上に等間隔に取り付けられた吸着チャックを備え、且つ隣接した吸着チャック間の角度間欠的に回転される回転テーブルと、電子部品を電子部品整列送り装置から回転テーブルの吸着チャックへ運ぶための、吸着ノズルを含む電子部品移載装置と、を有し、電子部品整列送り装置はガイドレールの直線溝とリッド（蓋）とによって構成された送り通路と、送り通路の中を送られてくる電子部品の先頭のものを停止させるためのストッパー装置と、を含み、電子部品移載装置は、吸着ノズルを電子部品整列送り装置の送り通路の先端と回転テーブルのこれに隣接して位置した吸着チャックとの間で円弧軌道を描いて往復動させる作動機構と、吸着ノズルの係る往復運動中、吸着ノズルを垂直状態に維持するための姿勢保持装置と、を含む、電子部品検査装置を提供する。   According to the present invention, the electronic component aligning and feeding device, the rotary chuck provided with suction chucks mounted at equal intervals on the circumference and rotated intermittently between adjacent suction chucks, and the electronic components as electronic components. An electronic component transfer device including a suction nozzle for conveying the component alignment feed device to the suction chuck of the rotary table, and the electronic component alignment feed device is constituted by a linear groove of a guide rail and a lid (lid). And a stopper device for stopping the leading electronic component sent through the feed passage, and the electronic component transfer device includes the suction nozzle as the feed passage of the electronic component alignment feed device. The suction nozzle is in a vertical state during the reciprocating motion of the suction nozzle, and an operating mechanism that reciprocates in a circular arc path between the tip of the rotary table and the suction chuck located adjacent to the suction table. Including a posture holding device for maintaining, to provide an electronic component testing apparatus.

本発明の好ましい実施形態では、ストッパー装置は、スライド部材により垂直ガイドレールに沿って昇降するように構成された可動部品と、その頂部にビスで取り付けられたストッパーと、スライド部材を可動部品とともに下降させるように作動するソレノイドと、を含み、可動部材は、常態ではスライド部材を上方にバネ付勢することによって上昇位置を占め、ストッパーは、その可動部品が上昇位置にあるとき通路の前端に位置して通路の中を送られてくる電子部品の先頭のものを所定位置に停止させ、可動部品が下降位置にあるとき通路より下に退避する。   In a preferred embodiment of the present invention, the stopper device includes a movable part configured to move up and down along the vertical guide rail by a slide member, a stopper attached to the top of the stopper with a screw, and the slide member descending together with the movable part. The movable member normally occupies a raised position by spring-biasing the slide member upward, and the stopper is positioned at the front end of the passage when the movable part is in the raised position. Then, the leading electronic component sent through the passage is stopped at a predetermined position, and retracted below the passage when the movable component is in the lowered position.

電子部品移載装置の作動機構は、電子部品整列送り装置の側面から支持され、そして水平ベース板を有する垂直支持ブラケットの背面に取り付けられ、支持ブラケットを貫通して延びる回転軸を有し、且つその回転軸を所定角度往復回転させるように作動するサーボモータと、回転軸に固定して取り付けられ、且つ回転軸の往復回転により所定角度スイングするスイングアームと、を含み、作動機構は更にシャフトホルダーと、該ホルダーに固定され、スイングアームの円形開口内に取り付けられたベアリングに差し込まれ且つベアリングで支持された固定シャフトと、を含み、ノズルホルダーがビスによってシャフトホルダーに固定され、そして電子部品送り通路の前端に向かって直角に延びるアームを有し、吸着ノズルはこのアームの先端に設けられている。   The electronic component transfer device actuating mechanism is supported from the side of the electronic component alignment feeder and is attached to the back of a vertical support bracket having a horizontal base plate, and has a rotating shaft extending through the support bracket; A servo motor that operates to reciprocate the rotating shaft by a predetermined angle; and a swing arm that is fixedly attached to the rotating shaft and swings by a predetermined angle by reciprocating rotation of the rotating shaft. And a fixed shaft inserted into and supported by a bearing mounted in the circular opening of the swing arm, the nozzle holder being fixed to the shaft holder by a screw, and an electronic component feed It has an arm that extends at a right angle toward the front end of the passage, and the suction nozzle It is provided to.

姿勢保持装置は、支持ブラケットの水平ベース板の上面に固定され、電子部品整列送り装置の部品送り通路と平行に延びる直線ガイドレールに摺動自在に取り付けられたスライダーと、スライダーに固定して取り付けられたブッシュホルダーと、ビスによってノズルホルダーとともにシャフトホルダーに固定され、ブッシュホルダー内に設けられたブッシング内に差し込まれて上下動可能に支持された一対の垂直なガイドロッドと、を含む。   The posture holding device is fixed to the upper surface of the horizontal base plate of the support bracket, and is slidably attached to a linear guide rail extending in parallel with the component feed path of the electronic component alignment feed device, and fixed to the slider. And a pair of vertical guide rods fixed to the shaft holder together with the nozzle holder by screws and inserted into a bushing provided in the bush holder and supported so as to move up and down.

図１及び２を参照すると、電子部品検査装置１０は、一般的には、電子部品整列送り装置１１と、円周上に等間隔に取り付けられた吸着チャック１２を備えた回転テーブル１３と、電子部品１４（図６及び７参照）を電子部品整列送り装置１１から回転テーブル１３の吸着チャック１２へ運ぶための電子部品移載装置１５と、を含む。電子部品整列送り装置１１はガイドレール１６の直線溝１７とリッド（蓋）１８とによって構成された送り通路１９と、ストッパー装置２０と、を含む。電子部品整列送り装置１１は当該技術分野で良く知られたタイプのものであり、これ以上の説明は不用と考えられる。ストッパー装置２０は、図４乃至７に明瞭に示すように、スライド部材２１により垂直ガイドレール２２に沿って昇降するように構成された可動部品２３と、その頂部にビス２４で取り付けられたストッパー２５と、を含む。可動部品２３は、常態ではコイルバネ２６がスライド部材２１を上方に付勢することによって上昇位置を占める。スライド部材２１を可動部品２３とともに下降させるように作動するソレノイド２７が設けられ、ソレノイド２７の作動でスライド部材２１は可動部品２３とともにバネ２６を圧縮しながら下降し、ソレノイド２７が消勢されるとき、スライド部材２１、従って可動部品２３は圧縮されたバネ２６の弾発作用で上昇する。ストッパー２５は、その可動部品２３が上昇位置にあるとき送り通路１９の前端に位置して送り通路の中を送られてくる電子部品１４の先頭のものを所定位置に停止させ（図６参照）、可動部品２３が下降位置にあるとき送り通路１９より下に退避する。回転テーブル１３は、隣接した吸着チャック１２、１２間の角度づつ間欠的に回転され、吸着チャック１２でチャッキングされた電子部品１４を回転テーブル１３と関連して設置されている複数の検査ステーション（図示せず）に運ぶように成っている。回転テーブル１３の間欠的な回転毎に、吸着チャック１２の１つが部品整列送り装置の送り通路１９と整合するように成っている。   Referring to FIGS. 1 and 2, an electronic component inspection apparatus 10 generally includes an electronic component aligning and feeding apparatus 11, a rotary table 13 having suction chucks 12 attached at equal intervals on a circumference, And an electronic component transfer device 15 for transporting the component 14 (see FIGS. 6 and 7) from the electronic component aligning and feeding device 11 to the suction chuck 12 of the rotary table 13. The electronic component aligning and feeding device 11 includes a feeding passage 19 constituted by a straight groove 17 and a lid (lid) 18 of the guide rail 16 and a stopper device 20. The electronic component aligning and feeding device 11 is of a type well known in the art, and further explanation is considered unnecessary. As clearly shown in FIGS. 4 to 7, the stopper device 20 includes a movable part 23 configured to move up and down along a vertical guide rail 22 by a slide member 21, and a stopper 25 attached to the top of the movable part 23 with a screw 24. And including. The movable part 23 normally occupies the raised position by the coil spring 26 urging the slide member 21 upward. A solenoid 27 is provided that operates so as to lower the slide member 21 together with the movable part 23. When the solenoid 27 is operated, the slide member 21 is lowered together with the movable part 23 while compressing the spring 26, and the solenoid 27 is de-energized. The slide member 21, and thus the movable part 23, is raised by the elastic action of the compressed spring 26. The stopper 25 is located at the front end of the feed passage 19 when the movable part 23 is in the raised position, and stops the top one of the electronic components 14 fed through the feed passage at a predetermined position (see FIG. 6). When the movable part 23 is in the lowered position, it retracts below the feed passage 19. The rotary table 13 is intermittently rotated at an angle between adjacent suction chucks 12, 12, and an electronic component 14 chucked by the suction chuck 12 is installed in association with a plurality of inspection stations ( (Not shown). For each intermittent rotation of the rotary table 13, one of the suction chucks 12 is aligned with the feed passage 19 of the component aligning and feeding device.

本発明による電子部品移載装置１５は、図２、３、６及び７に示すように、吸着ノズル２８を電子部品整列送り装置１１の送り通路１９の先端と回転テーブル１３のこれに隣接して位置した吸着チャック１２との間で円弧軌道を描いて往復動させる作動機構２９と、吸着ノズル２８の係る往復運動中、吸着ノズル２８を垂直状態に維持するための姿勢保持装置３０と、を含む。この作動機構２９は、電子部品整列送り装置の側面から支持され、そして水平ベース板３１を有する垂直支持ブラケット３２の背面に取り付けられ、支持ブラケット３２を貫通して延びる回転軸３３を有するサーボモータ３４と、回転軸３３に固定して取り付けられたスイングアーム３５と、を含む。サーボモータ３４はその回転軸３３を所定角度往復回転させるように作動し、回転軸の往復回転によりスイングアーム３５を所定角度スイングさせるようになっている。作動機構２９は更にシャフトホルダー３６と、該ホルダーに固定され、スイングアーム３５の円形開口３７内に取り付けられたベアリング３８に差し込まれ且つベアリング３８で支持された固定シャフト３９と、を含む。ノズルホルダー４０がビス４１によってシャフトホルダー３６に固定され、そして電子部品送り通路１９の前端に向かって直角に延びるアーム４２を有し、吸着ノズル２８はこのアーム４２の先端に取り付けられる。吸着ノズル２８は、好ましくは、図８に拡大して示すように、アーム４２の先端に設けられた開口４３内に上下に可動に配置され、アーム４２に固定されたバネ受け４４と吸着ノズル２８の肩４５との間に設けられたコイルバネ４６によって所定位置に付勢され、何か障害物に当たったときコイルバネ４６を介して上に逃げられるようになっている。、吸着ノズル２８の所定位置は、その上端に設けられたストッパー部品４７がバネ受け４４に当たることによって確立される。   As shown in FIGS. 2, 3, 6, and 7, the electronic component transfer device 15 according to the present invention places the suction nozzle 28 adjacent to the tip of the feed path 19 of the electronic component aligning and feeding device 11 and this of the rotary table 13. An actuation mechanism 29 that reciprocates in a circular arc path with the suction chuck 12 positioned; and a posture holding device 30 for maintaining the suction nozzle 28 in a vertical state during the reciprocating motion of the suction nozzle 28. . The actuating mechanism 29 is supported from the side of the electronic component aligning and feeding apparatus, and is attached to the back surface of the vertical support bracket 32 having the horizontal base plate 31. The servo motor 34 has a rotating shaft 33 extending through the support bracket 32. And a swing arm 35 fixedly attached to the rotary shaft 33. The servo motor 34 operates to reciprocate the rotation shaft 33 by a predetermined angle, and swings the swing arm 35 by a predetermined angle by reciprocating rotation of the rotation shaft. The actuating mechanism 29 further includes a shaft holder 36, and a fixed shaft 39 that is fixed to the holder and inserted into a bearing 38 mounted in a circular opening 37 of the swing arm 35 and supported by the bearing 38. The nozzle holder 40 is fixed to the shaft holder 36 by a screw 41 and has an arm 42 extending at a right angle toward the front end of the electronic component feeding path 19, and the suction nozzle 28 is attached to the tip of the arm 42. As shown in an enlarged view in FIG. 8, the suction nozzle 28 is preferably arranged so as to be movable up and down in an opening 43 provided at the tip of the arm 42, and the spring receiver 44 and the suction nozzle 28 fixed to the arm 42. A coil spring 46 provided between the shoulder 45 and the shoulder 45 is urged to a predetermined position so that it can escape upward through the coil spring 46 when it hits an obstacle. The predetermined position of the suction nozzle 28 is established by the stopper part 47 provided at the upper end of the suction nozzle 28 hitting the spring receiver 44.

姿勢保持装置３０は、支持ブラケット３２の水平ベース板３１の上面に固定され、電子部品整列送り装置１１の部品送り通路１９と平行に延びる直線ガイドレール４８に摺動自在に取り付けられたスライダーブロック４９と、スライダーブロック４９に固定して取り付けられたブッシュホルダー５０と、ビス４１によってノズルホルダー４０とともにシャフトホルダー３６に固定され、ブッシュホルダー５０内に設けられたブッシング５２内に差し込まれて上下動可能に支持された一対の垂直なガイドロッド５３、５３と、を含む。   The posture holding device 30 is fixed to the upper surface of the horizontal base plate 31 of the support bracket 32 and is slidably attached to a linear guide rail 48 extending in parallel with the component feed passage 19 of the electronic component aligning and feeding device 11. The bush holder 50 fixedly attached to the slider block 49 and the screw holder 41 are fixed to the shaft holder 36 together with the nozzle holder 40 and inserted into a bushing 52 provided in the bush holder 50 so as to be movable up and down. A pair of vertical guide rods 53, 53 supported.

かくして、電子部品移載装置１５は次のように作動する。サーボモータ３４を作動してその回転軸３３を時計回りに所定角度回転させると、スイングアーム３５は同じ所定角度スイングする。スイングアーム３５のスイングによりこれに連結された固定シャフト３９は回転軸３３を中心に円弧軌道を描いて移動し、これに伴って、シャフトホルダー３６、従ってノズルホルダー４０に取り付けられている吸着ノズル２８も円弧軌道を描いて回転テーブル１３の吸着チャック１２に向かって移動する。シャフトホルダー３６の移動により、ガイドロッド５３が差し込まれているブッシュホルダー５０はスライダーブロック４９を介してガイドレール４８上を摺動する。かくして、ガイドロッド５３はブッシュホルダー５０とともに移動しながらそのブッシング５２の中を垂直に上下動し、これによってシャフトホルダー５０、従ってノズルホルダー４０は水平に、換言すれば吸着ノズル２８は垂直に維持される。吸着ノズル２８を回転テーブル１３の吸着チャック１２の位置から戻すときは、サーボモータ３４によりスイングアーム３５を反時計回りに所定角度スイングさせればよい。   Thus, the electronic component transfer device 15 operates as follows. When the servo motor 34 is operated to rotate the rotating shaft 33 clockwise by a predetermined angle, the swing arm 35 swings by the same predetermined angle. The fixed shaft 39 connected to the swing arm 35 by swinging moves along an arc orbit around the rotation shaft 33, and accompanying this, the suction nozzle 28 attached to the shaft holder 36 and thus the nozzle holder 40. Moves along the circular arc trajectory toward the suction chuck 12 of the rotary table 13. Due to the movement of the shaft holder 36, the bush holder 50 into which the guide rod 53 is inserted slides on the guide rail 48 via the slider block 49. Thus, the guide rod 53 moves up and down vertically in the bushing 52 while moving together with the bush holder 50, so that the shaft holder 50 and thus the nozzle holder 40 are kept horizontal, in other words, the suction nozzle 28 is kept vertical. The When the suction nozzle 28 is returned from the position of the suction chuck 12 of the rotary table 13, the swing arm 35 may be swung counterclockwise by a predetermined angle by the servo motor 34.

図６及び７を参照して電子部品を部品整列送り装置１１から回転テーブル１３の吸着チャック１２に受け渡す仕方について説明する。ストッパー装置２０の可動部品２３が上昇位置にあるとき、ストッパー２５は部品整列送り装置１１の送り通路１９と整列して位置し、送り通路１９の中を送られてくる先頭の電子部品１４はこのストッパー２５に当たってそこに待機する。回転テーブル１３が間欠的に所定角度回転するとき、吸着チャック１２の１つは部品整列送り装置１１の送り通路１９と整列して位置する。吸着ノズル２８は回転テーブル１３の吸着チャック１２の位置から先に述べたように円弧軌道を描いて送り通路１９上の電子部品１４に向かって移動してこれを吸着する。その間に、回転テーブル１３が所定角度回転して次の吸着チャック１２が部品整列送り装置１１の送り通路１９と整列した位置に運ばれる。引き続いて、ストッパー装置２０の可動部品２３が下降してそのストッパー２５を送り通路１１より下に退避させる。次いで、吸着ノズル２８は同じ円弧軌道を描いて回転テーブル１３の吸着チャック１２まで移動し、吸引を開放してその電子部品１４を回転テーブル１３の吸着チャック１２に吸着させる。吸着ノズル２８の吸着チャック１２に向う移動中、ストッパー２５が下方に退避しているため、吸着ノズル２８に吸着された電子部品１４がそれによって干渉される事がない。以下同様の操作が繰り返されて電子部品が回転テーブルの吸着チャックによって次々とチャッキングされる。   With reference to FIGS. 6 and 7, a method of delivering electronic components from the component aligning and feeding apparatus 11 to the suction chuck 12 of the rotary table 13 will be described. When the movable component 23 of the stopper device 20 is in the raised position, the stopper 25 is positioned in alignment with the feed passage 19 of the component aligning and feeding device 11, and the leading electronic component 14 fed through the feed passage 19 is this Hit the stopper 25 and wait there. When the rotary table 13 rotates intermittently at a predetermined angle, one of the suction chucks 12 is positioned in alignment with the feed passage 19 of the component aligning and feeding device 11. The suction nozzle 28 draws an arc orbit from the position of the suction chuck 12 of the rotary table 13 and moves toward the electronic component 14 on the feed path 19 to suck it. Meanwhile, the rotary table 13 is rotated by a predetermined angle, and the next suction chuck 12 is carried to a position aligned with the feed passage 19 of the component aligning and feeding device 11. Subsequently, the movable part 23 of the stopper device 20 descends and retracts the stopper 25 below the feed passage 11. Next, the suction nozzle 28 draws the same circular arc trajectory and moves to the suction chuck 12 of the rotary table 13, releases the suction, and sucks the electronic component 14 to the suction chuck 12 of the rotary table 13. During the movement of the suction nozzle 28 toward the suction chuck 12, the stopper 25 is retracted downward, so that the electronic component 14 sucked by the suction nozzle 28 is not interfered therewith. Thereafter, the same operation is repeated, and the electronic components are successively chucked by the suction chuck of the rotary table.

当該技術で明らかなように、吸着ノズル及び吸着チャックは負圧源にパイプを介して接続された負圧通路を有し、電子部品を吸着したり開放したりするための制御装置（図示せず）を含む。
上述したように、本発明によれば所定角度にわたるスイングアームの往復回転により吸着ノズルを円弧軌道を描いて往復動させるため、吸着ノズルの往復動作に要する時間をより短くすることができる。 As is apparent in the art, the suction nozzle and the suction chuck have a negative pressure passage connected to a negative pressure source through a pipe, and a control device (not shown) for sucking and releasing electronic components. )including.
As described above, according to the present invention, since the suction nozzle is reciprocated while drawing a circular arc orbit by the reciprocating rotation of the swing arm over a predetermined angle, the time required for the reciprocating operation of the suction nozzle can be further shortened.

本発明による電子部品検査装置の全体の側面図である。1 is a side view of an entire electronic component inspection apparatus according to the present invention. 本発明による電子部品検査装置の部分平面図であって、部品移載装置を一部断面で示す図である。It is a fragmentary top view of the electronic component inspection apparatus by this invention, Comprising: It is a figure which shows a components transfer apparatus in a partial cross section. 図２の部品移載装置を一部断面で示す立面図である。FIG. 3 is an elevational view showing the component transfer apparatus of FIG. 2 in a partial cross section. 部品整列送り装置のストッパー装置の斜視図である。It is a perspective view of the stopper apparatus of a component alignment feeder. 図４に示すストッパー装置の側面図である。It is a side view of the stopper apparatus shown in FIG. ストッパー装置が上昇位置にあり、吸着ノズルが部品整列送り装置の送り通路内の電子部品を吸い付けている様子を示す断面図である。It is sectional drawing which shows a mode that a stopper apparatus exists in a raise position, and the suction nozzle is attracting | sucking the electronic component in the feed path of a components alignment feeding apparatus. ストッパー装置が下降位置にあり、吸着ノズルが電子部品を吸い付けて部品整列送り装置の送り通路から回転テーブルの吸着チャックに受け渡す動作を示す図６と同様な図である。FIG. 7 is a view similar to FIG. 6 illustrating an operation in which the stopper device is in the lowered position and the suction nozzle sucks the electronic component and transfers it to the suction chuck of the rotary table from the feed path of the component alignment feed device. 吸着ノズルの取付け構造を断面で示す図である。It is a figure which shows the attachment structure of a suction nozzle in a cross section.

符号の説明Explanation of symbols

１０ 電子部品検査装置
１１ 部品整列送り装置
１２ 吸着チャック
１３ 回転テーブル
１４ 電子部品
１５ 部品移載装置
１６ ガイドレール
１７ 直線溝
１８ リッド
１９ 送り通路
２０ ストッパー装置
２１ スライド部材
２２ ガイドレール
２３ 可動部品
２５ ストッパー
２６ コイルバネ
２７ ソレノイド
２８ 吸着ノズル
２９ 作動機構
３０ 姿勢維持装置
３１ 水平ベース板
３２ 垂直支持ブラケット
３３ 回転軸
３４ サーボモータ
３５ スイングアーム
３６ シャフトホルダー
３７ 円形開口
３８ ベアリング
３９ 固定シャフト
４０ ノズルホルダー
４２ アーム
４８ 直線ガイドレール
４９ スライダーブロック
５０ ブッシュホルダー
５２ ブッシング
５３ ガイドロッド DESCRIPTION OF SYMBOLS 10 Electronic component inspection apparatus 11 Component alignment feeder 12 Adsorption chuck 13 Rotary table 14 Electronic component 15 Component transfer apparatus 16 Guide rail 17 Linear groove 18 Lid 19 Feeding path 20 Stopper device 21 Slide member 22 Guide rail 23 Movable component 25 Stopper 26 Coil spring 27 Solenoid 28 Adsorption nozzle 29 Actuation mechanism 30 Posture maintenance device 31 Horizontal base plate 32 Vertical support bracket 33 Rotating shaft 34 Servo motor 35 Swing arm 36 Shaft holder 37 Circular opening 38 Bearing 39 Fixed shaft 40 Nozzle holder 42 Arm 48 Linear guide rail 49 Slider block 50 Bush holder 52 Bushing 53 Guide rod

Claims (5)

電子部品整列送り装置と、円周上に等間隔に取り付けられた吸着チャックを備え、且つ隣接した吸着チャック間の角度間欠的に回転される回転テーブルと、電子部品を前記電子部品整列送り装置から前記回転テーブルの前記吸着チャックへ運ぶための、吸着ノズルを含む電子部品移載装置と、を有し、前記電子部品移載装置は、前記吸着ノズルを、その垂直姿勢を維持しながら、部品整列送り装置と回転テーブルの吸着チャックとの間で円弧軌道を描いて往復動させる装置を有する、電子部品検査装置。   An electronic component aligning and feeding device, a rotary table provided with suction chucks mounted at equal intervals on the circumference and rotated intermittently between adjacent suction chucks, and electronic components from the electronic component aligning and feeding device An electronic component transfer device including a suction nozzle for transporting the rotary table to the suction chuck, and the electronic component transfer device aligns the components while maintaining the suction nozzle in a vertical position. An electronic component inspection apparatus having a device that reciprocates while drawing a circular arc path between a feeding device and a suction chuck of a rotary table. 電子部品整列送り装置と、円周上に等間隔に取り付けられた吸着チャックを備え、且つ隣接した吸着チャック間の角度間欠的に回転される回転テーブルと、電子部品を前記電子部品整列送り装置から前記回転テーブルの前記吸着チャックへ運ぶための、前記吸着ノズルを含む電子部品移載装置と、を有し、前記電子部品整列送り装置はガイドレールの直線溝とリッド（蓋）とによって構成された送り通路と、該送り通路の中を送られてくる電子部品の先頭のものを停止させるためのストッパー装置と、を含み、前記電子部品移載装置は、前記吸着ノズルを前記電子部品整列送り装置の前記送り通路の先端と前記回転テーブルのこれに隣接して位置した前記吸着チャックとの間で円弧軌道を描いて往復動させる作動機構と、前記吸着ノズルの係る往復運動中、前記吸着ノズルを垂直状態に維持するための姿勢保持装置と、を含む、電子部品検査装置。   An electronic component aligning and feeding device, a rotary table provided with suction chucks mounted at equal intervals on the circumference and rotated intermittently between adjacent suction chucks, and electronic components from the electronic component aligning and feeding device An electronic component transfer device including the suction nozzle for conveying the rotary table to the suction chuck, and the electronic component alignment feeding device is configured by a linear groove of a guide rail and a lid (lid). A feed passage and a stopper device for stopping the leading one of the electronic parts sent through the feed passage, wherein the electronic component transfer device includes the suction nozzle and the electronic component alignment feed device. An operation mechanism that reciprocates in a circular arc path between the tip of the feed passage and the suction chuck located adjacent to the rotary table; During reciprocation, including a posture holding device for maintaining the suction nozzle in a vertical state, the electronic component testing apparatus. 前記ストッパー装置は、スライド部材により垂直ガイドレールに沿って昇降するように構成された可動部品と、その頂部に取り付けられたストッパーと、前記スライド部材を前記可動部品とともに下降させるように作動するソレノイドと、を含み、前記可動部材は、常態では、前記スライド部材を上方にバネ付勢することによって上昇位置を占め、前記ストッパーは、その可動部品が上昇位置にあるとき通路の前端に位置して通路の中を送られてくる電子部品の先頭のものを所定位置に停止させ、前記可動部品が下降位置にあるとき、前記送り通路より下に退避する、請求項１に記載の電子部品検査装置。   The stopper device includes a movable part configured to move up and down along a vertical guide rail by a slide member, a stopper attached to the top of the movable part, and a solenoid that operates to lower the slide member together with the movable part. The movable member normally occupies a raised position by spring-biasing the slide member upward, and the stopper is located at the front end of the passage when the movable part is in the raised position. The electronic component inspection apparatus according to claim 1, wherein a leading electronic component sent through the inside is stopped at a predetermined position, and when the movable component is in a lowered position, the electronic component inspection device retreats below the feeding path. 前記作動機構は、前記電子部品整列送り装置の側面から支持され、そして水平ベース板を有する垂直支持ブラケットの背面に取り付けられ、前記支持ブラケットを貫通して延びる回転軸を有し、且つその回転軸を所定角度往復回転させるように作動するサーボモータと、回転軸に固定して取り付けられ、且つ回転軸の往復回転により所定角度スイングするスイングアームと、を含み、前記作動機構は更にシャフトホルダーと、該ホルダーに固定され、前記スイングアームの円形開口内に取り付けられたベアリングに差し込まれ且つベアリングで支持された固定シャフトと、を含み、ノズルホルダーが前記シャフトホルダーに固定され、そして電子部品送り通路の前端に向かって直角に延びるアームを有し、前記吸着ノズルはこのアームの先端に設けられている、請求項１に記載の電子部品検査装置。   The actuating mechanism is supported from the side of the electronic component aligning and feeding device, and is attached to the back surface of a vertical support bracket having a horizontal base plate, and has a rotation shaft extending through the support bracket, and the rotation shaft. And a swing arm that is fixedly attached to the rotating shaft and swings by a predetermined angle by reciprocating rotation of the rotating shaft, and the operating mechanism further includes a shaft holder, A fixed shaft fixed to the holder, inserted into a bearing mounted in a circular opening of the swing arm and supported by the bearing, a nozzle holder fixed to the shaft holder, and an electronic component feed passage The suction nozzle has an arm extending at a right angle toward the front end. It is provided, the electronic component testing apparatus according to claim 1. 前記姿勢保持装置は、支持ブラケットの水平ベース板の上面に固定され、前記電子部品整列送り装置の前記送り通路と平行に延びる直線ガイドレールに摺動自在に取り付けられたスライダーと、該スライダーに固定して取り付けられたブッシュホルダーと、前記ノズルホルダーとともに前記シャフトホルダーに固定され、前記ブッシュホルダー内に設けられたブッシング内に差し込まれて上下動可能に支持された一対の垂直なガイドロッドと、を含む、請求項１に記載の電子部品検査装置。   The posture holding device is fixed to the upper surface of the horizontal base plate of the support bracket, and is slidably attached to a linear guide rail extending in parallel with the feed path of the electronic component alignment feed device, and fixed to the slider. And a pair of vertical guide rods fixed to the shaft holder together with the nozzle holder and inserted into a bushing provided in the bush holder so as to be vertically movable. The electronic component inspection apparatus according to claim 1, further comprising:
JP2004123078A 2004-04-19 2004-04-19 Electronic component inspection device Pending JP2005306523A (en)

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KR1020040039134A KR20050101519A (en) 2004-04-19 2004-05-31 Device for inspecting electronic components

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KR100632258B1 (en) * 2005-01-14 2006-10-12 우리마이크론(주) Sample tester for semiconductor
CN108268058A (en) * 2018-02-09 2018-07-10 威海科莱默自动化设备有限公司 A kind of angle adjustment machine and its method of adjustment
WO2020080430A1 (en) * 2018-10-16 2020-04-23 上野精機株式会社 Inversion unit
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CN108268058A (en) * 2018-02-09 2018-07-10 威海科莱默自动化设备有限公司 A kind of angle adjustment machine and its method of adjustment
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