200535420 (1) 玖、發明說明 【發明所屬之技術領域】 本發明是關於用來檢查細微的發光二極體等的電子零 件的檢查裝置，特別是關於從零件排列輸送裝置將電子零 件交接到檢查裝置的電子零件移載裝置。 【先前技術】 電子零件也就是發光二極體，會接受其亮度、色調、 電子特性等的測定檢查。該電子零件的檢查，是藉由下述 方式所進行的，是使電子零件吸附在以等間隔被安裝在旋 轉台的圓周上的吸附夾頭，使旋轉台以預定角度間歇性地 旋轉’使電子零件依序定位於各種檢查站。而設置有於零 件排列輸送裝置與旋轉台的吸附夾頭之間朝上下、左右方 向往復移動的吸附噴嘴，該吸附噴嘴是將來自於零件排列 輸送裝置的電子零件一個一個予以吸附，朝向旋轉台的吸 附夾頭運送，然後交接到該吸附夾頭。吸附噴嘴的上下、 左右方向的往復運動，則是藉由以馬達使其旋轉的凸輪機 構所進行的。 【發明內容】 【發明欲解決的課題】 在對電子零件進行更高速的檢查的要求，最主要的問 題是如何快速進行吸附噴嘴的往復運動。在凸輪機構，由 於旋轉負何會有變動，所以對凸輪機構的高速驅動會有其 -4- 200535420 (2) 界限，因此吸附噴嘴的一次循環動作也就是一次往復動作 ，現在是限制在〇 · 5秒。 本發明的目的，是要提供一種電子零件移載裝置’可 進行吸附噴嘴的更高速的往復動作（一次循環動作（一次往 復動作）〇 · 2秒）。 本發明的其他目的，是要提供一種電子零件移載裝置 ，是使吸附噴嘴一邊維持其垂直姿勢，一邊在零件排列輸 送裝置與旋轉台的吸附夾頭之間，以描繪著圓弧軌道的方 式往復移動。 本發明的其他目的，是要提供一種電子零件移載裝置 ，在吸附噴嘴從零件排列輸送裝置移動到旋轉台的吸附夾 頭之前，會使零件排列輸送裝置的止動裝置下降，防止吸 附於吸附噴嘴的電子零件與止動裝置造成干涉。 【用以解決課題的手段】 藉由本發明，提供一種電子零件檢查裝置，是具有： 電子零件排列輸送裝置、具備以等間隔安裝在圓周上的吸 附夾頭，且以鄰接的吸附夾頭間的角度間歇性地旋轉的旋 轉台、以及包含用來將電子零件從電子零件排列輸送裝置 運送到旋轉台的吸附夾頭的吸附噴嘴的電子零件移載裝置 ，電子零件排列輸送裝置，是包含有：以導軌的直線溝槽 與蓋子所構成的輸送通路、以及使在輸送通路中所輸送的 電子零件的最前頭的零件停止的止動裝置，電子零件移載 裝置，則包含有：使吸附噴嘴，在電子零件排列輸送裝置 -5- 200535420 (3) 的輸送通路的前端與旋轉台的鄰接位置的吸附夾頭之間， 以描繪著圓弧軌道的方式往復移動的作動機構、以及在吸 附噴嘴的往復運動中，用來將吸附噴嘴維持成垂直狀態的 姿勢保持裝置。 在本發明的較佳實施方式，止動裝置，是包含有：藉 由滑動構件而沿著垂直導軌而升降的可動零件、以小螺釘 安裝在其頂部的止動件、以及會作動使滑動構件與可動零 件一起下降的電磁線圈，可動零件，在平常狀態，是藉由 以彈簧將滑動構件朝上方彈壓，而佔在上升位置，止動件 ，當該可動零件是位於上升位置時，是位於通路的前端， 而使在通路中所輸送的電子零件的最前頭的零件停止在預 定位置，當可動零件位於下降位置時則退避到通路更下方 處。 電子零件移載裝置的作動機構，是包含有：從電子零 件排列輸送裝置的側面被支承著，被安裝在具有水平基座 板的垂直支承托架的背面，具有貫穿支承托架而延伸的旋 轉軸’且以使其旋轉軸以預定角度往復旋轉的方式作動的 伺服馬達、以及被固定安裝在旋轉軸，且藉由旋轉軸的往 復旋轉擺動預定角度的擺動臂；作動機構，又包含有：軸 座、以及固定在該軸座，被插入到在擺動臂的圓形開口內 所安裝的軸承，且以軸承所支承的固定軸，噴嘴座是藉由 小螺釘被固定在軸座，且具有朝向電子零件輸送通路的前 端直角地延伸的臂部，吸附噴嘴是設置在該臂部的前端。 姿勢保持裝置，是包含有：被固定在支承托架的水平 -6 - 200535420 (4) 基座板的上面部，可自由滑動地被安裝在與電子零件排列 輸送裝置的零件輸送通路平行延伸的直線導軌的滑動件、 被固定安裝在滑動件的軸襯座、藉由小螺釘，與噴嘴座一 起被固定在軸座，被插入到軸襯座內所設置的軸襯內而可 上下動作地被支承著的一對垂直的導桿。 【實施方式】 參照第1圖及第2圖，電子零件檢查裝置1 〇 ’ 一般 來說，是包含有：電子零件排列輸送裝置1 1、具備有以 等間隔安裝在圓周上的吸附夾頭1 2的旋轉台1 3、以及用 來將電子零件14(參照第6圖及第7圖）從電子零件排列輸 送裝置1 1輸送到旋轉台1 3的吸附夾頭1 2的電子零件移 載裝置1 5。電子零件排列輸送裝置1 1，是包含有：以導 軌1 6的直線溝槽1 7與蓋子1 8所構成的輸送通路1 9、以 及止動裝置2 0。電子零件排列輸送裝置1 1，在該技術領 域是習知型式的構造，所以也不一定需要以上的說明。止 動裝置20，如第4圖〜第7圖所示’是包含有：藉由滑 動構件2 1而沿著垂直導軌2 2而升降的可動零件2 3、以 及以小螺釘2 4安裝在其頂部的止動件2 5。可動零件2 3， 在平常狀態，是藉由以線圈彈簧2 6將滑動構件2 1朝上方 彈壓，而佔在上升位置。且設置有會作動使滑動構件2 1 與可動零件2 3 —起下降的電磁線圈2 7 ’以電磁線圈2 7 的作動，滑動構件2 1會與可動零件2 3 一起一邊壓縮彈簧 2 6且一邊下降，當電磁線圈2 7解除作動時，滑動構件2 1 -7- 200535420 (5) 、可動零件2 3，會以壓縮著的彈簧2 6的回彈作用而上升 。止動件2 5，當該可動零件2 3是位於上升位置時，是位 於輸送通路1 9的前端，而使在通路中所輸送的電子零件 1 4的最前頭的零件停止在預定位置（參照第6圖），當可動 零件2 3位於下降位置時則退避到輸送通路！ 9更下方處。 旋轉台1 3，是以鄰接的吸附夾頭1 2、1 2間的角度間歇性 地旋轉，使以吸附夾頭1 2所吸附的電子零件1 4輸送到與 旋轉台1 3相關設置的複數的檢查站（沒有圖示）。每次旋 轉台1 3的間歇性的旋轉，會讓吸附夾頭1 2的其中一個對 準零件排列輸送裝置的輸送通路1 9。 本發明的電子零件移載裝置15，如第2圖、第3圖 、第6圖及第7圖所示，則包含有：使吸附噴嘴2 8，在 電子零件排列輸送裝置1 1的輸送通路1 9的前端與旋轉台 1 3的鄰接位置的吸附夾頭丨2之間，以描繪著圓弧軌道的 方式往復移動的作動機構2 9、以及在吸附噴嘴2 8的往復 運動中，用來將吸附噴嘴28維持成垂直狀態的姿勢保持 裝置3 0。該作動機構29，是包含有：從電子零件排列輸 送裝置的側面被支承著，被安裝在具有水平基座板3 1的 垂直支承托架3 2的背面，具有貫穿支承托架3 2而延伸的 旋轉軸3 3的伺服馬達3 4、以及被固定安裝在旋轉軸3 3 的揄動臂3 5。伺服馬達3 4是以使其旋轉軸3 3以預定角 度往復旋轉的方式作動，藉由旋轉軸的往復旋轉，使擺動 臂3 5以預定角度擺動。作動機構29，又包含有：軸座3 6 、以及固疋在該軸座’被插入到在擺動臂3 5的圓形開口 -8- 200535420 (6) 3 7內所安裝的軸承3 8，且以軸承3 8所支承的固定軸3 9 。噴嘴座4 0是藉由小螺釘4 1被固定在軸座3 6，且具有 朝向電子零件輸送通路1 9的前端直角地延伸的臂部4 2， 吸附噴嘴28是設置在該臂部42的前端。吸附噴嘴28， 如第8圖放大顯示，是可上下動作地配置在臂部42的前 端所設置的開口 43內，會藉由固定在臂部42的彈簧座 44與吸附噴嘴28的肩部45之間所設置的線圈彈簧46被 彈壓到預定位置，當碰到任何障礙物時，會經由線圈彈簧 46退避到上方。吸附噴嘴28的預定位置，是藉由讓設置 在其上端的止動零件4 7抵接到彈簧座4 4所確定的。 姿勢保持裝置30，是包含有：被固定在支承托架32 的水平基座板3 1的上面部，可自由滑動地被安裝在與電 子零件排列輸送裝置1 1的零件輸送通路1 9平行延伸的直 線導軌4 8的滑塊4 9、被固定安裝在滑塊4 9的軸襯座5 0 、藉由小螺釘41，與噴嘴座40 —起被固定在軸座36，被 插入到軸襯座5 0內所設置的軸襯5 2內而可上下動作地被 支承著的一對垂直的導桿5 3、5 3。 電子零件移載§?<置15疋以下述的方式作動。當伺服 馬達3 4作動，使其旋轉軸3 3朝向順時鐘方向旋轉預定角 度時’擺動臂35會以相同的預定角度擺動。藉由擺動臂 3 5的擺動’連結於此的固定軸3 9，會以旋轉軸3 3爲中心 以描繪者圓弧軌道的方式移動，伴隨著，軸座3 6、安裝 在噴嘴座40的吸附噴嘴28，也會以描繪著圓弧軌道的方 式，朝向旋轉台1 3的吸附夾頭1 2移動。藉由軸座3 6的 -9- 200535420 (7) 移動，插入了導桿5 3的軸襯座5 〇，會經由滑塊4 9而滑 動於導軌48上。導桿53是一邊與軸襯座50 —起移動一 邊於軸襯5 2中垂直地上下動作，藉此讓軸座5 〇、噴嘴座 4〇維持成水平的，換言之是讓吸附噴嘴28維持成垂直的 。當使吸附噴嘴2 8從旋轉台1 3的吸附夾頭1 2的位置回 復時，也可藉由伺服馬達3 4使擺動臂3 5朝向逆時鐘方向 以預定角度擺動。 接著參照第6圖及第7圖，針對將電子零件從零件排 列輸送裝置1 1父接到旋轉台1 3的吸附夾頭1 2的方式加 以說明。當止動裝置2 0的可動零件2 3位於上升位置時， 止動件2 5，會調整位置而與零件排列輸送裝置1 1的輸送 通路1 9排列，在輸送通路1 9中所輸送的最前面的電子零 件1 4，會碰到該止動件2 5而在這裡待機。當旋轉台1 3 間歇性地旋轉預定角度時，吸附夾頭1 2的其中一個會調 整位置而與零件排列輸送裝置1 1的輸送通路1 9排列。吸 附噴嘴2 8，會從旋轉台1 3的吸附夾頭1 2的位置，以描 繪著如先前所述的圓弧軌道的方式，朝向輸送通路1 9上 的電子零件1 4移動將其吸附。在期間，旋轉台1 3會旋轉 預定角度，讓下一個吸附夾頭1 2調整到與零件排列輸送 裝置1 1的輸送通路1 9排列的位置。接著，止動裝置2 0 的可動零件23會下降，使該止動件25退避到輸送通路 1 1更下方處。接著，吸附噴嘴2 8會以描繪著同樣的圓弧 軌道的方式，移動到旋轉台1 3的吸附夾頭1 2，進行吸引 動作將該電子零件1 4吸附到旋轉台]3的吸附夾頭1 2。 -10- 200535420 (8) 在吸附噴嘴2 8的朝向吸附夾頭1 2的移動過程中，由於止 動件2 5會退避到下方，所以吸附於吸附噴嘴2 8的電子零 件1 4不會被它所影響。以下反覆進行同樣的操作，藉由 旋轉台的吸附夾頭接著吸附電子零件。 藉由該技術，吸附噴嘴及吸附夾頭，具有經由管路連 接到負壓源的負壓通路，包含有用來吸附電子零件或將其 放開的控制裝置（沒有圖示）。 如上述’藉由本發明，藉由涵蓋預定角度的擺動臂的 往復旋轉’使吸附噴嘴以描繪圓弧軌道的方式往復移動， 所以可以更縮短吸附噴嘴的往復動作所需要的時間。 【圖式簡單說明】 第1圖是本發明的電子零件檢查裝置的全體的側面圖 〇 第2圖是本發明的電子零件檢查裝置的部份俯視圖， 是以局部剖面來顯示零件移載裝置的顯示圖。 第3圖是以局部剖面來顯示第2圖的零件移載裝置的 正面圖。 第4圖是零件排列輸送裝置的止動裝置的立體圖。 第5圖是第4圖所顯示的止動裝置的側面圖。 第6圖是顯示，止動裝置位於上升位置，吸附噴嘴吸 附零件排列輸送裝置的輸送通路內的電子零件的情況的剖 面圖。 第7圖是顯不，止動裝置位於下降位置，吸附噴嘴吸 -11 - 200535420 Ο) 附著電子零件，從零件排列輸送裝置的輸送通路交接到旋 轉台的吸附夾頭動作的與第6圖同樣的圖。 第8圖是以剖面來顯示吸附噴嘴的安裝構造的顯示圖 【主要元件符號說明】200535420 (1) 发明. Description of the invention [Technical field to which the invention belongs] The present invention relates to an inspection device for inspecting electronic components such as minute light-emitting diodes, and more particularly, to hand over electronic components from an arrangement and conveying device for inspection. Electronic parts transfer device of the device. [Prior art] Electronic parts, that is, light-emitting diodes, are subject to measurements such as brightness, hue, and electrical characteristics. The inspection of the electronic parts is performed by attaching the electronic parts to the suction chucks mounted on the circumference of the rotary table at equal intervals, and rotating the rotary table intermittently at a predetermined angle. Electronic parts are sequentially located at various inspection stations. An adsorption nozzle that reciprocates up and down and left and right between the part alignment conveying device and the adsorption chuck of the rotary table is provided. The adsorption nozzle sucks the electronic parts from the part alignment conveying device one by one and faces the rotating table. The suction chuck is transported and then transferred to the suction chuck. The reciprocating movement of the suction nozzle in the up-down and left-right directions is performed by a cam mechanism which is rotated by a motor. [Summary of the Invention] [Problems to be Solved by the Invention] In the demand for higher-speed inspection of electronic parts, the main problem is how to quickly perform the reciprocating motion of the suction nozzle. In the cam mechanism, the rotation of the cam mechanism varies, so the high-speed drive of the cam mechanism has its limit of -4- 200535420 (2). Therefore, one cycle operation of the suction nozzle is also a reciprocating operation, which is now limited to 0. 5 seconds. An object of the present invention is to provide an electronic component transfer device 'which can perform a higher-speed reciprocating operation of a suction nozzle (one cycle operation (one repetition operation) 0.2 seconds). Another object of the present invention is to provide an electronic component transfer device, in which the suction nozzle maintains its vertical posture while drawing a circular arc track between the component arrangement conveying device and the suction chuck of the rotary table. Move back and forth. Another object of the present invention is to provide an electronic component transfer device, before the adsorption nozzle is moved from the component arrangement conveying device to the adsorption chuck of the rotary table, the stopper of the component arrangement conveying device is lowered to prevent adsorption on the adsorption The electronic parts of the nozzle interfere with the stop. [Means for Solving the Problems] According to the present invention, there is provided an electronic component inspection device including: an electronic component alignment and conveying device; a suction chuck that is mounted on the circumference at equal intervals; and between adjacent suction chucks. The rotary table that rotates intermittently at an angle, and an electronic component transfer device including an adsorption nozzle for transferring electronic components from the electronic component array conveying device to the rotary chuck, and the electronic component array conveying device include: The conveying path formed by the straight groove of the guide rail and the cover, and the stopper for stopping the foremost part of the electronic part conveyed in the conveying path, and the electronic component transfer device include a suction nozzle, Between the front end of the conveying path of the electronic parts array conveying device-5-200535420 (3) and the suction chuck adjacent to the rotary table, an actuating mechanism that reciprocates in a circular arc orbit and a suction nozzle A posture holding device for maintaining the suction nozzle in a vertical state during reciprocating motion. In a preferred embodiment of the present invention, the stopper device includes: a movable part which is moved up and down along a vertical guide rail by a sliding member; a stopper mounted on the top thereof by a small screw; The electromagnetic coil that descends with the movable part. In the normal state, the movable part is urged upward by a spring to occupy the ascending position. The stopper is located when the movable part is in the ascending position. The front end of the passageway stops the foremost part of the electronic parts conveyed in the passageway at a predetermined position, and when the movable part is located at the lowered position, it retracts to a lower position of the passageway. The operating mechanism of the electronic component transfer device includes a support from the side of the electronic component arrangement and conveying device, a rear surface of a vertical support bracket having a horizontal base plate, and a rotation extending through the support bracket. A servo motor that rotates its shaft with a reciprocating rotation at a predetermined angle, and a swing arm that is fixedly mounted on the rotation shaft and swings at a predetermined angle by reciprocating rotation of the rotation shaft; the operating mechanism further includes: A shaft seat and a bearing fixed to the shaft seat are inserted into a circular opening of a swing arm, and a fixed shaft supported by the bearing is fixed to the shaft seat by a small screw, and has a An arm portion extending at a right angle toward the front end of the electronic component conveying path is provided at the front end of the arm nozzle. The posture holding device includes a level fixed to a support bracket-6-200535420 (4) The upper surface of the base plate is slidably mounted in parallel with the part conveying path of the electronic parts alignment conveying device. The slider of the linear guide, the bushing seat fixedly mounted on the slider, is fixed to the bushing together with the nozzle seat by a small screw, and is inserted into the bushing provided in the bushing seat to move up and down. A pair of supported vertical guides. [Embodiment] Referring to FIG. 1 and FIG. 2, the electronic component inspection device 1 ′ ′ generally includes: an electronic component array conveying device 1 1. It is provided with suction chucks 1 mounted on the circumference at equal intervals. 2 rotary table 1 3, and electronic component transfer device for transferring electronic parts 14 (refer to FIGS. 6 and 7) from the electronic component arrangement conveying device 11 to the rotary chuck 1 3 1 5. The electronic component arrangement conveying device 11 includes a conveying path 19 formed by a linear groove 17 of a guide rail 16 and a cover 18, and a stopper 20. The electronic component arrangement and conveying device 11 has a conventional structure in this technical field, so the above description is not necessarily required. As shown in FIG. 4 to FIG. 7, the stopper device 20 includes: a movable part 23 that moves up and down along a vertical guide rail 22 by a sliding member 21 and a small screw 24 that is mounted on the movable part 23. Top stopper 2 5. In the normal state, the movable part 2 3 occupies the raised position by urging the sliding member 2 1 upward with the coil spring 26. An electromagnetic coil 2 7 ′ that moves and slides the sliding member 2 1 and the movable part 2 3 together is provided. With the operation of the electromagnetic coil 2 7, the sliding member 2 1 and the movable part 2 3 compress the spring 2 6 and one side. When it is lowered and the solenoid coil 27 is deactivated, the sliding member 2 1 -7- 200535420 (5) and the movable member 23 are raised by the rebound action of the compressed spring 26. The stopper 25 is located at the leading end of the conveying path 19 when the movable part 23 is in the rising position, and stops the foremost part of the electronic part 14 conveyed in the path at a predetermined position (see (Figure 6), when the movable parts 23 are in the lowered position, they retreat to the conveying path! 9 Further down. The rotary table 1 3 is intermittently rotated at an angle between the adjacent suction chucks 1 2 and 12, so that the electronic components 14 absorbed by the suction chuck 12 are transported to a plurality of sets provided in relation to the rotary table 1 3. Checkpoint (not shown). Each time the rotary table 13 rotates intermittently, one of the suction chucks 12 is aligned with the conveying path 19 of the conveying device. The electronic component transfer device 15 of the present invention, as shown in FIGS. 2, 3, 6, and 7, includes a suction path 2 8 and a conveying path in which the electronic component is arranged in the conveying device 11. Between the front end of the 19 and the suction chuck 2 adjacent to the rotary table 13, the actuator mechanism 29, which reciprocates in a circular arc orbit, and is used in the reciprocating motion of the suction nozzle 28. The posture holding device 30 that maintains the suction nozzle 28 in a vertical state. This actuating mechanism 29 includes being supported from the side of the electronic component arrangement and conveying device, mounted on the back surface of the vertical support bracket 32 having a horizontal base plate 31, and extending through the support bracket 32. The servo motor 3 4 of the rotating shaft 3 3 and the swing arm 3 5 fixedly mounted on the rotating shaft 3 3. The servo motor 34 is operated so that its rotation shaft 33 is reciprocated at a predetermined angle, and the reciprocating rotation of the rotation shaft causes the swing arm 35 to swing at a predetermined angle. The actuating mechanism 29 further includes: a shaft seat 3 6, and a bearing 3 8 fixedly inserted into the circular seat of the swing arm 35 in the shaft seat 8-200535420 (6) 3 7, A fixed shaft 39 is supported by a bearing 38. The nozzle holder 40 is fixed to the shaft holder 36 by a small screw 41, and has an arm portion 42 extending at a right angle toward the front end of the electronic component conveying path 19, and the suction nozzle 28 is provided on the arm portion 42 front end. As shown in FIG. 8, the suction nozzle 28 is vertically arranged in an opening 43 provided at the front end of the arm portion 42. The suction nozzle 28 is fixed to the spring seat 44 of the arm portion 42 and the shoulder portion 45 of the suction nozzle 28. The coil spring 46 provided therebetween is urged to a predetermined position, and when it encounters any obstacle, it will retreat to the top via the coil spring 46. The predetermined position of the suction nozzle 28 is determined by abutting the stopper 47 provided on the upper end thereof against the spring seat 44. The posture holding device 30 includes an upper surface portion of a horizontal base plate 31 fixed to a support bracket 32, and is slidably mounted on a part conveying path 19 parallel to the electronic part alignment conveying device 11 The slider 4 9 of the linear guide 4 8 is fixed to the bushing seat 50 of the slider 4 9 and is fixed to the bushing 36 together with the nozzle seat 40 by a small screw 41 and inserted into the bushing A pair of vertical guide rods 5 3, 5 3 which are supported in a bushing 5 2 provided in the seat 50 to be movable up and down. Electronic component transfer §? ≪ Set 15 疋 operates in the following manner. When the servo motor 34 is actuated to rotate its rotation shaft 33 in a clockwise direction by a predetermined angle, the swing arm 35 will swing at the same predetermined angle. The fixed shaft 3 9 connected thereto by the swing of the swing arm 3 5 moves around the rotating shaft 3 3 in a manner of an arc orbit of the tracer. At the same time, the shaft seat 3 6 and the nozzle seat 40 are mounted. The suction nozzle 28 also moves toward the suction chuck 12 of the rotary table 13 in a manner of drawing an arc orbit. By moving -9-200535420 (7) of the shaft seat 36, the bushing seat 50 with the guide rod 53 inserted is slid on the guide rail 48 via the slider 49. The guide rod 53 moves vertically up and down in the bushing 52 while moving with the bushing seat 50, thereby maintaining the shaft seat 50 and the nozzle seat 40 horizontally, in other words, the suction nozzle 28 is maintained as vertical. When the suction nozzle 28 is returned from the position of the suction chuck 12 of the rotary table 13, the swing arm 35 can also be swung at a predetermined angle in the counterclockwise direction by the servo motor 34. Next, referring to Fig. 6 and Fig. 7, a description will be given of a manner in which electronic components are connected from the component row conveying device 11 to the suction chuck 12 of the rotary table 13. When the movable part 2 3 of the stopper device 20 is located at the ascending position, the stopper 25 is adjusted to be aligned with the conveying path 19 of the parts arrangement conveying device 11 and the most conveyed in the conveying path 19 The front electronic parts 1 4 will meet the stopper 25 and stand by here. When the rotary table 1 3 is intermittently rotated by a predetermined angle, one of the suction chucks 12 is adjusted in position to be aligned with the conveying path 19 of the part alignment conveying device 11. The suction nozzle 28 is moved from the position of the suction chuck 12 of the rotary table 13 to the circular arc orbit as described above, and is moved toward the electronic parts 14 on the transport path 19 to suck it. During this period, the rotary table 13 is rotated by a predetermined angle, so that the next suction chuck 12 is adjusted to the position aligned with the conveying path 19 of the part alignment conveying device 11. Next, the movable part 23 of the stopper device 20 is lowered, and the stopper 25 is retracted to a position further below the conveyance path 11. Next, the suction nozzle 28 moves to the suction chuck 12 of the rotary table 1 3 so as to draw the same circular orbit, and performs a suction operation to suction the electronic component 14 to the rotary chuck] 3 1 2. -10- 200535420 (8) During the movement of the suction nozzle 2 8 toward the suction chuck 12, since the stopper 25 will retract to the lower side, the electronic parts 14 attracted to the suction nozzle 2 8 will not be caught. It affects. The same operation is repeated the following, and the electronic parts are suctioned by the suction chuck of the rotary table. With this technology, the suction nozzle and the suction chuck have a negative pressure path connected to a negative pressure source through a pipeline, and include a control device (not shown) for sucking or releasing electronic parts. As described above, by the present invention, the suction nozzle is reciprocated in a manner of drawing a circular arc track by reciprocating rotation of a swing arm covering a predetermined angle, so that the time required for the reciprocating action of the suction nozzle can be further shortened. [Brief description of the drawings] Fig. 1 is a side view of the entire electronic component inspection device of the present invention. Fig. 2 is a partial plan view of the electronic component inspection device of the present invention, and shows a part transfer device in a partial cross section. Show graph. Fig. 3 is a front view showing the part transfer device of Fig. 2 in a partial cross section. Fig. 4 is a perspective view of a stopper of the parts arrangement conveying device. Fig. 5 is a side view of the stopper shown in Fig. 4. Fig. 6 is a cross-sectional view showing a state in which the stopper is located at the rising position, and the suction nozzle sucks the electronic components in the conveying path of the component arrangement conveying device. Figure 7 shows the stop device in the lowered position, and the suction nozzle sucks -11-200535420 〇) The attachment of electronic parts from the conveying path of the parts arrangement conveying device to the turntable's suction chuck is the same as in Figure 6. Illustration. Fig. 8 is a sectional view showing a mounting structure of an adsorption nozzle [Description of main component symbols]
1 〇 :電子零件檢查裝置 1 1 :零件排列輸送裝置 1 2 :吸附夾頭 1 3 ·旋轉台 1 4 :電子零件 1 5 :零件移載裝置 1 6 :導軌 1 7 :直線溝槽 18 :蓋子1 〇: Electronic parts inspection device 1 1: Parts arrangement conveying device 1 2: Suction chuck 1 3 · Rotary table 1 4: Electronic parts 1 5: Parts transfer device 1 6: Guide rail 1 7: Linear groove 18: Cover
1 9 :輸送通路 20 :止動裝置 2 1 :滑動構件 22 :導軌 2 3 :可動零件 2 5 :止動件 26 :線圈彈簧 2 7 :電磁線圈 2 8 :吸附噴嘴 -12- 200535420 (10) 2 9 :作動機構 3 0 :姿勢維持裝置 3 1 :水平基座板1 9: Transport path 20: Stopper 2 1: Sliding member 22: Guide rail 2 3: Movable part 2 5: Stopper 26: Coil spring 2 7: Solenoid coil 2 8: Suction nozzle-12- 200535420 (10) 2 9: Actuating mechanism 3 0: Posture maintaining device 3 1: Horizontal base plate
3 2 :垂直支承托架 3 3 :旋轉軸 3 4 :伺服馬達 3 5 :擺動臂 3 6 :軸座 3 7 :圓形開口 3 8 :軸承 3 9 :固定軸 4 〇 :噴嘴座 42 :臂部 4 8 :直線導軌 4 9 :滑塊3 2: Vertical support bracket 3 3: Rotating shaft 3 4: Servo motor 3 5: Swing arm 3 6: Shaft holder 3 7: Round opening 3 8: Bearing 3 9: Fixed shaft 4 〇: Nozzle holder 42: Arm Part 4 8: Linear guide 4 9: Slider
5 0 :軸襯座 5 2 :軸襯 53 :導桿 -13-5 0: Bushing seat 5 2: Bushing 53: Guide bar -13-