JP2005305443A - Deaerator and deaeration method - Google Patents

Deaerator and deaeration method Download PDF

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JP2005305443A
JP2005305443A JP2005211931A JP2005211931A JP2005305443A JP 2005305443 A JP2005305443 A JP 2005305443A JP 2005211931 A JP2005211931 A JP 2005211931A JP 2005211931 A JP2005211931 A JP 2005211931A JP 2005305443 A JP2005305443 A JP 2005305443A
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deaeration
liquid
deaerator
parallel
vacuum chamber
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JP4105716B2 (en
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Hajime Otani
肇 大谷
Toshihiko Ariyoshi
俊彦 有吉
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Nitto Denko Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a deaerator capable of flexibly responding to various amounts of treatment liquid, kinds of the treatment liquid, properties of the treatment liquid and a feed method of the treatment liquid by one deaerator. <P>SOLUTION: In the deaerator, three or more deaeration elements provided with a joint member having couplings connected to both ends and comprising one or two or more gas permeable tubes are arranged in one vacuum chamber. The deaerator is made to a deaerator characterized in that the deaeration element having three or more single liquid inlets of the deaeration elements and the deaeration element having liquid inlets connected in parallel are provided and the deaeration element having a single liquid outlet and the deaeration element having the liquid outlets connected in parallel are also provided. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

この発明は脱気装置及び脱気方法に係り、その目的は、1台の脱気装置で、様々な処理液量、処理液の種類、処理液の性状、処理液の供給方法に柔軟に対応可能な脱気装置及び脱気方法を提供することにある。   The present invention relates to a deaeration device and a deaeration method, and its purpose is to flexibly cope with various processing liquid amounts, types of processing liquids, properties of processing liquids, and processing liquid supply methods with a single deaeration device. It is an object of the present invention to provide a possible degassing apparatus and degassing method.

一般的に、熱交換器における熱交換エレメントや溶液中の溶存ガスの除去等に使用される脱気装置は、フッ素樹脂製の接合部材とフッ素樹脂製チューブを接合せしめた脱気エレメントをプラスチック製や金属製、或いは、ガラス製の真空チャンバー内に固定治具を用いて一体化することにより製造される。
このような脱気装置の例としては、例えば、図3に示すものが存在する。
この脱気装置の構成は、フッ素樹脂製の気体透過性チューブからなる脱気エレメント(A)を接合部材(B)により真空チャンバー(C)内部に接続固定してなるものであり、脱気処理される液は継ぎ手(D)を介して脱気装置に接続されたフッ素樹脂製チューブから供給される。
このような脱気装置の運転方法としては、吸引口(E)に接続された真空ポンプ等の減圧装置により真空チャンバー(C)内を減圧した状態で、フッ素樹脂製チューブ内に処理液を加圧送液する方法が一般的である。
Generally, a degassing device used to remove a heat exchange element in a heat exchanger or a dissolved gas in a solution is a plastic degassing element in which a fluororesin joining member and a fluororesin tube are joined. It is manufactured by integrating them in a vacuum chamber made of metal, metal, or glass using a fixing jig.
As an example of such a deaeration device, for example, the one shown in FIG. 3 exists.
This deaeration device is constructed by connecting and fixing a deaeration element (A) made of a gas-permeable tube made of a fluororesin inside a vacuum chamber (C) by a joining member (B). The liquid to be supplied is supplied from a fluororesin tube connected to a deaeration device through a joint (D).
As a method of operating such a deaeration device, the processing liquid is added to the fluororesin tube while the vacuum chamber (C) is decompressed by a decompression device such as a vacuum pump connected to the suction port (E). A method of pumping liquid is common.

しかしながら、上記したような脱気装置では、処理液の供給量が多い場合には脱気効率を良くするために複数の脱気装置を並列或いは直列に接続しなければならなかった。
一方、処理液の供給量が多い場合でも高い脱気効率を得ることができる脱気装置として、図4に示すような複数の嵌合部を有する接合部材(B)を真空チャンバー(C)に固定し、複数の脱気エレメント(A)を各嵌合部にそれぞれ取り付けた脱気装置も使用されている。
この脱気装置によれば、1台の装置で多量の処理液を効率良く脱気処理することができるものの、以下に述べるような課題が存在していた。
However, in the degassing apparatus as described above, when the supply amount of the processing liquid is large, a plurality of degassing apparatuses must be connected in parallel or in series in order to improve the degassing efficiency.
On the other hand, as a deaeration device capable of obtaining high deaeration efficiency even when the amount of treatment liquid supplied is large, a joining member (B) having a plurality of fitting portions as shown in FIG. 4 is provided in the vacuum chamber (C). A deaeration device in which a plurality of deaeration elements (A) are fixed and attached to the respective fitting portions is also used.
According to this degassing apparatus, although a large amount of processing liquid can be efficiently degassed with one apparatus, there are problems as described below.

先ず、一度に一種類の液体しか脱気処理することができないため、液の性状(例えば、粘度、密度、水系と溶剤系の別)が異なる2種類以上の液体を同時に脱気処理しようとした場合には、結局2台以上の脱気装置を接続して使用しなければならなかった。
また、高粘度の液体を脱気処理する場合には、チューブ径を太くしたり、チューブ長さを短くしたり、チューブ本数を増やしたりする必要があるが、これらの変更を柔軟且つ容易に行うことができなかった。
First, since only one type of liquid can be degassed at a time, an attempt was made to simultaneously degas two or more types of liquids having different liquid properties (for example, viscosity, density, aqueous type and solvent type). In some cases, it was necessary to connect and use two or more deaerators.
In addition, when degassing high viscosity liquids, it is necessary to increase the tube diameter, shorten the tube length, or increase the number of tubes, but these changes can be made flexibly and easily. I couldn't.

本発明の解決課題は、1台の脱気装置で、様々な処理液量に対応することが可能で、複数種類の処理液を同時に脱気処理することができ、しかも処理液の性状の違いに柔軟に対応可能で、さらには処理液の様々な供給方法、取り出し方法に適応することができる汎用性に優れた脱気装置及び脱気方法を提供することにある。   The problem to be solved by the present invention is that it is possible to deal with various amounts of processing liquid with a single deaeration device, and it is possible to simultaneously deaerate a plurality of types of processing liquids, and the difference in properties of the processing liquids. It is another object of the present invention to provide a versatile degassing apparatus and degassing method that can adapt to various supply methods and extraction methods of processing liquid.

請求項1に係る発明は、1つの真空チャンバー内に、両端部に継手が接続された接合部材が設けられてなる1本又は2本以上の気体透過性チューブからなる脱気エレメントが3つ以上配設された脱気装置であって、3つ以上の脱気エレメントの液入口が単独のものと並列に接続されているものが設けられ、液出口も同様に単独のものと並列に接続されているものが設けられてなることを特徴とする脱気装置に関する。
請求項2に係る発明は、単独の液入口と並列に接続された液入口に供給する処理液が異なった種類のものであることを特徴とする請求項1記載の脱気装置に関する。
According to the first aspect of the present invention, there are three or more deaeration elements composed of one or two or more gas permeable tubes in which a joining member having joints connected to both ends is provided in one vacuum chamber. There are provided deaeration devices in which the liquid inlets of three or more deaeration elements are connected in parallel with a single one, and the liquid outlets are also connected in parallel with a single one. It is related with the deaeration apparatus characterized by being provided.
The invention according to claim 2 relates to the deaeration device according to claim 1, wherein the processing liquid supplied to the liquid inlet connected in parallel with the single liquid inlet is of a different type.

請求項3に係る発明は、請求項1記載の脱気装置を使用し、単独の液入口と並列に接続された液入口とで異なった種類の処理液を供給して脱気処理を行うことを特徴とする脱気方法に関する。   The invention according to claim 3 uses the deaeration device according to claim 1 to perform a deaeration process by supplying different types of processing liquids between a single liquid inlet and a liquid inlet connected in parallel. It is related with the deaeration method characterized by this.

本発明によれば、1台の脱気装置で、様々な処理液量に対応することが可能で、且つ、複数種類の処理液を同時に脱気処理することができ、しかも処理液の性状の違いに柔軟に対応可能で、さらには処理液の様々な供給方法、取り出し方法に適応することができるという優れた効果を奏する。   According to the present invention, it is possible to deal with various amounts of processing liquid with a single degassing apparatus, and it is possible to simultaneously degas a plurality of types of processing liquids, and the properties of the processing liquids It is possible to flexibly cope with the difference, and further, it has an excellent effect that it can be applied to various supply methods and extraction methods of the processing liquid.

以下、本発明に係る脱気装置及び脱気方法の実施形態について、図面を参照しつつ説明する。
図1は本発明に係る脱気装置の基本構成を説明するための参考例を示す断面図である。
図1に示した参考例の脱気装置(1)は、1つの真空チャンバー(2)と該真空チャンバー(2)内に配設される2つ以上の脱気エレメント(3)から構成される。
本発明に係る脱気装置(1)においては、真空チャンバー(2)の材質は特に限定されるものではなく、金属、プラスチック、ガラス等、適宜任意の素材を用いることができるが、耐久性や耐薬品性の点から、金属材料を用いる場合はステンレス鋼を、プラスチック材料を用いる場合はポリテトラフルオロエチレン(PTFE)やテトラフルオロエチレン−パーフルオロアルキルビニルエーテル共重合体(PFA)等のフッ素樹脂、ポリプロピレン樹脂(PP)、ポリエチレン樹脂(PE)等を用いることが好ましい。
また真空チャンバー(2)の形状及び大きさについても、真空ポンプ等の減圧手段と接続可能な吸引口(21)と脱気エレメント(3)に処理液を通過させるための入液口及び出液口を有し且つ所要数の脱気エレメント(3)をその内部に収めることが可能な大きさであれば特に限定されない。
Hereinafter, embodiments of a deaeration device and a deaeration method according to the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view showing a reference example for explaining a basic configuration of a deaeration device according to the present invention.
The degassing device (1) of the reference example shown in FIG. 1 is composed of one vacuum chamber (2) and two or more degassing elements (3) disposed in the vacuum chamber (2). .
In the degassing apparatus (1) according to the present invention, the material of the vacuum chamber (2) is not particularly limited, and any material such as metal, plastic, glass, etc. can be used as appropriate. From the viewpoint of chemical resistance, when using a metal material, stainless steel is used. When using a plastic material, a fluororesin such as polytetrafluoroethylene (PTFE) or tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), It is preferable to use polypropylene resin (PP), polyethylene resin (PE), or the like.
In addition, the shape and size of the vacuum chamber (2) also includes a suction port (21) that can be connected to a decompression means such as a vacuum pump and a liquid inlet and a liquid outlet for allowing the processing liquid to pass through the deaeration element (3). There is no particular limitation as long as it has a mouth and can accommodate a required number of deaeration elements (3).

脱気エレメント(3)は、1本の気体透過性チューブ又は2本以上の気体透過性チューブが端部において熱融着性を有するフッ素樹脂粉末を介して融着により接合一体化されてなる気体透過性チューブ束からなる。
気体透過性チューブの材質の具体例としては、ポリテトラフルオロエチレン(PTFE)、テトラフルオロエチレン−パ−フルオロアルキルビニルエーテル共重合体(PFA)、テトラフルオロエチレン−ヘキサフルオロプロピレン共重合体(FEP)、エチレン−テトラフルオロエチレン共重合体(ETFE)、ポリクロロトリフルオロエチレン(PCTFE)等が例示できるが、これらに限定されるものではない。
また、熱融着性を有するフッ素樹脂粉末についても特に限定されるものではないが、具体的には、テトラフルオロエチレン−ヘキサフルオロプロピレン共重合体(FEP)、ポリテトラフルオロエチレン(PTFE)、テトラフルオロエチレン−パーフルオロアルキルビニルエーテル共重合体(PFA)、エチレン−テトラフルオロエチレン共重合体(ETFE)等の粉末を好適な例として例示することができる。
The deaeration element (3) is a gas in which one gas-permeable tube or two or more gas-permeable tubes are joined and integrated by fusion through a fluororesin powder having heat-fusibility at the end. It consists of a permeable tube bundle.
Specific examples of the material of the gas permeable tube include polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), Examples thereof include, but are not limited to, ethylene-tetrafluoroethylene copolymer (ETFE) and polychlorotrifluoroethylene (PCTFE).
Further, the fluororesin powder having heat-fusibility is not particularly limited. Specifically, tetrafluoroethylene-hexafluoropropylene copolymer (FEP), polytetrafluoroethylene (PTFE), tetra Preferable examples include powders such as fluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA) and ethylene-tetrafluoroethylene copolymer (ETFE).

脱気エレメント(3)は、接合部材(5)を介して真空チャンバー(2)内に固定される。脱気エレメント(3)と接合部材(5)は、脱気エレメント(3)両端部の接合片(10)をフェルール等の嵌合片(6)を介して嵌合部(51)に嵌合し、袋ナット(7)を雄ねじ部(52)に螺合させることにより接続固定され、また接合部材(5)と真空チャンバー(2)はナット(8)を雄ねじ部(55)に螺合させて鍔部(53)とナット(8)で真空チャンバー(2)の上壁をOリングを介して挟み込むことにより固定される。
脱気装置(1)内に処理液を送り込むためのチューブ(図示せず)接続用の継手(9)は接合部材(5)に螺着され、継手(9)と接合部材(5)の間には図示の如くOリングが介装される。このとき、接合部材(5)の膨らみを防止するために接合部材(5)の外周には筒状の膨らみ防止具(4)が嵌着される。
The deaeration element (3) is fixed in the vacuum chamber (2) via the joining member (5). The deaeration element (3) and the joining member (5) are fitted to the fitting part (51) via the fitting piece (6) such as a ferrule with the joining pieces (10) at both ends of the deaeration element (3). Then, the cap nut (7) is connected and fixed by screwing into the male screw portion (52), and the joining member (5) and the vacuum chamber (2) screw the nut (8) into the male screw portion (55). This is fixed by sandwiching the upper wall of the vacuum chamber (2) through the O-ring with the flange (53) and the nut (8).
A joint (9) for connecting a tube (not shown) for feeding the processing liquid into the deaerator (1) is screwed to the joining member (5), and between the joint (9) and the joining member (5). As shown in the figure, an O-ring is interposed. At this time, in order to prevent the joining member (5) from bulging, a tubular bulging prevention tool (4) is fitted to the outer periphery of the joining member (5).

なお、本発明に係る脱気装置においては、脱気エレメント(3)と接合部材(5)及び接合部材(5)と真空チャンバー(2)との接続固定方法は、図示例に何ら限定されるものではなく、接続部の気密性に優れ且つ真空チャンバー(2)内に脱気エレメント(3)を確実に固定することができれば、適宜任意の方法を採用することができる。   In the deaeration device according to the present invention, the degassing element (3) and the joining member (5) and the connection and fixing method between the joining member (5) and the vacuum chamber (2) are not limited to the illustrated examples. Any method can be appropriately employed as long as the connection portion is excellent in airtightness and the deaeration element (3) can be securely fixed in the vacuum chamber (2).

上記基本構成を有する脱気装置(1)の様々な使用方法の例を本発明の実施例を示す概略図として図2に示す。尚、図2においてU字状に示されているのが脱気エレメント(3)であり、四角形状に示されているのは真空チャンバー(2)である。また矢印(三角印)は処理液の流通方向を示す。
図2は、3つの脱気エレメントの液入口を単独のものと並列に接続されているものとし、液出口も同様に単独のものと並列に接続されているものとした場合であり、この場合処理量の多い液と、処理量の少ない別の種類の液を同時に且つ混合させることなく脱気処理することができる。
Examples of various methods of using the deaerator (1) having the above basic configuration are shown in FIG. 2 as a schematic diagram showing an embodiment of the present invention. In FIG. 2, the U-shape indicates the deaeration element (3), and the square shape indicates the vacuum chamber (2). An arrow (triangle mark) indicates the flow direction of the processing liquid.
FIG. 2 shows a case where the liquid inlets of the three deaeration elements are connected in parallel with a single element, and the liquid outlets are also connected in parallel with a single element. A degassing treatment can be performed without mixing a liquid with a large amount of treatment and another type of liquid with a small amount of treatment at the same time.

上記した如く、本発明に係る脱気装置によれば、1つの真空チャンバー内に2つ以上の脱気エレメントが配設されているため、各脱気エレメントの接続形態を変えることにより、1台の脱気装置で、様々な処理液量、処理液の種類、処理液の性状、処理液の供給方法に柔軟に対応可能となる。
尚、上記例においては、脱気エレメントの数を3つとした例を示したが、本発明においては脱気エレメントの数は限定されず3以上であればいくつであってもよい。また、脱気エレメント同士の接続方法についても何ら限定されず、配管用チューブやLタイプ、Tタイプ等の各種継手などを接続方法に応じて適宜使用すればよい。
As described above, according to the deaeration device according to the present invention, since two or more deaeration elements are arranged in one vacuum chamber, one unit can be obtained by changing the connection form of each deaeration element. This degassing apparatus can flexibly cope with various processing liquid amounts, types of processing liquids, properties of processing liquids, and processing liquid supply methods.
In the above example, the number of deaeration elements is three. However, in the present invention, the number of deaeration elements is not limited as long as it is three or more. Further, the connection method between the deaeration elements is not limited at all, and various types of joints such as a tube for piping, L type, and T type may be appropriately used according to the connection method.

以下、本発明に係る脱気装置及び脱気方法の実施例を示すことにより、本発明に係る脱気装置及び脱気方法の効果をより明確にする。尚、本発明はこの実施例により何ら限定されるものではない。
(実施例)
内径0.9mm、外径1.2mm、長さ3.5mのフッ素樹脂製気体透過性チューブを130本結束し、両端をPFA粉末を介して380℃で熱熔着して接合一体化したものを2つ製作し、それぞれを第1脱気エレメント、第2脱気エレメントとし、これらの脱気エレメントを真空チャンバーに取り付けて図1に示すような脱気装置を得た。
そして、図1の装置において、脱気エレメントの数を3つに増やして脱気装置を構成し以下aに示す方法で脱気装置に処理液(純水)を供給したところ、良好に脱気処理を行うことができた。
a.配管用チューブと継手Lタイプ及びTタイプを用いて脱気エレメントの入口側の2本を並列に接続し残りの1本を単独とし、出口側も同様に2本を並列に接続し残りの1本を単独として処理液を供給した。(図2の接続形態)
Hereinafter, the effect of the deaeration device and the deaeration method concerning the present invention is clarified more by showing the example of the deaeration device and the deaeration method concerning the present invention. In addition, this invention is not limited at all by this Example.
(Example)
Bundled 130 fluororesin gas permeable tubes with an inner diameter of 0.9 mm, outer diameter of 1.2 mm, and length of 3.5 m, and both ends were heat-bonded at 380 ° C. via PFA powder and joined together 2 were prepared, and each was used as a first deaeration element and a second deaeration element, and these deaeration elements were attached to a vacuum chamber to obtain a deaeration device as shown in FIG.
In the apparatus of FIG. 1, when the number of degassing elements is increased to three to form a degassing apparatus, and the treatment liquid (pure water) is supplied to the degassing apparatus by the method shown in a below, the degassing is excellent. The process could be done.
a. Two pipes on the inlet side of the deaeration element are connected in parallel using piping tubes and joints L type and T type, and the other one is connected alone, and the other two are connected in parallel on the outlet side as well. The treatment liquid was supplied as a book alone. (Connection form in FIG. 2)

1台の脱気装置で、様々な処理液量、処理液の種類、処理液の性状、処理液の供給方法に柔軟に対応可能な脱気装置及び脱気方法としての利用が可能である。   A single degassing device can be used as a degassing device and a degassing method that can flexibly cope with various processing liquid amounts, types of processing liquids, properties of the processing liquid, and processing liquid supply methods.

本発明に係る脱気装置に共通する基本構成を説明するための参考例を示す断面図である。It is sectional drawing which shows the reference example for demonstrating the basic composition common to the deaeration apparatus which concerns on this invention. 本発明に係る脱気装置の実施例を示す概略図である。It is the schematic which shows the Example of the deaeration apparatus which concerns on this invention. 従来の脱気装置の一実施例の断面図である。It is sectional drawing of one Example of the conventional deaeration apparatus. 従来の脱気装置の一実施例の断面図である。It is sectional drawing of one Example of the conventional deaeration apparatus.

符号の説明Explanation of symbols

1 脱気装置
2 真空チャンバー
3 脱気エレメント
5 接合部材
9 継手
DESCRIPTION OF SYMBOLS 1 Deaeration apparatus 2 Vacuum chamber 3 Deaeration element 5 Joining member 9 Joint

Claims (3)

1つの真空チャンバー内に、両端部に継手が接続された接合部材が設けられてなる1本又は2本以上の気体透過性チューブからなる脱気エレメントが3つ以上配設された脱気装置であって、3つ以上の脱気エレメントの液入口が単独のものと並列に接続されているものが設けられ、液出口も同様に単独のものと並列に接続されているものが設けられてなることを特徴とする脱気装置。   A deaeration device in which three or more deaeration elements made up of one or two or more gas permeable tubes are provided in one vacuum chamber, each of which is provided with a joining member having joints connected to both ends. The liquid inlets of three or more deaeration elements are provided in parallel with a single element, and the liquid outlets are similarly provided in parallel with a single element. A deaeration device characterized by that. 単独の液入口と並列に接続された液入口に供給する処理液が異なった種類のものであることを特徴とする請求項1記載の脱気装置。   The degassing apparatus according to claim 1, wherein the processing liquid supplied to the liquid inlet connected in parallel with the single liquid inlet is of a different type. 請求項1記載の脱気装置を使用し、単独の液入口と並列に接続された液入口とで異なった種類の処理液を供給して脱気処理を行うことを特徴とする脱気方法。

A deaeration method using the deaeration device according to claim 1 to perform a deaeration process by supplying different types of processing liquids at a single liquid inlet and a liquid inlet connected in parallel.

JP2005211931A 2005-07-21 2005-07-21 Deaeration device and deaeration method Expired - Lifetime JP4105716B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2021024527A1 (en) * 2019-08-05 2021-02-11

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6025514A (en) * 1983-07-21 1985-02-08 Eruma Kogaku Kk Degassing apparatus
JPH0428983A (en) * 1989-10-26 1992-01-31 Mitsubishi Electric Corp Evaporative cooler
JPH08332307A (en) * 1995-06-09 1996-12-17 Yunifuroozu:Kk Degassing apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6025514A (en) * 1983-07-21 1985-02-08 Eruma Kogaku Kk Degassing apparatus
JPH0428983A (en) * 1989-10-26 1992-01-31 Mitsubishi Electric Corp Evaporative cooler
JPH08332307A (en) * 1995-06-09 1996-12-17 Yunifuroozu:Kk Degassing apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2021024527A1 (en) * 2019-08-05 2021-02-11
WO2021024527A1 (en) * 2019-08-05 2021-02-11 株式会社日立ハイテク Deaerator and electrolyte measurement system
CN114127550A (en) * 2019-08-05 2022-03-01 株式会社日立高新技术 Degassing device and electrolyte measurement system
JP7209096B2 (en) 2019-08-05 2023-01-19 株式会社日立ハイテク Deaerator and electrolyte measurement system

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