JPH0957008A - Deaerator - Google Patents

Deaerator

Info

Publication number
JPH0957008A
JPH0957008A JP24666895A JP24666895A JPH0957008A JP H0957008 A JPH0957008 A JP H0957008A JP 24666895 A JP24666895 A JP 24666895A JP 24666895 A JP24666895 A JP 24666895A JP H0957008 A JPH0957008 A JP H0957008A
Authority
JP
Japan
Prior art keywords
vacuum chamber
fluororesin
gas permeable
joining member
degassing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24666895A
Other languages
Japanese (ja)
Other versions
JP3521367B2 (en
Inventor
Hajime Otani
肇 大谷
Kenzo Okada
健三 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP24666895A priority Critical patent/JP3521367B2/en
Publication of JPH0957008A publication Critical patent/JPH0957008A/en
Application granted granted Critical
Publication of JP3521367B2 publication Critical patent/JP3521367B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To prevent the elution of metal ions into a liquid to be treated and the formation of rust in a device in which a deaeration element is arranged in a vacuum chamber by fitting the ends of the deaeration element in the start ends of joining members made of fluororesin and projecting the terminations of the joining members to outside the vacuum chamber. SOLUTION: In a deaerator 1, joining members 6 are fitted over the ends 3a of a deaeration element 3, and the deaeration member 3 is arranged in a vacuum chamber 2, and the joining members 6 are fixed by using fixing members 7 with the terminations of the joining members 6 being projected to outside the vacuum chamber 2. The deaeration element 3 is a gas permeable tube bundle 5 made of fluororesin or a gas permeable tube bundle 5 which two or more gas permeable tubes made of fluororesin are tied into a bundle to form, and the joining members 6 made of fluororesin are fitted over the ends 3a of the deaeration elements 3. In this way, the deaerator 1 in which metal ions are not eluted during deaeration treatment.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は液体中の溶存ガス
を除去する脱気作業において、脱気処理中に金属イオン
を溶出させることのない脱気装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a degassing apparatus which does not elute metal ions during degassing in a degassing operation for removing dissolved gas in a liquid.

【0002】[0002]

【従来の技術】液体クロマトグラフィー等各種分析機器
において、高感度の検出器が創出されてくるに従って、
分析用試薬も高純度のものが要求されている。このよう
な高純度の薬品に空気などが溶解すると、変色や劣化、
或いは不純物の増加等が生じ、精度の高い分析結果が得
られないことがある。一般にこのような高純度の薬品は
純度を上げるために様々な工程を経て製造されるが、特
に金属イオンの混入を避ける必要がある薬品を製造する
工程では、耐熱性及び耐溶剤性等に優れたフッ素樹脂製
の装置を用いることにより金属イオン等の混入を防止し
ている。
2. Description of the Related Art With the creation of highly sensitive detectors in various analytical instruments such as liquid chromatography,
High-purity analytical reagents are also required. When air etc. dissolves in such high-purity chemicals, discoloration or deterioration,
Alternatively, an increase in impurities may occur, and a highly accurate analysis result may not be obtained. Generally, such high-purity chemicals are manufactured through various processes in order to increase the purity, but particularly in the process of manufacturing chemicals that need to avoid mixing metal ions, they have excellent heat resistance and solvent resistance. The use of a fluororesin device prevents metal ions from entering.

【0003】また液体中に溶解している空気等の溶存ガ
スを脱気する脱気方法としては、液体中のガスを選択的
に透過する分離膜を用いた脱気装置が使用されている。
このような脱気装置に使用される脱気エレメントとして
は、例えば図4に示すような長尺の合成樹脂製の気体透
過性チューブ(14)を多数本束ねてなる気体透過性チ
ューブ束(15)と、この気体透過性チューブ束(1
5)の端部に嵌合、接着された筒状のポリテトラフルオ
ロエチレン製の嵌合片(16)とから構成されるものが
例示できる。このような脱気エレメント(13)は、図
5に示すように真空ポンプ(25)と接続された真空チ
ャンバー(12)内部に配設される。この真空チャンバ
ー(12)内が減圧されているから、気体透過性チュー
ブ(14)の中に脱気すべき液体を通過させると、この
気体透過性チューブ(14)の壁から液体中の溶存ガス
が系内に脱気して除去される、という構造であり分析用
試薬の処理以外にも各種産業分野に利用されつつある。
As a degassing method for degassing a dissolved gas such as air dissolved in a liquid, a degassing device using a separation membrane which selectively permeates the gas in the liquid is used.
As a degassing element used in such a degassing device, for example, a gas permeable tube bundle (15) formed by bundling a plurality of long gas permeable tubes (14) made of synthetic resin as shown in FIG. ) And this gas permeable tube bundle (1
An example is a tubular polytetrafluoroethylene fitting piece (16) fitted and bonded to the end of 5). Such a degassing element (13) is arranged inside a vacuum chamber (12) connected to a vacuum pump (25) as shown in FIG. Since the inside of the vacuum chamber (12) is depressurized, when the liquid to be degassed is passed through the gas permeable tube (14), the dissolved gas in the liquid is removed from the wall of the gas permeable tube (14). Has a structure in which it is removed by degassing in the system, and is being used in various industrial fields other than the treatment of analytical reagents.

【0004】従来の脱気エレメント(13)を真空チャ
ンバー(12)内部へ取り付けるには、例えば図6及び
図7に示すように固定部材(17)を真空チャンバー
(12)の接続口(18)に取り付け、この固定部材
(17)に脱気エレメント(13)を取り付けていた。
この固定部材(17)は、外端部に送液パイプが接続さ
れるパイプコネクター部(20)が形成され且つ内端部
の内壁には脱気エレメント(13)の嵌合片(16)を
嵌着させる嵌着部(19)が成形されており、かつ略中
央部にフランジ部(21)及びナット(23)を螺合さ
せるためのネジ部(22)が形成されていた。この固定
部材(17)の嵌着部(19)に脱気エレメント(1
3)の嵌合片(16)を嵌入させ、これをナット(2
3)で固定して真空チャンバー(12)の内部に配置し
ていた。
In order to mount the conventional degassing element (13) inside the vacuum chamber (12), for example, as shown in FIGS. 6 and 7, a fixing member (17) is attached to the connection port (18) of the vacuum chamber (12). And the deaerating element (13) was attached to this fixing member (17).
The fixing member (17) has a pipe connector portion (20) to which a liquid sending pipe is connected at an outer end portion thereof, and a fitting piece (16) of a deaeration element (13) at an inner wall of the inner end portion. The fitting part (19) for fitting is formed, and the flange part (21) and the screw part (22) for screwing the nut (23) are formed in the substantially central part. The fitting member (19) of the fixing member (17) has a deaerating element (1).
3) Insert the fitting piece (16) into the nut (2
It was fixed in step 3) and placed inside the vacuum chamber (12).

【0005】[0005]

【発明が解決しようとする課題】ところが、前記の固定
部材(17)の材質として金属を用いた場合、処理液中
に金属イオンが溶出することが多々有り、純度の高い試
薬等の処理には適さないという課題が存在した。この問
題を解決するため、固定部材(17)をフッ素樹脂製と
することが考えられた。しかしこの試案方法によると、
金属イオンの溶出は防止できるものの、成形性が複雑に
なり、装置全体が高価になるという課題が存在する。こ
の発明の解決課題は、溶液中の溶存ガスを脱気する脱気
装置において、その処理液中に金属イオンを溶出させた
り錆を生じさせることがないとともに、構造が簡単な脱
気装置を提供することにある。
However, when a metal is used as the material of the fixing member (17), metal ions are often eluted in the treatment liquid, which is not suitable for treatment of high purity reagents and the like. There was a problem of not being suitable. In order to solve this problem, it was considered that the fixing member (17) was made of fluororesin. But according to this draft method,
Although the elution of metal ions can be prevented, there is a problem that the moldability becomes complicated and the entire apparatus becomes expensive. The problem to be solved by the present invention is to provide a deaerator having a simple structure, which does not elute metal ions or rust in the treatment liquid in a deaerator for deaerating dissolved gas in a solution. To do.

【0006】[0006]

【課題を解決するための手段】この発明は、1本のフッ
素樹脂製の気体透過性チューブまたは2本以上のフッ素
樹脂製の気体透過性チューブを束ねてなる脱気エレメン
トが、真空チャンバーの内部に配置された脱気装置にお
いて、前記脱気エレメントの端部はフッ素樹脂製の接合
部材の始端に嵌入され、該接合部材は前記真空チャンバ
ーに固定部材により接続固定され且つ接合部材の終端部
は前記真空チャンバーの外部に出ていることを特徴とす
る脱気装置、及び気体透過性チューブの両端部外面と接
合部材始端部の内面に熱融着性フッ素樹脂粉末が面状に
介在され、気体透過性チューブは両端部が揃えられて束
ねられ、その両面が接合部材の始端部に嵌入されるとと
もにこの気体透過性チューブの両端部と接合部材の始端
部は加熱加圧手段により接合一体化されてなることを特
徴とする請求項1記載の脱気装置である。
According to the present invention, a degassing element formed by bundling one fluororesin gas permeable tube or two or more fluororesin gas permeable tubes is provided inside a vacuum chamber. In the degassing device arranged in, the end of the degassing element is fitted into the starting end of the joining member made of fluororesin, the joining member is connected and fixed to the vacuum chamber by a fixing member, and the end portion of the joining member is A degassing device characterized in that it is exposed to the outside of the vacuum chamber, and a heat-fusible fluororesin powder is planarly interposed between the outer surfaces of both ends of the gas permeable tube and the inner surface of the joining member starting end, Both ends of the permeable tube are aligned and bundled, and both sides of the permeable tube are fitted into the starting ends of the joining members, and both ends of the gas permeable tube and the starting ends of the joining members are heated and pressurized by means of heating and pressing means. A deaeration apparatus according to claim 1, characterized by being a more integrally joined.

【0007】[0007]

【発明の実施の形態】以下この発明に係る脱気装置を、
図面に基づいて説明する。図1はこの発明に係る脱気装
置の一実施例を示す断面図であり、図2はこの発明に係
る脱気装置の一実施例における脱気エレメントと真空チ
ャンバーの接合部分を示す部分断面図であり、図3はこ
の発明で使用する脱気エレメントを接合部材に嵌入した
もの示す模式図である。図において、(1)は脱気装
置、(2)は脱気装置(1)の真空チャンバー、(3)
は脱気エレメントである。(4)は脱気エレメント
(3)に使用される気体透過性チューブ、(3a)はこ
の脱気エレメント(3)の端部、(5)は気体透過性チ
ューブ(4)が集まった気体透過性チューブ束、(6)
は気体透過性チューブ束(5)の端部に嵌合された接合
部材である。(7)は真空チャンバー(2)を脱気エレ
メント(3)に固定する固定部材、(8)は脱気エレメ
ント(3)の端部(3a)が貫通する接続口である。
(9)はフェルールであり、(10)はナットである。
(11)は真空チャンバー(2)を減圧するための吸引
口である。
BEST MODE FOR CARRYING OUT THE INVENTION The deaerator according to the present invention will be described below.
This will be described with reference to the drawings. 1 is a sectional view showing an embodiment of a degassing apparatus according to the present invention, and FIG. 2 is a partial sectional view showing a joint portion between a degassing element and a vacuum chamber in an embodiment of the degassing apparatus according to the present invention. FIG. 3 is a schematic view showing a deaerating element used in the present invention fitted in a joining member. In the figure, (1) is a deaerator, (2) is a vacuum chamber of the deaerator (1), (3)
Is a degassing element. (4) is a gas permeable tube used for the degassing element (3), (3a) is an end of this degassing element (3), (5) is gas permeation where the gas permeable tube (4) is gathered Sex tube bundle, (6)
Is a joining member fitted to the end of the gas permeable tube bundle (5). (7) is a fixing member for fixing the vacuum chamber (2) to the degassing element (3), and (8) is a connection port through which the end portion (3a) of the degassing element (3) penetrates.
(9) is a ferrule and (10) is a nut.
(11) is a suction port for depressurizing the vacuum chamber (2).

【0008】脱気装置(1)は脱気エレメント(3)の
端部(3a)に接合部材(6)を嵌合し、真空チャンバ
ー(2)の内部に脱気エレメント(3)を配置し、かつ
接合部材(6)の終端部が真空チャンバー(2)の外部
に出ている状態で該接合部材(6)を真空チャンバー
(2)に固定部材(7)を用いて固定することによって
形成される。この例において真空チャンバー(2)と固
定部材(7)は金属製である。脱気エレメント(3)の
端部(3a)は接合部材(6)とフッ素樹脂粉末を介し
て接合一体化されている。固定部材(7)は真空チャン
バー(2)の接続口(8)に溶接等により固定され、該
固定部材(7)には接続口(8)と連通する嵌入孔が形
成されているとともに外周面にネジ部が形成されてい
る。接合部材(6)は接続口(8)とこの接続口(8)
に連通する嵌入孔に挿入され、フェルール(9)等を介
してナット(10)により締め込まれて固定部材(7)
に固定されている。
The deaerator (1) has a joining member (6) fitted to the end (3a) of the deaerator (3), and the deaerator (3) is placed inside the vacuum chamber (2). And by fixing the joining member (6) to the vacuum chamber (2) using the fixing member (7) in a state where the end portion of the joining member (6) is exposed to the outside of the vacuum chamber (2). To be done. In this example, the vacuum chamber (2) and the fixing member (7) are made of metal. The end portion (3a) of the degassing element (3) is joined and integrated with the joining member (6) via a fluororesin powder. The fixing member (7) is fixed to the connection port (8) of the vacuum chamber (2) by welding or the like, and the fixing member (7) has an insertion hole communicating with the connection port (8) and an outer peripheral surface. The threaded portion is formed on. The joining member (6) has a connection port (8) and this connection port (8).
Is inserted into a fitting hole communicating with the fixing member (7) and is tightened by a nut (10) through a ferrule (9) or the like.
It is fixed to.

【0009】この発明で使用される脱気エレメント
(3)は、1本のフッ素樹脂製の気体透過性チューブ
(4)または2本以上のフッ素樹脂製の気体透過性チュ
ーブ(4)を束ねてなる気体透過性チューブ束(5)で
あり、この脱気エレメント(3)の端部(3a)にフッ
素樹脂製の接合部材(6)が嵌合されている。この発明
で使用する、気体透過性チューブ(4)及び接合部材
(6)の材質の具体例としては、ポリテトラフルオロエ
チレン(PTFE)、テトラフルオロエチレン−パ−フ
ルオロアルキルビニルエーテル共重合体(PFA)、テ
トラフルオロエチレン−ヘキサフルオロプロピレン共重
合体(FEP)、エチレン−テトラフルオロエチレン共
重合体(ETFE)、ポリクロロトリフルオロエチレン
(PCTFE)等が例示できるが、この発明においては
これらに限定されない。さらに、この発明においてフッ
素樹脂製気体透過性チューブ(4)の本数、長さは特に
限定されず、使用目的に応じて適宜選択することができ
る。接合部材(6)の、真空チャンバー(2)の外部に
出ている部分の長さは送液用のパイプに接続可能な長さ
があれば良く特に限定されない。接合部材(6)の、真
空チャンバー(2)の内部の長さは固定部材(7)の長
さ以上であれば良く特に限定されない。接合部材(6)
はその終端を真空チャンバー(2)の外に出して、真空
チャンバー(2)に固定される。この様にすると脱気工
程において処理液中に金属イオンが溶出せず、また錆が
発生することもなく、さらに固定部材(7)は処理液と
接触しないため金属製とすることが出来るので壊れにく
い。
The degassing element (3) used in the present invention is formed by bundling one fluororesin gas permeable tube (4) or two or more fluororesin gas permeable tubes (4). This is a gas permeable tube bundle (5), and a joining member (6) made of fluororesin is fitted to the end portion (3a) of the degassing element (3). Specific examples of the material of the gas permeable tube (4) and the joining member (6) used in the present invention include polytetrafluoroethylene (PTFE) and tetrafluoroethylene-perfluoroalkylvinylether copolymer (PFA). , Tetrafluoroethylene-hexafluoropropylene copolymer (FEP), ethylene-tetrafluoroethylene copolymer (ETFE), polychlorotrifluoroethylene (PCTFE) and the like can be exemplified, but the present invention is not limited thereto. Further, in the present invention, the number and length of the fluororesin gas permeable tube (4) are not particularly limited and can be appropriately selected according to the purpose of use. The length of the portion of the joining member (6) that is exposed to the outside of the vacuum chamber (2) is not particularly limited as long as it has a length that can be connected to a liquid delivery pipe. The length of the joining member (6) inside the vacuum chamber (2) is not particularly limited as long as it is equal to or longer than the length of the fixing member (7). Joining member (6)
Is brought out of the vacuum chamber (2) and fixed in the vacuum chamber (2). By doing so, metal ions do not elute in the treatment liquid in the degassing step, rust does not occur, and since the fixing member (7) does not come into contact with the treatment liquid, it can be made of metal and thus is broken. Hateful.

【0010】この発明においては気体透過性チューブ
(4)を束ねて気体透過性チューブ束(5)とする際、
その端部に熱融着性を有するフッ素樹脂粉末を介在させ
て融着させ接合一体化するのが好ましい。ここで熱融着
性を有するフッ素樹脂としては、FEP、PTFE、P
FA、ETFE等の粉末が好適に使用できるが、これら
に限定されない。前記気体透過性チューブ束(5)を一
体化する際、金属線、金属棒等の耐圧芯材を挿入した
り、あるいは端部に金型を外挿してもよい。気体透過性
チューブ(4)の変形が防止できる。また気体透過性チ
ューブ束(5)を接合部材(6)に挿入する際にも、気
体透過性チューブ束(5)の端部と接合部材(6)は熱
融着性を有するフッ素樹脂粉末を介在させて融着するこ
とより接合一体化されると好ましい。また気体透過性チ
ューブ(4)の本数にかかわらずフッ素樹脂粉末を介在
した融着により接合部材(6)と接合一体化されるのが
好ましい。このように熱融着性を有するフッ素樹脂粉末
を用いて融着することにより、固定部材(7)への挿入
が容易になるとともに、この挿入を気体透過性チューブ
(4)同士、または気体透過性チューブ束(5)と接合
部材(6)のズレを起こすことなく正確に行うことがで
きる。
In the present invention, when the gas permeable tubes (4) are bundled to form the gas permeable tube bundle (5),
It is preferable that the end portion is fused and bonded by interposing a fluororesin powder having a heat-fusible property. Here, as the fluororesin having heat fusion property, FEP, PTFE, P
Powders such as FA and ETFE can be preferably used, but not limited to these. When the gas permeable tube bundle (5) is integrated, a pressure resistant core material such as a metal wire or a metal rod may be inserted, or a mold may be externally attached to the end. The deformation of the gas permeable tube (4) can be prevented. Further, even when the gas permeable tube bundle (5) is inserted into the joining member (6), the end portion of the gas permeable tube bundle (5) and the joining member (6) are made of a fluororesin powder having heat fusion property. It is preferable that they are joined and integrated by interposing and fusing. Further, regardless of the number of the gas-permeable tubes (4), it is preferable that the gas-permeable tubes (4) are joined and integrated with the joining member (6) by fusion with fluororesin powder interposed. By fusion-bonding the fluororesin powder having heat-fusion property in this manner, the insertion into the fixing member (7) becomes easy, and the insertion is performed between the gas-permeable tubes (4) or between the gas-permeable tubes (4). It can be performed accurately without causing a deviation between the sex tube bundle (5) and the joining member (6).

【0011】真空チャンバー(2)の材質としては所定
の強度を有していれば特に限定されないが、具体的には
炭素鋼、ステンレス鋼、鋳鉄、銅、黄銅、アルミニウム
等の金属、ポリ塩化ビニル、ポリエチレン、アクリル等
の熱可塑性プラスチック、フェノール樹脂、メラミン樹
脂、エポキシ樹脂等の熱硬化性プラスチック等を挙げる
ことができる。また真空チャンバー(2)の形状及び大
きさも真空ポンプ等の減圧手段と接続可能な吸引口(1
1)と、固定部材(7)及び接合部材(6)の端部と気
密に接合可能な接続口(8)を有し且つ脱気エレメント
(3)をその内部に収めることが可能な大きさであれば
特に限定されない。
The material of the vacuum chamber (2) is not particularly limited as long as it has a predetermined strength, and specifically, metal such as carbon steel, stainless steel, cast iron, copper, brass and aluminum, polyvinyl chloride. , Thermoplastic resins such as polyethylene and acrylic, and thermosetting plastics such as phenol resin, melamine resin and epoxy resin. Further, the shape and size of the vacuum chamber (2) are such that the suction port (1
1) and a connecting port (8) capable of airtightly joining the ends of the fixing member (7) and the joining member (6) and having a size capable of accommodating the deaeration element (3) therein. It is not particularly limited as long as it is.

【0012】固定部材(7)の材質は所定の強度を有し
ていれば特に限定されないが、具体的には炭素鋼、ステ
ンレス鋼、鋳鉄、銅、黄銅、アルミニウム等の金属、ポ
リ塩化ビニル、ポリエチレン、アクリル等の熱可塑性プ
ラスチック、フェノール樹脂、メラミン樹脂、エポキシ
樹脂等の熱硬化性プラスチック等を挙げることができ
る。固定部材(7)の嵌入孔の形状は、この嵌入孔に接
合部材(6)を通して緊密に固定できる形状であればよ
く、かつ固定部材(7)の上端面は真空チャンバー
(2)の接続口(8)の下端面と気密に固定可能であれ
ば特に限定されない。なお固定部材(7)の嵌入孔に接
合部材(6)を嵌入して固定する方法としては、接着剤
を使用する方法、接合部材(6)に凸部を設けてこの凸
部を固定部材(7)の嵌入孔と係合させる方法、固定部
材(7)の外周にネジ部を設け接合部材(6)にフェル
ール(9)を嵌め込んでナット(10)により締め込む
方法が例示できるが、これらの方法には限定されない。
さらに固定部材(7)の上端面と真空チャンバー(2)
の接続口(8)の下端面の固定方法としては、接着剤を
使用する方法、溶接あるいは熱融着による方法が例示で
きるが、これらの方法には限定されない。
The material of the fixing member (7) is not particularly limited as long as it has a predetermined strength. Specifically, metal such as carbon steel, stainless steel, cast iron, copper, brass, aluminum, polyvinyl chloride, Examples thereof include thermoplastics such as polyethylene and acrylic, and thermosetting plastics such as phenol resin, melamine resin and epoxy resin. The shape of the fitting hole of the fixing member (7) may be any shape that allows the fitting member (6) to be tightly fixed in the fitting hole, and the upper end surface of the fixing member (7) has a connection port for the vacuum chamber (2). There is no particular limitation as long as it can be airtightly fixed to the lower end surface of (8). As a method of fitting and fixing the joining member (6) in the fitting hole of the fixing member (7), a method of using an adhesive, a convex portion is provided on the joining member (6), and the convex portion is fixed. A method of engaging with the fitting hole of 7), a method of providing a screw portion on the outer periphery of the fixing member (7), fitting the ferrule (9) into the joining member (6), and tightening with the nut (10) can be exemplified. It is not limited to these methods.
Furthermore, the upper end surface of the fixing member (7) and the vacuum chamber (2)
Examples of the method for fixing the lower end surface of the connection port (8) include a method using an adhesive and a method by welding or heat fusion, but are not limited to these methods.

【0013】[0013]

【実施例】以下にこの発明に係る脱気装置を具体的に説
明する。内径0.5mm、外径0.8mm、長さ28c
mのPTFE気体透過性チューブを150本結束して得
られた気体透過性チューブ束の両端部に金型を外挿する
と共に、各気体透過性チューブの端部外周面上にPFA
粉末を塗布して370℃で10分間加熱加圧し、気体透
過性チューブ相互を融着一体化することにより、断面円
形の気体透過性チューブ束を得た。この気体透過性チュ
ーブ束の端部に、熱収縮性を有する円筒状のフッ素樹脂
製の接合部材の内部にPFA粉末を塗布したものを嵌合
し、気体透過性チューブ束と接合部材を融着一体化して
有効長さ20cmの脱気エレメントを得た。この脱気エ
レメントの接合部材の一部を図1に示すように固定部材
を嵌入させて真空チャンバーの外部に出し、真空チャン
バーの内部に残る接合部材の一部をフェルールを介して
ナットで締め、脱気エレメントを固定して脱気装置とし
た。この脱気装置を使用して水を脱気処理したところ、
水は良好に脱気処理され且つ金属イオンの溶出はなかっ
た。
EXAMPLES The deaerator according to the present invention will be specifically described below. Inner diameter 0.5 mm, outer diameter 0.8 mm, length 28c
m of the PTFE gas permeable tubes of m are bundled, and a mold is externally attached to both ends of the gas permeable tube bundle, and PFA is provided on the outer peripheral surface of the end of each gas permeable tube.
The powder was applied, heated and pressed at 370 ° C. for 10 minutes, and the gas permeable tubes were fused and integrated with each other to obtain a gas permeable tube bundle having a circular cross section. At the end of this gas permeable tube bundle, a heat-shrinkable cylindrical joining member made of fluororesin and coated with PFA powder was fitted, and the gas permeable tube bundle and the joining member were fused. Integral to obtain a degassing element with an effective length of 20 cm. As shown in FIG. 1, a part of the joining member of the deaeration element is fitted into the fixing member to be taken out of the vacuum chamber, and a part of the joining member remaining inside the vacuum chamber is fastened with a nut through a ferrule. The degassing element was fixed to form a degassing device. When degassing water using this degasser,
The water was well degassed and there was no elution of metal ions.

【0014】[0014]

【発明の効果】この発明は、1本のフッ素樹脂製の気体
透過性チューブまたは2本以上のフッ素樹脂製の気体透
過性チューブを束ねてなる脱気エレメントが、真空チャ
ンバーの内部に配置された脱気装置において、前記脱気
エレメントの端部はフッ素樹脂製の接合部材の始端に嵌
入され、該接合部材は前記真空チャンバーに固定部材に
より接続固定され且つ接合部材の終端部は前記真空チャ
ンバーの外部に出ていることを特徴とする脱気装置、及
び気体透過性チューブの両端部外面と接合部材始端部の
内面に熱融着性フッ素樹脂粉末が面状に介在され、気体
透過性チューブは両端部が揃えられて束ねられ、その両
面が接合部材の始端部に嵌入されるとともにこの気体透
過性チューブの両端部と接合部材の始端部は加熱加圧手
段により接合一体化されてなることを特徴とする請求項
1記載の脱気装置であるから以下のような効果を奏す
る。請求項1記載の発明の効果は、フッ素樹脂製の接合
部材の終端部が真空チャンバーの外部に出ているので、
その脱気工程において処理液中に金属イオンが溶出せ
ず、また錆が発生することもないということである。ま
た、脱気エレメントの固定部材は脱気処理液に接触しな
いためフッ素樹脂製にする必要がないため壊れにくいと
いう効果を奏する。請求項2記載の発明の効果は、気体
透過性チューブと接合部材とを熱融着性フッ素樹脂粉末
により接合一体化しているので、固定部材に脱気エレメ
ントを挿入する作業が容易になり、しかもこれらの挿入
の際、気体透過性チューブと接合部材がズレを起こすこ
とがないということである。
According to the present invention, the degassing element formed by bundling one gas permeable tube made of fluororesin or two or more gas permeable tubes made of fluororesin is arranged inside the vacuum chamber. In the deaerator, the end of the deaerator is fitted into the starting end of a fluororesin joining member, the joining member is connected and fixed to the vacuum chamber by a fixing member, and the end of the joining member is connected to the vacuum chamber. The degassing device, which is characterized in that it is exposed to the outside, and the heat-fusible fluororesin powder is planarly interposed between the outer surfaces of both ends of the gas permeable tube and the inner surface of the joining member starting end, and the gas permeable tube is Both ends are aligned and bundled, and both surfaces are fitted into the starting end of the joining member, and both ends of this gas permeable tube and the starting end of the joining member are integrally joined by heating and pressing means. Since a deaeration apparatus according to claim 1, characterized in that is it provides the following effects. The effect of the invention according to claim 1 is that since the end portion of the joining member made of fluororesin is exposed to the outside of the vacuum chamber,
That is, in the degassing step, metal ions do not elute in the treatment liquid and rust does not occur. Further, since the fixing member of the degassing element does not come into contact with the degassing treatment liquid, it does not need to be made of fluororesin, so that it is difficult to break. The effect of the invention according to claim 2 is that the gas-permeable tube and the joining member are joined and integrated by the heat-fusible fluororesin powder, so that the work of inserting the degassing element into the fixing member becomes easy, and When these are inserted, the gas permeable tube and the joining member will not be displaced.

【図面の簡単な説明】[Brief description of drawings]

【図 1】この発明に係る脱気装置の一実施例の断面図
である。
FIG. 1 is a cross-sectional view of an embodiment of a deaerator according to the present invention.

【図 2】この発明に係る脱気装置の一実施例における
脱気エレメントと真空チャンバーの接合部分の部分拡大
断面図である。
FIG. 2 is a partially enlarged cross-sectional view of a joint portion between a degassing element and a vacuum chamber in an embodiment of the degassing device according to the present invention.

【図 3】この発明で使用する脱気エレメントを接合部
材に嵌入した状態の模式図である。
FIG. 3 is a schematic view of a state in which the degassing element used in the present invention is fitted in the joining member.

【図 4】従来の脱気エレメントの模式図である。FIG. 4 is a schematic view of a conventional degassing element.

【図 5】従来の脱気エレメントを用いた脱気装置の模
式図である。
FIG. 5 is a schematic view of a conventional degassing device using a degassing element.

【図 6】従来の脱気装置の断面図である。FIG. 6 is a sectional view of a conventional deaerator.

【図 7】従来の脱気装置における脱気エレメントと真
空チャンバーの接合部分の部分拡大断面図である。
FIG. 7 is a partially enlarged cross-sectional view of a joint portion between a degassing element and a vacuum chamber in a conventional degassing device.

【符号の説明】[Explanation of symbols]

1・・・・・脱気装置 2・・・・・真空チャンバー 3・・・・・脱気エレメント 3a・・・・端部 4・・・・・気体透過性チューブ 5・・・・・気体透過性チューブ束 6・・・・・接合部材 7・・・・・固定部材 8・・・・・接続口 1 ... Deaeration device 2 ... Vacuum chamber 3 ... Deaeration element 3a ... End 4 ... Gas permeable tube 5 ... Gas Permeable tube bundle 6 ... Joining member 7 ... Fixing member 8 ... Connection port

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 1本のフッ素樹脂製の気体透過性チュー
ブまたは2本以上のフッ素樹脂製の気体透過性チューブ
を束ねてなる脱気エレメントが、真空チャンバーの内部
に配置された脱気装置において、前記脱気エレメントの
端部はフッ素樹脂製の接合部材の始端に嵌入され、該接
合部材は前記真空チャンバーに固定部材により接続固定
され且つ接合部材の終端部は前記真空チャンバーの外部
に出ていることを特徴とする脱気装置。
1. A degassing device in which a degassing element formed by bundling one fluororesin gas-permeable tube or two or more fluororesin gas-permeable tubes is arranged inside a vacuum chamber. The end portion of the degassing element is fitted into the starting end of a joining member made of fluororesin, the joining member is connected and fixed to the vacuum chamber by a fixing member, and the end portion of the joining member is exposed to the outside of the vacuum chamber. A degassing device characterized by being
【請求項2】 気体透過性チューブの両端部外面と接合
部材始端部の内面に熱融着性フッ素樹脂粉末が面状に介
在され、気体透過性チューブは両端部が揃えられて束ね
られ、その両面が接合部材の始端部に嵌入されるととも
にこの気体透過性チューブの両端部と接合部材の始端部
は加熱加圧手段により接合一体化されてなることを特徴
とする請求項1記載の脱気装置。
2. A heat-fusible fluororesin powder is planarly interposed between the outer surfaces of both ends of the gas permeable tube and the inner surface of the joining member starting end, and the gas permeable tubes are bundled with both ends aligned. The degassing apparatus according to claim 1, wherein both sides are fitted into the starting end portion of the joining member, and both end portions of the gas permeable tube and the starting end portion of the joining member are joined and integrated by heating and pressing means. apparatus.
JP24666895A 1995-08-30 1995-08-30 Degassing device Expired - Lifetime JP3521367B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24666895A JP3521367B2 (en) 1995-08-30 1995-08-30 Degassing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24666895A JP3521367B2 (en) 1995-08-30 1995-08-30 Degassing device

Publications (2)

Publication Number Publication Date
JPH0957008A true JPH0957008A (en) 1997-03-04
JP3521367B2 JP3521367B2 (en) 2004-04-19

Family

ID=17151844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24666895A Expired - Lifetime JP3521367B2 (en) 1995-08-30 1995-08-30 Degassing device

Country Status (1)

Country Link
JP (1) JP3521367B2 (en)

Also Published As

Publication number Publication date
JP3521367B2 (en) 2004-04-19

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