KR20150091891A - Using the hollow fiber membranes of amorphous fluoropolymer resin and a method of manufacturing the gas removal device - Google Patents

Abstract

The present invention relates to a degassing apparatus using a Teflon AF hollow fiber membrane and a manufacturing method thereof. More specifically, the present invention relates to a manufacturing method of the degassing apparatus of a Teflon AF hollow fiber membrane, which makes a bundle of Teflon AF hollow fiber membranes be tightly connected in a honeycomb shape through a surface process and an adhesion process, wherein the bundle of Teflon AF hollow fiber membrane has gas transmissibility and liquid impermeableness and is used for the degassing apparatus of a degassing system used to efficiently remove dissolved gas existing in high viscosity solvent and liquid mainly used in a progress of manufacturing a semiconductor, a flat panel display (FPD), a film, and a medicine, and an operating method thereof. A space serving as a vacuum chamber is formed inside the Teflon AF hollow fiber membrane different from an existing product. The apparatus of the present invention has a structure (external flowing through method) that the liquid flows toward the outside of the hollow fiber membrane and has an additional discharge hole for defoamation.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a hollow fiber membrane, and more particularly,

TECHNICAL FIELD The present invention relates to a degassing apparatus using Teflon AF hollow fiber membranes and a method of manufacturing the same, and more particularly, to a degassing apparatus using a Teflon AF hollow fiber membrane, (Teflon AF hollow fiber membranes) which are impermeable to gas permeability and liquid used in the degassing apparatus used for efficiently removing dissolved gases in the surface of the hollow fiber membranes The present invention relates to a method of manufacturing an amorphous fluororesin hollow fiber membrane degasser and a method of operating the same.

 In all liquids, gas molecules of the same composition as the gas in contact with the liquid are constantly dissolved and called dissolved gas. The dissolved gas in the liquid causes corrosion and decomposition of the inside of the pipe through which the liquid passes, lowering of the pressure and heat exchange efficiency due to the generation of bubbles, unevenness of the coating process due to the generated bubbles and microbubbles, and the like. Therefore, it is necessary to remove the gas in the liquid depending on the method of using the liquid and the purpose of use, and it is necessary to remove a series of operations and methods for removing the gas.

As a conventional degassing apparatus, a degassing apparatus (see FIG. 9) disclosed in Japanese Laid-Open Patent Publication No. 11-333206 can be used for the liquid degassing. In the main technical configuration, as shown in FIG. 9, A bundle of gas permeable tubes 103 and tubes is accommodated in a decompression chamber 102 having an inlet 111 for the liquid before the treatment and an outlet 112 for the liquid after the degassing, And the other end is connected to the outlet port 112. [0064] The vacuum supply exhaust pipe 104 which reaches the bottom of the decompression chamber 102 is mounted in the decompression chamber 102 and the vacuum exhaust pipe 104 is connected to the vacuum exhaust pipe 102 above the decompression chamber 102. [ (Not shown). Such a conventional degassing apparatus 101 is provided with a pressure reducing device such as a vacuum pump such as a vacuum pump in which liquid flows into the gas permeable tube 103 by flowing the liquid from the inlet port 111 before the degassing process and is connected to the vacuum exhaust port 113 The inside of the decompression chamber 102 is decompressed, and the liquid can be deaerated.

However, in the above-described degassing apparatus, in order to improve the degassing performance, a gas-permeable hollow tube having a small diameter and capable of increasing the contact area with liquid is often used. A thin gas-permeable hollow tube can contain a large number of hollow tubes in a honeycomb form, but the inner tube of the hollow tube has a small inner diameter and the liquid flows through the inner surface of the hollow tube The fluid containing a high viscosity and particles can not flow out due to the influence of the internal resistance of the piping, and the problem of pressure loss occurs.

In addition, although the gas can be removed, it can not be removed only by the gas removing ability of the degassing apparatus with respect to the bubbles which are visually confirmed. The hollow tube constituted by the conventional degassing apparatus uses a hollow fiber membrane made of PTFE and PFA There is a limit to miniaturization due to the relatively low gas permeability as compared with the amorphous fluorine resin hollow fiber membranes.

The present invention is realized by recognizing at least any one of the requirements or problems occurring in the conventional deaerator of the present invention.

One aspect of the object of the present invention is to enable degassing of the high viscosity liquid with minimal pressure loss.

Another aspect of the object of the present invention is to simultaneously perform degassing and bubble removal.

Another aspect of the object of the present invention is to make the degassing liquid discharged at the time of removing bubbles reusable.

Another aspect of the object of the present invention is to enable high efficiency deaeration by using hollow tube of the same area.

A degassing apparatus according to an embodiment for realizing at least one of the above problems may include the following features.

The present invention basically comprises a vacuum chamber provided with a decompression device such as a vacuum pump and a deaerating section composed of a plurality of bundles of hollow fibers in the main body section and one surface of the deaerating section in contact with the vacuum chamber is subjected to surface treatment, The end of the hollow fiber of each of the deaerating portions positioned near the outlet of the main body portion is formed into a sealing treatment shape through heat treatment and a deaeration portion is formed between the outlet portion and the deaerating portion. .

At this time, the deaeration section includes an outer binding pipe made of amorphous fluororesin, an inner binding pipe made of an amorphous fluororesin material inserted into the outer binding pipe, and a plurality of amorphous fluororesin hollow fibers inserted into the inner binding pipe And an inlet pipe positioned at the center of the deaerating section.

Further, the heat treatment is performed at a temperature of 340 to 360 ° C in a short time.

The bonding of the plurality of amorphous fluororesin hollow fiber tubes described above includes a surface treatment with a mixture of amine-based chemistry and acetone, a bonding treatment with a cyanoacrylate-based adhesive, a coating treatment with an amorphous fluorine-based coating solution, .

Meanwhile, a method of manufacturing a degassing apparatus using an amorphous fluororesin hollow fiber tube using an amorphous fluororesin hollow fiber tube according to the present invention includes the steps of preparing an inner binding tube of an amorphous fluororesin material, Preparing a hollow fiber and a bundle tube which are prepared by preparing a resin-made external binding tube and blocking the end of the amorphous fluororesin hollow fiber tube through heat treatment; and a step of preparing a hollow fiber bundle and a bundle tube, A surface treatment step for binding and adhering the tube, an adhesion treatment step of inserting the surface-treated hollow fiber membrane and the inflow tube into the inner binding tube to perform the adhesion treatment, and a step of bonding the amorphous fluororesin coating solution A heat treatment step of binding and bundling the hollow fiber bundle after the coating step into the external binding pipe, Generated after the voting insert and cover parts a degassing the body portion characterized in that the assembly is configured including the step of assembling.

In this case, the heat treatment in the heat treatment step is performed at a temperature of 340 to 360 ° C in a short time.

Further, the surface treatment is characterized in that it is applied and precipitated by a mixture of an amine-based chemical and acetone.

The adhesive treatment is performed by applying a cyanoacrylate-based adhesive.

As described above, according to the embodiment of the present invention, the gas can be effectively removed from the deaeration section, and the gas can be removed at a higher efficiency than the conventional deaerator due to the high gas permeability of the amorphous fluororesin.

Further, according to the embodiment of the present invention, bubbles which could not be removed from the conventional degassing apparatus can be removed from the deflagration portion.

Furthermore, according to the embodiment of the present invention, it is possible to perform deaeration of the high viscosity liquid which was impossible in the conventional degassing apparatus.

Furthermore, according to the embodiment of the present invention, it is possible to reuse the liquid including bubbles discharged from the deaerator.

Further, according to the embodiment of the present invention, since the amorphous fluororesin hollow fiber tube exhibiting a high gas permeability is used, the size of the degassing apparatus can be reduced.

In addition, according to the embodiment of the present invention, since the liquid flows through the outside of the hollow tube, the deaeration can be performed with a low pressure loss.

1 is a half sectional side view of a degassing apparatus according to the present invention.
FIG. 2 is a view showing the configuration and operation of the deaerator according to the present invention shown in FIG. 1. FIG.
Fig. 3 is a half cross-sectional side view showing the binding portion of the degassing portion according to the present invention shown in Fig. 2;
Fig. 4 is a front cross-sectional view of the honeycomb portion of the binding portion of the degassing portion according to the present invention shown in Fig. 2;
5 is a flowchart illustrating a manufacturing process of the degassing unit according to the present invention shown in FIG.
6 is a cross-sectional view showing an example of a connecting method of a lid portion of a deaerator according to the present invention.
7 is an enlarged cross-sectional view showing the operation of the defoaming portion of the degassing apparatus according to the present invention.
8 is a configuration diagram of a degassing system using a degassing apparatus according to the present invention.
9 is a cross-sectional view schematically showing an example of a conventional deaerator.
FIG. 10 is a graph showing a comparison of pressure loss of an external perfusion system and an internal perfusion system constituted by a conventional degassing apparatus and a degassing apparatus according to the present invention.
FIG. 11 is a graph comparing the gas permeabilities of an amorphous fluororesin hollow fiber membrane constituted by PTFE, PFA (Tetrafluoroethylene-Perfluoroalkyl Vinyl Ether Copolymer) hollow tube used in a conventional degassing apparatus and the degassing apparatus according to the present invention.
12A to 12B are views schematically showing a method of manufacturing a degassing part of a degassing apparatus according to the present invention.
13C to 13D are views schematically showing a method of manufacturing a degassing part of a degassing apparatus according to the present invention.

In order to facilitate understanding of the features of the present invention, a deaerator according to an embodiment of the present invention will be described in detail.

Hereinafter, exemplary embodiments will be described based on embodiments best suited for understanding the technical characteristics of the present invention, and the technical features of the present invention are not limited by the illustrated embodiments, It is to be understood that the present invention may be implemented as illustrated embodiments. Therefore, it is intended that the present invention covers the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents. In order to facilitate understanding of the embodiments to be described below, in the reference numerals shown in the accompanying drawings, among the constituent elements which perform the same function in each embodiment, the related constituent elements are indicated by the same or an extension line number.

The embodiments related to the present invention basically remove the solvent present in the high viscosity solvent and the liquid in the deaeration section, remove the gas present in the liquid, effectively remove the bubbles introduced into the deaerator and remove the liquid introduced from the deaeration section into the de- It is based on making a degassing device to send and reuse.

1, the degassing apparatus according to the present invention includes a vacuum chamber 2, a deaerator 15 and a defoaming unit 6, and has an inlet 11 and an outlet 12, And may include a vacuum exhaust port 13 and a bubble outlet 14.

More specifically, the vacuum chamber 2 provides a depressurized space for degassing, and a deaerating unit 15 and a defoaming unit 6 are installed inside the vacuum chamber 2.

An inlet port 11 through which the liquid before the degassing flows and a vacuum exhaust port 13 through which the gas in the vacuum chamber 2 is discharged to the outside are provided outside the lid portion 22 constituting the vacuum chamber 2 .

At this time, the inlet port 11 passes through the lid part 22. At this time, the airtight state is maintained by using the O-ring 23 in order to prevent gas from flowing into the vacuum chamber 2 .

A vacuum pump 61 is connected to the vacuum exhaust port 13. The vacuum pump 61 decompresses the vacuum chamber 2 so that the space inside the vacuum chamber 2 is evacuated, The liquid that has entered into the main body 22 through the outer portion of the deaerating portion 15 can be acted on.

The deaerator 15 is located inside the main body 22. When the liquid to be degassed flows into the main body 15 through the inflow pipe 24, a large number of hollow fibers 2, the outer binding pipe 72, the inner binding pipe 71, and the hollow fiber tube 16 (see FIG. 2) are provided for removing gas components dissolved in the liquid through the outer wall of the tube 16, An inflow pipe 24, and a coupling part 31. [0034]

The outer binding pipe 72 is made of a fluororesin or more specifically an amorphous fluororesin (Teflon AF resin) and is connected to an inner binding pipe 71 for binding a deaerating unit 15 provided in the main body 22, (Teflon AF resin) has both gas permeability and liquid impermeability, so that it is possible to discharge only the gas flowing inside the Teflon AF resin to the outside.

The inner binding pipe 71 is joined to the inner side of the outer binding pipe 72 by fusion due to melting during the heat treatment and the inner side is bonded to the inside of the outer binding pipe 72 by the surface treatment agent 41 and the adhesive 42 and the coating liquid 43 A plurality of hollow tubes 16 and an inlet pipe 24 are provided inside the outer binding pipe 72 so that the hollow tubes 16 and the inlet pipe 24 can be pinched between the hollow tubes 16 and the outer surface of the inlet pipe 24, And is made of an amorphous fluororesin (Teflon AF resin), which serves to fix the end of the hollow tube 16 and the end of the inflow pipe 24 so as to be inserted and installed.

That is, the inner binding pipe 72 is made of a film made of amorphous fluororesin (Teflon AF resin) in the form of a tube, and a plurality of hollow tubes 16 surrounding the inflow pipe 24 can be inserted therein And a plurality of hollow tubes 16 and an inlet pipe 24 are surface treated through a surface treatment agent 41 and an inner binding pipe 71 bounded by an adhesive 42 is connected to an outer binding pipe 72 The inner binding pipe 71 and the outer binding pipe 72 made of amorphous fluororesin Teflon AF resin are melted by the heat and the outer binding pipe 72 and the inner binding pipe 72 are melted by heat, (71) are welded together.

The hollow tube 16 serves to remove gas contained in the liquid flowing into the main body 22 through the inlet 11. The hollow tube 16 is made of an amorphous fluororesin (Teflon AF resin) .

The coupling portion 31 of the deaerating portion 15 is inserted and coupled to the inside of the body portion 22 including the defoaming portion 6 and the bubble outlet 14 and the outlet 12, The same binding portion 31 is configured to have a honeycomb shape by a surface treatment, an adhesive treatment, a heat treatment and a coating treatment so as to improve the degassing performance and improve the durability.

The deodorization unit 6 is disposed between the deodorization unit 15 installed in the main body unit 22 and the outlet 12 and the bubble outlet 14, When the bubbles which have not been removed from the deaeration section 15 are floated upward in the defoaming section 15 by the buoyancy force, the bubbles are discharged to the outside through the bubble outlet 14.

At this time, the bubble outlet 14 should be located at a higher position than the outlet 12, and the bubble can be effectively removed by controlling the amount of liquid flow out of the outlet 12 and the bubble outlet 14.

In other words, conventionally, a deaerator is constructed by a structure in which a liquid flows through the inside of a hollow fiber tube 16 (internal flow regulating method), so that a liquid having a high viscosity can not flow due to a problem of internal resistance of a pipe, The liquid is introduced into the main body through the inflow pipe 24 and is discharged through the outer wall of the hollow tube 16 surrounding the inflow pipe (external perfusion system). In contrast, In the conventional degassing apparatus, a vacuum is formed outside the hollow tube 16, but a vacuum is formed inside the hollow tube 16 according to the present invention. In FIGS. 1, 2, 3, and 5 Respectively.

Next, a manufacturing method of the degassing apparatus according to the present invention will be described in detail with reference to FIGS. 6, 12, and 13. FIG.

First, the hollow tube 16 having one side blocked by heat treatment, the inflow tube 24, the inner binding tube 71, the outer binding tube 72, the hollow tube 16, A body portion 22 for assembling the surface treatment agent 41 for bonding the inflow pipe 24 and the internal binding pipe 71, the adhesive 42, the coating liquid 43 and the completed deaeration portion 15, (Preparation of hollow fibers and binding tubes R10)

12 (A), the hollow tube 16 and the inflow tube 24 are inserted into the inner binding tube 71. At this time, the hollow tube 16 and the inlet The surface treatment agent 41 is applied between the tubes 24 and the surface treatment agent 41 is also applied to the inside of the inner binding tube 71. (Surface treatment step R20)

Next, as shown in Fig. 12 (B), the hollow tube 16 inserted into the inner binding pipe 71 and the adhesive 42 prepared for binding the inflow pipe 24 are applied, In this case, the surface treatment agent should be applied within 2 minutes after the surface treatment, since the component of the surface treatment agent 41 may be vaporized to deteriorate the adhesive strength after 2 minutes have elapsed after the surface treatment (adhesion treatment step (R30)).

Thereafter, as shown in Fig. 13 (C), the prepared coating liquid 43 is applied to one side of the bundled hollow tube 16, the inflow tube 24 and the inner binding tube 71, The coating liquid used is a coating solution prepared by dissolving an amorphous fluororesin (Teflon AF resin) such as a hollow fiber tube 16 in a specific solvent, and after about 1 hour has elapsed from the coating, And the outer side surface is inserted into the inner side surface of the outer binding pipe (72). (Coating step R40)

Next, as shown in Fig. 14 (D), the outer side of the inner binding pipe 71 and the outer binding pipe 72 to which the bending tube 16 and the inflow pipe 24 are coupled inward, The heat treatment time may vary depending on the thickness of the external coupling pipe 72. However, the heat treatment time should be within 2 minutes based on 1 mm thickness, and the inside of the amorphous fluororesin (Teflon AF resin) The coupling pipe 71 and the external coupling pipe 72 are temporarily melted and fused at a melting point (350 ° C) to form a deaerating unit 15 having a honeycomb shape as a whole (heat treatment step R50).

At this time, in the heat treatment step (R50), heat treatment is performed on the internal binding pipe (71) and the external binding pipe (72) through a hot press using a heat medium material having a relatively low specific heat, You can manage less.

5, the O-ring 23 is disposed on the outer side of the inflow pipe passing through the cover, and the O-ring 23 is inserted into the O- So that the vacuum chamber 2 can be kept in a hermetic state. (Assembly step R60)

After the degassing apparatus 1 is completed, the liquid to be degassed is introduced through the inlet 11 provided at one side of the lid unit 21, and the liquid is supplied to the inside of the vacuum chamber 2 through the vacuum pump 61 The gases remaining in the liquid are collected in the vacuum chamber 2 through the Teflon AF hollow fiber membranes having gas permeability as shown in FIG. 2, and the vacuum exhaust port 13 And finally only the pure liquid component is discharged to the outlet 12 provided on one side of the body portion 22. The bubbles introduced into the inlet 11 as shown in FIG. 14 to the outside.

10 is a graph showing a comparison between the pressure loss of the conventional degassing apparatus and the pressure loss of the degassing apparatus according to the present invention in the degassing apparatus according to the present invention.

As shown in FIG. 10, the conventional degassing apparatus is an internal perfusion system that flows inside the hollow fiber membrane, and the degassing apparatus according to the present invention exhibits a low pressure loss rate because it is an external perfusion system that flows outside the hollow fiber membrane.

11 is a graph showing the gas permeability of each fluororesin.

As shown in FIG. 11, the conventional degassing apparatus is provided with the degassing apparatus using the PTFE hollow tube, and it can be confirmed that the gas permeation rate is low, and that even a large number of gases can not be permeated.

As shown in FIG. 11, since the degassing apparatus according to the present invention uses the TEFLON AF 2400 hollow fiber tube shown in the graph, it is possible to remove various gases that have not been removed in the past.

Next, Fig. 8 is a configuration diagram of the degassing system 59 using the degassing apparatus according to the present invention. The degassing system 59 can be disposed between the tank 65 containing the liquid before degassing and the point of use 66 of the degassed liquid and the vacuum chamber 2 inside the degassing apparatus 1, A vacuum pump 61 for reducing the pressure of the deodorant trap 63 in the degassing system 59 to a pressure lower than atmospheric pressure and a vacuum pump 61 for connecting the vacuum pump 61 and the vacuum exhaust port 13 of the degassing apparatus 1 A leakage sensor 67 for detecting the leakage of the liquid to the vacuum chamber 2 from the degassing apparatus 1 and a leakage sensor 67 for detecting the leakage of the liquid to the vacuum chamber 2, A deaerating liquid trap 63 for storing the liquid discharged from the bubble outlet 14 of the deaerator 1 and a deaerating liquid trap 63 for storing the deaerating liquid trap 63 in the deaerating liquid trap 63, A valve 60 provided between the piping for sending the liquid to the tank 65, It can be composed of a water level sensor 64 to measure. The degassing apparatus 1 is installed horizontally and the outflow port 12 formed in the body portion 22 is disposed below and the bubble outlet 14 formed in the body portion 22 is disposed upward. The liquid in the tank 65 may be pumped up from the liquid sending pump 62 to the degassing system 30 and the degassed liquid may be sent to the use point 66. [

In the degassing system 59 shown in Fig. 8, it is possible to judge the presence or absence of liquid leakage through a vacuum system 69 provided in a piping between the degassing apparatus 1 and the vacuum pump 61. Fig. However, in the case of a small amount of liquid leakage, it is difficult to judge the presence or absence of leakage only by variation of the vacuum system 69. A vacuum trap 68 is provided between the vacuum degassing apparatus 69 and the degassing apparatus 1 and a leak sensor 67 is attached to the inside of the vacuum trap 68 to leak the liquid in the vacuum trap 68 It is preferable that the sensor 67 detects it. Vacuum Pump (61) The vacuum pump (61) should be able to determine whether to stop or stop the degassing system by detecting the leakage of accurate liquid because expensive products are used. The type of the leak sensor 67 is not particularly specified, but it is recommended to use an optical fiber type sensor that senses liquid well.

8, when the liquid mixed with the bubbles discharged to the bubble outlet 14 of the degassing apparatus 1 is sent to the tank 65 without any additional treatment, the bubbles are returned to the inlet 11 The results are influenced. Therefore, a deodorization trap (63) capable of storing liquid is provided between the bubble outlet (14) and the tank (65). The decolatum trap 63 does not specifically define the type, but a vertical cylindrical shape, which is a structure in which the bubbles in the liquid tend to float to the top due to buoyancy, may be suitable. Further, in order to remove the air bubbles rising upward, the upper portion receives a vacuum of the vacuum pump 61 and maintains the reduced pressure state. Since the de-foam liquid trap 61 has a small buoyancy in the case of a high-viscosity liquid, the de-liquid trap 61 may be formed of a material capable of heating a jacket heated around the de-liquid trap 61. In order to prevent the liquid inside the deodorization liquid trap 61 from flowing into the vacuum pump 61, the structure should include a water level sensor 64. When the inside of the deodorization liquid trap 61 rises above a certain level The valve 60 is opened and the liquid inside the deodorization trap 61 is discharged by the suction force of the liquid delivery pump 62. [

As described above, by using the degassing apparatus according to the present invention, it is possible to easily remove the gas existing in the high viscosity liquid, to easily remove the bubbles present in the liquid, The liquid can be reused through the above-described degassing system, and the deficiency due to the introduction of gas or bubbles into the coating or discharging process of the high viscosity liquid is reduced, thereby improving the productivity.

1: degassing device 2: vacuum chamber
6: Deaerator 11: Inlet
12: outlet 13: vacuum outlet
14: air bubble outlet 15:
16: hollow fiber tube 21: lid part
22: main body portion 23: O-ring
24: inlet pipe 31:
41: Surface treatment agent 42: Adhesive
43: coating liquid 59: degassing system
60: valve 61: vacuum pump
62: Liquid supply pump 63: Decolorant trap
64: water level sensor 65: tank
66: Use point 67: Leakage sensor
68: Vacuum trap 69: Vacuum gauge
71: inner coupling pipe 72: outer coupling pipe
101: Conventional degassing apparatus 102: Decompression chamber
103: gas permeable tube 104: vacuum exhaust pipe
111: inlet 112: outlet
113: Vacuum exhaust

Claims (7)

A deaeration section 15 composed of a body part 22 and a plurality of amorphous fluororesin hollow fiber tubes 16 provided inside the body part and a vacuum chamber 2 penetrating the inlet 11 The deodorizing device (1) according to any one of claims 1 to 3, wherein the deodorizing device (1) comprises a lid part (21) And a vacuum chamber 2 is provided on the inner side surface of the lid unit 21 and an outer surface of the lid unit 21 is provided with an exhaust port 12 and a bubble outlet port 14, The deaerator 15 is composed of an outer binding pipe 72 made of an amorphous fluororesin and an amorphous fluororesin material inserted and bonded to the inside of the outer binding pipe 72, And a plurality of amorphous fluororesin hollow fiber tubes 16 which are inserted into the inner binding pipe 71, And an inlet pipe 24 made of PFA (Tetrafluoroethylene-Perfluoroalkyl Vinyl Ether Copolymer), and the surface of the hollow tube 16, the inlet pipe 24, and the inner binding pipe 71 is coated with a surface treatment agent 41 ), An adhesive (42), and a coating liquid (43). The degasser according to claim 1, wherein the degassing apparatus (1) is an external perfusion system in which liquid flows to the outer surface of the hollow tube (16) and a vacuum is formed on the inner surface of the hollow tube (16). The degasser according to claim 1, wherein the hollow tube (16) is made of amorphous fluororesin (Teflon AF resin). The degasser according to claim 1, wherein the inner binding pipe (71) and the outer binding pipe (72) are made of amorphous fluororesin (Teflon AF resin). The degasser according to claim 1, wherein the binding portion (31) is made of a surface treatment agent (41), an adhesive (42) and a coating liquid (43). 2. The degasser as set forth in claim 1, wherein said inflow pipe (24) is enclosed by a hollow fiber tube (16). A method for producing a deaerator using an amorphous fluororesin hollow fiber tube, comprising the steps of: forming an amorphous fluororesin hollow fiber tube (16) whose one side is blocked by heat treatment; an inflow tube (24) A surface treatment agent 41, an adhesive 42 and a coating liquid 43 and a hollow fiber for preparing the main body portion 22 and the cover portion 21 and a binding tube preparing step A surface treatment step (R20) of surface treating the hollow fiber tube (16), the inflow pipe (24) and the inner binding pipe (71) in the preparation through the surface treatment agent (41) (R30) for binding the yarn tube (16) and the inflow pipe (24) to the inner binding pipe (71), a coating step (R40) for coating the outer side surface of the bound binding surface, A heat treatment step R50 for binding the pipe 71 and the external binding pipe 72 and a completed deaeration part 15 are provided to the body part 22 and the cover part 2 1), and the heat treatment of the heat treatment step (R50) is performed within a period of 2 minutes based on 1 mm thickness at a temperature of 340 to 360 ° C. (Manufacturing method of deaerator using tube).

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