JP2005300250A5 - - Google Patents

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Publication number
JP2005300250A5
JP2005300250A5 JP2004113974A JP2004113974A JP2005300250A5 JP 2005300250 A5 JP2005300250 A5 JP 2005300250A5 JP 2004113974 A JP2004113974 A JP 2004113974A JP 2004113974 A JP2004113974 A JP 2004113974A JP 2005300250 A5 JP2005300250 A5 JP 2005300250A5
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JP
Japan
Prior art keywords
light
path length
optical
optical path
measurement
Prior art date
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Pending
Application number
JP2004113974A
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English (en)
Japanese (ja)
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JP2005300250A (ja
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Application filed filed Critical
Priority to JP2004113974A priority Critical patent/JP2005300250A/ja
Priority claimed from JP2004113974A external-priority patent/JP2005300250A/ja
Publication of JP2005300250A publication Critical patent/JP2005300250A/ja
Publication of JP2005300250A5 publication Critical patent/JP2005300250A5/ja
Pending legal-status Critical Current

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JP2004113974A 2004-04-08 2004-04-08 光干渉測定装置、光干渉測定方法、光学素子、及び露光装置 Pending JP2005300250A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004113974A JP2005300250A (ja) 2004-04-08 2004-04-08 光干渉測定装置、光干渉測定方法、光学素子、及び露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004113974A JP2005300250A (ja) 2004-04-08 2004-04-08 光干渉測定装置、光干渉測定方法、光学素子、及び露光装置

Publications (2)

Publication Number Publication Date
JP2005300250A JP2005300250A (ja) 2005-10-27
JP2005300250A5 true JP2005300250A5 (enExample) 2007-06-07

Family

ID=35331962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004113974A Pending JP2005300250A (ja) 2004-04-08 2004-04-08 光干渉測定装置、光干渉測定方法、光学素子、及び露光装置

Country Status (1)

Country Link
JP (1) JP2005300250A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009216454A (ja) 2008-03-07 2009-09-24 Canon Inc 波面収差測定装置、波面収差測定方法、露光装置およびデバイス製造方法
JP5489658B2 (ja) * 2009-11-05 2014-05-14 キヤノン株式会社 計測装置
JP6378149B2 (ja) 2015-09-16 2018-08-22 東芝メモリ株式会社 欠陥検出装置、欠陥検出方法およびプログラム
JP6441252B2 (ja) 2016-03-16 2018-12-19 東芝メモリ株式会社 熱レーザ刺激装置、熱レーザ刺激方法および記録媒体
CN114414073B (zh) * 2022-03-15 2023-06-02 中国工程物理研究院激光聚变研究中心 一种超短脉冲激光系统中光谱相位的测量方法
US12442717B2 (en) * 2023-02-03 2025-10-14 Onto Innovation Inc. Interferometer with auxiliary lens for measurement of a transparent test object

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