JP2005300250A5 - - Google Patents

Claims (7)

The light from the light source is divided into reference light and measurement light, by interfering the measurement light transmitted through the optical system to have a lenses and with said reference light, the transmitted wavefront of the target optical system An optical interference measuring device for measuring,
A moving mechanism for moving the measurement position before SL transmitted wavefront,
Optical interference measuring apparatus characterized by having an optical path length changing mechanism for changing one optical path length of the least well of the optical path length of the measuring light or the reference light in accordance with the prior Kihaka place 2. The optical interference measuring apparatus according to claim 1, wherein the optical system to be tested is a catadioptric system.   The optical interference measurement apparatus according to claim 1, wherein a coherence distance of the light source is shorter than an optical path length difference between an optical path length of the measurement light and an optical path length of the reference light. The optical interference measuring apparatus according to claim 1, wherein the glass material of the lens is fluorite. The optical path length changing mechanism, an optical interference measurement according to claim 4, wherein the reduced optical path length of the measuring light optical path length or the reference light and also change one based on the variance of the fluorite apparatus. The optical path length of the measurement light or the reference light so that the optical path length changing mechanism maximizes the visibility of interference fringes due to the combination of the reference light and the measurement light via the test optical system. optical interference measuring apparatus according to claim 1, characterized in that also change one and less of the optical path length of. The light from the light source is divided into reference light and measurement light, by interfering the measurement light transmitted through the optical system to have a lenses and with said reference light, the transmitted wavefront of the target optical system An optical interference measuring device for measuring,
Moving the transmitted wavefront measurement position in the test optical system;
Optical interference measuring method characterized by a step of changing one said measuring light optical path length or the reference light and small optical path length also in response to the transmitted wavefront measuring position.