JP2005299773A - 送りねじユニット及びステージ装置 - Google Patents

送りねじユニット及びステージ装置 Download PDF

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Publication number
JP2005299773A
JP2005299773A JP2004115461A JP2004115461A JP2005299773A JP 2005299773 A JP2005299773 A JP 2005299773A JP 2004115461 A JP2004115461 A JP 2004115461A JP 2004115461 A JP2004115461 A JP 2004115461A JP 2005299773 A JP2005299773 A JP 2005299773A
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JP
Japan
Prior art keywords
ball screw
nut
screw shaft
drive motor
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004115461A
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English (en)
Japanese (ja)
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JP2005299773A5 (enExample
Inventor
Shigehiro Arai
茂弘 荒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP2004115461A priority Critical patent/JP2005299773A/ja
Publication of JP2005299773A publication Critical patent/JP2005299773A/ja
Publication of JP2005299773A5 publication Critical patent/JP2005299773A5/ja
Pending legal-status Critical Current

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JP2004115461A 2004-04-09 2004-04-09 送りねじユニット及びステージ装置 Pending JP2005299773A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004115461A JP2005299773A (ja) 2004-04-09 2004-04-09 送りねじユニット及びステージ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004115461A JP2005299773A (ja) 2004-04-09 2004-04-09 送りねじユニット及びステージ装置

Publications (2)

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JP2005299773A true JP2005299773A (ja) 2005-10-27
JP2005299773A5 JP2005299773A5 (enExample) 2007-05-24

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ID=35331552

Family Applications (1)

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JP2004115461A Pending JP2005299773A (ja) 2004-04-09 2004-04-09 送りねじユニット及びステージ装置

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JP (1) JP2005299773A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102175450A (zh) * 2010-12-30 2011-09-07 大连高金数控集团有限公司 一种检测高速精密滚珠丝杠副综合性能的装置
JP2012117644A (ja) * 2010-12-03 2012-06-21 Nsk Ltd 粗微動位置決め装置
CN102840980A (zh) * 2012-09-06 2012-12-26 南京理工大学 滚动直线导轨副综合精度及性能测试装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60263765A (ja) * 1984-06-13 1985-12-27 Hiroshi Teramachi ボ−ルねじを用いた移送装置
JPS62159853A (ja) * 1986-01-09 1987-07-15 Hiroshi Teramachi ボ−ルねじユニツト
JPS62258258A (ja) * 1986-05-02 1987-11-10 Chugoku Kiko:Kk 差動式直線運動発生機構
JPH02116056U (enExample) * 1989-03-03 1990-09-17
JP2003074551A (ja) * 2001-08-30 2003-03-12 Thk Co Ltd リニアアクチュエータ
JP2003214518A (ja) * 2002-01-24 2003-07-30 Ryoei Engineering Kk 電動変速シリンダ
JP2003327324A (ja) * 2002-05-13 2003-11-19 Sandvik Sorting System Kk ダイバータを有する仕分け装置、及びダイバータの駆動制御方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60263765A (ja) * 1984-06-13 1985-12-27 Hiroshi Teramachi ボ−ルねじを用いた移送装置
JPS62159853A (ja) * 1986-01-09 1987-07-15 Hiroshi Teramachi ボ−ルねじユニツト
JPS62258258A (ja) * 1986-05-02 1987-11-10 Chugoku Kiko:Kk 差動式直線運動発生機構
JPH02116056U (enExample) * 1989-03-03 1990-09-17
JP2003074551A (ja) * 2001-08-30 2003-03-12 Thk Co Ltd リニアアクチュエータ
JP2003214518A (ja) * 2002-01-24 2003-07-30 Ryoei Engineering Kk 電動変速シリンダ
JP2003327324A (ja) * 2002-05-13 2003-11-19 Sandvik Sorting System Kk ダイバータを有する仕分け装置、及びダイバータの駆動制御方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012117644A (ja) * 2010-12-03 2012-06-21 Nsk Ltd 粗微動位置決め装置
CN102175450A (zh) * 2010-12-30 2011-09-07 大连高金数控集团有限公司 一种检测高速精密滚珠丝杠副综合性能的装置
CN102840980A (zh) * 2012-09-06 2012-12-26 南京理工大学 滚动直线导轨副综合精度及性能测试装置

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