JP2005299773A - 送りねじユニット及びステージ装置 - Google Patents

送りねじユニット及びステージ装置 Download PDF

Info

Publication number
JP2005299773A
JP2005299773A JP2004115461A JP2004115461A JP2005299773A JP 2005299773 A JP2005299773 A JP 2005299773A JP 2004115461 A JP2004115461 A JP 2004115461A JP 2004115461 A JP2004115461 A JP 2004115461A JP 2005299773 A JP2005299773 A JP 2005299773A
Authority
JP
Japan
Prior art keywords
ball screw
nut
screw shaft
shaft
drive motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004115461A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005299773A5 (enExample
Inventor
Shigehiro Arai
茂弘 荒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP2004115461A priority Critical patent/JP2005299773A/ja
Publication of JP2005299773A publication Critical patent/JP2005299773A/ja
Publication of JP2005299773A5 publication Critical patent/JP2005299773A5/ja
Pending legal-status Critical Current

Links

Images

Landscapes

  • Transmission Devices (AREA)
JP2004115461A 2004-04-09 2004-04-09 送りねじユニット及びステージ装置 Pending JP2005299773A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004115461A JP2005299773A (ja) 2004-04-09 2004-04-09 送りねじユニット及びステージ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004115461A JP2005299773A (ja) 2004-04-09 2004-04-09 送りねじユニット及びステージ装置

Publications (2)

Publication Number Publication Date
JP2005299773A true JP2005299773A (ja) 2005-10-27
JP2005299773A5 JP2005299773A5 (enExample) 2007-05-24

Family

ID=35331552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004115461A Pending JP2005299773A (ja) 2004-04-09 2004-04-09 送りねじユニット及びステージ装置

Country Status (1)

Country Link
JP (1) JP2005299773A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102175450A (zh) * 2010-12-30 2011-09-07 大连高金数控集团有限公司 一种检测高速精密滚珠丝杠副综合性能的装置
JP2012117644A (ja) * 2010-12-03 2012-06-21 Nsk Ltd 粗微動位置決め装置
CN102840980A (zh) * 2012-09-06 2012-12-26 南京理工大学 滚动直线导轨副综合精度及性能测试装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60263765A (ja) * 1984-06-13 1985-12-27 Hiroshi Teramachi ボ−ルねじを用いた移送装置
JPS62159853A (ja) * 1986-01-09 1987-07-15 Hiroshi Teramachi ボ−ルねじユニツト
JPS62258258A (ja) * 1986-05-02 1987-11-10 Chugoku Kiko:Kk 差動式直線運動発生機構
JPH02116056U (enExample) * 1989-03-03 1990-09-17
JP2003074551A (ja) * 2001-08-30 2003-03-12 Thk Co Ltd リニアアクチュエータ
JP2003214518A (ja) * 2002-01-24 2003-07-30 Ryoei Engineering Kk 電動変速シリンダ
JP2003327324A (ja) * 2002-05-13 2003-11-19 Sandvik Sorting System Kk ダイバータを有する仕分け装置、及びダイバータの駆動制御方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60263765A (ja) * 1984-06-13 1985-12-27 Hiroshi Teramachi ボ−ルねじを用いた移送装置
JPS62159853A (ja) * 1986-01-09 1987-07-15 Hiroshi Teramachi ボ−ルねじユニツト
JPS62258258A (ja) * 1986-05-02 1987-11-10 Chugoku Kiko:Kk 差動式直線運動発生機構
JPH02116056U (enExample) * 1989-03-03 1990-09-17
JP2003074551A (ja) * 2001-08-30 2003-03-12 Thk Co Ltd リニアアクチュエータ
JP2003214518A (ja) * 2002-01-24 2003-07-30 Ryoei Engineering Kk 電動変速シリンダ
JP2003327324A (ja) * 2002-05-13 2003-11-19 Sandvik Sorting System Kk ダイバータを有する仕分け装置、及びダイバータの駆動制御方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012117644A (ja) * 2010-12-03 2012-06-21 Nsk Ltd 粗微動位置決め装置
CN102175450A (zh) * 2010-12-30 2011-09-07 大连高金数控集团有限公司 一种检测高速精密滚珠丝杠副综合性能的装置
CN102840980A (zh) * 2012-09-06 2012-12-26 南京理工大学 滚动直线导轨副综合精度及性能测试装置

Similar Documents

Publication Publication Date Title
JP6016896B2 (ja) ワーク、特に金属薄板を加工するプレスの形態の工作機械
US6186024B1 (en) Driving device for displacing a platform in a plane
US4693131A (en) Feeding apparatus employing ball screw
CN101983296B (zh) 气缸装置
JP4516785B2 (ja) ダイクッション装置
CN101941166A (zh) 一种双端面磨床
JP2005299773A (ja) 送りねじユニット及びステージ装置
KR100231769B1 (ko) 공작기계
US4842457A (en) Machine tool with improved spindlehead mounting and traversing means
JP4279632B2 (ja) プレス装置
JP2000042661A (ja) 板材加工機の材料位置決め装置
JP2818121B2 (ja) 曲げロール機
CN213270738U (zh) 一种可调节直线模组
CN106113908B (zh) 一种烫印机的压轮调节装置
JP2008260041A (ja) プレス装置
CN103170661B (zh) 中间尺度零件微细铣削机床
JP4880956B2 (ja) プレスの駆動装置
CN219667485U (zh) 一种大尺寸fdm打印机的运行结构
JP4672284B2 (ja) 電動プレス装置
CN106181429A (zh) 一种重切削雕铣机
CN219994315U (zh) 丝杆驱动模组及同步升降机构
CN219648875U (zh) 一种印刷机用铜螺母研磨装置
CN202039240U (zh) 流浆箱唇板条差动微调机构
JP2014084975A (ja) 直動テーブル装置及び直動テーブル装置のボールねじサポート機構
JPH02116442A (ja) Ｘｙテーブル

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070402

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070402

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20091113

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100326

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100407

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100601

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20101012

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101210

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110322

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110517

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20110726