JP2005288300A - 超純水製造装置 - Google Patents
超純水製造装置 Download PDFInfo
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- JP2005288300A JP2005288300A JP2004106437A JP2004106437A JP2005288300A JP 2005288300 A JP2005288300 A JP 2005288300A JP 2004106437 A JP2004106437 A JP 2004106437A JP 2004106437 A JP2004106437 A JP 2004106437A JP 2005288300 A JP2005288300 A JP 2005288300A
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Abstract
【解決手段】一次純水が供給されるサブタンク12内の液体の一部を循環させるサブ循環路30を設ける。サブ循環路30は、配管31、32、および電気脱塩装置7を備え、サブタンク12内の液体の一部を抜き出して、脱塩処理し、イオンが除去された脱塩処理水をサブタンク12に返送する。これにより、サブシステム3に供給される一次純水に含まれるイオンを除去し、サブシステム3を構成する非再生型のイオン交換装置5の負荷を低減できる。
【選択図】 図1
Description
2 一次純水システム
3 サブシステム
5 イオン交換装置(非再生型)
7 電気脱塩装置
12 サブタンク
20 メイン循環路
21 返送管
30 サブ循環路
33 配管(分岐管)
34 三方弁(流路切換え手段)
40 制御装置(制御手段)
Claims (2)
- 一次純水システムで製造された一次純水を処理して超純水を製造する超純水製造装置であって、
前記一次純水が供給されるサブタンクと、非再生型のイオン交換装置を含み、前記サブタンク内の液体を被処理液として導入して超純水を製造するサブシステムと、前記サブシステムで製造された超純水の一部を前記サブタンクに返送する返送管と、を含むメイン循環路と、
前記サブタンク内の液体の一部を循環させるサブ循環路と、
このサブ循環路に設けられ、前記サブタンク内から抜き出されて前記サブ循環路を流通する液体を脱塩処理し、イオンが除去された脱塩処理水と、イオンが濃縮された濃縮水と、に分離し、前記脱塩処理水を、前記サブ循環路を介して前記サブタンクに返送する電気脱塩装置と、を備えることを特徴とする超純水製造装置。 - 前記超純水製造装置は、原水を貯留する原水タンクと、
この原水を処理して一次純水を製造する一次純水システムと、
この一次純水システムから前記サブタンクに供給される一次純水の供給量を計測する計測手段と、
前記濃縮水を前記原水タンクまたは前記サブタンクに供給する流路切換え手段を備えた分岐管と、
前記サブタンクに供給される一次純水の供給量に応じて、前記分岐管の流路切換え手段の切換えを行う制御手段と、をさらに備えることを特徴とする請求項1記載の超純水製造装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004106437A JP4432583B2 (ja) | 2004-03-31 | 2004-03-31 | 超純水製造装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004106437A JP4432583B2 (ja) | 2004-03-31 | 2004-03-31 | 超純水製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005288300A true JP2005288300A (ja) | 2005-10-20 |
JP4432583B2 JP4432583B2 (ja) | 2010-03-17 |
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JP2004106437A Expired - Fee Related JP4432583B2 (ja) | 2004-03-31 | 2004-03-31 | 超純水製造装置 |
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JP (1) | JP4432583B2 (ja) |
Cited By (9)
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WO2007037412A1 (ja) | 2005-09-30 | 2007-04-05 | Matsushita Electric Industrial Co., Ltd. | 無線送信装置および無線送信方法 |
CN102071727A (zh) * | 2010-12-23 | 2011-05-25 | 浙江精功新能源有限公司 | 光伏超纯水废水的回用技术和双管路供水装置 |
US8155070B2 (en) | 2007-03-19 | 2012-04-10 | Lg Electronics Inc. | Method for receiving ACK/NACK signal in mobile communication system |
US8363743B2 (en) | 2007-06-21 | 2013-01-29 | Lg Electronics Inc. | Method for receiving control information in orthogonal frequency division multiplexing system of mobile communication system |
US8369378B2 (en) | 2007-06-13 | 2013-02-05 | Lg Electronics Inc. | Transmitting spread signal in communication system |
US8509175B2 (en) | 2006-10-02 | 2013-08-13 | Lg Electronics Inc. | Method for transmitting downlink control signal |
USRE44564E1 (en) | 2006-10-02 | 2013-10-29 | Lg Electronics Inc. | Method for transmitting control signal using efficient multiplexing |
US8630242B2 (en) | 2007-03-19 | 2014-01-14 | Lg Electronics Inc. | Resource allocation method and a method for transmitting/receiving resource allocation information in mobile communication system |
US8774299B2 (en) | 2007-06-13 | 2014-07-08 | Lg Electronics Inc. | Transmitting spread signal in communication system |
-
2004
- 2004-03-31 JP JP2004106437A patent/JP4432583B2/ja not_active Expired - Fee Related
Cited By (39)
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EP3726792A1 (en) | 2005-09-30 | 2020-10-21 | Optis Wireless Technology, LLC | Radio transmission device, and radio transmission method based on offset information for adjusting the data coding rate and the control information coding rate |
WO2007037412A1 (ja) | 2005-09-30 | 2007-04-05 | Matsushita Electric Industrial Co., Ltd. | 無線送信装置および無線送信方法 |
US9106379B2 (en) | 2006-10-02 | 2015-08-11 | Lg Electronics Inc. | Method for transmitting control signal using efficient multiplexing |
US9967064B2 (en) | 2006-10-02 | 2018-05-08 | Lg Electronics Inc. | Method for transmitting control signal using efficient multiplexing |
US9729282B2 (en) | 2006-10-02 | 2017-08-08 | Lg Electronics Inc. | Method for transmitting control signal using efficient multiplexing |
US9451613B2 (en) | 2006-10-02 | 2016-09-20 | Lg Electronics Inc. | Method for transmitting control signal using efficient multiplexing |
US8509175B2 (en) | 2006-10-02 | 2013-08-13 | Lg Electronics Inc. | Method for transmitting downlink control signal |
USRE44564E1 (en) | 2006-10-02 | 2013-10-29 | Lg Electronics Inc. | Method for transmitting control signal using efficient multiplexing |
US9331816B2 (en) | 2007-03-19 | 2016-05-03 | Lg Electronics Inc. | Method for receiving ACK/NACK signal in mobile communications system |
US9078247B2 (en) | 2007-03-19 | 2015-07-07 | Lg Electronics Inc. | Method for receiving ACK/NACK signal in mobile communication system |
US10616874B2 (en) | 2007-03-19 | 2020-04-07 | Lg Electronics Inc. | Method for receiving ACK/NACK signal in mobile communication system |
US8767650B2 (en) | 2007-03-19 | 2014-07-01 | Lg Electronics Inc. | Method for receiving ACK/NACK signal in mobile communication system |
US8155070B2 (en) | 2007-03-19 | 2012-04-10 | Lg Electronics Inc. | Method for receiving ACK/NACK signal in mobile communication system |
US9900138B2 (en) | 2007-03-19 | 2018-02-20 | Lg Electronics Inc. | Resource allocation method and a method for transmitting/receiving resource allocation information in mobile communication system |
US8780837B2 (en) | 2007-03-19 | 2014-07-15 | Lg Electronics Inc. | Method for receiving ACK/NACK signal in mobile communication system |
US8787297B2 (en) | 2007-03-19 | 2014-07-22 | Lg Electronics Inc. | Resource allocation method and a method for transmitting/receiving resource allocation information in mobile communication system |
US8787278B2 (en) | 2007-03-19 | 2014-07-22 | Lg Electronics Inc. | Resource allocation method and a method for transmitting/receiving resource allocation information in mobile communication system |
US9826518B2 (en) | 2007-03-19 | 2017-11-21 | Lg Electronics Inc. | Method for receiving ACK/NACK signal in mobile communication system |
US9749109B2 (en) | 2007-03-19 | 2017-08-29 | Lg Electronics Inc. | Resource allocation method and a method for transmitting/receiving resource allocation information in mobile communication system |
US8553638B2 (en) | 2007-03-19 | 2013-10-08 | Lg Electronics Inc. | Method for receiving ACK/NACK signal in mobile communication system |
US8923241B2 (en) | 2007-03-19 | 2014-12-30 | Lg Electronics Inc. | Resource allocation method and a method for transmitting/receiving resource allocation information in mobile communication system |
US9191173B2 (en) | 2007-03-19 | 2015-11-17 | Lg Electronics Inc. | Resource allocation method and a method for transmitting/receiving resource allocation information in mobile communication system |
US8630242B2 (en) | 2007-03-19 | 2014-01-14 | Lg Electronics Inc. | Resource allocation method and a method for transmitting/receiving resource allocation information in mobile communication system |
US8774299B2 (en) | 2007-06-13 | 2014-07-08 | Lg Electronics Inc. | Transmitting spread signal in communication system |
US8774297B2 (en) | 2007-06-13 | 2014-07-08 | Lg Electronics Inc. | Transmitting spread signal in communication system |
US10742256B2 (en) | 2007-06-13 | 2020-08-11 | Lg Electronics Inc. | Transmitting spread signal in communication system |
US9197392B2 (en) | 2007-06-13 | 2015-11-24 | Lg Electronics Inc. | Transmitting spread signal in communication system |
US8787421B2 (en) | 2007-06-13 | 2014-07-22 | Lg Electronics Inc. | Transmitting spread signal in communication system |
US8369378B2 (en) | 2007-06-13 | 2013-02-05 | Lg Electronics Inc. | Transmitting spread signal in communication system |
US8582626B2 (en) | 2007-06-13 | 2013-11-12 | Lg Electronics Inc. | Transmitting spread signal in communication system |
US8792570B2 (en) | 2007-06-13 | 2014-07-29 | Lg Electronics Inc. | Transmitting spread signal in communication system |
US9048992B2 (en) | 2007-06-13 | 2015-06-02 | Lg Electronics Inc. | Transmitting spread signal in communication system |
US8363743B2 (en) | 2007-06-21 | 2013-01-29 | Lg Electronics Inc. | Method for receiving control information in orthogonal frequency division multiplexing system of mobile communication system |
USRE46694E1 (en) | 2007-06-21 | 2018-01-30 | Lg Electronics Inc. | Method for receiving control information in orthogonal frequency division multiplexing system of mobile communication system |
USRE46693E1 (en) | 2007-06-21 | 2018-01-30 | Lg Electronics Inc. | Method for receiving control information in orthogonal frequency division multiplexing system of mobile communication system |
USRE45103E1 (en) | 2007-06-21 | 2014-09-02 | Lg Electronics Inc. | Method for receiving control information in orthogonal frequency division multiplexing system of mobile communication system |
USRE44928E1 (en) | 2007-06-21 | 2014-06-03 | Lg Electronics Inc. | Method for receiving control information in orthogonal frequency division multiplexing system of mobile communication system |
USRE45523E1 (en) | 2007-06-21 | 2015-05-19 | Lg Electronics Inc. | Method for receiving control information in orthogonal frequency division multiplexing system of mobile communication system |
CN102071727A (zh) * | 2010-12-23 | 2011-05-25 | 浙江精功新能源有限公司 | 光伏超纯水废水的回用技术和双管路供水装置 |
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