JP2005286892A - Piezoelectric vibrator with built-in temperature sensor and piezoelectric oscillator using the same - Google Patents

Piezoelectric vibrator with built-in temperature sensor and piezoelectric oscillator using the same Download PDF

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JP2005286892A
JP2005286892A JP2004100721A JP2004100721A JP2005286892A JP 2005286892 A JP2005286892 A JP 2005286892A JP 2004100721 A JP2004100721 A JP 2004100721A JP 2004100721 A JP2004100721 A JP 2004100721A JP 2005286892 A JP2005286892 A JP 2005286892A
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piezoelectric
piezoelectric vibrator
temperature sensor
temperature
oscillator
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Hideo Outsuka
日出夫 鶯塚
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Kyocera Crystal Device Corp
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Kyocera Crystal Device Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator in which a temperature sensor is accommodated in a package for accommodating the piezoelectric blank plate of the piezoelectric vibrator and placed near the piezoelectric blank plate, and to provide a piezoelectric oscillator using the same. <P>SOLUTION: In order to achieve the above object, in the piezoelectric vibrator formed by accommodating the piezoelectric blank plate and hermetically sealing it, the temperature sensor is placed near the piezoelectric blank plate in a piezoelectric vibrator container and the output of the aforementioned temperature sensor is outputted to a terminal outside the piezoelectric vibrator. Also, in the piezoelectric oscillator, the temperature sensor is placed near the piezoelectric blank plate inside the piezoelectric vibrator container and the piezoelectric vibrator is mounted. Thus, the problem can be solved. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は温度センサーを圧電振動子のパッケージ内に収容し圧電素板の近傍に載置した圧電振動子、及びそれを用いた圧電発振器に関する。        The present invention relates to a piezoelectric vibrator in which a temperature sensor is housed in a package of a piezoelectric vibrator and placed in the vicinity of a piezoelectric element plate, and a piezoelectric oscillator using the same.

圧電振動子は環境温度により周波数が変化する温度特性を持っている。一例としてATカットの水晶振動子では他のカットの水晶振動子に比べて広い温度範囲において周波数偏差の少ない特性が得られる。こういった特性を持つ水晶振動子を搭載する発振器のなかでも、例えば移動体通信機器のひとつである携帯電話の端末などに使用される発振器には周囲の温度変化による発振周波数の変動が非常に小さく、その精度の高いことが求められるために従来から水晶振動子の温度による周波数変化を補正する回路を発振器に搭載した高精度の温度補償型水晶発振器(Temperature Compensated Crystal Oscillator)や、伝送系の機器に使用され、さらに高精度で非常に安定した周波数出力を必要とされる恒温槽に水晶振動子と発振回路が収容された恒温槽型水晶発振器(Oven Temperature Compensated Crystal Oscillator)という発振器が数多く市場に存在する。        The piezoelectric vibrator has a temperature characteristic in which the frequency changes depending on the environmental temperature. As an example, an AT-cut quartz crystal unit has characteristics with less frequency deviation over a wider temperature range than other cut quartz crystal units. Among oscillators equipped with crystal resonators with these characteristics, for example, oscillators used in mobile phone terminals, which are one of mobile communication devices, have very high fluctuations in oscillation frequency due to ambient temperature changes. Since it is required to be small and highly accurate, a highly accurate temperature compensated crystal oscillator (Temperature Compensated Crystal Oscillator) with a circuit that compensates the frequency change due to the temperature of the crystal unit in the oscillator has been used. There are many oscillators called Oven Temperature Compensated Crystal Oscillators, which are used in equipment and require a high-accuracy and very stable frequency output. Exists.

先述の温度補償型水晶発振器や、恒温槽型水晶発振器においては、従来から温度を検出する為、例えばサーミスタ素子やダイオードといった温度センサーを、先述の温度補償型水晶発振器においては図5のように水晶振動子のパッケージ外側の近傍に載置し、また恒温槽型水晶発振器においては図6のように、温度センサーを、高温槽を構成する電流が通じて加熱されるヒーターが巻かれ高温に保たれるアルミダイカストなどから成る熱筒に埋設していた。        In the temperature compensated crystal oscillator and the thermostatic chamber crystal oscillator described above, a temperature sensor such as a thermistor element or a diode is conventionally used to detect the temperature. In the temperature compensated crystal oscillator described above, a crystal is used as shown in FIG. As shown in FIG. 6, the temperature sensor was placed near the outside of the package of the vibrator, and the temperature sensor was kept at a high temperature by winding a heater that was heated through the current constituting the high-temperature tank, as shown in FIG. 6. It was buried in a heat cylinder made of aluminum die casting.

特開2001−308640号公報 特開2001−60828号公報JP 2001-308640 A JP 2001-60828 A

なお、出願人は前記した先行技術文献情報で特定される先行技術文献以外には、本発明に関連する先行技術文献を、本件出願時までに発見するに至らなかった。        The applicant has not found any prior art documents related to the present invention other than the prior art documents specified by the prior art document information described above by the time of filing of the present application.

しかしながら、従来においては、先述の温度補償型水晶発振器や恒温槽型水晶発振器において、温度センサーは圧電振動子のパッケージの外側に在り、圧電振動子の水晶素板と温度センサーの間には若干の距離が出来、その為に検出したい水晶素板そのものの温度と、温度センサーの検出温度とのあいだに僅少ながらも温度差が発生し、その結果、このような温度センサーを圧電振動子のパッケージの外側に搭載した発振器の出力周波数が温度に対して不安定に成るおそれがあるといった問題があった。        However, conventionally, in the above-described temperature compensated crystal oscillator or thermostatic chamber crystal oscillator, the temperature sensor is outside the package of the piezoelectric vibrator, and there is a slight gap between the crystal base plate of the piezoelectric vibrator and the temperature sensor. There is a slight temperature difference between the temperature of the quartz base plate itself to be detected and the detected temperature of the temperature sensor, and as a result, such a temperature sensor is mounted on the piezoelectric vibrator package. There is a problem that the output frequency of the oscillator mounted outside may become unstable with respect to temperature.

また、従来においては、先述の温度補償型水晶発振器や恒温槽型水晶発振器において、温度センサーは圧電振動子の圧電素板を収容するパッケージの外側に在り、圧電振動子の水晶素板と温度センサーの間には若干の距離が出来、その為に検出したい水晶素板そのものの温度と温度センサーの検出温度とのあいだに僅少ながらも明らかな温度差が発生し、この温度差が温度センサーと水晶振動子の熱的時定数が異なる為に、温度補償型水晶発振器の場合では温度補償が過剰に成ったり不足したりする現象が発生し、また、恒温槽型水晶発振器の場合では、温度制御が不安定と成りその結果恒温槽の温度が上がったり下がったりする現象が発生し、これらの結果として、ここでも発振器の出力周波数が温度に対して不安定に成るおそれがあるといった問題があった。        Conventionally, in the above-described temperature compensated crystal oscillator or thermostatic chamber crystal oscillator, the temperature sensor is outside the package housing the piezoelectric element plate of the piezoelectric vibrator, and the crystal element plate of the piezoelectric vibrator and the temperature sensor There is a slight distance between them, and there is a small but obvious temperature difference between the temperature of the quartz base plate itself to be detected and the temperature detected by the temperature sensor. Due to the difference in the thermal time constant of the oscillator, there is a phenomenon in which temperature compensation becomes excessive or insufficient in the case of a temperature compensated crystal oscillator, and in the case of a thermostat crystal oscillator, temperature control is not possible. As a result, the temperature of the thermostatic chamber rises and falls, and as a result, the output frequency of the oscillator may be unstable with respect to the temperature. There has been a Tsu was a problem.

本発明は、以上のような技術的背景のもとで成されたものであり、従がってその目的は、温度センサーを圧電振動子の圧電素板を収容するパッケージ内に収容して圧電素板の近傍に載置した圧電振動子と、その圧電振動子を搭載した圧電発振器を提供することである。        The present invention has been made on the basis of the technical background as described above. Accordingly, the object of the present invention is to accommodate a temperature sensor in a package that accommodates a piezoelectric element plate of a piezoelectric vibrator. A piezoelectric vibrator placed in the vicinity of a base plate and a piezoelectric oscillator having the piezoelectric vibrator mounted thereon are provided.

上記の目的を達成するために本発明は、圧電素板を収納して気密封止して成る圧電振動子において、温度センサーが圧電振動子容器内部の圧電素板の近傍に載置され、先述の温度センサーの出力が圧電振動子の外側の端子に出力されることを特徴とする。        In order to achieve the above object, according to the present invention, there is provided a piezoelectric vibrator comprising a piezoelectric element plate and hermetically sealed, wherein a temperature sensor is placed in the vicinity of the piezoelectric element plate inside the piezoelectric vibrator container. The output of the temperature sensor is output to a terminal outside the piezoelectric vibrator.

また、温度センサーが圧電振動子容器内部の圧電素板の近傍に載置された圧電振動子を搭載した圧電発振器であることを特徴とする。        The temperature sensor is a piezoelectric oscillator having a piezoelectric vibrator mounted in the vicinity of the piezoelectric element plate inside the piezoelectric vibrator container.

本発明の圧電振動子により、検出したい圧電素板そのものの温度と、先述の温度センサーによって検出される温度の差が、気密された圧電振動子容器の内部の雰囲気を測定し、かつ圧電素板の近傍に温度センサーが載置されているために非常に僅少となり、その結果、温度センサーの出力を温度に対して著しく安定かつ正確な出力とすることが出来る。        With the piezoelectric vibrator of the present invention, the difference between the temperature of the piezoelectric base plate itself to be detected and the temperature detected by the above-described temperature sensor measures the atmosphere inside the hermetically sealed piezoelectric vibrator container, and the piezoelectric base plate Since the temperature sensor is mounted in the vicinity of, the output becomes extremely small. As a result, the output of the temperature sensor can be made extremely stable and accurate with respect to the temperature.

また、本発明の圧電振動子により、それを搭載した圧電発振器の製造歩留まりを著しく高めることが出来る。        In addition, with the piezoelectric vibrator of the present invention, the manufacturing yield of the piezoelectric oscillator on which it is mounted can be significantly increased.

以下に図面を参照しながら本発明の実施の一形態について説明する。
なお、各図においての同一の符号は同じ対象を示すものとする。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In addition, the same code | symbol in each figure shall show the same object.

図1は本発明の温度センサー7が圧電振動子2容器内部の圧電素板1の近傍に載置された圧電振動子2の概略の側面模式図である。本図に示されるように圧電素板1が載置される圧電振動子2容器の内部、例えば圧電素板1の真下の絶縁基板上に温度センサー7を載置することにより、従来に比べて検出したい圧電素板1そのものの温度と、温度センサー7によって検出される温度の差を、気密された圧電振動子2容器の内部の雰囲気を測定し、かつ圧電素板1の近傍に温度センサー7が載置されているために非常に僅少とすることが出来る。温度センサー7の出力は圧電振動子2の外側の端子8に出ており、圧電発振器6の温度補償回路と結線することが出来る。なお、本発明の発振器、及び圧電振動子2の概略の図面においては、発振をするための、もしくは恒温槽内の温度を制御する電気部品や回路基板などの描写は省略されている。        FIG. 1 is a schematic side view of a piezoelectric vibrator 2 in which a temperature sensor 7 of the present invention is placed in the vicinity of a piezoelectric element plate 1 inside a piezoelectric vibrator 2 container. As shown in this figure, the temperature sensor 7 is placed on the inside of the piezoelectric vibrator 2 container on which the piezoelectric element plate 1 is placed, for example, on the insulating substrate directly below the piezoelectric element plate 1, thereby making it possible to compare with the conventional case. The difference between the temperature of the piezoelectric element 1 to be detected and the temperature detected by the temperature sensor 7 is measured, the atmosphere inside the hermetic piezoelectric vibrator 2 container is measured, and the temperature sensor 7 is located in the vicinity of the piezoelectric element 1. Can be very small. The output of the temperature sensor 7 is output to the terminal 8 outside the piezoelectric vibrator 2 and can be connected to the temperature compensation circuit of the piezoelectric oscillator 6. In the schematic drawings of the oscillator and the piezoelectric vibrator 2 according to the present invention, depictions of electrical components and circuit boards for oscillating or controlling the temperature in the thermostat are omitted.

図2は本発明の別の実施例である温度センサー7が圧電振動子2容器内部の圧電素板1の近傍に載置された圧電振動子2を、内部の圧電素板1の主面方向からみた概略の正面模式図である。本図に示されるような、水晶素板1を保持する支持構造がサポートピンといった棒状を成す場合は、圧電振動子2外部と圧電素板1とのあいだの熱伝導は、圧電振動子2内部が真空のとき圧電振動子2内部気体の対流による熱伝導は無く、先述のサポートピンを介しての熱伝導によるものが大部分と成るためにサポートピンのすぐ側に温度センサー7を載置することが必要である。本3図において温度センサー7は金属板5の上に載置されているが、温度センサー7と金属板7のあいだは電気的に絶縁されていて短絡することはない。        FIG. 2 shows a piezoelectric vibrator 2 in which a temperature sensor 7 according to another embodiment of the present invention is placed in the vicinity of the piezoelectric base plate 1 inside the piezoelectric vibrator 2 container. It is the schematic front schematic diagram seen from. When the support structure for holding the quartz base plate 1 is in the shape of a rod such as a support pin as shown in this figure, the heat conduction between the outside of the piezoelectric vibrator 2 and the piezoelectric base plate 1 is the inside of the piezoelectric vibrator 2. When there is a vacuum, there is no heat conduction due to the convection of the gas inside the piezoelectric vibrator 2, and most of the heat conduction through the support pin described above is placed on the immediate side of the support pin. It is necessary. In FIG. 3, the temperature sensor 7 is placed on the metal plate 5, but the temperature sensor 7 and the metal plate 7 are electrically insulated and do not short-circuit.

図3は先の実施例2に示される、本発明の温度センサー7が圧電振動子2容器内部の圧電素板1の近傍に載置された圧電振動子2の概略の上面模式図である。上面方向、即ち搭載されている圧電素板1の主面方向からみると、温度センサー7は圧電素板1の真下の凹型をした容器4底部に載置されている。なお、温度センサー7が圧電振動子2容器底部に載置されず、圧電振動子2容器内部の側面や圧電素板1の上部の蓋を成す金属板5に載置されていても構わず、これらの場合においても本発明の技術的範囲に含まれることは言うまでも無い。        FIG. 3 is a schematic top view schematically showing the piezoelectric vibrator 2 in which the temperature sensor 7 of the present invention is placed in the vicinity of the piezoelectric element plate 1 inside the container of the piezoelectric vibrator 2 shown in the second embodiment. When viewed from the upper surface direction, that is, the main surface direction of the mounted piezoelectric element 1, the temperature sensor 7 is mounted on the bottom of the concave container 4 directly below the piezoelectric element 1. The temperature sensor 7 may not be placed on the bottom of the piezoelectric vibrator 2 container, but may be placed on the metal plate 5 that forms a lid on the side surface inside the piezoelectric vibrator 2 container or the upper portion of the piezoelectric element plate 1. Needless to say, these cases are also included in the technical scope of the present invention.

図4は本発明の、温度センサー7が圧電振動子2容器内部の圧電素板1の近傍に載置された圧電振動子2を搭載した温度補償型発振器の概略の側面模式図である。本図に示されるように例えばサーミスタ素子やダイオードといった温度センサー7を、発振器の内部に搭載される圧電振動子2容器内部の圧電素板1の近くに載置する。これにより検出したい圧電素板1そのものの温度と、温度センサー7によって検出される温度の差が非常に僅少となり発振器の出力周波数を温度に対して著しく安定とすることが出来る。        FIG. 4 is a schematic side view of a temperature-compensated oscillator equipped with the piezoelectric vibrator 2 in which the temperature sensor 7 of the present invention is mounted in the vicinity of the piezoelectric element plate 1 inside the container of the piezoelectric vibrator 2. As shown in this figure, a temperature sensor 7 such as a thermistor element or a diode is placed near the piezoelectric element plate 1 inside the piezoelectric vibrator 2 container mounted inside the oscillator. As a result, the difference between the temperature of the piezoelectric element 1 itself to be detected and the temperature detected by the temperature sensor 7 becomes very small, and the output frequency of the oscillator can be remarkably stabilized with respect to the temperature.

図5は従来の、温度センサー7が圧電振動子2容器の外部に載置された構成をした圧電発振器6である温度補償型発振器を側面方向からみた概略の側面模式図である。        FIG. 5 is a schematic side view of a conventional temperature compensated oscillator, which is a piezoelectric oscillator 6 having a configuration in which the temperature sensor 7 is mounted outside the container of the piezoelectric vibrator 2 as viewed from the side.

図6は従来の、温度センサー7が圧電振動子2容器の外部に載置された構成をした圧電発振器6である恒温槽型発振器を側面方向からみた概略の側面模式図である。本6図において断熱材9は、恒温槽に外部からその温度を変化させる影響を与えないために入れられるものである。        FIG. 6 is a schematic side view of a conventional thermostatic oven oscillator, which is a piezoelectric oscillator 6 having a configuration in which the temperature sensor 7 is placed outside the container of the piezoelectric vibrator 2 as viewed from the side. In FIG. 6, the heat insulating material 9 is inserted so as not to affect the thermostatic bath from changing its temperature from the outside.

本発明の、温度センサーが圧電振動子容器内部の圧電素板の近傍に載置された圧電振動子の概略の側面模式図である。FIG. 3 is a schematic side view of a piezoelectric vibrator in which a temperature sensor according to the present invention is placed in the vicinity of a piezoelectric element plate inside a piezoelectric vibrator container. 本発明の別の実施例である温度センサーが圧電振動子容器内部の圧電素板の近傍に載置された圧電振動子を、内部の圧電素板の主面方向からみた概略の正面模式図である。FIG. 5 is a schematic front view schematically showing a piezoelectric vibrator in which a temperature sensor according to another embodiment of the present invention is placed in the vicinity of a piezoelectric element plate inside a piezoelectric element container as viewed from a main surface direction of the inner piezoelectric element plate. is there. 本発明の、温度センサーが圧電振動子容器内部の圧電素板の近傍に載置された図1に示された圧電振動子の概略の上面模式図である。上面方向、即ち搭載されている圧電素板の主面方向からみると、温度センサーは圧電素板の真下の凹型をした容器底部に載置されている。FIG. 2 is a schematic top schematic view of the piezoelectric vibrator shown in FIG. 1 in which the temperature sensor of the present invention is placed in the vicinity of the piezoelectric element plate inside the piezoelectric vibrator container. When viewed from the upper surface direction, that is, the main surface direction of the mounted piezoelectric element plate, the temperature sensor is placed on the bottom of the concave container just below the piezoelectric element plate. 本発明の、温度センサーが圧電振動子容器内部の圧電素板の近傍に載置された圧電振動子を搭載した温度補償型発振器の概略の側面模式図である。1 is a schematic side view of a temperature compensated oscillator equipped with a piezoelectric vibrator in which a temperature sensor according to the present invention is mounted in the vicinity of a piezoelectric element plate inside a piezoelectric vibrator container. 従来の、温度センサーが圧電振動子容器の外部に載置された構成をした温度補償型発振器を側面方向からみた概略の側面模式図である。FIG. 6 is a schematic side view of a conventional temperature-compensated oscillator having a configuration in which a temperature sensor is placed outside a piezoelectric vibrator container as viewed from the side. 従来の、温度センサーが圧電振動子容器の外部に載置された構成をした恒温槽型発振器を側面方向からみた概略の側面模式図である。FIG. 6 is a schematic side view of a conventional thermostatic oven type oscillator having a configuration in which a temperature sensor is mounted outside a piezoelectric vibrator container, as viewed from the side.

符号の説明Explanation of symbols

1 圧電素板
2 圧電振動子
3 半導体部品
4 凹型容器
5 金属板
6 圧電発振器
7 温度センサー
8 外側の端子
9 断熱材
DESCRIPTION OF SYMBOLS 1 Piezoelectric base plate 2 Piezoelectric vibrator 3 Semiconductor component 4 Concave container 5 Metal plate 6 Piezoelectric oscillator 7 Temperature sensor 8 Outer terminal 9 Heat insulating material

Claims (2)

圧電素板を収納して気密封止して成る圧電振動子において、
温度センサーが該圧電振動子容器内部の該圧電素板の近傍に載置され、該温度センサーの出力が該圧電振動子の外側の端子に出力されることを特徴とする圧電振動子。
In a piezoelectric vibrator that houses a piezoelectric element plate and is hermetically sealed,
A piezoelectric vibrator, wherein a temperature sensor is placed in the vicinity of the piezoelectric element plate inside the piezoelectric vibrator container, and an output of the temperature sensor is output to a terminal outside the piezoelectric vibrator.
請求項1に記載の圧電振動子を搭載した圧電発振器。        A piezoelectric oscillator mounting the piezoelectric vibrator according to claim 1.
JP2004100721A 2004-03-30 2004-03-30 Piezoelectric vibrator with built-in temperature sensor and piezoelectric oscillator using the same Pending JP2005286892A (en)

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JP2009005117A (en) * 2007-06-22 2009-01-08 Daishinku Corp Surface-mounting type piezoelectric vibration device
JP2009027477A (en) * 2007-07-19 2009-02-05 Citizen Finetech Miyota Co Ltd Piezoelectric oscillator
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