JP2005281753A5 - - Google Patents
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- Publication number
- JP2005281753A5 JP2005281753A5 JP2004096287A JP2004096287A JP2005281753A5 JP 2005281753 A5 JP2005281753 A5 JP 2005281753A5 JP 2004096287 A JP2004096287 A JP 2004096287A JP 2004096287 A JP2004096287 A JP 2004096287A JP 2005281753 A5 JP2005281753 A5 JP 2005281753A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- processing
- regeneration
- voltage
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 230000008929 regeneration Effects 0.000 description 4
- 238000011069 regeneration method Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004096287A JP2005281753A (ja) | 2004-03-29 | 2004-03-29 | 電解加工装置 |
| PCT/JP2005/006208 WO2005093135A1 (en) | 2004-03-29 | 2005-03-24 | Electrolytic processing apparatus |
| US10/585,739 US20080217164A1 (en) | 2004-03-29 | 2005-03-24 | Electrolytic Processing Apparatus |
| TW094109721A TW200536643A (en) | 2004-03-29 | 2005-03-29 | Electrolytic processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004096287A JP2005281753A (ja) | 2004-03-29 | 2004-03-29 | 電解加工装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005281753A JP2005281753A (ja) | 2005-10-13 |
| JP2005281753A5 true JP2005281753A5 (https=) | 2007-04-12 |
Family
ID=35056231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004096287A Ceased JP2005281753A (ja) | 2004-03-29 | 2004-03-29 | 電解加工装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20080217164A1 (https=) |
| JP (1) | JP2005281753A (https=) |
| TW (1) | TW200536643A (https=) |
| WO (1) | WO2005093135A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6699604B2 (ja) * | 2017-03-14 | 2020-05-27 | トヨタ自動車株式会社 | 金属皮膜の成膜方法 |
| JP6699605B2 (ja) * | 2017-03-15 | 2020-05-27 | トヨタ自動車株式会社 | 金属皮膜の成膜方法 |
| JP6699606B2 (ja) * | 2017-03-15 | 2020-05-27 | トヨタ自動車株式会社 | 金属皮膜の成膜装置 |
| JP6740951B2 (ja) * | 2017-04-03 | 2020-08-19 | トヨタ自動車株式会社 | 金属皮膜の成膜装置 |
| DE102019200832A1 (de) * | 2019-01-24 | 2020-07-30 | MTU Aero Engines AG | VERFAHREN ZUM ENTFERNEN VON Cr(VI)-IONEN AUS EINER WÄSSRIGEN ELEKTROLYTLÖSUNG |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6722950B1 (en) * | 2000-11-07 | 2004-04-20 | Planar Labs Corporation | Method and apparatus for electrodialytic chemical mechanical polishing and deposition |
| JP4056359B2 (ja) * | 2002-03-22 | 2008-03-05 | 株式会社荏原製作所 | 電解加工装置及び方法 |
| US7427345B2 (en) * | 2001-11-29 | 2008-09-23 | Ebara Corporation | Method and device for regenerating ion exchanger, and electrolytic processing apparatus |
| JP4076430B2 (ja) * | 2002-01-31 | 2008-04-16 | 株式会社荏原製作所 | 基板処理装置 |
| JP3967207B2 (ja) * | 2002-06-12 | 2007-08-29 | 株式会社荏原製作所 | 電解加工装置 |
| JP2004015028A (ja) * | 2002-06-11 | 2004-01-15 | Ebara Corp | 基板処理方法及び半導体装置 |
-
2004
- 2004-03-29 JP JP2004096287A patent/JP2005281753A/ja not_active Ceased
-
2005
- 2005-03-24 US US10/585,739 patent/US20080217164A1/en not_active Abandoned
- 2005-03-24 WO PCT/JP2005/006208 patent/WO2005093135A1/en not_active Ceased
- 2005-03-29 TW TW094109721A patent/TW200536643A/zh unknown
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