JP2005259707A5 - - Google Patents

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Publication number
JP2005259707A5
JP2005259707A5 JP2005107008A JP2005107008A JP2005259707A5 JP 2005259707 A5 JP2005259707 A5 JP 2005259707A5 JP 2005107008 A JP2005107008 A JP 2005107008A JP 2005107008 A JP2005107008 A JP 2005107008A JP 2005259707 A5 JP2005259707 A5 JP 2005259707A5
Authority
JP
Japan
Prior art keywords
sample
irradiation angle
changing means
electron beam
angle changing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005107008A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005259707A (ja
JP3874011B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2005107008A priority Critical patent/JP3874011B2/ja
Priority claimed from JP2005107008A external-priority patent/JP3874011B2/ja
Publication of JP2005259707A publication Critical patent/JP2005259707A/ja
Publication of JP2005259707A5 publication Critical patent/JP2005259707A5/ja
Application granted granted Critical
Publication of JP3874011B2 publication Critical patent/JP3874011B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2005107008A 2005-04-04 2005-04-04 微小試料加工観察方法及び装置 Expired - Lifetime JP3874011B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005107008A JP3874011B2 (ja) 2005-04-04 2005-04-04 微小試料加工観察方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005107008A JP3874011B2 (ja) 2005-04-04 2005-04-04 微小試料加工観察方法及び装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2004317452A Division JP4259454B2 (ja) 2004-11-01 2004-11-01 微小試料加工観察装置

Publications (3)

Publication Number Publication Date
JP2005259707A JP2005259707A (ja) 2005-09-22
JP2005259707A5 true JP2005259707A5 (enExample) 2006-03-09
JP3874011B2 JP3874011B2 (ja) 2007-01-31

Family

ID=35085184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005107008A Expired - Lifetime JP3874011B2 (ja) 2005-04-04 2005-04-04 微小試料加工観察方法及び装置

Country Status (1)

Country Link
JP (1) JP3874011B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006194907A (ja) * 2006-03-31 2006-07-27 Hitachi Ltd 電子線を用いた試料観察装置および方法
JP5125123B2 (ja) * 2007-01-31 2013-01-23 株式会社日立製作所 微小試料加工観察方法及び装置
JP5825797B2 (ja) * 2011-02-08 2015-12-02 株式会社ブリヂストン 高分子材料の評価方法
DE102020203580B4 (de) 2020-03-20 2021-10-07 Carl Zeiss Microscopy Gmbh Verfahren zum Ändern der Raum-Orientierung einer Mikroprobe in einem Mikroskop-System, sowie Computerprogrammprodukt

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2811073B2 (ja) * 1988-11-01 1998-10-15 セイコーインスツルメンツ株式会社 断面加工観察装置
JP3216881B2 (ja) * 1990-09-07 2001-10-09 株式会社日立製作所 試料断面観察方法
JP3119959B2 (ja) * 1993-02-05 2000-12-25 セイコーインスツルメンツ株式会社 集束イオンビーム装置および加工観察装置
JP2972535B2 (ja) * 1993-12-08 1999-11-08 株式会社東芝 基板断面観察装置
JP3805547B2 (ja) * 1999-01-21 2006-08-02 株式会社日立製作所 試料作製装置
JP4534273B2 (ja) * 1999-08-31 2010-09-01 株式会社日立製作所 試料作成装置
JP2004343131A (ja) * 2004-06-07 2004-12-02 Hitachi Ltd 試料解析方法および装置

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