WO2014158290A8 - Optical beam positioning unit for atomic force microscope - Google Patents

Optical beam positioning unit for atomic force microscope Download PDF

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Publication number
WO2014158290A8
WO2014158290A8 PCT/US2014/000069 US2014000069W WO2014158290A8 WO 2014158290 A8 WO2014158290 A8 WO 2014158290A8 US 2014000069 W US2014000069 W US 2014000069W WO 2014158290 A8 WO2014158290 A8 WO 2014158290A8
Authority
WO
WIPO (PCT)
Prior art keywords
probe
photothermal
sample
atomic force
force microscope
Prior art date
Application number
PCT/US2014/000069
Other languages
French (fr)
Other versions
WO2014158290A1 (en
Inventor
Aleksander Labuda
Jason Cleveland
Deron Walters
Roger Proksch
Original Assignee
Aleksander Labuda
Jason Cleveland
Deron Walters
Roger Proksch
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aleksander Labuda, Jason Cleveland, Deron Walters, Roger Proksch filed Critical Aleksander Labuda
Priority to JP2016500155A priority Critical patent/JP6229914B2/en
Priority to EP14772613.7A priority patent/EP2972065B8/en
Publication of WO2014158290A1 publication Critical patent/WO2014158290A1/en
Publication of WO2014158290A8 publication Critical patent/WO2014158290A8/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means

Abstract

This invention relates to an optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other.
PCT/US2014/000069 2013-03-14 2014-03-31 Optical beam positioning unit for atomic force microscope WO2014158290A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016500155A JP6229914B2 (en) 2013-08-06 2014-03-31 Light beam positioning unit for atomic force microscope
EP14772613.7A EP2972065B8 (en) 2013-03-14 2014-03-31 Optical beam positioning unit for atomic force microscope

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
USNONE 2011-07-18
US201361852231P 2013-03-14 2013-03-14
US61/852,231 2013-03-14
US201361958849P 2013-08-06 2013-08-06
US61/958,849 2013-08-06
US201414000000A 2014-03-12 2014-03-12

Publications (2)

Publication Number Publication Date
WO2014158290A1 WO2014158290A1 (en) 2014-10-02
WO2014158290A8 true WO2014158290A8 (en) 2015-04-30

Family

ID=51624985

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2014/000069 WO2014158290A1 (en) 2013-03-14 2014-03-31 Optical beam positioning unit for atomic force microscope

Country Status (1)

Country Link
WO (1) WO2014158290A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9804193B2 (en) 2014-03-12 2017-10-31 Oxford Instruments Asylum Research, Inc Metrological scanning probe microscope
US10705114B2 (en) 2014-03-12 2020-07-07 Oxford Instruments Asylum Research Inc Metrological scanning probe microscope
WO2016073999A1 (en) * 2014-11-03 2016-05-12 Oxford Instruments Asylum Research, Inc. Metrological scanning probe microscope
EP3258275A1 (en) * 2016-06-17 2017-12-20 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Method of determining an overlay error, method for manufacturing a multilayer semiconductor device, atomic force microscopy device, lithographic system and semiconductor device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2661314B2 (en) * 1990-03-07 1997-10-08 松下電器産業株式会社 Shape measuring device and shape measuring method
JP2001304833A (en) 2000-04-21 2001-10-31 Olympus Optical Co Ltd Optical lever type inclination detecting apparatus
JP2006329973A (en) * 2005-04-28 2006-12-07 Hitachi Ltd Scanning probe microscope, sample observing method using the same, and device manufacturing method
JP4810251B2 (en) * 2006-02-16 2011-11-09 キヤノン株式会社 Atomic force microscope
DE102007007797B4 (en) * 2007-02-16 2017-11-16 Leica Microsystems Cms Gmbh Fluorescence microscope with illumination device
JP2009128139A (en) 2007-11-22 2009-06-11 Hitachi Ltd Scan probe microscope, and probe unit for the scan probe microscope

Also Published As

Publication number Publication date
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