JP2005256845A5 - - Google Patents
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- Publication number
- JP2005256845A5 JP2005256845A5 JP2005165360A JP2005165360A JP2005256845A5 JP 2005256845 A5 JP2005256845 A5 JP 2005256845A5 JP 2005165360 A JP2005165360 A JP 2005165360A JP 2005165360 A JP2005165360 A JP 2005165360A JP 2005256845 A5 JP2005256845 A5 JP 2005256845A5
- Authority
- JP
- Japan
- Prior art keywords
- pump
- pressure
- screw
- vacuum
- booster
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000875 corresponding Effects 0.000 claims description 9
- 238000005086 pumping Methods 0.000 description 24
- 238000007789 sealing Methods 0.000 description 18
- 239000012530 fluid Substances 0.000 description 14
- 238000003860 storage Methods 0.000 description 14
- 230000004323 axial length Effects 0.000 description 10
- 238000007906 compression Methods 0.000 description 10
- 239000003921 oil Substances 0.000 description 10
- 239000007795 chemical reaction product Substances 0.000 description 4
- 238000004904 shortening Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000037250 Clearance Effects 0.000 description 2
- 230000035512 clearance Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 210000000078 Claw Anatomy 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000001052 transient Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005165360A JP2005256845A (ja) | 1999-11-17 | 2005-06-06 | 真空排気装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32627699 | 1999-11-17 | ||
| JP2005165360A JP2005256845A (ja) | 1999-11-17 | 2005-06-06 | 真空排気装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000213110A Division JP2001207984A (ja) | 1999-11-17 | 2000-07-13 | 真空排気装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005256845A JP2005256845A (ja) | 2005-09-22 |
| JP2005256845A5 true JP2005256845A5 (de) | 2007-06-14 |
Family
ID=35082788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005165360A Pending JP2005256845A (ja) | 1999-11-17 | 2005-06-06 | 真空排気装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005256845A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007263121A (ja) * | 1999-11-17 | 2007-10-11 | Nabtesco Corp | 真空排気装置 |
| FR2971018A1 (fr) * | 2011-01-27 | 2012-08-03 | Alcatel Vacuum Technology France | Pompe a vide primaire, installation pour le traitement de substrats et procede de pompage |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62102883U (de) * | 1985-12-20 | 1987-06-30 | ||
| JPH0518378A (ja) * | 1990-12-12 | 1993-01-26 | Ebara Corp | ２段スクリユー真空ポンプ |
| JP3767052B2 (ja) * | 1996-11-30 | 2006-04-19 | アイシン精機株式会社 | 多段式真空ポンプ |
-
2005
- 2005-06-06 JP JP2005165360A patent/JP2005256845A/ja active Pending
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