JP2005249501A - Extra thin contact probe - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an extra thin contact probe markedly thinner than a conventional one and capable of conducting an inspection of a printed wiring board having a narrow pitch interval without obstacle. <P>SOLUTION: An extra thin linear body having a needle part on the tip is fitted into a probe guide as to freely advance and retreat. The back end is abutted on an elastic body and, the extra thin linear body can be elastically moved backward and forward by the elastic force of the elastic body. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an ultrafine contact probe capable of precisely performing a trie inspection of a semiconductor having a small pitch interval, a substrate electrode such as a liquid crystal, or a disconnection, a short circuit or the like of a pattern.

  Conventionally, an integrated contact probe has been used to check for disconnection, short-circuiting, etc. of an electric circuit of a printed wiring board.

As shown in FIG. 1, the conventional integrated contact probe has a center conductor 2 fitted in a cylindrical sleeve 1, and a protrusion 4 formed at the rear end of the sleeve 1 and a rear end of the center conductor 2. In the meantime, the coil spring 3 is fixed via a small ball 5 so that the center conductor 2 can move relative to the sleeve 1 when the tip of the center conductor 2 is pressed against the surface to be measured of the printed circuit board. It is configured.
Therefore, the pitch interval of printed circuit boards to be inspected recently has become very narrow. For this reason, since there is a demand for the development of a probe that is thinner, more reliable, and has a longer life, there is a strong demand for a contact probe that does not shake the tip of the needle portion.

  This is because if the tip of the needle part moves even slightly, the tip of the needle part may hit an unmeasured surface. By forming the needle part very finely, the clearance with the sleeve or probe guide is reduced proportionally, so the gap with the sleeve or probe guide can be reduced, so the deflection of the tip of the needle part is improved Is done.

  Since the conventional contact probe shown in FIG. 1 requires the coil spring 3, there is a limit in reducing the diameter of the contact probe. That is, the limit of the outer diameter of the probe is about 0.15 mm due to the function of the spring coil mounted inside. Even if a probe smaller than this is made, the functionality of the contact is incomplete, so it cannot be used industrially.

  The present invention is intended to solve such problems, and an ultrafine contact probe that can be significantly thinner than conventional probes and can perform inspection of a printed circuit board with a narrow pitch interval without hindrance. The purpose is to provide.

  In order to achieve the above-mentioned object, the present inventor has devised, as a result of diligent research, that an ultrafine wire body is brought into contact with an elastic body without using a coil spring, and the role of the coil spring is imparted to the elastic body. And the present invention has been reached.

  That is, according to the present invention, a probe pin formed from a very thin wire body is fitted to a probe guide so as to be able to advance and retreat, and a rear end is brought into contact with an elastic body, and the probe pin is moved in the front-rear direction by the elastic force of the elastic body. It is characterized in that it can move elastically.

The diameter of the probe pin is preferably 50 to 100 μm.
The contact probe is preferably formed from a material having spring properties such as steel, copper alloy, or tungsten.

  It is preferable that the probe pin is fitted to a probe pin holder fitted to the probe guide so as to be able to advance and retreat, and the probe pin is brought into contact with the elastic body via the holder. Item 4).

  It is preferable that the probe pin is fitted to the second probe guide via a guide pipe so as to be able to advance and retreat in front of the receptacle.

The probe pin holder is made of metal with a pipe-shaped central portion formed in a small diameter, and a hard metal wire is connected to the opposite surface of the stopper to which the probe pin rear end abuts. A lead wire may be connected to the diameter portion, and a lead wire may be connected to the narrow diameter portion. This hard metal linear body also serves to prevent the small-diameter portion from being bent or bent.
(Claim 6).

  In the case where the center of the receiver is formed thin, it is preferable that the receiver is fitted to the third probe guide so as to be able to advance and retract behind the receiver (claim 7).

  The elastic body may be made of rubber, and the elastic force of the rubber may be adjusted so that the pressing force against the rubber can be adjusted.

  It is preferable to provide a film or plate-like body on the probe or receiver contact portion of the elastic body and the opposing surface thereof, and adjust the elastic force of the rubber by pressing the film or plate-like body on the opposing surface with a screw. (Claim 9).

  According to the present invention, since the contact probe can be made as fine as half of the conventional one having a diameter of about 0.05 mm, inspection of a printed circuit board with a narrow pitch interval can be performed without any trouble, and the tip needle portion is Since it becomes difficult to move from the center, this type of conventional contact probe that effectively avoids the possibility of the tip hitting an object to be measured can have a great effect that is not seen at all.

  Next, embodiments of the present invention will be described with reference to the drawings.

  FIG. 2 shows an embodiment of the present invention. A metal probe pin holder 12 is fitted in the through hole of the guide resin plate 11 so as to be movable up and down. The rear end of the holder 12 is shown in FIG. , It abuts against a damper rubber 13 which acts as a spring.

  A probe pin (extra fine wire) 14 is fitted to the tip of the receiver 12, and when the tip of the probe pin 14 is pressed against the object 15, the receiver 12 resists the spring force of the damper rubber 13. When the pressure is released, the damper rubber 13 is lowered by the spring force.

  A second guide resin plate 16 faces the lower side of the guide resin plate 11, and a wear-resistant guide pipe 17 is closely fitted in a through hole of the second guide resin plate 16. 17, the tip of the probe pin 14 is slidably (moved up and down).

  A hemispherical (semi-circular cross section) stopper 18 is formed in the pipe-shaped receiving member 12, and the rear end of the probe pin 14 comes into contact with the stopper 18. Since the probe pin 14 is fitted to the receiving member 12 and is in elastic contact with the stopper 18, the reliability of the inspection is not impaired even if the probe pin 14 is formed thin.

  A hard metal wire (linear body) 19 is connected to the opposite surface of the hemispherical stopper 18, and the wire 19 reaches the rear end of the pipe-shaped receiving device 12. The center of the pipe-shaped receiving member 12 is formed in a small diameter portion 20, and a lead wire 21 is connected to the small diameter portion 20. In addition, the small diameter part 20 and the metal wire 19 in the inside are contacting.

  A third guide resin plate 26 faces above the guide resin plate 11, and the rear portion of the support 12 slides (moves up and down) into a through hole formed in the third guide resin plate 26. ) Fits freely.

  The rear end of the receiving tool 12 comes into contact with the damper rubber 13 through the strong film 22. The thickness of the strong film 22 is preferably selected in accordance with the thickness of the support 12 and the elastic force of the damper rubber 13.

  A plate body 23 is fixed to the upper end of the damper rubber 13 so that the elastic force of the damper rubber 13 can be adjusted by pressing the plate body 23 with a screw 24. The damper rubber 13 is fixed to the plate-like body 25.

  The diameter of the probe pin of the present invention is preferably 50 to 100 μm. In the embodiment of FIG. 2, the diameter of the probe pin is about 60 μm, and the diameter of the guide pipe 17 is about 100 μm.

  The distance between the second guide resin plate 16 and the guide resin plate 11 and the distance between the guide resin plate 11 and the third guide resin plate 26 are adjusted so that the probe is difficult to be bent or bent. good.

  According to the above embodiment, since the probe pin 14 is fitted so as to be attachable to and detachable from the receiver 12, it can be easily replaced when the probe tip is damaged.

  According to the present invention, since the coil spring or the like is not housed in the sleeve as in the conventional probe, the probe can be formed thinner accordingly. Further, since the probe pin is fitted to the receiving member and is in contact with the stopper 18 of the receiving member, the reliability of the inspection is not impaired even if the probe pin is made thinner.

It is sectional drawing which shows the conventional integrated contact probe.

It is sectional drawing which shows one Example of the contact probe of this invention.

Explanation of symbols

11... Guide resin plate 12... Probe pin holder 13... Damper rubber 14... Probe pin 15. Guide pipe 18 ......... Stopper 19 in the receiver ......... Hard metal wire (metal wire)
20 ......... Small diameter portion 21 ......... Lead wire 22 ......... Strong film 23 ......... Plate body 24 ......... Screw 25 ......... Plate body 26 ......... Second guide resin plate

Claims (9)

A probe pin formed from a very thin wire body is fitted to a probe guide so as to be able to advance and retreat, and a rear end is brought into contact with an elastic body, and the probe pin can be elastically moved in the front-rear direction by the elastic force of the elastic body. An ultra-fine contact probe characterized by being configured as described above. The contact probe according to claim 1, wherein the probe pin has a diameter of 50 to 100 μm. The contact probe according to claim 1, wherein the contact probe is formed of steel, a copper alloy, or tungsten. 2. The probe pin holder fitted to the probe guide so as to be able to advance and retreat is fitted to the probe pin, and the probe pin is brought into contact with the elastic body via the holder. The contact probe according to any one of? The contact probe according to any one of claims 1 to 4, wherein the probe pin is fitted in a second probe guide via a guide pipe so as to be capable of moving forward and backward in front of the receptacle. The probe pin holder is formed of a metal with a pipe-shaped central portion having a small diameter, and a hard metal linear body is connected to the surface opposite to the stopper of the holder that the rear end of the probe pin hits, The contact probe according to claim 1, wherein a lead wire is connected to the small diameter portion. The contact probe according to claim 6, wherein the receiver is fitted to a third probe guide so as to be able to advance and retract behind the receiver. The contact probe according to claim 1, wherein the elastic body is formed of rubber, and the elastic force of the rubber is adjusted so that a pressing force against the rubber can be adjusted. A film or a plate-like body is provided on the probe or receiver abutting portion of the elastic body and its opposing surface, and the elastic force of the rubber is adjusted by pressing the film or plate-like body on the opposing surface with a screw. Item 9. The contact probe according to Item 8.

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