JP2005247516A5 - - Google Patents

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Publication number
JP2005247516A5
JP2005247516A5 JP2004061510A JP2004061510A JP2005247516A5 JP 2005247516 A5 JP2005247516 A5 JP 2005247516A5 JP 2004061510 A JP2004061510 A JP 2004061510A JP 2004061510 A JP2004061510 A JP 2004061510A JP 2005247516 A5 JP2005247516 A5 JP 2005247516A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004061510A
Other languages
Japanese (ja)
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JP2005247516A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004061510A priority Critical patent/JP2005247516A/ja
Priority claimed from JP2004061510A external-priority patent/JP2005247516A/ja
Publication of JP2005247516A publication Critical patent/JP2005247516A/ja
Publication of JP2005247516A5 publication Critical patent/JP2005247516A5/ja
Pending legal-status Critical Current

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JP2004061510A 2004-03-05 2004-03-05 浮上式基板搬送処理装置 Pending JP2005247516A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004061510A JP2005247516A (ja) 2004-03-05 2004-03-05 浮上式基板搬送処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004061510A JP2005247516A (ja) 2004-03-05 2004-03-05 浮上式基板搬送処理装置

Publications (2)

Publication Number Publication Date
JP2005247516A JP2005247516A (ja) 2005-09-15
JP2005247516A5 true JP2005247516A5 (zh) 2006-02-02

Family

ID=35028385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004061510A Pending JP2005247516A (ja) 2004-03-05 2004-03-05 浮上式基板搬送処理装置

Country Status (1)

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JP (1) JP2005247516A (zh)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4745040B2 (ja) * 2005-12-05 2011-08-10 東京エレクトロン株式会社 基板搬送装置及び基板処理装置
KR100727001B1 (ko) 2006-05-04 2007-06-14 주식회사 디엠에스 인라인 타입 코팅장치
JP4982306B2 (ja) * 2007-09-05 2012-07-25 大日本スクリーン製造株式会社 塗布装置および塗布方法
JP5303129B2 (ja) * 2007-09-06 2013-10-02 東京応化工業株式会社 塗布装置及び塗布方法
JP5308647B2 (ja) * 2007-09-19 2013-10-09 東京応化工業株式会社 浮上搬送塗布装置
JP4787872B2 (ja) * 2008-10-16 2011-10-05 東京エレクトロン株式会社 基板搬送処理装置
KR101133266B1 (ko) 2009-11-02 2012-04-05 주식회사 나래나노텍 코팅 영역의 기판 이송 장치 및 이를 구비한 코팅 장치, 및 기판 이송 방법
JP5536516B2 (ja) * 2010-04-14 2014-07-02 オイレス工業株式会社 非接触搬送装置
KR101202456B1 (ko) 2010-06-24 2012-11-16 주식회사 나래나노텍 코팅 영역에서 기판을 안정적으로 이송시키기 위한 리니어 모션 가이드 구조, 및 이를 구비한 기판 이송 장치 및 코팅 장치
JP2014133655A (ja) * 2014-03-17 2014-07-24 Oiles Ind Co Ltd 非接触搬送装置
KR101965571B1 (ko) * 2016-09-06 2019-04-04 주식회사 케이씨텍 기판 처리 장치 및 기판 처리 시스템
JP6853520B2 (ja) * 2018-09-20 2021-03-31 株式会社Ｎｓｃ 浮上搬送装置

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