JP2005244703A - Base substrate - Google Patents

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JP2005244703A
JP2005244703A JP2004053051A JP2004053051A JP2005244703A JP 2005244703 A JP2005244703 A JP 2005244703A JP 2004053051 A JP2004053051 A JP 2004053051A JP 2004053051 A JP2004053051 A JP 2004053051A JP 2005244703 A JP2005244703 A JP 2005244703A
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base substrate
piezoelectric
surface electrode
substrate
electrode
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Takahiro Ueda
貴博 植田
Takeshi Nitobe
剛 二藤部
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Kyocera Crystal Device Corp
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Kyocera Crystal Device Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To obtain a base substrate capable of confirming improved junction intensity with a user substrate and the quality at the junction portion, when the base substrate becomes smaller in size following miniaturization of electronic components such as a crystal oscillator. <P>SOLUTION: In the base substrate for surface mounting, having a plane electrode as an external terminal which conducts between the internal and external sides of a sealed vessel for housing a piezoelectric element plate, the plane electrode is thickened by a laminate structure with metallization or addition of silver solder. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、主に無線通信機器や携帯電話機などの移動体通信分野などに使用される極小型化した圧電部品を収納する密閉容器に用いる圧電素板を実装するベース基板の面電極構造に関する。   The present invention relates to a surface electrode structure of a base substrate on which a piezoelectric element plate used for an airtight container for housing an extremely miniaturized piezoelectric component used mainly in the field of mobile communication such as a wireless communication device and a cellular phone is mounted.

昨今、コンピュータや携帯電話の普及に伴って日増しにその機能や性能が向上し、同時にモバイル化を展開する上で軽量化、薄型化、低背化が急激な速度で変化し、各電子部品業界ではその対応を課題のひとつとして取り組んでいる。コンピュータや携帯電話をはじめとするほとんどの電子機器の心臓部には、クロック信号や、局部発振部の信号を発生させる振動子や発振器は必要不可欠な部品であり、これら電子機器の形状の薄型化、低背化の流れに沿って発振器自体も同様に小型化(軽量化、薄型化、低背化、低容積化)への要求を強く求められている。   In recent years, with the spread of computers and mobile phones, the functions and performance have been increasing day by day, and at the same time, the weight reduction, thinning, and low profile have changed at an abrupt speed in developing mobile devices. The industry is addressing this as one of the challenges. At the heart of most electronic devices such as computers and mobile phones, oscillators and oscillators that generate clock signals and local oscillator signals are indispensable components. Along with the trend of low profile, the oscillator itself is also strongly demanded to be downsized (light weight, thin, low profile, low volume).

一般的な圧電振動子や圧電発振器は、セラミック材料や有機材料を用いた積層基板に圧電素板や駆動回路を実装するための印刷パターンを配置し、積層基板に多層印刷を施し導通パターンを配置した基板の同一平面上に必要部品として圧電素板や発振回路を構成するコンデンサ、抵抗、集積回路などの半導体部品を収納し気密雰囲気に封止された密閉容器として構成されている。   In general piezoelectric vibrators and piezoelectric oscillators, a printed pattern for mounting piezoelectric elements and drive circuits is placed on a multilayer substrate using ceramic materials or organic materials, and a conductive pattern is placed on the multilayer substrate by multilayer printing. This is configured as a sealed container in which semiconductor components such as a capacitor, resistor, and integrated circuit constituting a piezoelectric element plate and an oscillation circuit are housed as necessary components on the same plane of the substrate and sealed in an airtight atmosphere.

このように最近の圧電部品(圧電振動子、圧電発振器、弾性表面波装置)は、小さなユーザ基板に実装して使われており、同時にユーザ製品が小型化、薄型化することから、圧電部品の厚み(高さ)も極低背化した外形形状を強いられている現状にある。
特開平07−201650号公報 特開2002−141466号公報
In this way, recent piezoelectric parts (piezoelectric vibrators, piezoelectric oscillators, surface acoustic wave devices) are used by being mounted on a small user board. At the same time, user products have become smaller and thinner. The thickness (height) is currently forced to have a very low profile.
Japanese Patent Application Laid-Open No. 07-201650 JP 2002-141466 A

前述のように最近の圧電部品は極小型化と低背化が急激に進展している。更に、圧電部品においては今までの製品外形寸法が3mm×2.5mmであったものが、1.0ミリ角程度までに小さくなってきている。また同時に高さ寸法も0.5mmにまで低くなっていることで、従来の技術のように密閉容器を構成するベース基板を単体で加工し、そのベース基板に圧電部品を搭載する製造方法が難しい現状にある。   As described above, recent piezoelectric parts have been rapidly reduced in size and height. Further, in the piezoelectric component, the product outer dimension so far, which has been 3 mm × 2.5 mm, has been reduced to about 1.0 mm square. At the same time, since the height is reduced to 0.5 mm, it is difficult to manufacture a base substrate constituting a sealed container as in the prior art and mount a piezoelectric component on the base substrate. It is in the present situation.

そこで、ベース基板を例えばセラミック材料のウエハの状態で加工し、ひとつの圧電部品単位でのベース基板を得る前に、いわゆるバッチ処理でウエハ状のベース基板の上に圧電部品を搭載し、その後に圧電部品単位に切断することで現状の小型化に対応していた。   Therefore, for example, before processing the base substrate in the state of a wafer of ceramic material and obtaining the base substrate in one piezoelectric component unit, the piezoelectric component is mounted on the wafer-like base substrate by so-called batch processing, and then The current miniaturization was supported by cutting into piezoelectric parts.

しかし、圧電部品が極小型化し、外形寸法も小さくなるとベース基板をウエハの状態から加工するために、今まではウエハ状のベース基板の圧電部品単位で分割するために、ベース基板の側面で基板の表裏にスルーホールを設けて、このスルーホールの内壁にメタライズ処理を施すことができたが、外形寸法が小さくなったために、従来のスルーホール加工や形状を得ることができなくなってしまい、ユーザ基板への実装時の強度や、実装状態の確認をすることが難しくなってしまうという課題が生じてしまう。   However, if the piezoelectric component is miniaturized and the outer dimensions are reduced, the base substrate is processed from the wafer state, and until now, the substrate is divided by the piezoelectric component unit of the wafer-like base substrate. Through holes were provided on the front and back of the metal, and the inner wall of this through hole could be metallized. However, because the external dimensions were reduced, conventional through hole processing and shapes could not be obtained, and the user There arises a problem that it becomes difficult to confirm the strength and mounting state when mounted on the substrate.

上述のように本発明のベース基板により、圧電部品をユーザ基板に実装する際の実装強度と実装状態の確認をし易くすることで、ユーザ基板に実装時の実装品質を向上することができる。   As described above, with the base substrate of the present invention, it is possible to easily check the mounting strength and mounting state when mounting the piezoelectric component on the user substrate, thereby improving the mounting quality when mounted on the user substrate.

本発明は、圧電素板を収納する密閉容器で該密閉容器の内外に導通する電極を外部端子として面電極を備えた表面実装用のベース基板において、該面電極にはメタライズあるいは銀ロウを付加して積層構造で面電極の厚みを厚くしたことを特徴とするベース基板である。   The present invention relates to a surface mount base substrate which is an airtight container for housing a piezoelectric element plate and has an electrode that conducts the inside and outside of the airtight container as an external terminal. The surface electrode is added with metallization or silver solder. Thus, the base substrate is characterized in that the thickness of the surface electrode is increased in a laminated structure.

要するに、従来から密閉容器の一部である圧電素板を搭載するベース基板をウエハの状態で形成し用いた場合に、今までは圧電部品の外形寸法も大きく余裕を持ってウエハ状態に圧電部品単位でレイアウトすることができた。そのため、圧電部品単位では、基板の側面に配置するスルーホールとその内壁のメタライズ処理を行うことができたが、最近では外形寸法が小さくなったことから、上述のスルーホールとメタライズ処理が出来にくくなっている。   In short, when a base substrate on which a piezoelectric base plate, which is a part of a sealed container, is conventionally formed and used in a wafer state, the external dimensions of the piezoelectric component have been large so far that the piezoelectric component is in the wafer state. It was possible to lay out in units. For this reason, in the piezoelectric component unit, the metallization processing of the through hole and the inner wall disposed on the side surface of the substrate could be performed. However, since the outer dimensions have recently been reduced, it is difficult to perform the above-described through hole and metallization processing. It has become.

そのため、従来のベース基板を用いた圧電部品をユーザ基板に実装するときと同程度の実装強度を確保することと、実装時の接合状態を確認することができるように、ベース基板に形成する面電極部分に積層構造で厚みを付けて、例えば面電極を導電性接着剤やはんだなどで固着と導通を図る場合で、総合的に接合強度を確保するために、面電極の露出する表面積を増やすことを意図したものである。   Therefore, the surface to be formed on the base substrate to ensure the same mounting strength as when mounting piezoelectric parts using a conventional base substrate on the user substrate and to confirm the bonding state at the time of mounting. Increase the surface area where the surface electrode is exposed in order to secure overall bonding strength when the electrode part is thickened with a laminated structure, for example, when the surface electrode is fixed and connected with a conductive adhesive or solder. It is intended.

面電極の露出する表面積の確保については、ベース基板に対して面積を大きくすることも考えられるが、従来の技術にも記載するように圧電部品の外形寸法が極端に小さくなったことから、ベース基板に形成できる面電極にも制限がでるために、面電極の厚みを確保することで実際のユーザ基板実装時の接合強度と高めることができる。   As for securing the surface area where the surface electrode is exposed, it is conceivable to increase the area relative to the base substrate. However, as described in the prior art, the external dimensions of the piezoelectric component have become extremely small. Since the surface electrode that can be formed on the substrate is also limited, securing the thickness of the surface electrode can increase the bonding strength when actually mounted on the user substrate.

また、面電極の厚みを厚くすることで、ユーザ基板とベース基板とに隙間も確保できることから、面電極の接合状態を確認する場合の信頼性も向上することができる。なお、ここに記載する密閉容器には、圧電振動子、圧電発振器、弾性表面波を収納するものである。   Further, since the gap between the user substrate and the base substrate can be secured by increasing the thickness of the surface electrode, the reliability in confirming the bonding state of the surface electrode can also be improved. The sealed container described here accommodates a piezoelectric vibrator, a piezoelectric oscillator, and a surface acoustic wave.

以下、添付図面に従って本発明の実施例を説明する。なお、各図において同一の符号は同様の対象を示すものとする。なお、ベース基板上の配線や圧電素板の電極は図示していない。   Embodiments of the present invention will be described below with reference to the accompanying drawings. In each figure, the same numerals indicate the same objects. The wiring on the base substrate and the electrodes of the piezoelectric element plate are not shown.

図1は本発明の表面実装用部品を構成する側面断面図である。図1に示すようにベース基板4とその上部例えば金属などのフタ部材により密閉容器2を構成するものである。圧電素板1は金バンプや導電性接着剤で導通がとられている。なお、面電極3については第1の面電極と第2の面電極の積層構造となっている。   FIG. 1 is a side sectional view of the surface mounting component of the present invention. As shown in FIG. 1, a closed container 2 is constituted by a base substrate 4 and an upper portion thereof, for example, a lid member such as metal. The piezoelectric element plate 1 is electrically connected by a gold bump or a conductive adhesive. The surface electrode 3 has a laminated structure of a first surface electrode and a second surface electrode.

図2はウエハ状のベース基板4をイメージした図で、例えば3インチ角のセラミック基板から圧電部品の外形寸法単位で分割した様子を示すものである。図2(a)ではウエハ状態の全体図を示し、図2(b)では圧電部品単体としてのベース基板4を示す斜視図である。一方、図4では従来例としてのウエハ状態のベース基板4を示している。   FIG. 2 is an image of a wafer-like base substrate 4 and shows a state where, for example, a 3-inch square ceramic substrate is divided in units of external dimensions of piezoelectric components. FIG. 2A shows an overall view of the wafer state, and FIG. 2B is a perspective view showing a base substrate 4 as a single piezoelectric component. On the other hand, FIG. 4 shows a base substrate 4 in a wafer state as a conventional example.

図4からも分かるように圧電部品としての外形寸法とは大きく外形寸法が小さくなるために、特にベース基板4の表裏を導通させるためのベース基板4側面のスルーホールの形成が出来なくなっていることが分かると思われる。そのために、図2(b)では圧電部品単体で見た場合のベース基板4の側面にはメタライズ部分が無いことが分かる。   As can be seen from FIG. 4, since the outer dimensions of the piezoelectric component are large and the outer dimensions are small, it is not possible to form a through hole on the side surface of the base substrate 4 for conducting the base board 4 in particular. It seems to understand. Therefore, in FIG. 2B, it can be seen that there is no metallized portion on the side surface of the base substrate 4 when viewed as a single piezoelectric component.

図3は本発明のベース基板4を圧電部品の単体として分割した中のひとつを面電極3に注目して図示したものである。従来と大きく異なる点は、図3(a)に示すように側面にメタライズ部分が無いことと、ユーザ基板と実装する面電極に第1の面電極と第2の面電極を積層構造にして厚みを加えたことである。厚みを付加するために、メタライズ層を厚くしたり、ロウ材などを加えている。   FIG. 3 shows one of the divided base substrates 4 of the present invention as a single piezoelectric component, paying attention to the surface electrode 3. As shown in FIG. 3A, there is a significant difference from the conventional case, and there is no metallized portion on the side surface, and the surface electrode to be mounted on the user board has a laminated structure of the first surface electrode and the second surface electrode. Is added. In order to add thickness, the metallized layer is thickened or a brazing material is added.

図3(b)には図3(a)を拡大したもので、第1の面電極と第2の面電極との面積を大きく変えて描画したもと、図3(c)のように、ユーザ基板との接合強度の向上を図るために、面電極3の形状を工夫したものとして第1の電極の外形を変えたものである。本願発明の経緯としては、表面実装型の水晶振動子の外形寸法が2mm×1.6mmと小型化、軽量化する現状にある。そこで従来の発想である個別にベース基板4を製造するのでは無く、一枚のウエハ状のベース基板4を小割に切断することで、外形寸法が小さくなった場合の取り扱いを改善したものである。要するに一枚のウエハ状ベース基板4の形態で水晶振動子を組立、その後個々の水晶振動子に小割切断するものである。   FIG. 3B is an enlarged view of FIG. 3A, and is drawn by changing the areas of the first surface electrode and the second surface electrode as shown in FIG. In order to improve the bonding strength with the user substrate, the outer shape of the first electrode is changed as a devised shape of the surface electrode 3. The background of the present invention is that the external dimensions of the surface-mount type quartz crystal resonator are 2 mm × 1.6 mm and are reduced in size and weight. Therefore, instead of manufacturing the base substrate 4 individually, which is a conventional idea, the handling of the case where the outer dimensions are reduced is improved by cutting a single wafer-like base substrate 4 into smaller pieces. is there. In short, a crystal resonator is assembled in the form of a single wafer-like base substrate 4 and then cut into individual crystal resonators.

本発明では圧電材料を用いた振動子を中心として記述するが、通信機器に用いる発振器や弾性表面素子についても応用することができる。   In the present invention, a vibrator using a piezoelectric material is mainly described. However, the present invention can also be applied to an oscillator and an elastic surface element used for communication equipment.

本発明で得たベース基板を用いた表面実装部品の断面図である。It is sectional drawing of the surface mounted component using the base substrate obtained by this invention. 本発明で用いるベース基板の概念図である。It is a conceptual diagram of the base substrate used by this invention. 本発明のベース基板の面電極部に注目した図である。It is the figure which paid its attention to the surface electrode part of the base substrate of this invention. 従来から用いるベース基板の概念図である。It is a conceptual diagram of the base substrate used conventionally.

符号の説明Explanation of symbols

1 圧電素板
2 密閉容器
3 面電極
4 ベース基板
DESCRIPTION OF SYMBOLS 1 Piezoelectric base plate 2 Airtight container 3 Surface electrode 4 Base substrate

Claims (2)

圧電素板を収納する密閉容器で該密閉容器の内外に導通する電極を外部端子として面電極を備えた表面実装用のベース基板において、
該面電極にはメタライズあるいは銀ロウを付加して積層構造で面電極の厚みを厚くしたことを特徴とするベース基板。
In a surface mount base substrate having a surface electrode as an external terminal, an electrode that conducts the inside and outside of the sealed container in a sealed container containing a piezoelectric element plate,
A base substrate characterized in that metal oxide or silver solder is added to the surface electrode to increase the thickness of the surface electrode in a laminated structure.
請求項1記載の密閉容器は、圧電振動子、圧電発振器、弾性表面波を収納することを特徴とするベース基板。

The base container according to claim 1, wherein the base substrate stores a piezoelectric vibrator, a piezoelectric oscillator, and a surface acoustic wave.

JP2004053051A 2004-02-27 2004-02-27 Base substrate Pending JP2005244703A (en)

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JP2007096899A (en) * 2005-09-29 2007-04-12 Seiko Epson Corp Manufacturing method and bonding structure of piezoelectric vibration piece, and piezoelectric device
JP2009100353A (en) * 2007-10-18 2009-05-07 Nippon Dempa Kogyo Co Ltd Quartz crystal device
JP2009141455A (en) * 2007-12-04 2009-06-25 Nippon Dempa Kogyo Co Ltd Crystal device for surface mounting
JP2009188374A (en) * 2008-01-07 2009-08-20 Epson Toyocom Corp Package for electronic component, and piezoelectric vibrator

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Publication number Priority date Publication date Assignee Title
JP2007096899A (en) * 2005-09-29 2007-04-12 Seiko Epson Corp Manufacturing method and bonding structure of piezoelectric vibration piece, and piezoelectric device
JP2009100353A (en) * 2007-10-18 2009-05-07 Nippon Dempa Kogyo Co Ltd Quartz crystal device
JP2009141455A (en) * 2007-12-04 2009-06-25 Nippon Dempa Kogyo Co Ltd Crystal device for surface mounting
JP2009188374A (en) * 2008-01-07 2009-08-20 Epson Toyocom Corp Package for electronic component, and piezoelectric vibrator
JP2013065875A (en) * 2008-01-07 2013-04-11 Seiko Epson Corp Package for electronic component and electronic device

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