JP2005217801A - Piezoelectric transducer - Google Patents

Piezoelectric transducer Download PDF

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JP2005217801A
JP2005217801A JP2004022288A JP2004022288A JP2005217801A JP 2005217801 A JP2005217801 A JP 2005217801A JP 2004022288 A JP2004022288 A JP 2004022288A JP 2004022288 A JP2004022288 A JP 2004022288A JP 2005217801 A JP2005217801 A JP 2005217801A
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container body
recess
lid
piezoelectric vibrator
wiring conductor
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Toshio Nakazawa
利夫 中澤
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Kyocera Corp
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Kyocera Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric transducer that can be handled easily and can cope with the miniaturization of an entire structure relatively easily. <P>SOLUTION: In the piezoelectric transducer, a plurality of external terminals 3 including a ground terminal 3a and a recess 1a are provided on the lower surface and the upper surface of a container 1, respectively, a piezoelectric element 5 is accommodated in the recess 1a, and a metal lid 8 for blocking the opening of the recess 1a is attached onto the upper surface of the container 1. In the piezoelectric transducer, the lid 8 and the ground terminal 3a are electrically connected via a ground wiring conductor 6 deposited on the inner surface of the recess of the container 1. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、携帯用通信機器や電子計算機等の電子機器に用いられる水晶振動子等の圧電振動子に関するものである。   The present invention relates to a piezoelectric vibrator such as a quartz vibrator used in electronic equipment such as portable communication equipment and electronic computers.

従来より、携帯用通信機器や電子計算機等の電子機器に水晶振動子が用いられている。   Conventionally, crystal resonators have been used in electronic devices such as portable communication devices and electronic computers.

かかる従来の水晶振動子としては、例えば図3に示す如く、アルミナセラミックス等から成る容器体21の上面に凹部22を形成するとともに、該凹部22内に水晶振動素子23を搭載・収容し、前記容器体21の上面に、凹部22の開口部を塞ぐようにして金属製の蓋体24を取着・接合した構造のものが知られている(例えば、特許文献1参照。)。   As such a conventional crystal resonator, for example, as shown in FIG. 3, a concave portion 22 is formed on the upper surface of a container body 21 made of alumina ceramic or the like, and a quartz resonator element 23 is mounted and accommodated in the concave portion 22. There is known a structure in which a metal lid 24 is attached and joined to the upper surface of the container body 21 so as to close the opening of the recess 22 (see, for example, Patent Document 1).

尚、前記蓋体24は、容器体21の上面に金属シート等を介して載置・固定されており、従来周知の抵抗溶接等によって容器体21の上面に接合される。これにより、凹部22の内面と蓋体24の下面とで囲まれた領域が気密封止されることとなる。   The lid body 24 is mounted and fixed on the upper surface of the container body 21 via a metal sheet or the like, and is joined to the upper surface of the container body 21 by conventionally known resistance welding or the like. Thereby, the region surrounded by the inner surface of the recess 22 and the lower surface of the lid 24 is hermetically sealed.

また上述した従来の水晶振動子は、通常、蓋体24が容器体内部のビアホール導体26等を介して容器体下面のグランド端子27に電気的に接続されており、水晶振動子の使用時、蓋体24をグランド電位に保持しておくことにより、水晶振動素子23をノイズ等の不要な電気的作用から保護するようにしている。   In the above-described conventional crystal resonator, the lid body 24 is usually electrically connected to the ground terminal 27 on the lower surface of the container body via the via-hole conductor 26 and the like inside the container body. By holding the lid 24 at the ground potential, the crystal resonator element 23 is protected from unnecessary electric action such as noise.

かかる水晶振動子は、容器体21の下面に設けられる入出力端子(入力端子・出力端子)を介して水晶振動素子23の振動電極間に外部からの変動電圧が印加されると、水晶振動素子23の特性に応じた所定の周波数で厚みすべり振動を起こし、その周波数に基づいて外部の発振回路で所定の発振信号を生成・出力することによって水晶振動子として機能する。そして、得られた発振信号は、例えば携帯用通信機器等の電子機器におけるクロック信号(基準信号)として利用される。
特開2001−274649号公報
When such a crystal resonator is applied with a varying voltage from the outside between the vibration electrodes of the crystal resonator element 23 via an input / output terminal (input terminal / output terminal) provided on the lower surface of the container body 21, the crystal resonator element The thickness shear vibration is generated at a predetermined frequency corresponding to the characteristic of the frequency 23, and a predetermined oscillation signal is generated and output by an external oscillation circuit based on the frequency, thereby functioning as a crystal resonator. The obtained oscillation signal is used as a clock signal (reference signal) in an electronic device such as a portable communication device.
JP 2001-274649 A

ところで、上述した従来の水晶振動子においては、蓋体24とグランド端子27とが容器体内部のビアホール導体26等を介して電気的に接続されており、かかるビアホール導体26のうち、容器体21の上面に導出される部位は容器体21の側壁部(凹部内壁と容器体外壁との間の部位)に埋設されている。それ故、近時の水晶振動子の小型化に伴い上述した側壁部の厚みを薄くした場合、側壁部に埋設されるビアホール導体26の径も小さくなってしまい、その結果、ビアホール導体26の上端が露出される容器体21の上面において金属シート等との導通を確実にとることが困難になるという欠点を有していた。   Incidentally, in the above-described conventional crystal resonator, the lid body 24 and the ground terminal 27 are electrically connected via the via-hole conductor 26 and the like inside the container body. The part led out to the upper surface of the container is embedded in the side wall of the container body 21 (the part between the inner wall of the recess and the outer wall of the container body). Therefore, when the thickness of the side wall portion described above is reduced along with the recent miniaturization of the crystal unit, the diameter of the via hole conductor 26 embedded in the side wall portion is also reduced. As a result, the upper end of the via hole conductor 26 is reduced. There is a drawback that it is difficult to reliably establish conduction with a metal sheet or the like on the upper surface of the container body 21 from which is exposed.

そこで上記欠点を解消するために、上述したビアホール導体26の代わりに、容器体外壁面の上端から下端にかけて帯状のグランド配線導体を被着させ、このグランド配線導体を介して蓋体24とグランド端子27とを電気的に接続することが考えられる。   Therefore, in order to eliminate the above-described drawbacks, a belt-like ground wiring conductor is attached from the upper end to the lower end of the outer wall surface of the container instead of the via hole conductor 26 described above, and the lid body 24 and the ground terminal 27 are interposed via the ground wiring conductor. Can be electrically connected to each other.

しかしながら、容器体21の外壁面にグランド配線導体を被着させた場合、水晶振動子を半田付け等によってマザーボード等の外部配線基板上に実装した際に溶融した半田の一部がグランド配線導体に付着して短絡を起こしたり、或いは、溶融した半田がグランド配線導体を伝って蓋体26の近傍まで這い上がり、これがAu−Sn等の接合材と混ざり合うことで蓋体26の接合強度を著しく低下させてしまう恐れがあり、水晶振動子の取り扱いに簡便性を欠く欠点を有していた。   However, when the ground wiring conductor is attached to the outer wall surface of the container body 21, a part of the melted solder when the crystal resonator is mounted on an external wiring substrate such as a mother board by soldering or the like becomes the ground wiring conductor. Adhering causes a short circuit, or the molten solder crawls up to the vicinity of the lid body 26 through the ground wiring conductor, and mixes with a bonding material such as Au—Sn, thereby significantly increasing the bonding strength of the lid body 26. There is a risk that it may be lowered, and there is a drawback that the handling of the crystal resonator is not easy.

本発明は上記欠点に鑑み案出されたもので、その目的は、取り扱いが簡便で、全体構造の小型化にも比較的容易に対応することができる圧電振動子を提供することにある。   The present invention has been devised in view of the above-mentioned drawbacks, and an object of the present invention is to provide a piezoelectric vibrator that is easy to handle and can cope with the downsizing of the entire structure relatively easily.

本発明の圧電振動子は、容器体の下面にグランド端子を含む複数個の外部端子を、上面に凹部を設けるとともに、該凹部内に圧電振動素子を収容し、前記容器体の上面に前記凹部の開口部を塞ぐ金属製の蓋体を取着させてなる圧電振動子において、前記蓋体と前記グランド端子とを、前記容器体の凹部内面に被着させたグランド配線導体を介して電気的に接続したことを特徴とするものである。   The piezoelectric vibrator of the present invention includes a plurality of external terminals including ground terminals on the lower surface of the container body, a recess on the upper surface, a piezoelectric vibration element accommodated in the recess, and the recess on the upper surface of the container body. In the piezoelectric vibrator formed by attaching a metal lid that closes the opening of the container, the lid and the ground terminal are electrically connected via a ground wiring conductor attached to the inner surface of the concave portion of the container body. It is characterized by being connected to.

また本発明の圧電振動子は、前記グランド配線導体が、前記凹部の開口部から凹部底面にかけて柱状に形成された切り欠きの内面に被着されていることを特徴とするものである。   The piezoelectric vibrator of the present invention is characterized in that the ground wiring conductor is attached to the inner surface of a notch formed in a column shape from the opening of the recess to the bottom of the recess.

更に本発明の圧電振動子は、前記容器体の凹部開口部が矩形状を成しており、前記切り欠きが前記開口部の角部に設けられていることを特徴とするものである。   Furthermore, the piezoelectric vibrator of the present invention is characterized in that the concave opening of the container body has a rectangular shape, and the notch is provided at a corner of the opening.

また更に本発明の圧電振動子は、前記容器体が矩形状を、前記切り欠きが略円柱状をなしており、前記容器体の角部から該角部に近接する切り欠きまでの最短距離Dと、前記角部の両側に配されている容器体外側面−凹部内壁間の側壁部の厚みT,Tとが関係式「D≧T」「D≧T」の双方を満たすように設定されていることを特徴とするものである。 Still further, in the piezoelectric vibrator of the present invention, the container body has a rectangular shape and the notch has a substantially cylindrical shape, and the shortest distance D from the corner portion of the container body to the notch adjacent to the corner portion. And the thicknesses T 1 and T 2 of the side wall portion between the outer surface of the container body and the inner wall of the concave portion arranged on both sides of the corner portion satisfy both the relational expressions “D ≧ T 1 ” and “D ≧ T 2 ”. It is characterized by being set to.

更にまた本発明の圧電振動子は、前記圧電振動素子が水晶振動素子であることを特徴とするものである。   Furthermore, the piezoelectric vibrator of the present invention is characterized in that the piezoelectric vibration element is a crystal vibration element.

本発明の圧電振動子によれば、圧電振動素子が収容される容器体の凹部内面にグランド配線導体を被着させるとともに、該グランド配線導体を介して容器体上の金属製蓋体と容器体下面のグランド端子とを電気的に接続するようにしたことから、圧電振動子の小型化に伴い容器体の側壁部の厚みを薄くする場合であっても、容器体の側壁部の厚みに左右されることなくグランド配線導体を容器体上面の接合用導体と確実に接続させることができ、圧電振動子の小型化に供することが可能となる。   According to the piezoelectric vibrator of the present invention, the ground wiring conductor is attached to the inner surface of the concave portion of the container body in which the piezoelectric vibration element is accommodated, and the metal lid and the container body on the container body are interposed via the ground wiring conductor. Since the ground terminal on the lower surface is electrically connected, the thickness of the side wall portion of the container body is affected by the thickness of the side wall portion of the container body even when the thickness of the side wall portion of the container body is reduced due to downsizing of the piezoelectric vibrator. Accordingly, the ground wiring conductor can be reliably connected to the bonding conductor on the upper surface of the container body, and the piezoelectric vibrator can be miniaturized.

しかも本発明の圧電振動子によれば、前記グランド配線導体は容器体の凹部内面に被着されていることから、圧電振動子を半田付け等によってマザーボード等の外部配線基板上に実装する際、溶融した半田の一部がグランド配線導体に付着して短絡を起こしたり、或いは、溶融した半田が蓋体を接合するAu−Sn等の接合材と混ざり合うことで蓋体の接合強度を低下させるといった問題は皆無となり、取り扱いが簡便な圧電振動子が得られるようになる。   Moreover, according to the piezoelectric vibrator of the present invention, since the ground wiring conductor is attached to the inner surface of the concave portion of the container body, when mounting the piezoelectric vibrator on an external wiring board such as a mother board by soldering or the like, A part of the melted solder adheres to the ground wiring conductor to cause a short circuit, or the melted solder is mixed with a bonding material such as Au—Sn for joining the lid, thereby reducing the joint strength of the lid. Such a problem is eliminated, and a piezoelectric vibrator that is easy to handle can be obtained.

また本発明の圧電振動子によれば、上述したグランド配線導体を凹部の開口部から凹部底面にかけて柱状に形成された切り欠きの内面に被着させておけば、圧電振動素子が凹部内でグランド配線導体に接触して短絡するのを有効に防止することができ、圧電振動子の生産性を高く維持することが可能になる。   According to the piezoelectric vibrator of the present invention, if the ground wiring conductor is attached to the inner surface of the notch formed in a column shape from the opening of the recess to the bottom of the recess, the piezoelectric vibration element is grounded in the recess. It is possible to effectively prevent a short circuit due to contact with the wiring conductor, and it is possible to maintain high productivity of the piezoelectric vibrator.

更に本発明の圧電振動子によれば、凹部の開口部を矩形状に成し、側壁部の厚みが最も厚い凹部内面の内側角部に上述の切り欠きを設けておくことにより、容器体の機械的強度を高く保つことができるようになり、外力の印加に伴う容器体の破損を有効に防止することが可能となる。またこの場合、容器体の角部から該角部に近接する切り欠きまでの最短距離Dを、角部の両側に配されている容器体側壁部の厚みT,Tよりも大きく設定しておくことにより、外力の印加に伴う容器体の破損をより確実に防止することができ、圧電振動子の信頼性を高く維持することが可能となる。 Furthermore, according to the piezoelectric vibrator of the present invention, the opening of the concave portion is formed in a rectangular shape, and the above-mentioned notch is provided in the inner corner of the inner surface of the concave portion where the thickness of the side wall portion is the thickest. The mechanical strength can be kept high, and the breakage of the container body due to the application of external force can be effectively prevented. In this case, the shortest distance D from the corner portion of the container body to the notch close to the corner portion is set to be larger than the thicknesses T 1 and T 2 of the container body side wall portions arranged on both sides of the corner portion. By doing so, it is possible to more reliably prevent damage to the container body due to application of external force, and it is possible to maintain high reliability of the piezoelectric vibrator.

以下、本発明を添付図面に基づいて詳細に説明する。   Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

図1は本発明の圧電振動子を水晶振動子に適用した一実施形態を示す断面図であり、同図に示す水晶振動子は、大略的に、容器体1と、圧電振動素子としての水晶振動素子5と、蓋体8とで構成されている。   FIG. 1 is a cross-sectional view showing an embodiment in which the piezoelectric vibrator of the present invention is applied to a quartz crystal vibrator. The quartz crystal vibrator shown in the figure is roughly composed of a container body 1 and a quartz crystal as a piezoelectric vibrating element. The vibration element 5 and the lid 8 are configured.

前記容器体1は、例えば、アルミナセラミックス、ガラス−セラミック等のセラミック材料から成る絶縁層を複数層、積層することによって形成されており、その上面にはその中央域に矩形状に開口する凹部1aが、周辺域に凹部1aの開口部を囲繞する環状の接合用導体9が形成され、下面には入力端子、出力端子及びグランド端子3aを含む複数個の外部端子3が設けられている。   The container body 1 is formed, for example, by laminating a plurality of insulating layers made of a ceramic material such as alumina ceramics or glass-ceramics, and a concave portion 1a that opens in a rectangular shape in the central region on the upper surface thereof. However, an annular bonding conductor 9 surrounding the opening of the recess 1a is formed in the peripheral area, and a plurality of external terminals 3 including an input terminal, an output terminal, and a ground terminal 3a are provided on the lower surface.

前記容器体1は、その内部、具体的には凹部1a内で水晶振動素子5を収容するためのものであり、凹部1aの底面には一対の接続パッド2が、凹部1aの内壁には円柱状の切り欠き4が形成されている。   The container body 1 is for accommodating the crystal resonator element 5 inside, specifically, in the recess 1a. A pair of connection pads 2 are provided on the bottom surface of the recess 1a, and a circular shape is provided on the inner wall of the recess 1a. A columnar notch 4 is formed.

前記凹部1aの底面に設けられている一対の接続パッド2は、その上面側で水晶振動素子5の振動電極に導電性接着材を介して電気的に接続され、下面側で容器体内部の導体パターンやビアホール導体等を介して入出力端子(入力端子・出力端子)に電気的に接続される。   The pair of connection pads 2 provided on the bottom surface of the recess 1a are electrically connected to the vibration electrode of the crystal resonator element 5 on the upper surface side through a conductive adhesive, and the conductors inside the container body on the lower surface side. It is electrically connected to the input / output terminal (input terminal / output terminal) via a pattern, a via-hole conductor or the like.

一方、前記凹部1aの内壁に設けられている切り欠き4は、凹部1aの4つのコーナーのうち2つのコーナー部分に設けられており、凹部1aの開口部から凹部底面にかけて形成されている。   On the other hand, the notches 4 provided on the inner wall of the recess 1a are provided at two corners of the four corners of the recess 1a, and are formed from the opening of the recess 1a to the bottom of the recess.

そして、このような切り欠き4に臨む凹部1aの内面にはグランド配線導体6が被着・形成されており、かかるグランド配線導体6の上端側は接合用導体9に電気的に接続され、下端側は容器体1内の凹部底面よりも下方に埋設されたビアホール導体を介して容器体下面のグランド端子3aに電気的に接続されている。   A ground wiring conductor 6 is deposited and formed on the inner surface of the recess 1a facing the notch 4, and the upper end side of the ground wiring conductor 6 is electrically connected to the bonding conductor 9, and the lower end. The side is electrically connected to the ground terminal 3a on the lower surface of the container body via a via-hole conductor embedded below the bottom surface of the recess in the container body 1.

また、前記容器体1の上面に設けられている接合用導体9は、例えば、Au−Sn,Au−Ni等の導電性材料によって環状に形成されており、該接合用導体9の表面に後述するシールリング10が接合される。   Further, the bonding conductor 9 provided on the upper surface of the container body 1 is formed in an annular shape by a conductive material such as Au—Sn, Au—Ni, for example, and the surface of the bonding conductor 9 is described later. The seal ring 10 is joined.

更にまた、前記容器体1の下面に設けられている複数個の外部端子3は、水晶振動子をマザーボード等の外部配線基板上に搭載する際、外部配線基板の配線と半田等の導電性接着材を介して電気的に接続するための端子として機能するものである。   Furthermore, the plurality of external terminals 3 provided on the lower surface of the container body 1 are formed by conductive bonding such as soldering with the wiring of the external wiring board when the crystal resonator is mounted on the external wiring board such as a mother board. It functions as a terminal for electrical connection through a material.

尚、上述した容器体1は、アルミナセラミックスから成る場合、所定のセラミック材料粉末に適当な有機溶剤等を添加・混合して得たセラミックグリーンシートの表面に外部端子3や接続パッド2,導体パターン等となる導体ペーストを、またセラミックグリーンシートに打ち抜き等を施して予め穿設しておいた貫通孔内にビアホール導体となる導体ペーストを、従来周知のスクリーン印刷等によって塗布するとともに、これを複数枚積層してプレス成形した後、高温で焼成することによって製作される。また、前記切り欠き4の奥行きは、例えば、容器体1の側壁部(凹部内壁面と容器体外壁面との間の領域)の厚みが200μmの場合、40μm〜80μmの深さに設定され、その形成領域と接するように設けられるグランド配線導体6は従来周知の電解メッキ法等によって凹部1aの内面に被着・形成される。   When the container body 1 is made of alumina ceramic, the external terminal 3, the connection pad 2, and the conductor pattern are formed on the surface of a ceramic green sheet obtained by adding and mixing a suitable organic solvent to a predetermined ceramic material powder. In addition, a conductive paste to be a via-hole conductor is applied by a conventionally known screen printing or the like into a through-hole previously punched by punching a ceramic green sheet or the like, and a plurality of such pastes are applied. After being laminated and press-molded, it is manufactured by firing at a high temperature. The depth of the notch 4 is set to a depth of 40 μm to 80 μm, for example, when the thickness of the side wall portion of the container body 1 (region between the inner wall surface of the recess and the outer wall surface of the container body) is 200 μm, The ground wiring conductor 6 provided so as to be in contact with the formation region is deposited and formed on the inner surface of the recess 1a by a conventionally known electrolytic plating method or the like.

そして、前記容器体1の凹部1a内に収容される水晶振動素子5は、所定の結晶軸でカットした、厚み30μm〜160μmの水晶片の両主面に一対の振動電極(図示せず)を被着・形成してなり、外部からの変動電圧が一対の振動電極を介して水晶片に印加されると、所定の周波数で厚みすべり振動を起こすようになっている。   The quartz resonator element 5 accommodated in the recess 1a of the container body 1 has a pair of vibrating electrodes (not shown) on both main surfaces of a crystal piece having a thickness of 30 μm to 160 μm cut along a predetermined crystal axis. When the fluctuating voltage from the outside is applied to the crystal piece via the pair of vibrating electrodes, the thickness shear vibration is caused at a predetermined frequency.

このような水晶振動素子5は、その両主面に被着されている振動電極と凹部底面の対応する接続パッド2とを導電性接着材7を介して電気的・機械的に接続することによって容器体1の凹部底面に搭載される。   Such a quartz-crystal vibrating element 5 is obtained by electrically and mechanically connecting the vibrating electrodes attached to both main surfaces thereof and the corresponding connection pads 2 on the bottom surface of the recesses via the conductive adhesive 7. It is mounted on the bottom surface of the recess of the container body 1.

更にまた、前記容器体1の上面にはシールリング10を介して金属製の蓋体8が固定されており、これによって蓋体8はシールリング10、接合用導体9及びグランド配線導体6を介して容器体下面のグランド端子3aと電気的に接続され、同時に、蓋体8の下面で凹部1aの開口部が塞がれ、水晶振動素子5が収容される領域を気密封止している。   Furthermore, a metal lid 8 is fixed to the upper surface of the container body 1 via a seal ring 10, whereby the lid 8 is interposed via the seal ring 10, the joining conductor 9 and the ground wiring conductor 6. And the ground terminal 3a on the lower surface of the container body is electrically connected. At the same time, the opening of the concave portion 1a is closed on the lower surface of the lid body 8, and the region in which the crystal resonator element 5 is accommodated is hermetically sealed.

このとき、金属から成る蓋体8は先に述べたグランド配線導体6等を介してグランド端子3aと電気的に接続されており、水晶振動子の使用時、蓋体8はグランド電位に保持されることとなるため、蓋体8のシールド作用によって、水晶振動素子5を外部からの不要な電気的作用より良好に保護することができる。   At this time, the lid 8 made of metal is electrically connected to the ground terminal 3a via the above-described ground wiring conductor 6 and the like, and the lid 8 is held at the ground potential when the crystal resonator is used. Therefore, the quartz resonator element 5 can be protected better than the unnecessary electrical action from the outside by the shielding action of the lid 8.

またこの場合、グランド配線導体6は容器体1の凹部内面に被着されているため、水晶振動素の小型化に伴い容器体1の側壁部の厚みを薄くする場合であっても、容器体1上の蓋体8とグランド端子3aとを容器体1の側壁部の厚みに左右されることなくグランド配線導体6でもって確実に接続させることができ、水晶振動子の小型化に供することが可能となる。   In this case, since the ground wiring conductor 6 is attached to the inner surface of the concave portion of the container body 1, the container body 1 can be used even when the thickness of the side wall portion of the container body 1 is reduced as the quartz resonator element is downsized. 1 can be reliably connected by the ground wiring conductor 6 without being influenced by the thickness of the side wall of the container body 1, and the crystal resonator can be miniaturized. It becomes possible.

しかも、前記グランド配線導体6は容器体1の凹部内面に被着されていることから、水晶振動子を半田付け等によってマザーボード等の外部配線基板上に実装する際に、溶融した半田の一部がグランド配線導体6に付着して短絡を起こしたり、或いは、溶融した半田が蓋体8を接合するAu−Sn等の接合材と混ざり合うことで蓋体8の接合強度を低下させるといった問題は皆無となり、取り扱いが簡便な水晶振動子が得られる利点もある。   Moreover, since the ground wiring conductor 6 is attached to the inner surface of the concave portion of the container body 1, a part of the melted solder is mounted when the crystal resonator is mounted on an external wiring board such as a mother board by soldering or the like. Are attached to the ground wiring conductor 6 to cause a short circuit, or the melted solder is mixed with a bonding material such as Au—Sn for bonding the lid body 8 to reduce the bonding strength of the lid body 8. There is also an advantage that a crystal resonator that can be easily handled can be obtained.

また前記グランド配線導体6は、凹部1aの開口部から凹部底面にかけて柱状に形成された切り欠き4の内面に被着させてあるため、水晶振動素子5が凹部1a内でグランド配線導体6に接触して短絡するといった不具合の発生を有効に防止することができ、水晶振動子の生産性を高く維持することも可能となる。   Further, since the ground wiring conductor 6 is attached to the inner surface of the notch 4 formed in a column shape from the opening of the recess 1a to the bottom of the recess, the crystal resonator element 5 contacts the ground wiring conductor 6 in the recess 1a. Therefore, it is possible to effectively prevent the occurrence of a problem such as a short circuit, and it is possible to maintain high productivity of the crystal unit.

更に本実施形態においては、容器体1の側壁部の厚みが最も厚くなっている凹部内面の内側角部に切り欠き4を設けるようにしているため、切り欠き4を設けたことによる容器体1の強度低下を極力小さく抑えて、容器体1の機械的強度を高く保つことができ、外力の印加に伴う容器体1の破損を有効に防止することが可能となる。この点において、より好適な条件としては、容器体1の角部から該角部に近接する切り欠き4までの最短距離Dを、角部の両側に配されている容器体側壁部の厚みT,Tよりも大きく設定しておくことであり、これによって外力の印加に伴う容器体1の破損をより確実に防止し、水晶振動子の信頼性を高く維持することが可能となる。 Furthermore, in this embodiment, since the notch 4 is provided at the inner corner of the inner surface of the recess where the thickness of the side wall of the container body 1 is the thickest, the container body 1 by providing the notch 4. It is possible to keep the mechanical strength of the container body 1 high, and to effectively prevent damage to the container body 1 due to the application of external force. In this respect, as a more preferable condition, the shortest distance D from the corner portion of the container body 1 to the notch 4 adjacent to the corner portion is set to the thickness T of the container body side wall portion disposed on both sides of the corner portion. 1, by setting larger than T 2, thereby more reliably prevent breakage of the container body 1 due to the application of external force, it is possible to maintain high reliability of the crystal oscillator.

尚、蓋体8及びシールリング10はコバールや42アロイ,リン青銅等の金属によってそれぞれ所定形状をなすように形成されており、前記シールリング10はAu−Sn,Au−Ni等の接合材を介して容器体上面の接合用導体9に接合させることによって容器体1に取着され、前記蓋体8は従来周知のシーム溶接(抵抗溶接)等を採用し、蓋体8の下面外周部をAu−Ni等の接合材を介してシールリング10の上面に接合させることによってシールリング10の上面に取着される。   The lid 8 and the seal ring 10 are formed of a metal such as Kovar, 42 alloy, phosphor bronze, etc., respectively, and the seal ring 10 is made of a bonding material such as Au-Sn or Au-Ni. The lid body 8 is attached to the container body 1 by being joined to the joining conductor 9 on the top surface of the container body, and the lid body 8 employs a well-known seam welding (resistance welding) or the like. It is attached to the upper surface of the seal ring 10 by being bonded to the upper surface of the seal ring 10 via a bonding material such as Au—Ni.

このとき、蓋体8の接合作業を窒素ガスやアルゴンガス等の不活性ガス雰囲気中で行うようにすれば、水晶振動素子5が収納される空間には不活性ガスが充満されるため、水晶振動素子5が酸素や大気中の水分等によって腐食・劣化するのを有効に防止することができる。従って、蓋体8の接合作業は窒素ガスやアルゴンガス等の不活性ガス雰囲気中で行うことが好ましい。   At this time, if the lid 8 is joined in an inert gas atmosphere such as nitrogen gas or argon gas, the space in which the crystal resonator element 5 is accommodated is filled with inert gas. It is possible to effectively prevent the vibration element 5 from being corroded or deteriorated by oxygen or moisture in the atmosphere. Therefore, it is preferable to perform the joining operation of the lid 8 in an inert gas atmosphere such as nitrogen gas or argon gas.

かくして上述した水晶振動子は、容器体1の下面に設けられている入出力端子を介して水晶振動素子5の振動電極間に外部からの変動電圧を印加し、水晶振動素子5を所定の周波数で厚みすべり振動させることによって水晶振動子として機能する。かかる水晶振動子の周波数に基づいて外部の発振回路で生成・出力された発振信号は、例えば、携帯用通信機器等の電子機器における基準信号(クロック信号)として利用されることとなる。   Thus, the above-described crystal resonator applies a fluctuating voltage from the outside between the vibration electrodes of the crystal resonator element 5 via the input / output terminal provided on the lower surface of the container body 1, thereby causing the crystal resonator element 5 to have a predetermined frequency. It functions as a quartz crystal resonator by vibrating it through thickness. An oscillation signal generated and output by an external oscillation circuit based on the frequency of the crystal resonator is used as a reference signal (clock signal) in an electronic device such as a portable communication device.

尚、本発明は上述の実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々の変更、改良等が可能である。   In addition, this invention is not limited to the above-mentioned embodiment, A various change, improvement, etc. are possible in the range which does not deviate from the summary of this invention.

例えば、上述した実施形態においては、シールリング10を用いて蓋体8を容器体1上に取着させるようにしたが、これに代えて、容器体上面の接合用導体9に対して蓋体8を直接、接合することにより蓋体8を容器体1上に取着させるようにしても構わない。   For example, in the above-described embodiment, the lid body 8 is attached to the container body 1 using the seal ring 10. Instead, the lid body is connected to the bonding conductor 9 on the upper surface of the container body. The lid 8 may be attached onto the container body 1 by directly joining the 8.

また上述した実施形態においては、凹部1a内に設けた切り欠き4の内面にグランド配線導体6を被着させるようにしたが、そのような実施形態に限定されるものではなく、グランド配線導体6を凹部1aの内壁面に直接被着させても良いし、グランド配線導体6を切り欠き4の内面に被着させる場合であっても切り欠き4を凹部1aのコーナー以外の箇所に設けるようにしても良い。この場合、切り欠き4は半円柱状になしておくことが好ましく、このように切り欠き4の内面を曲面状になしておくことにより、グランド配線導体6を切り欠き4の形成領域に臨む凹部1aの内面に良好に被着させておくことができる。   In the above-described embodiment, the ground wiring conductor 6 is attached to the inner surface of the notch 4 provided in the recess 1a. However, the present invention is not limited to such an embodiment, and the ground wiring conductor 6 is not limited thereto. May be directly attached to the inner wall surface of the recess 1a, or even when the ground wiring conductor 6 is attached to the inner surface of the notch 4, the notch 4 is provided at a location other than the corner of the recess 1a. May be. In this case, the notch 4 is preferably formed in a semi-cylindrical shape, and the inner surface of the notch 4 is thus curved so that the ground wiring conductor 6 faces the formation region of the notch 4. It can be satisfactorily adhered to the inner surface of 1a.

更に上述した実施形態においては、圧電振動素子として水晶振動素子を用いることにより水晶振動子を構成するようにしたが、それ以外の圧電振動子、例えば、弾性表面波素子等を用いて圧電振動子を構成する場合においても本発明は適用可能である。   Further, in the above-described embodiment, the crystal resonator is configured by using the crystal resonator element as the piezoelectric resonator element. However, other piezoelectric resonators such as a surface acoustic wave element are used to form the piezoelectric resonator. The present invention can also be applied to the case of configuring the above.

本発明の圧電振動子を水晶振動子に適用した一実施形態を示す分解斜視図である。1 is an exploded perspective view showing an embodiment in which a piezoelectric vibrator of the present invention is applied to a quartz crystal vibrator. 図1の水晶振動子の断面図である。FIG. 2 is a cross-sectional view of the crystal resonator of FIG. 1. 従来の圧電振動子の断面図である。It is sectional drawing of the conventional piezoelectric vibrator.

符号の説明Explanation of symbols

1・・・容器体
1a・・・凹部
2・・・接続パッド
3・・・外部端子
3a・・・グランド端子
4・・・切り欠き
5・・・水晶振動素子(圧電振動素子)
6・・・グランド配線導体
7・・・導電性接着材
8・・・蓋体
9・・・接合用導体
10・・・シールリング
DESCRIPTION OF SYMBOLS 1 ... Container body 1a ... Concave part 2 ... Connection pad 3 ... External terminal 3a ... Ground terminal 4 ... Notch 5 ... Crystal oscillation element (piezoelectric oscillation element)
6 ... Ground wiring conductor 7 ... Conductive adhesive 8 ... Cover 9 ... Conducting conductor 10 ... Seal ring

Claims (5)

容器体の下面にグランド端子を含む複数個の外部端子を、上面に凹部を設けるとともに、該凹部内に圧電振動素子を収容し、前記容器体の上面に前記凹部の開口部を塞ぐ金属製の蓋体を取着させてなる圧電振動子において、
前記蓋体と前記グランド端子とを、前記容器体の凹部内面に被着させたグランド配線導体を介して電気的に接続したことを特徴とする圧電振動子。
A plurality of external terminals including ground terminals are provided on the lower surface of the container body, a recess is provided on the upper surface, a piezoelectric vibration element is accommodated in the recess, and the opening made of the recess is closed on the upper surface of the container body. In the piezoelectric vibrator with the lid attached,
The piezoelectric vibrator, wherein the lid body and the ground terminal are electrically connected via a ground wiring conductor attached to the inner surface of the concave portion of the container body.
前記グランド配線導体が、前記凹部の開口部から凹部底面にかけて柱状に形成された切り欠きの内面に被着されていることを特徴とする請求項1に記載の圧電振動子。 2. The piezoelectric vibrator according to claim 1, wherein the ground wiring conductor is attached to an inner surface of a notch formed in a column shape from the opening of the recess to the bottom of the recess. 前記容器体の凹部開口部が矩形状を成しており、前記切り欠きが前記開口部の角部に設けられていることを特徴とする請求項2に記載の圧電振動子。 3. The piezoelectric vibrator according to claim 2, wherein the concave opening of the container body has a rectangular shape, and the notch is provided at a corner of the opening. 前記容器体が矩形状をなしており、前記容器体の角部から該角部に近接する切り欠きまでの最短距離Dと、前記角部の両側に配されている容器体外側面−凹部内壁間の側壁部の厚みT,Tとが下記関係式(1)(2)の双方を満たすように設定されていることを特徴とする請求項3に記載の圧電振動素子。
D≧T・・・関係式(1)
D≧T・・・関係式(2)
The container body has a rectangular shape, and the shortest distance D from the corner portion of the container body to the notch close to the corner portion, and between the container body outer surface and the inner wall of the recess disposed on both sides of the corner portion 4. The piezoelectric vibration element according to claim 3, wherein the thicknesses T 1 and T 2 of the side walls are set so as to satisfy both of the following relational expressions (1) and (2).
D ≧ T 1 ... Relational expression (1)
D ≧ T 2 ... Relational expression (2)
前記圧電振動素子が水晶振動素子であることを特徴とする請求項1乃至請求項4のいずれかに記載の圧電振動子。 The piezoelectric vibrator according to claim 1, wherein the piezoelectric vibration element is a crystal vibration element.
JP2004022288A 2004-01-29 2004-01-29 Piezoelectric transducer Pending JP2005217801A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007184545A (en) * 2005-12-06 2007-07-19 Yamaha Corp Semiconductor unit, semiconductor device and method for manufacturing the same
JP2009010660A (en) * 2007-06-27 2009-01-15 Daishinku Corp Piezoelectric vibration device
JP2009010671A (en) * 2007-06-28 2009-01-15 Daishinku Corp Piezoelectric vibrating device
JP2011171701A (en) * 2010-01-23 2011-09-01 Kyocera Corp Electronic component housing package
JP2012174814A (en) * 2011-02-19 2012-09-10 Kyocera Corp Electronic component storing package
US8344489B2 (en) 2005-12-06 2013-01-01 Yamaha Corporation Semiconductor device and manufacturing method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007184545A (en) * 2005-12-06 2007-07-19 Yamaha Corp Semiconductor unit, semiconductor device and method for manufacturing the same
US8344489B2 (en) 2005-12-06 2013-01-01 Yamaha Corporation Semiconductor device and manufacturing method thereof
JP2009010660A (en) * 2007-06-27 2009-01-15 Daishinku Corp Piezoelectric vibration device
JP2009010671A (en) * 2007-06-28 2009-01-15 Daishinku Corp Piezoelectric vibrating device
JP2011171701A (en) * 2010-01-23 2011-09-01 Kyocera Corp Electronic component housing package
JP2012174814A (en) * 2011-02-19 2012-09-10 Kyocera Corp Electronic component storing package

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