JP2005231116A5 - - Google Patents
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- Publication number
- JP2005231116A5 JP2005231116A5 JP2004041312A JP2004041312A JP2005231116A5 JP 2005231116 A5 JP2005231116 A5 JP 2005231116A5 JP 2004041312 A JP2004041312 A JP 2004041312A JP 2004041312 A JP2004041312 A JP 2004041312A JP 2005231116 A5 JP2005231116 A5 JP 2005231116A5
- Authority
- JP
- Japan
- Prior art keywords
- liquid discharge
- inorganic material
- material film
- flow path
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims 19
- 229910010272 inorganic material Inorganic materials 0.000 claims 9
- 239000011147 inorganic material Substances 0.000 claims 9
- 238000004519 manufacturing process Methods 0.000 claims 5
- 238000000034 method Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 229910017604 nitric acid Inorganic materials 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004041312A JP4480132B2 (ja) | 2004-02-18 | 2004-02-18 | 液体吐出用ヘッドの製造方法 |
| US11/058,164 US7090339B2 (en) | 2004-02-18 | 2005-02-16 | Liquid discharge head and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004041312A JP4480132B2 (ja) | 2004-02-18 | 2004-02-18 | 液体吐出用ヘッドの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005231116A JP2005231116A (ja) | 2005-09-02 |
| JP2005231116A5 true JP2005231116A5 (enExample) | 2007-04-05 |
| JP4480132B2 JP4480132B2 (ja) | 2010-06-16 |
Family
ID=34836411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004041312A Expired - Fee Related JP4480132B2 (ja) | 2004-02-18 | 2004-02-18 | 液体吐出用ヘッドの製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7090339B2 (enExample) |
| JP (1) | JP4480132B2 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4865309B2 (ja) | 2005-11-29 | 2012-02-01 | キヤノン株式会社 | インクジェット記録ヘッド用基板の製造方法 |
| JP4871612B2 (ja) * | 2006-03-01 | 2012-02-08 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| JP4854336B2 (ja) * | 2006-03-07 | 2012-01-18 | キヤノン株式会社 | インクジェットヘッド用基板の製造方法 |
| US7699441B2 (en) * | 2006-12-12 | 2010-04-20 | Eastman Kodak Company | Liquid drop ejector having improved liquid chamber |
| JP4979440B2 (ja) * | 2007-04-03 | 2012-07-18 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| US20090233386A1 (en) * | 2008-03-12 | 2009-09-17 | Yimin Guan | Method for forming an ink jetting device |
| JP5566130B2 (ja) * | 2009-02-26 | 2014-08-06 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| SG178479A1 (en) * | 2009-08-25 | 2012-04-27 | Silverbrook Res Pty Ltd | Crack-resistant thermal bend actuator |
| JP5679688B2 (ja) * | 2010-03-31 | 2015-03-04 | キヤノン株式会社 | 液体吐出ヘッド及びその製造方法 |
| JP6041527B2 (ja) * | 2012-05-16 | 2016-12-07 | キヤノン株式会社 | 液体吐出ヘッド |
| JP6230279B2 (ja) * | 2013-06-06 | 2017-11-15 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4611219A (en) * | 1981-12-29 | 1986-09-09 | Canon Kabushiki Kaisha | Liquid-jetting head |
| US4438191A (en) | 1982-11-23 | 1984-03-20 | Hewlett-Packard Company | Monolithic ink jet print head |
| JP3143307B2 (ja) | 1993-02-03 | 2001-03-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
| JPH11138773A (ja) * | 1997-11-10 | 1999-05-25 | Fuji Xerox Co Ltd | 画像形成方法および画像形成装置 |
| JP3619036B2 (ja) | 1997-12-05 | 2005-02-09 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
| US6650350B2 (en) * | 1998-08-31 | 2003-11-18 | Canon Kabushiki Kaisha | Process and apparatus for forming images |
| JP2002029047A (ja) * | 2000-07-13 | 2002-01-29 | Fuji Xerox Co Ltd | インクジェット記録ヘッド及びその製造方法、インクジェット記録装置 |
| US6398329B1 (en) * | 2000-11-13 | 2002-06-04 | Hewlett-Packard Company | Thermal inkjet pen having a backpressure sensor |
-
2004
- 2004-02-18 JP JP2004041312A patent/JP4480132B2/ja not_active Expired - Fee Related
-
2005
- 2005-02-16 US US11/058,164 patent/US7090339B2/en not_active Expired - Fee Related