JP2005221044A - 角度調整装置 - Google Patents

角度調整装置 Download PDF

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Publication number
JP2005221044A
JP2005221044A JP2004031858A JP2004031858A JP2005221044A JP 2005221044 A JP2005221044 A JP 2005221044A JP 2004031858 A JP2004031858 A JP 2004031858A JP 2004031858 A JP2004031858 A JP 2004031858A JP 2005221044 A JP2005221044 A JP 2005221044A
Authority
JP
Japan
Prior art keywords
connecting portion
screw
linear guide
motion
screw shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004031858A
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English (en)
Japanese (ja)
Other versions
JP2005221044A5 (enExample
Inventor
Takashi Hirano
敬 平野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
NSK Precision Co Ltd
Original Assignee
NSK Ltd
NSK Precision Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd, NSK Precision Co Ltd filed Critical NSK Ltd
Priority to JP2004031858A priority Critical patent/JP2005221044A/ja
Publication of JP2005221044A publication Critical patent/JP2005221044A/ja
Publication of JP2005221044A5 publication Critical patent/JP2005221044A5/ja
Pending legal-status Critical Current

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JP2004031858A 2004-02-09 2004-02-09 角度調整装置 Pending JP2005221044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004031858A JP2005221044A (ja) 2004-02-09 2004-02-09 角度調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004031858A JP2005221044A (ja) 2004-02-09 2004-02-09 角度調整装置

Publications (2)

Publication Number Publication Date
JP2005221044A true JP2005221044A (ja) 2005-08-18
JP2005221044A5 JP2005221044A5 (enExample) 2007-02-22

Family

ID=34996835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004031858A Pending JP2005221044A (ja) 2004-02-09 2004-02-09 角度調整装置

Country Status (1)

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JP (1) JP2005221044A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010071275A1 (en) * 2008-12-19 2010-06-24 Secron Co., Ltd. Control unit for adjusting a wafer angle in a probe apparatus
KR101099500B1 (ko) 2009-11-24 2011-12-27 (주)대일정공 자세회전 장치 및 이를 포함하는 의료용 테이블
TWI480121B (zh) * 2014-08-05 2015-04-11 Chin Yen Wang 對位平台之傳動裝置
CN111069925A (zh) * 2020-01-10 2020-04-28 北京集科仪器有限公司 一种角度回转台
CN114251425A (zh) * 2021-12-28 2022-03-29 保定向阳航空精密机械有限公司 一种旋转定位机构
WO2023190416A1 (ja) * 2022-03-28 2023-10-05 日本精工株式会社 角度調整テーブル
CN119780674A (zh) * 2024-12-27 2025-04-08 长春光华微电子设备工程中心有限公司 卡盘承载台

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010071275A1 (en) * 2008-12-19 2010-06-24 Secron Co., Ltd. Control unit for adjusting a wafer angle in a probe apparatus
KR101099500B1 (ko) 2009-11-24 2011-12-27 (주)대일정공 자세회전 장치 및 이를 포함하는 의료용 테이블
TWI480121B (zh) * 2014-08-05 2015-04-11 Chin Yen Wang 對位平台之傳動裝置
CN111069925A (zh) * 2020-01-10 2020-04-28 北京集科仪器有限公司 一种角度回转台
CN114251425A (zh) * 2021-12-28 2022-03-29 保定向阳航空精密机械有限公司 一种旋转定位机构
CN114251425B (zh) * 2021-12-28 2023-09-15 保定向阳航空精密机械有限公司 一种旋转定位机构
WO2023190416A1 (ja) * 2022-03-28 2023-10-05 日本精工株式会社 角度調整テーブル
KR20240157056A (ko) 2022-03-28 2024-10-31 닛본 세이고 가부시끼가이샤 각도 조정 테이블
JP7626090B2 (ja) 2022-03-28 2025-02-04 日本精工株式会社 角度調整テーブル
CN119780674A (zh) * 2024-12-27 2025-04-08 长春光华微电子设备工程中心有限公司 卡盘承载台

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