JP2005197693A - 半導体素子の配線形成方法 - Google Patents
半導体素子の配線形成方法 Download PDFInfo
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- JP2005197693A JP2005197693A JP2004373232A JP2004373232A JP2005197693A JP 2005197693 A JP2005197693 A JP 2005197693A JP 2004373232 A JP2004373232 A JP 2004373232A JP 2004373232 A JP2004373232 A JP 2004373232A JP 2005197693 A JP2005197693 A JP 2005197693A
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- interlayer insulating
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- 238000000034 method Methods 0.000 title claims abstract description 44
- 239000004065 semiconductor Substances 0.000 title claims abstract description 26
- 229910052751 metal Inorganic materials 0.000 claims abstract description 53
- 239000002184 metal Substances 0.000 claims abstract description 53
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 11
- 239000011229 interlayer Substances 0.000 claims description 41
- 239000010410 layer Substances 0.000 claims description 27
- 238000005530 etching Methods 0.000 claims description 20
- 239000010949 copper Substances 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052802 copper Inorganic materials 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 229910010272 inorganic material Inorganic materials 0.000 claims description 6
- 239000011147 inorganic material Substances 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- 239000011368 organic material Substances 0.000 claims description 4
- HWEYZGSCHQNNEH-UHFFFAOYSA-N silicon tantalum Chemical compound [Si].[Ta] HWEYZGSCHQNNEH-UHFFFAOYSA-N 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 4
- 230000009977 dual effect Effects 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 230000002265 prevention Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
【解決手段】本発明ではデュアルダマシンで配線を形成しながらビアホールVを形成した感光膜パターンPR1,PR2を利用してトレンチTを形成することによって、トレンチTを形成するための感光膜パターンを別途に形成せずに金属配線82を容易に形成することができる。
【選択図】図1
Description
第1金属層としてタンタルナイトライド(TaN)、タンタル(Ta)、タンタルシリコンナイトライド(TaSiN)などの拡散防止膜が挙げられ、第2金属層として低抵抗金属である銅(Cu)などの導電物質で形成されている金属層が挙げられる。
図面で多様な層及び領域を明確に表現するために厚さを拡大して示した。また明細書全体にかけて類似な部分については同一な図面符号を付けた。
まず、本発明の実施形態による半導体素子の金属配線構造を添付した図面を参照して詳細に説明する。
図1に示すように、金属配線(図示せず)または半導体素子などの下部構造が形成されている半導体基板10上にエッチング停止膜12が形成されており、エッチング停止膜12上には第1及び第2層間絶縁膜14、16が形成されている。
図2乃至図4は本発明の一実施形態による半導体素子の金属配線を形成する方法を工程順に示した断面図である。
この時、第1層間絶縁膜14は無機物質で形成されており、第2層間絶縁膜16は低誘電率有機物質で形成されていてエッチング選択比の差が大きい。
その後、図1に示すようにビアホールVとトレンチTの内壁にチタニウムまたはチタニウム合金などの金属を蒸着して薄い第1金属膜を蒸着する。次いで、第1金属膜によって画定されるビアホールV及びトレンチ内部に充填するように第2金属膜を形成する。
12 エッチング停止膜
14 第1層間絶縁膜
16 第2層間絶縁膜
82 金属配線
T トレンチ
V ビアホール
PR1 感光膜パターン
PR2 第2感光膜パターン
Claims (4)
- 半導体基板上にエッチング停止膜を形成する段階と、
前記エッチング停止膜上に第1層間絶縁膜を形成する段階と、
前記第1層間絶縁膜上に第2層間絶縁膜を形成する段階と、
前記第2層間絶縁膜上にビアホールを画定する第1感光膜パターンを形成する段階、
前記第1感光膜パターンをマスクとして前記エッチング停止膜を露出するビアホールを形成する段階と、
前記第1感光膜パターンを露光及び現像してトレンチを画定する第2感光膜パターンを形成する段階と、
前記第2感光膜パターンをマスクとして前記第2層間絶縁膜をエッチングしてトレンチを形成する段階と、
前記ビアホールによって露出されるエッチング停止膜を除去する段階と、
前記ビアホール及びトレンチ内部を充填する金属配線を形成する段階と、
を含むことを特徴とする、半導体素子の配線形成方法。 - 前記金属配線は、
前記ビアホール及びトレンチ内壁に形成されている第1金属層と、
前記第1金属層によって画定されるビアホール及びトレンチを充填する第2金属層と、で形成されていることを特徴とする、請求項1に記載の半導体素子の配線形成方法。 - 前記第1層間絶縁膜は無機物質で形成し、
前記第2層間絶縁膜は低誘電率有機物質で形成することを特徴とする、請求項1に記載の半導体素子の配線形成方法。 - 前記第1金属層はタンタルナイトライド、タンタル、タンタルシリコンナイトライドで形成し、
前記第2金属層は銅で形成することを特徴とする、請求項2に記載の半導体素子の配線形成方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030101834A KR100571409B1 (ko) | 2003-12-31 | 2003-12-31 | 반도체 소자의 배선 형성 방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2005197693A true JP2005197693A (ja) | 2005-07-21 |
Family
ID=34698927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004373232A Pending JP2005197693A (ja) | 2003-12-31 | 2004-12-24 | 半導体素子の配線形成方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7241684B2 (ja) |
JP (1) | JP2005197693A (ja) |
KR (1) | KR100571409B1 (ja) |
DE (1) | DE102004062392B4 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20060078849A (ko) * | 2004-12-30 | 2006-07-05 | 동부일렉트로닉스 주식회사 | 반도체 장치 및 그의 제조 방법 |
US7368393B2 (en) * | 2006-04-20 | 2008-05-06 | International Business Machines Corporation | Chemical oxide removal of plasma damaged SiCOH low k dielectrics |
US10522468B2 (en) * | 2017-07-31 | 2019-12-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect structure and method |
CN112820706A (zh) * | 2020-12-30 | 2021-05-18 | 南通通富微电子有限公司 | 扇出型封装结构及封装方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6294799B1 (en) * | 1995-11-27 | 2001-09-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of fabricating same |
KR0184158B1 (ko) | 1996-07-13 | 1999-04-15 | 문정환 | 반도체장치의 자기 정합정 금속 배선 형성 방법 |
US5877092A (en) * | 1997-06-18 | 1999-03-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for edge profile and design rules control |
US6271117B1 (en) * | 1997-06-23 | 2001-08-07 | Vanguard International Semiconductor Corporation | Process for a nail shaped landing pad plug |
US5877075A (en) * | 1997-10-14 | 1999-03-02 | Industrial Technology Research Institute | Dual damascene process using single photoresist process |
US6770975B2 (en) * | 1999-06-09 | 2004-08-03 | Alliedsignal Inc. | Integrated circuits with multiple low dielectric-constant inter-metal dielectrics |
US6251770B1 (en) * | 1999-06-30 | 2001-06-26 | Lam Research Corp. | Dual-damascene dielectric structures and methods for making the same |
US6313026B1 (en) * | 2000-04-10 | 2001-11-06 | Micron Technology, Inc. | Microelectronic contacts and methods for producing same |
KR100350811B1 (ko) * | 2000-08-19 | 2002-09-05 | 삼성전자 주식회사 | 반도체 장치의 금속 비아 콘택 및 그 형성방법 |
JP2003092349A (ja) * | 2001-09-18 | 2003-03-28 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
US6713402B2 (en) * | 2002-05-31 | 2004-03-30 | Texas Instruments Incorporated | Methods for polymer removal following etch-stop layer etch |
KR20030094453A (ko) | 2002-06-04 | 2003-12-12 | 주식회사 하이닉스반도체 | 듀얼 다마신 공정을 이용한 반도체소자 제조방법 |
US6709965B1 (en) * | 2002-10-02 | 2004-03-23 | Taiwan Semiconductor Manufacturing Company | Aluminum-copper bond pad design and method of fabrication |
-
2003
- 2003-12-31 KR KR1020030101834A patent/KR100571409B1/ko not_active IP Right Cessation
-
2004
- 2004-12-23 DE DE102004062392A patent/DE102004062392B4/de not_active Expired - Fee Related
- 2004-12-24 JP JP2004373232A patent/JP2005197693A/ja active Pending
- 2004-12-30 US US11/024,631 patent/US7241684B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US7241684B2 (en) | 2007-07-10 |
US20050142850A1 (en) | 2005-06-30 |
KR20050071041A (ko) | 2005-07-07 |
KR100571409B1 (ko) | 2006-04-14 |
DE102004062392B4 (de) | 2007-07-26 |
DE102004062392A1 (de) | 2005-08-04 |
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