JP2005193088A5 - - Google Patents

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Publication number
JP2005193088A5
JP2005193088A5 JP2003435750A JP2003435750A JP2005193088A5 JP 2005193088 A5 JP2005193088 A5 JP 2005193088A5 JP 2003435750 A JP2003435750 A JP 2003435750A JP 2003435750 A JP2003435750 A JP 2003435750A JP 2005193088 A5 JP2005193088 A5 JP 2005193088A5
Authority
JP
Japan
Prior art keywords
excimer lamp
lamp
excimer
house
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003435750A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005193088A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003435750A priority Critical patent/JP2005193088A/ja
Priority claimed from JP2003435750A external-priority patent/JP2005193088A/ja
Priority to TW093139767A priority patent/TWI259497B/zh
Priority to PCT/JP2004/019762 priority patent/WO2005065817A1/ja
Priority to KR1020057004537A priority patent/KR100641309B1/ko
Priority to CNB2004800127242A priority patent/CN100420512C/zh
Publication of JP2005193088A publication Critical patent/JP2005193088A/ja
Publication of JP2005193088A5 publication Critical patent/JP2005193088A5/ja
Pending legal-status Critical Current

Links

JP2003435750A 2003-12-26 2003-12-26 エキシマランプ照射装置 Pending JP2005193088A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2003435750A JP2005193088A (ja) 2003-12-26 2003-12-26 エキシマランプ照射装置
TW093139767A TWI259497B (en) 2003-12-26 2004-12-21 Irradiating device of excimer lamp and method for using the same
PCT/JP2004/019762 WO2005065817A1 (ja) 2003-12-26 2004-12-24 エキシマランプ照射装置及びその使用方法
KR1020057004537A KR100641309B1 (ko) 2003-12-26 2004-12-24 엑시머 램프 조사 장치 및 그 사용 방법
CNB2004800127242A CN100420512C (zh) 2003-12-26 2004-12-24 激发式气体分子放电灯的照射装置及其使用方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003435750A JP2005193088A (ja) 2003-12-26 2003-12-26 エキシマランプ照射装置

Publications (2)

Publication Number Publication Date
JP2005193088A JP2005193088A (ja) 2005-07-21
JP2005193088A5 true JP2005193088A5 (enrdf_load_stackoverflow) 2007-02-15

Family

ID=34746912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003435750A Pending JP2005193088A (ja) 2003-12-26 2003-12-26 エキシマランプ照射装置

Country Status (5)

Country Link
JP (1) JP2005193088A (enrdf_load_stackoverflow)
KR (1) KR100641309B1 (enrdf_load_stackoverflow)
CN (1) CN100420512C (enrdf_load_stackoverflow)
TW (1) TWI259497B (enrdf_load_stackoverflow)
WO (1) WO2005065817A1 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4501830B2 (ja) 2005-09-28 2010-07-14 ウシオ電機株式会社 エキシマランプ及び紫外線照射装置
JP5146061B2 (ja) * 2008-04-10 2013-02-20 ウシオ電機株式会社 エキシマランプおよびこれを備えたランプユニット
JP5195111B2 (ja) * 2008-07-17 2013-05-08 ウシオ電機株式会社 エキシマランプ装置
TWI841791B (zh) * 2019-10-07 2024-05-11 日商牛尾電機股份有限公司 紫外線照射裝置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3653980B2 (ja) * 1998-04-09 2005-06-02 ウシオ電機株式会社 紫外線照射装置
JP4045682B2 (ja) * 1999-01-26 2008-02-13 株式会社日立ハイテクノロジーズ 紫外線照射による基板処理装置
JP2001185089A (ja) * 1999-12-28 2001-07-06 Quark Systems Co Ltd エキシマ照射装置
ES2213371T3 (es) * 1999-06-04 2004-08-16 Henry Kozlowski Aparato y metodo para tratamiento de fluidos con luz ultravioleta.
JP2001217216A (ja) * 1999-11-25 2001-08-10 Hoya Schott Kk 紫外線照射方法及び装置
JP2001319510A (ja) * 2000-05-11 2001-11-16 Ushio Inc 誘電体バリア放電ランプ装置
US6559460B1 (en) * 2000-10-31 2003-05-06 Nordson Corporation Ultraviolet lamp system and methods
JP3757790B2 (ja) * 2000-11-30 2006-03-22 ウシオ電機株式会社 誘電体バリア放電ランプを使った光源装置
JP4126892B2 (ja) * 2001-09-14 2008-07-30 ウシオ電機株式会社 光照射装置

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