JP2005191361A5 - - Google Patents
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- Publication number
- JP2005191361A5 JP2005191361A5 JP2003432401A JP2003432401A JP2005191361A5 JP 2005191361 A5 JP2005191361 A5 JP 2005191361A5 JP 2003432401 A JP2003432401 A JP 2003432401A JP 2003432401 A JP2003432401 A JP 2003432401A JP 2005191361 A5 JP2005191361 A5 JP 2005191361A5
- Authority
- JP
- Japan
- Prior art keywords
- metal
- electro
- optical device
- forming
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229910052751 metal Inorganic materials 0.000 claims 31
- 239000002184 metal Substances 0.000 claims 31
- 239000010955 niobium Substances 0.000 claims 10
- 239000000758 substrate Substances 0.000 claims 9
- 239000000956 alloy Substances 0.000 claims 7
- 229910045601 alloy Inorganic materials 0.000 claims 7
- 238000004519 manufacturing process Methods 0.000 claims 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 7
- 229910052721 tungsten Inorganic materials 0.000 claims 7
- 239000010937 tungsten Substances 0.000 claims 7
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 6
- 229910052750 molybdenum Inorganic materials 0.000 claims 6
- 239000011733 molybdenum Substances 0.000 claims 6
- 229910052758 niobium Inorganic materials 0.000 claims 6
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims 5
- 229910052715 tantalum Inorganic materials 0.000 claims 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 5
- 239000000463 material Substances 0.000 claims 4
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 229910017604 nitric acid Inorganic materials 0.000 claims 3
- 239000000654 additive Substances 0.000 claims 2
- 230000000996 additive effect Effects 0.000 claims 2
- 239000004973 liquid crystal related substance Substances 0.000 claims 2
- 150000002739 metals Chemical class 0.000 claims 2
- 238000000059 patterning Methods 0.000 claims 2
- 235000011007 phosphoric acid Nutrition 0.000 claims 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims 1
- 238000000137 annealing Methods 0.000 claims 1
- 239000010407 anodic oxide Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000001259 photo etching Methods 0.000 claims 1
- XGZGDYQRJKMWNM-UHFFFAOYSA-N tantalum tungsten Chemical compound [Ta][W][Ta] XGZGDYQRJKMWNM-UHFFFAOYSA-N 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003432401A JP2005191361A (ja) | 2003-12-26 | 2003-12-26 | 非線形抵抗素子、電気光学装置、電気光学装置の製造方法、及び電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003432401A JP2005191361A (ja) | 2003-12-26 | 2003-12-26 | 非線形抵抗素子、電気光学装置、電気光学装置の製造方法、及び電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005191361A JP2005191361A (ja) | 2005-07-14 |
| JP2005191361A5 true JP2005191361A5 (https=) | 2006-06-15 |
Family
ID=34790114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003432401A Withdrawn JP2005191361A (ja) | 2003-12-26 | 2003-12-26 | 非線形抵抗素子、電気光学装置、電気光学装置の製造方法、及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005191361A (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8449817B2 (en) | 2010-06-30 | 2013-05-28 | H.C. Stark, Inc. | Molybdenum-containing targets comprising three metal elements |
| US8449818B2 (en) | 2010-06-30 | 2013-05-28 | H. C. Starck, Inc. | Molybdenum containing targets |
| US9334565B2 (en) | 2012-05-09 | 2016-05-10 | H.C. Starck Inc. | Multi-block sputtering target with interface portions and associated methods and articles |
-
2003
- 2003-12-26 JP JP2003432401A patent/JP2005191361A/ja not_active Withdrawn
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