JP2005184028A5 - - Google Patents

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Publication number
JP2005184028A5
JP2005184028A5 JP2005041611A JP2005041611A JP2005184028A5 JP 2005184028 A5 JP2005184028 A5 JP 2005184028A5 JP 2005041611 A JP2005041611 A JP 2005041611A JP 2005041611 A JP2005041611 A JP 2005041611A JP 2005184028 A5 JP2005184028 A5 JP 2005184028A5
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JP
Japan
Prior art keywords
insulating film
film
memory element
semiconductor
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005041611A
Other languages
English (en)
Japanese (ja)
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JP2005184028A (ja
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Publication date
Application filed filed Critical
Priority to JP2005041611A priority Critical patent/JP2005184028A/ja
Priority claimed from JP2005041611A external-priority patent/JP2005184028A/ja
Publication of JP2005184028A publication Critical patent/JP2005184028A/ja
Publication of JP2005184028A5 publication Critical patent/JP2005184028A5/ja
Pending legal-status Critical Current

Links

JP2005041611A 2005-02-18 2005-02-18 不揮発性記憶素子 Pending JP2005184028A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005041611A JP2005184028A (ja) 2005-02-18 2005-02-18 不揮発性記憶素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005041611A JP2005184028A (ja) 2005-02-18 2005-02-18 不揮発性記憶素子

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001257698A Division JP2003068893A (ja) 2001-08-28 2001-08-28 不揮発性記憶素子及び半導体集積回路

Publications (2)

Publication Number Publication Date
JP2005184028A JP2005184028A (ja) 2005-07-07
JP2005184028A5 true JP2005184028A5 (cg-RX-API-DMAC7.html) 2008-02-14

Family

ID=34792799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005041611A Pending JP2005184028A (ja) 2005-02-18 2005-02-18 不揮発性記憶素子

Country Status (1)

Country Link
JP (1) JP2005184028A (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008078376A (ja) * 2006-09-21 2008-04-03 Oki Electric Ind Co Ltd 半導体記憶装置
US8101989B2 (en) * 2006-11-20 2012-01-24 Macronix International Co., Ltd. Charge trapping devices with field distribution layer over tunneling barrier
US8320191B2 (en) 2007-08-30 2012-11-27 Infineon Technologies Ag Memory cell arrangement, method for controlling a memory cell, memory array and electronic device
JP2019087667A (ja) 2017-11-08 2019-06-06 東芝メモリ株式会社 半導体装置

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