JP2005167148A5 - - Google Patents
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- Publication number
- JP2005167148A5 JP2005167148A5 JP2003407624A JP2003407624A JP2005167148A5 JP 2005167148 A5 JP2005167148 A5 JP 2005167148A5 JP 2003407624 A JP2003407624 A JP 2003407624A JP 2003407624 A JP2003407624 A JP 2003407624A JP 2005167148 A5 JP2005167148 A5 JP 2005167148A5
- Authority
- JP
- Japan
- Prior art keywords
- inert gas
- gas purge
- furnace
- diffusion furnace
- purge mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003407624A JP2005167148A (ja) | 2003-12-05 | 2003-12-05 | 拡散炉 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003407624A JP2005167148A (ja) | 2003-12-05 | 2003-12-05 | 拡散炉 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005167148A JP2005167148A (ja) | 2005-06-23 |
JP2005167148A5 true JP2005167148A5 (fr) | 2007-01-25 |
Family
ID=34729614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003407624A Pending JP2005167148A (ja) | 2003-12-05 | 2003-12-05 | 拡散炉 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2005167148A (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6832786B2 (ja) * | 2017-04-27 | 2021-02-24 | 東京エレクトロン株式会社 | 掃気ノズル及びこれを用いた基板処理装置、並びにパーティクル除去方法 |
KR102441994B1 (ko) | 2021-12-27 | 2022-09-08 | 주식회사 에이치피에스피 | 고속 냉각 고압 챔버 |
-
2003
- 2003-12-05 JP JP2003407624A patent/JP2005167148A/ja active Pending
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