JP2005167148A5 - - Google Patents

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Publication number
JP2005167148A5
JP2005167148A5 JP2003407624A JP2003407624A JP2005167148A5 JP 2005167148 A5 JP2005167148 A5 JP 2005167148A5 JP 2003407624 A JP2003407624 A JP 2003407624A JP 2003407624 A JP2003407624 A JP 2003407624A JP 2005167148 A5 JP2005167148 A5 JP 2005167148A5
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JP
Japan
Prior art keywords
inert gas
gas purge
furnace
diffusion furnace
purge mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003407624A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005167148A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003407624A priority Critical patent/JP2005167148A/ja
Priority claimed from JP2003407624A external-priority patent/JP2005167148A/ja
Publication of JP2005167148A publication Critical patent/JP2005167148A/ja
Publication of JP2005167148A5 publication Critical patent/JP2005167148A5/ja
Pending legal-status Critical Current

Links

JP2003407624A 2003-12-05 2003-12-05 拡散炉 Pending JP2005167148A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003407624A JP2005167148A (ja) 2003-12-05 2003-12-05 拡散炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003407624A JP2005167148A (ja) 2003-12-05 2003-12-05 拡散炉

Publications (2)

Publication Number Publication Date
JP2005167148A JP2005167148A (ja) 2005-06-23
JP2005167148A5 true JP2005167148A5 (fr) 2007-01-25

Family

ID=34729614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003407624A Pending JP2005167148A (ja) 2003-12-05 2003-12-05 拡散炉

Country Status (1)

Country Link
JP (1) JP2005167148A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6832786B2 (ja) * 2017-04-27 2021-02-24 東京エレクトロン株式会社 掃気ノズル及びこれを用いた基板処理装置、並びにパーティクル除去方法
KR102441994B1 (ko) 2021-12-27 2022-09-08 주식회사 에이치피에스피 고속 냉각 고압 챔버

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