JP2005167084A - レーザ結晶化装置及びレーザ結晶化方法 - Google Patents
レーザ結晶化装置及びレーザ結晶化方法 Download PDFInfo
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- JP2005167084A JP2005167084A JP2003406167A JP2003406167A JP2005167084A JP 2005167084 A JP2005167084 A JP 2005167084A JP 2003406167 A JP2003406167 A JP 2003406167A JP 2003406167 A JP2003406167 A JP 2003406167A JP 2005167084 A JP2005167084 A JP 2005167084A
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- 238000005499 laser crystallization Methods 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 80
- 230000003287 optical effect Effects 0.000 claims abstract description 59
- 239000004065 semiconductor Substances 0.000 claims abstract description 56
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000009826 distribution Methods 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 21
- 238000002425 crystallisation Methods 0.000 description 15
- 229910021417 amorphous silicon Inorganic materials 0.000 description 14
- 230000008025 crystallization Effects 0.000 description 13
- 239000004973 liquid crystal related substance Substances 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 11
- 239000010408 film Substances 0.000 description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- 238000012546 transfer Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 229920005591 polysilicon Polymers 0.000 description 5
- 239000003086 colorant Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- FOXXZZGDIAQPQI-XKNYDFJKSA-N Asp-Pro-Ser-Ser Chemical compound OC(=O)C[C@H](N)C(=O)N1CCC[C@H]1C(=O)N[C@@H](CO)C(=O)N[C@@H](CO)C(O)=O FOXXZZGDIAQPQI-XKNYDFJKSA-N 0.000 description 1
- 241000270295 Serpentes Species 0.000 description 1
- 229910009372 YVO4 Inorganic materials 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0673—Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0823—Devices involving rotation of the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
- B23K26/0861—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane in at least in three axial directions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02678—Beam shaping, e.g. using a mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02683—Continuous wave laser beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02691—Scanning of a beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
- H01L27/1285—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Recrystallisation Techniques (AREA)
Abstract
【解決手段】 レーザ結晶化装置は、半導体層が形成された基板を支持する可動のステージと、レーザ光を時分割で複数の光路33,34に振り分ける装置36と、各光路を通るレーザ光を集光してステージに支持された基板の半導体層に照射する光学装置37,38とを備えた構成とする。
【選択図】 図4
Description
32…レーザ源
33,34…光路
36…レーザ光を振り分ける装置
37,38…光学装置
52…ガルバノ
58…制御手段
62…ステージ
62X…Xステージ
62Y…Yステージ
62R…回転ステージ
64…吸着プレート
66…基板
68…半導体層
70…ビームトレース
74…回転装置
Claims (5)
- 半導体層が形成された基板を支持する可動のステージと、レーザ光を時分割で複数の光路に振り分ける装置と、各光路を通るレーザ光を集光して該ステージに支持された基板の半導体層に照射する光学装置とを備えたことを特徴とするレーザ結晶化装置。
- 該レーザ光を時分割で複数の光路に振り分ける装置と基板を取り付けたステージの往復運動とを同期して制御する制御手段を備えたことを特徴とする請求項1に記載のレーザ結晶化装置。
- 該制御手段は、該ステージが一方の方向に動くときに半導体層に形成されるビームトレースと該ステージが次に該一方の方向に動くときに半導体層に形成されるビームトレースとが互いにオーバーラップするように該レーザ光を時分割で複数の光路に振り分ける装置と該ステージを制御することを特徴とする請求項2に記載のレーザ結晶化装置。
- CWレーザ光を時分割で少なくとも2つの光学系に振り分け、該レーザ光が振り分けられた光学系を使用して基板に形成された半導体層の第1の領域を結晶化し、次にレーザ光が振り分けられた光学系を使用して基板に形成された半導体層の第1の領域とは離れた第2の領域を結晶化することを特徴とするレーザ結晶化方法。
- 半導体層が形成された基板を支持する可動のステージと、レーザ光を該ステージに支持された基板の半導体層に照射する光学装置と、該ステージとは別に設けられ、該基板を回転させることのできる回転装置と、少なくとも該ステージと該回転装置の間で基板を搬送することのできる搬送手段とを備えたことを特徴とするレーザ結晶化装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003406167A JP2005167084A (ja) | 2003-12-04 | 2003-12-04 | レーザ結晶化装置及びレーザ結晶化方法 |
KR1020040098937A KR100792955B1 (ko) | 2003-12-04 | 2004-11-30 | 레이저 결정화 장치 및 레이저 결정화 방법 |
US11/003,021 US20050127045A1 (en) | 2003-12-04 | 2004-12-02 | Laser crystallization apparatus and laser crystallization method |
TW093137400A TWI251869B (en) | 2003-12-04 | 2004-12-03 | Laser crystallization apparatus and laser crystallization method |
CNB2004100983485A CN100337309C (zh) | 2003-12-04 | 2004-12-03 | 激光结晶设备和激光结晶方法 |
CNB2007101011499A CN100511580C (zh) | 2003-12-04 | 2004-12-03 | 激光结晶设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2003406167A JP2005167084A (ja) | 2003-12-04 | 2003-12-04 | レーザ結晶化装置及びレーザ結晶化方法 |
Publications (1)
Publication Number | Publication Date |
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JP2005167084A true JP2005167084A (ja) | 2005-06-23 |
Family
ID=34650248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2003406167A Pending JP2005167084A (ja) | 2003-12-04 | 2003-12-04 | レーザ結晶化装置及びレーザ結晶化方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20050127045A1 (ja) |
JP (1) | JP2005167084A (ja) |
KR (1) | KR100792955B1 (ja) |
CN (2) | CN100337309C (ja) |
TW (1) | TWI251869B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
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TW297138B (ja) * | 1995-05-31 | 1997-02-01 | Handotai Energy Kenkyusho Kk | |
KR100956339B1 (ko) | 2003-02-25 | 2010-05-06 | 삼성전자주식회사 | 규소 결정화 시스템 및 규소 결정화 방법 |
EP1717058B1 (de) * | 2005-04-27 | 2010-07-28 | KUM Limited | Stiftspitzer |
KR100947356B1 (ko) | 2009-07-10 | 2010-03-15 | 주식회사 엘에스텍 | 도광판 제조장치 및 제조방법 |
KR20120008345A (ko) | 2010-07-16 | 2012-01-30 | 삼성모바일디스플레이주식회사 | 레이저 조사 장치 |
KR101135537B1 (ko) * | 2010-07-16 | 2012-04-13 | 삼성모바일디스플레이주식회사 | 레이저 조사 장치 |
KR101739019B1 (ko) | 2010-11-01 | 2017-05-24 | 삼성디스플레이 주식회사 | 레이저 결정화 시스템 및 이를 이용한 표시 장치 제조 방법 |
KR20120048240A (ko) * | 2010-11-05 | 2012-05-15 | 삼성모바일디스플레이주식회사 | 연속측면고상화(Sequential Lateral Solidification:SLS)를 이용한 결정화 장치, 결정화 방법 및 유기 발광 디스플레이 장치의 제조 방법 |
TWI581408B (zh) * | 2016-04-28 | 2017-05-01 | 友達光電股份有限公司 | 顯示面板 |
CN107876968A (zh) * | 2017-12-26 | 2018-04-06 | 英诺激光科技股份有限公司 | 一种用于平行加工的激光加工设备 |
CN112558315B (zh) * | 2020-11-23 | 2022-09-02 | 华南师范大学 | 一种多路分光系统 |
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2003
- 2003-12-04 JP JP2003406167A patent/JP2005167084A/ja active Pending
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2004
- 2004-11-30 KR KR1020040098937A patent/KR100792955B1/ko not_active IP Right Cessation
- 2004-12-02 US US11/003,021 patent/US20050127045A1/en not_active Abandoned
- 2004-12-03 TW TW093137400A patent/TWI251869B/zh not_active IP Right Cessation
- 2004-12-03 CN CNB2004100983485A patent/CN100337309C/zh not_active Expired - Fee Related
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JPH0897169A (ja) * | 1994-09-26 | 1996-04-12 | Semiconductor Energy Lab Co Ltd | レーザー処理方法およびレーザー処理装置 |
JPH0950961A (ja) * | 1995-05-31 | 1997-02-18 | Semiconductor Energy Lab Co Ltd | レーザー処理方法及びレーザー処理装置 |
JP2000164527A (ja) * | 1998-11-26 | 2000-06-16 | Matsushita Electric Ind Co Ltd | レーザアニール装置 |
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JP2003086505A (ja) * | 2000-08-25 | 2003-03-20 | Fujitsu Ltd | 半導体装置の製造方法及び半導体製造装置 |
WO2002031871A1 (fr) * | 2000-10-06 | 2002-04-18 | Mitsubishi Denki Kabushiki Kaisha | Procédé et dispositif de production de film de silicium polycristallin, dispositif à semi-conducteurs, et procédé de fabrication |
JP2002353159A (ja) * | 2001-03-23 | 2002-12-06 | Sumitomo Heavy Ind Ltd | 処理装置及び方法 |
JP2001358087A (ja) * | 2001-04-16 | 2001-12-26 | Nec Corp | パルスレーザ光照射装置及び照射方法 |
JP2003077834A (ja) * | 2001-09-05 | 2003-03-14 | Matsushita Electric Ind Co Ltd | 結晶化半導体膜の形成方法およびその製造装置と薄膜トランジスタの製造方法およびそれらを用いた表示装置 |
Also Published As
Publication number | Publication date |
---|---|
CN100337309C (zh) | 2007-09-12 |
KR100792955B1 (ko) | 2008-01-08 |
KR20050054444A (ko) | 2005-06-10 |
CN101086954A (zh) | 2007-12-12 |
TWI251869B (en) | 2006-03-21 |
US20050127045A1 (en) | 2005-06-16 |
TW200524007A (en) | 2005-07-16 |
CN1624874A (zh) | 2005-06-08 |
CN100511580C (zh) | 2009-07-08 |
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