JP2005158786A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 174
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 174
- 239000010703 silicon Substances 0.000 claims abstract description 174
- 238000000034 method Methods 0.000 claims abstract description 64
- 239000000758 substrate Substances 0.000 claims abstract description 58
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 45
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 45
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims abstract description 45
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 18
- 230000005669 field effect Effects 0.000 claims abstract description 8
- 239000013078 crystal Substances 0.000 claims description 61
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 51
- 239000012808 vapor phase Substances 0.000 claims description 26
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 claims description 22
- 229910021334 nickel silicide Inorganic materials 0.000 claims description 22
- 229910052736 halogen Inorganic materials 0.000 claims description 16
- 150000002367 halogens Chemical class 0.000 claims description 16
- 238000002955 isolation Methods 0.000 claims description 13
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 6
- 229910000077 silane Inorganic materials 0.000 claims description 6
- 229910003902 SiCl 4 Inorganic materials 0.000 claims description 4
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 claims description 4
- 150000001282 organosilanes Chemical class 0.000 claims description 4
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 2
- 239000012535 impurity Substances 0.000 abstract description 28
- 230000000694 effects Effects 0.000 abstract description 10
- 239000007769 metal material Substances 0.000 abstract description 6
- 150000002739 metals Chemical class 0.000 abstract description 2
- 239000004973 liquid crystal related substance Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 261
- 239000007789 gas Substances 0.000 description 68
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 23
- 229910052814 silicon oxide Inorganic materials 0.000 description 23
- 239000011229 interlayer Substances 0.000 description 13
- 239000010410 layer Substances 0.000 description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 239000000460 chlorine Substances 0.000 description 10
- 229910021332 silicide Inorganic materials 0.000 description 10
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 238000001312 dry etching Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 238000009429 electrical wiring Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
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Abstract
【解決手段】シリコンバッファ膜形成工程S110において、500℃〜600℃の温度範囲内でシリコンバッファ膜を形成する。このシリコンバッファ膜は基板表面の不純物の影響を低減する。次に混合ガス供給工程S120において、500℃〜600℃の温度範囲内でシリコンとゲルマニウムの混晶膜を形成する。500℃〜600℃の低温での膜形成方法によりゲート電極がメタルで構成されたMIS型電界効果トランジスタでの、ソース部及びドレイン部のかさ上げ構造を形成することができる。
【選択図】 図2
Description
(1)ソース部8及びドレイン部9上にシリコンバッファ膜11を形成することにより、シリコン基板1の表面上に残存する不純物を閉じ込め、その後、成膜速度の速いSiGe膜12を安定して形成することができる。その結果、ソース部8及びドレイン部9にかさ上げ構造を有するMISFETを容易に得ることができる。
(2)シリコンバッファ膜11の膜厚を1nm〜10nmの範囲で形成することによりシリコン基板1の表面に残存する不純物を閉じ込めることができる。また、成膜レートが比較的遅いシリコンバッファ膜11の膜厚を最小限にすることで、成膜プロセスのスループットの減少を抑えることができる。
(3)SiGe膜12の膜厚を10nm〜100nmの範囲で形成することにより、ニッケルシリサイド14を安定して形成することができ、ソース部8あるいはドレイン部9での接合リークを抑えることができる。また、必要以上の膜厚にしないことにより、ゲート部6との短絡を防ぐことができる。また、成膜時間及び原料の消費量の増大を防ぐことができる。
(4)500℃〜600℃という低い温度で気相エピタキシャル成長によるシリコンバッファ膜11及びSiGe膜12の成膜ができるため、ゲート電極5が熱に弱い金属であっても、ソース部8及びドレイン部9にかさ上げ構造を有するMISFETを容易に得ることができる。
(5)500℃〜600℃という低い温度でニッケルシリサイド14を形成することにより、ゲート電極5が熱に弱い金属であっても、ソース部8及びドレイン部9にかさ上げ構造を有するMISFETを容易に得ることができる。
(6)気相選択エピタキシャル成長法において、シリコンバッファ膜11の形成に一回の工程のみで形成することができる。Si2H6ガスを供給したときに、シリコン基板1の表面の差、すなわち、シリコンであるか酸化シリコンであるかの違いによる成膜が始まる時間の差を利用するからである。
(7)SiGe膜12の原料ガスと塩素ガスを交互に供給することにより、SiGe膜12の形成時の選択成長性を高めることができる。また、選択エピタキシャル成長する時間を超えた場合でも、塩素ガスのエッチング効果によって、LOCOS2などの酸化シリコン膜や金属ゲート電極5上に形成されたSiGe膜12を除去することも可能である。
(1)素子分離領域2は、本実施形態でのLOCOS構造ではなく、STI(Shallow Trench Isolation)構造、あるいは、SOI基板の場合はメサ分離で形成してもよい。
(2)層間絶縁膜15の上に形成される電気配線17は、本実施形態でのAlの替わりにCuで形成してもよい。
(3)電気配線17とソース部8あるいはドレイン部9と電気的接続をとるために形成される導通層16の材料はWの替わりに、AlやCuで形成してもよい。
(4)気相エピタキシャル成長で形成するシリコンバッファ膜11あるいはSiGe膜12は、本実施形態ではノンドープで形成されているが、膜形成時にAs、P、B等がドーピングされていてもよい。
(5)シリコンバッファ膜11及びSiGe膜12を選択エピタキシャル成長させる部分は、ソース部8あるいはドレイン部9に限らず、MISFETのチャネル部分でも良い。
(6)シリコンバッファ膜11の形成は、Si2H6ガスに限らず、SiH4、SiH2Cl2、SiHCl3、SiCl4、SiF4、あるいは有機シラン系のガスのうちいずれか一種類のガスを用いて形成してもよい。
(7)SiGe膜12の形成は、Si2H6ガスに限らず、SiH4、SiH2Cl2、SiHCl3、SiCl4、SiF4、あるいは有機シラン系のガスとGeH4ガスとの混合ガスを供給することによって形成してもよい。
(8)シリコンバッファ膜11の形成前にアニール処理を行ってもよい。
Claims (10)
- 素子分離領域とMIS型電界効果トランジスタ形成領域を有する半導体基板であって、
前記MIS型電界効果トランジスタは、金属膜で形成されたゲート電極と、
ソース部及びドレイン部の上にエピタキシャル成長法にて形成されたシリコンバッファ膜と、
前記シリコンバッファ膜の上にエピタキシャル成長法にて形成されたシリコンとゲルマニウムの混晶膜と、
を備えた半導体装置。 - 請求項1に記載の半導体装置であって、
前記シリコンバッファ膜の厚さは1nm以上10nm以下である半導体装置。 - 請求項1または2に記載の半導体装置であって、
前記シリコンとゲルマニウムの混晶膜の厚さは10nm以上100nm以下である半導体装置。 - 請求項1乃至3のいずれか一項に記載の半導体装置であって、前記シリコンとゲルマニウムの混晶膜に形成されたニッケルシリサイドを有する半導体装置。
- 金属膜で形成されたゲート電極とソース部とドレイン部とを備えたトランジスタを有する半導体基板を気相エピタキシャル成長炉に導入し、500℃以上600℃以下の範囲内でシリコンバッファ膜を形成するシリコンバッファ膜形成工程と、
500℃以上600℃以下の範囲内でシリコンとゲルマニウムの混晶膜を形成する混晶膜形成工程と、
を有する半導体装置の製造方法。 - 請求項5に記載の半導体装置の製造方法であって、
前記シリコンバッファ膜形成工程は、気相エピタキシャル成長炉にてSiH4、Si2H6、SiH2Cl2、SiHCl3、SiCl4、SiF4、あるいは有機シラン系のガスのうち、いずれか一種類のガスを供給することにより形成される半導体装置の製造方法。 - 請求項5に記載の半導体装置の製造方法であって、
前記シリコンとゲルマニウムの混晶膜形成工程は、気相エピタキシャル成長炉にてシラン系のガスとGeH4ガスとの混合ガスを供給してシリコンとゲルマニウムの混晶膜を形成する混合ガス供給工程と、
前記シラン系のガスとGeH4ガスとの混合ガスを止めた後、ハロゲンガスを供給するハロゲンガス供給工程と、
を含む半導体装置の製造方法。 - 請求項7に記載の半導体装置の製造方法であって、
前記混合ガス供給工程と前記ハロゲンガス供給工程とを複数回繰り返すことでシリコンとゲルマニウムの混晶膜を形成する半導体装置の製造方法。 - 請求項5に記載の半導体装置の製造方法であって、
前記シリコンバッファ膜の厚さを1nm以上10nm以下の範囲で形成する半導体装置の製造方法。 - 請求項5に記載の半導体装置の製造方法であって、
前記シリコンとゲルマニウムの混晶膜の厚さを10nm以上100nm以下の範囲で形成する半導体装置の製造方法。
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US7414277B1 (en) * | 2005-04-22 | 2008-08-19 | Spansion, Llc | Memory cell having combination raised source and drain and method of fabricating same |
US8278176B2 (en) | 2006-06-07 | 2012-10-02 | Asm America, Inc. | Selective epitaxial formation of semiconductor films |
JP5358893B2 (ja) * | 2007-04-03 | 2013-12-04 | 三菱電機株式会社 | トランジスタ |
US8367528B2 (en) | 2009-11-17 | 2013-02-05 | Asm America, Inc. | Cyclical epitaxial deposition and etch |
US8809170B2 (en) | 2011-05-19 | 2014-08-19 | Asm America Inc. | High throughput cyclical epitaxial deposition and etch process |
US9941363B2 (en) | 2015-12-18 | 2018-04-10 | International Business Machines Corporation | III-V transistor device with self-aligned doped bottom barrier |
US20170179232A1 (en) * | 2015-12-18 | 2017-06-22 | International Business Machines Corporation | Iii-v transistor device with doped bottom barrier |
CN109300789B (zh) * | 2017-07-25 | 2021-07-09 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构及其形成方法 |
CN113327888B (zh) * | 2020-02-28 | 2022-11-22 | 长鑫存储技术有限公司 | 半导体结构的制造方法 |
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