JP2005154894A5 - - Google Patents

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Publication number
JP2005154894A5
JP2005154894A5 JP2004297556A JP2004297556A JP2005154894A5 JP 2005154894 A5 JP2005154894 A5 JP 2005154894A5 JP 2004297556 A JP2004297556 A JP 2004297556A JP 2004297556 A JP2004297556 A JP 2004297556A JP 2005154894 A5 JP2005154894 A5 JP 2005154894A5
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JP
Japan
Prior art keywords
substrate
raw material
material powder
aerosol
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2004297556A
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English (en)
Japanese (ja)
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JP2005154894A (ja
JP4327057B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2004297556A priority Critical patent/JP4327057B2/ja
Priority claimed from JP2004297556A external-priority patent/JP4327057B2/ja
Publication of JP2005154894A publication Critical patent/JP2005154894A/ja
Publication of JP2005154894A5 publication Critical patent/JP2005154894A5/ja
Application granted granted Critical
Publication of JP4327057B2 publication Critical patent/JP4327057B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004297556A 2003-10-27 2004-10-12 成膜装置 Expired - Fee Related JP4327057B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004297556A JP4327057B2 (ja) 2003-10-27 2004-10-12 成膜装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003366165 2003-10-27
JP2004297556A JP4327057B2 (ja) 2003-10-27 2004-10-12 成膜装置

Publications (3)

Publication Number Publication Date
JP2005154894A JP2005154894A (ja) 2005-06-16
JP2005154894A5 true JP2005154894A5 (enExample) 2007-04-26
JP4327057B2 JP4327057B2 (ja) 2009-09-09

Family

ID=34741037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004297556A Expired - Fee Related JP4327057B2 (ja) 2003-10-27 2004-10-12 成膜装置

Country Status (1)

Country Link
JP (1) JP4327057B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010180436A (ja) * 2009-02-04 2010-08-19 Nikon Corp 箔基材連続成膜の微粒子噴射成膜システム及び箔基材連続成膜方法

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