JP4327057B2 - 成膜装置 - Google Patents

成膜装置 Download PDF

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Publication number
JP4327057B2
JP4327057B2 JP2004297556A JP2004297556A JP4327057B2 JP 4327057 B2 JP4327057 B2 JP 4327057B2 JP 2004297556 A JP2004297556 A JP 2004297556A JP 2004297556 A JP2004297556 A JP 2004297556A JP 4327057 B2 JP4327057 B2 JP 4327057B2
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Japan
Prior art keywords
aerosol
substrate
raw material
material powder
forming apparatus
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Expired - Fee Related
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JP2004297556A
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Japanese (ja)
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JP2005154894A5 (enExample
JP2005154894A (ja
Inventor
哲 三好
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Fujifilm Corp
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Fujifilm Corp
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Priority to JP2004297556A priority Critical patent/JP4327057B2/ja
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Publication of JP2005154894A5 publication Critical patent/JP2005154894A5/ja
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Publication of JP4327057B2 publication Critical patent/JP4327057B2/ja
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JP2004297556A 2003-10-27 2004-10-12 成膜装置 Expired - Fee Related JP4327057B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004297556A JP4327057B2 (ja) 2003-10-27 2004-10-12 成膜装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003366165 2003-10-27
JP2004297556A JP4327057B2 (ja) 2003-10-27 2004-10-12 成膜装置

Publications (3)

Publication Number Publication Date
JP2005154894A JP2005154894A (ja) 2005-06-16
JP2005154894A5 JP2005154894A5 (enExample) 2007-04-26
JP4327057B2 true JP4327057B2 (ja) 2009-09-09

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ID=34741037

Family Applications (1)

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JP2004297556A Expired - Fee Related JP4327057B2 (ja) 2003-10-27 2004-10-12 成膜装置

Country Status (1)

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JP (1) JP4327057B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010180436A (ja) * 2009-02-04 2010-08-19 Nikon Corp 箔基材連続成膜の微粒子噴射成膜システム及び箔基材連続成膜方法

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Publication number Publication date
JP2005154894A (ja) 2005-06-16

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