JP2005136370A5 - - Google Patents
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- Publication number
- JP2005136370A5 JP2005136370A5 JP2004044030A JP2004044030A JP2005136370A5 JP 2005136370 A5 JP2005136370 A5 JP 2005136370A5 JP 2004044030 A JP2004044030 A JP 2004044030A JP 2004044030 A JP2004044030 A JP 2004044030A JP 2005136370 A5 JP2005136370 A5 JP 2005136370A5
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- heating means
- substrate
- detecting
- control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 5
- 238000001514 detection method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004044030A JP2005136370A (ja) | 2003-10-07 | 2004-02-20 | 基板処理装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003348222 | 2003-10-07 | ||
| JP2004044030A JP2005136370A (ja) | 2003-10-07 | 2004-02-20 | 基板処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005136370A JP2005136370A (ja) | 2005-05-26 |
| JP2005136370A5 true JP2005136370A5 (enExample) | 2007-10-25 |
Family
ID=34655959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004044030A Pending JP2005136370A (ja) | 2003-10-07 | 2004-02-20 | 基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005136370A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6424593B2 (ja) * | 2014-12-01 | 2018-11-21 | 住友電気工業株式会社 | 炭化珪素単結晶の製造方法 |
| JP6912497B2 (ja) | 2016-12-01 | 2021-08-04 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | 基板処理装置、天井ヒータおよび半導体装置の製造方法 |
| CN110335901B (zh) * | 2019-08-12 | 2024-04-16 | 无锡松煜科技有限公司 | 光伏电池表面钝化系统及钝化方法 |
| CN113237234A (zh) * | 2021-05-24 | 2021-08-10 | 四川九门科技股份有限公司 | 一种小型水浴式燃气管道间接加热装置及恒温加热方法 |
-
2004
- 2004-02-20 JP JP2004044030A patent/JP2005136370A/ja active Pending
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