JP2005134542A5 - - Google Patents

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Publication number
JP2005134542A5
JP2005134542A5 JP2003369051A JP2003369051A JP2005134542A5 JP 2005134542 A5 JP2005134542 A5 JP 2005134542A5 JP 2003369051 A JP2003369051 A JP 2003369051A JP 2003369051 A JP2003369051 A JP 2003369051A JP 2005134542 A5 JP2005134542 A5 JP 2005134542A5
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JP
Japan
Prior art keywords
electro
substrate
optical device
carbon film
amorphous carbon
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Application number
JP2003369051A
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English (en)
Japanese (ja)
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JP4529414B2 (ja
JP2005134542A (ja
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Priority to JP2003369051A priority Critical patent/JP4529414B2/ja
Priority claimed from JP2003369051A external-priority patent/JP4529414B2/ja
Publication of JP2005134542A publication Critical patent/JP2005134542A/ja
Publication of JP2005134542A5 publication Critical patent/JP2005134542A5/ja
Application granted granted Critical
Publication of JP4529414B2 publication Critical patent/JP4529414B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003369051A 2003-10-29 2003-10-29 電気光学装置用基板の製造方法 Expired - Fee Related JP4529414B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003369051A JP4529414B2 (ja) 2003-10-29 2003-10-29 電気光学装置用基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003369051A JP4529414B2 (ja) 2003-10-29 2003-10-29 電気光学装置用基板の製造方法

Publications (3)

Publication Number Publication Date
JP2005134542A JP2005134542A (ja) 2005-05-26
JP2005134542A5 true JP2005134542A5 (https=) 2006-06-01
JP4529414B2 JP4529414B2 (ja) 2010-08-25

Family

ID=34646537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003369051A Expired - Fee Related JP4529414B2 (ja) 2003-10-29 2003-10-29 電気光学装置用基板の製造方法

Country Status (1)

Country Link
JP (1) JP4529414B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020101616A (ja) * 2018-12-20 2020-07-02 日本電気硝子株式会社 電子デバイスの製造方法及びガラス基板

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63283166A (ja) * 1987-05-15 1988-11-21 Oki Electric Ind Co Ltd ゲ−ト電極構造
JP2596927Y2 (ja) * 1990-11-22 1999-06-28 株式会社半導体エネルギー研究所 電子装置
CN1316556C (zh) * 1996-01-30 2007-05-16 精工爱普生株式会社 高能体供给装置、结晶性膜的形成方法和薄膜电子装置的制造方法
JP2607838Y2 (ja) * 1997-12-22 2003-03-31 株式会社半導体エネルギー研究所 電子装置および液晶表示装置
JPH11307782A (ja) * 1998-04-24 1999-11-05 Semiconductor Energy Lab Co Ltd 半導体装置およびその作製方法
JP5046439B2 (ja) * 2000-05-12 2012-10-10 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP2002016276A (ja) * 2000-06-30 2002-01-18 Sony Corp 電子装置
JP4869471B2 (ja) * 2000-07-17 2012-02-08 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4754677B2 (ja) * 2000-07-31 2011-08-24 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP2002093586A (ja) * 2000-09-19 2002-03-29 Semiconductor Energy Lab Co Ltd 発光装置およびその作製方法
JP2002076352A (ja) * 2000-08-31 2002-03-15 Semiconductor Energy Lab Co Ltd 表示装置及びその作製方法
JP2002287661A (ja) * 2001-03-27 2002-10-04 Seiko Instruments Inc 高分子樹脂基板、それを用いた液晶素子及びエレクトロルミネッセンス素子
JP2003229578A (ja) * 2001-06-01 2003-08-15 Semiconductor Energy Lab Co Ltd 半導体装置、表示装置およびその作製方法
JP2003115456A (ja) * 2001-10-05 2003-04-18 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法
JP4060113B2 (ja) * 2002-04-05 2008-03-12 株式会社半導体エネルギー研究所 発光装置

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