JP2005125798A - Printer unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To secure the adhesive strength of a diaphragm for an ink-jet printer unit. <P>SOLUTION: The diaphragm covering the pressure chamber has a thermoplastic layer with adhesiveness and a pattern layer which overlies the thermoplastic layer in at least the opposite section against the pressure chamber and at the position other than the opposite section against the above liquid feeding-passage. At the time of installing the diaphragm which has the thermoplastic layer and the pattern layer on the principal plane at which the liquid feeding-passage of the pressure chamber forming section is formed and of adhering the thermoplastic layer of the diaphragm onto the top of the pressure chamber forming section by pressurizing and heating the layer, the pressure is applied in concentrating to the pattern layer of the diaphragm. At that time, neither unnecessary pressure is applied to the opposite section against the liquid feeding-passage where the pattern layer is formed, nor the liquid feeding-passage is closed with the thermoplastic layer, and also the work of bonding the diaphragm to the pressure forming section at which the pressure chamber has been formed is easily performed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a printer apparatus that ejects ink droplets from a nozzle in accordance with a recording signal and records the ink on a recording medium such as paper or film.

  In recent years, so-called inkjet printer apparatuses that perform recording by ejecting ink droplets and directly depositing them on a recording medium such as paper or film have been rapidly spreading.

  Among such ink jet printer apparatuses, a so-called on-demand type printer apparatus that discharges ink droplets in accordance with a recording signal is particularly popular because it can realize a reduction in size and cost.

  Various methods have been proposed for ejecting ink droplets in the on-demand type printer apparatus, but a method using a piezoelectric element such as a piezo element or a method using a heating element is common. The former is a method in which a pressure is applied to a pressure chamber filled with ink by deformation of a piezo element and discharged. The latter is a method in which ink is ejected by the pressure of bubbles generated by heating and boiling ink with a heating element.

  In the method using the piezoelectric element, a laminated piezoelectric element in which three or more piezoelectric elements are laminated is bonded to a pressure chamber filled with ink through a vibration plate, and the laminated piezoelectric element is linearly bonded. A method in which the pressure chamber is pressed through the vibration plate by displacing the plate, and a single plate type piezoelectric element or a piezoelectric element laminated in two or more layers is attached to the pressure chamber filled with ink through the vibration plate. In addition, there is a method of pressing the pressure chamber by applying a voltage to the piezoelectric element to bend the diaphragm by the bimorph effect of the diaphragm and the piezoelectric element.

  The printer apparatus as described above has, for example, a print head having the following structure. That is, as shown in FIG. 78, this print head is constituted by a pressure chamber forming portion 1101, a diaphragm 1102, a piezoelectric element 1103, and a nozzle forming member 1104.

  In the pressure chamber forming portion 1101, the first groove portion 1105 that forms the liquid supply passage, the second groove portion 1106 that forms the pressure chamber, and the third groove portion 1107 that forms the liquid supply passage communicate with each other. An opening is formed so as to face the surface 1101a. The first groove portion 1105 and the third groove portion 1107 are formed as grooves having substantially the same depth, and the second groove portion 1106 is formed as a groove deeper than these. Further, in the pressure chamber forming portion 1101, a nozzle introduction hole 1108 that penetrates in the thickness direction from the bottom surface 1107 a of the third groove portion 1107 to the main surface 1101 b facing the one main surface 1101 a of the pressure chamber forming portion 1101 is formed. ing.

  The diaphragm 1102 is adhered to the one main surface 1101a side of the pressure chamber forming portion 1101 with an adhesive (not shown) so as to close the first groove portion 1105, the second groove portion 1106, and the third groove portion 1107. The space surrounded by the first groove 1105 and the diaphragm 1102 is a liquid supply path 1109, and the space surrounded by the second groove 1106 and the diaphragm 1102 is a pressure chamber 1110, and the third groove 1107. A space surrounded by the diaphragm 1102 is a liquid flow path 1111. Therefore, the liquid supply path 1109, the pressure chamber 1110, the liquid flow path 1111 and the nozzle introduction hole 1108 are formed in communication.

  Since an ink supply pipe (not shown) connected to an ink tank (not shown) is attached to the vibration plate 1102, a through hole (not shown) corresponding to the ink supply pipe is formed in the vibration plate 1102.

  Further, a single plate type piezoelectric element 1103 is fixed by an adhesive (not shown) at a position corresponding to the pressure chamber 1110 on the main surface 1102a opposite to the surface facing the pressure chamber forming portion 1101 of the diaphragm 1102. Yes.

  Furthermore, on one main surface 1101b opposite to the one main surface 1101a that becomes the groove opening surface of the pressure chamber forming portion 1101, a discharge nozzle 1112 that communicates with the nozzle introduction hole 1108 and discharges ink is formed. A nozzle forming member 1104 (hereinafter referred to as an orifice plate 1104) is disposed.

That is, in this print head, ink is first supplied from the liquid supply path 1109 to the discharge nozzle 1112 through the pressure chamber 1110, the liquid flow path 1111, and the nozzle introduction hole 1108, and a meniscus is formed at the tip of the discharge nozzle 1112. . In this print head, when a predetermined voltage is applied, the piezoelectric element 1103 contracts in the in-plane direction due to the bimorph effect and is bent in the thickness direction indicated by the arrow m1 in the figure. Accordingly, the diaphragm 1102 is also curved in the direction indicated by the arrow m1 in the drawing. Then, the volume of the pressure chamber 1110 decreases, the pressure in the pressure chamber 1110 increases, ink is ejected from the ejection nozzle 1112, this ink adheres to the recording medium, and printing is performed.

  Further, the printer apparatus as described above generally has a plurality of print heads as described above. That is, as schematically shown in FIG. 79, the above print heads are arranged in parallel to each other in the longitudinal direction of a tubular ink buffer tank 1114 having an ink supply port 1113 connected to an ink tank (not shown). Then, the liquid supply path 1109 of each print head is connected to the ink buffer tank 1114 so as to be orthogonal to the side surface 1114 a of the ink buffer tank 1114. For this reason, the discharge nozzle 1112 of each print head opens on one surface. Further, the ink is supplied from an ink tank (not shown) to the ink buffer tank 1114, and is supplied from here to the liquid supply path 1109 of each print head.

  By the way, in recent years, document creation using a computer called desktop publishing has been actively performed particularly in offices and the like, and recently, not only characters and figures but also color natural images such as photographs are used as characters. The demand for output with graphics is also increasing. Along with this, it is required to print high-quality natural images, and reproduction of halftones has become important.

  Various methods have been proposed as a method for reproducing the above-described halftone with an on-demand printer that discharges the ink droplets. That is, the first method is to control the droplet size to be ejected by changing the voltage and pulse width of the voltage pulse applied to a piezoelectric element such as a piezo element or a heating element, and to express the gradation by changing the diameter of the print dot. To do.

  However, according to this method, if the voltage or pulse width applied to the piezo element or the heating element is too low, ink cannot be ejected, so there is a limit to the minimum droplet diameter, the number of gradation levels that can be expressed is small, and particularly low density. It is difficult to express and is insufficient to print out a natural image.

  Further, as a second method, there is a method in which one pixel is constituted by a matrix of, for example, 4 × 4 dots without changing the dot diameter, and gradation representation is performed using a so-called dither method in units of this matrix. It is done. In this case, 17 gradations can be expressed.

  However, with this method, for example, when printing is performed at the same dot density as in the first method, the resolution is 1/4 of the first method, and the roughness is conspicuous, which is not sufficient for printing out a natural image. is there.

  Therefore, the present inventors can control the density of the printed dots by changing the density of the ejected ink droplets by mixing the ink and the diluent when ejecting the ink, A printer apparatus that prints out a natural image without causing degradation in resolution has been proposed.

  A print head of a printer device that mixes two liquids will be described briefly. The discharge nozzle into which the discharge medium is introduced and the fixed quantity nozzle into which the fixed quantity medium is introduced are adjacent to each other. The fixed amount medium is oozed toward the discharge nozzle and mixed with the discharge medium in the vicinity of the discharge nozzle opening, and the discharge medium is ejected from the discharge nozzle together with the discharge medium mixed with the fixed amount medium. The medium is mixed and discharged in the in-plane direction of the discharge nozzle and the fixed amount nozzle. In such a printer device, the amount of the quantification medium, which is either ink or dilution liquid, is changed, and the dot density is changed by changing the mixing ratio of the ink and the dilution liquid, thereby producing a natural image. Print out. Note that one of the quantitative medium and the ejection medium may be ink and the remaining one may be a diluent.

  It should be noted that such a two-liquid mixing type printer apparatus also requires an ink or diluting liquid discharge function as in the above-described on-demand type ink jet printer apparatus. A method using a piezoelectric element similar to the apparatus or a method using a heating element is generally used.

  Therefore, the two-liquid mixing type printer device has substantially the same configuration as the above-described ink jet printer device. Here, an example in which the diluent is used as the ejection medium and the ink is used as the quantitative medium will be described. That is, the first liquid supply path, the first pressure chamber, the first liquid flow path, and the first nozzle introduction hole through which the discharge medium is introduced into the pressure chamber forming portion as described above are sequentially provided, and these The second liquid supply path, the second pressure chamber, the second liquid flow path, and the second nozzle introduction hole into which the quantitative medium is introduced with a predetermined interval are sequentially provided so as to be adjacent to each other. The diaphragm is bonded and disposed on the pressure chamber forming portion, and a piezoelectric element is provided at a position corresponding to each pressure chamber.

  Further, an orifice plate having a discharge nozzle and a quantitative nozzle respectively communicating with the first and second nozzle introduction holes of the pressure chamber forming portion on the main surface on the side where the diaphragm of the pressure chamber forming portion is not disposed It is adhered and arranged. In this orifice plate, it is preferable that the discharge nozzle and the metering nozzle have openings adjacent to each other so that the ink and the diluting liquid can be easily mixed.

  In addition, the two-liquid mixing type printer device generally has a plurality of print heads, and the first liquid supply path and the second liquid supply path of each print head are the diluent buffer tank and the ink. Each is connected to a buffer tank. Also in this printer apparatus, the print heads are arranged in parallel at a predetermined interval, and the nozzles are arranged so as to form one surface.

  At this time, the diluent buffer tank and the ink buffer tank are connected to the diluent tank and the ink tank, respectively, and the diluent or ink is supplied from the diluent buffer tank or the ink tank to the first liquid supply path or the second liquid tank. The liquid is supplied to the liquid supply path, supplied to the first pressure chamber or the second pressure chamber, and the first liquid flow path and the first nozzle introduction hole or the second liquid flow path and the second nozzle introduction hole are provided. Then, it is supplied to the discharge nozzle or the fixed quantity nozzle, respectively.

  Also in this two-liquid mixing type printer device, by applying a predetermined voltage to the piezoelectric element, for example, ink is oozed out from the quantification nozzle toward the discharge nozzle as a quantification medium, and for example, a diluent is used as the discharge medium from the discharge nozzle The ink and the diluting liquid are mixed and discharged, and the mixed droplets are deposited on the recording medium to perform printing. Among such two-component mixed printer devices, a printer device using a discharge medium as a diluent and a quantitative medium as ink is referred to as a “carrier jet” printer device.

JP-A-5-318750

  By the way, in the above-described ink jet printer device, “carrier jet” printer device, and the like, it is necessary that liquid such as ink or diluting liquid is filled without bubbles in the corresponding pressure chamber. In the process of bonding to the pressure chamber forming portion, a highly accurate bonding technique is required.

  For example, an ink jet printer apparatus as shown in FIG. 78 will be described as an example. As a method for bonding the vibration plate 1102 to the pressure chamber forming portion 1101, the vibration plate 1102 is made of a photosensitive material such as a dry film resist material and adhesiveness. After forming the first groove portion 1105 for forming the liquid supply passage 1109 and the third groove portion 1107 for forming the liquid flow passage 1111 in the pressure chamber forming portion 1101, the vibration is A method of heating and pressing the plate 1102 to the one main surface 1101a side of the pressure chamber forming portion 1101 is used, and has been widely used conventionally.

  However, if the vibration plate 1102 is bonded to the pressure chamber forming portion 1101 by this method, an expensive exposure device is required as a manufacturing apparatus, and the dry film resist material forming the vibration plate 1102 has durability against ink, dilution liquid, and the like. Inconvenience arises in that a heat curing treatment is required to provide the properties.

  Further, as a method of adhering the diaphragm 1102 to the pressure chamber forming portion 1101, a method in which the pressure chamber forming portion 1101 and the diaphragm 1102 are formed using a glass material, and the diaphragm 1102 is anodic bonded to the pressure chamber forming portion 1101. Also mentioned. However, with this method, since the glass material is a material that is vulnerable to impacts and scratches, it is difficult to reduce the thickness of the diaphragm 1102 to 10 [μm] or less.

  When the pressure required to discharge ink from the discharge nozzle 1112 is generated in the pressure chamber 1110, a load is generated on the piezoelectric element 1103 in accordance with the plate thickness of the vibration plate 1102, and thus the drive for the piezoelectric element 1103 is performed. In order to reduce the voltage, the diaphragm 1102 needs to be thinned. However, in the printer apparatus in which the diaphragm 1102 is bonded to the pressure chamber forming portion 1101 by the method described above, the diaphragm 1102 is thinned. Therefore, it is difficult to cope with a reduction in driving voltage. Further, in the printer apparatus as described above, it is necessary to increase the lateral width of the pressure chamber 1110 in order to reduce the load on the piezoelectric element 1103 as much as possible, so that the pressure chamber 1110 is miniaturized, that is, the discharge nozzle 1112 has a narrow pitch. It is difficult to cope with downsizing.

  Further, as a method of bonding the diaphragm 1102 to the pressure chamber forming portion 1101, a method of bonding the pressure chamber forming portion 1101 and the diaphragm 1102 using an adhesive is also used, which has been conventionally used. However, in this method, it is difficult to reduce the adhesive application thickness to 2 [μm] or less, so the first groove 1105 that forms the liquid supply path 1109 formed in the pressure chamber forming portion 1101 and the liquid When the depth of the third groove portion 1107 forming the flow path 1111 is shallow, the first and third groove portions 1105 and 1107 may be blocked by the adhesive, and the liquid supply path 1109 and the liquid Inconveniences such as a change in flow path characteristics of the flow path 1111 occur.

  As a method for solving such an inconvenience, a first substrate for forming a liquid supply path 1109 by using a silicon substrate or the like as a material of the pressure chamber forming portion 1101 and etching the pressure chamber forming portion 1101 by anisotropic etching or the like. A method of increasing the aspect ratio (ratio of depth to width) of the third groove portion 1107 that forms the groove portion 1105 and the liquid channel 1111 is mentioned.

  However, in this method, when silicon is used as the material of the pressure chamber forming portion 1101, it is necessary to select the material of another member in accordance with the coefficient of thermal expansion. Therefore, the material selection tolerance is extremely limited. Inconvenience occurs.

  As a method for adhering the diaphragm 1102 to the pressure chamber forming portion 1101, as disclosed in JP-A-5-183625, as an adhesive for adhering the diaphragm 1102 to the pressure chamber forming portion 1101, heat A method using a plastic adhesive sheet is also included. However, in this method, it is necessary to form a through hole in the adhesive sheet prior to the bonding process so that the protruding portion of the adhesive does not block the ink supply port. High accuracy is required for alignment and dimensional accuracy. Furthermore, this adhesive sheet has a problem in that the material strength of the sheet alone is not high, and high-precision temperature management is required to maintain its accuracy.

  That is, in an ink jet printer apparatus as described above and a two-liquid mixing type printer apparatus such as a “carrier jet” printer apparatus, the liquid supply path formed on one main surface side of the pressure chamber forming portion is not blocked. Thus, it is an issue to easily perform the bonding operation of the diaphragm to the pressure chamber forming portion in which the pressure chamber is formed.

  Further, in these printer devices, the diaphragm is displaced every time the liquid is discharged, so that a mechanical load is applied to the bonded portion of the diaphragm every time the liquid is discharged, and the vibration plate is bonded. There is a risk that peeling or the like may occur at the location, which greatly impairs the function of the printer device.

  In order to solve such inconveniences, the present inventors have made a printer apparatus in which a diaphragm is formed of a thermoplastic material, and the adhesiveness between the diaphragm and the pressure chamber forming portion is increased by thermocompression bonding. Has been advocated. However, in this printer device, the process of adhering the diaphragm to the pressure chamber forming portion to which the orifice plate after the discharge nozzle or quantitative nozzle formation is bonded is carried out at the time of manufacture. The temperature and pressure for thermocompression bonding of the thermoplastic material are also applied to the orifice plate subjected to the above.

  As a result of intensive studies by the present inventors to solve the above-mentioned problems, as a diaphragm, a thermoplastic layer that covers the pressure chamber and also has adhesiveness, at least a portion facing the pressure chamber and a portion facing the liquid supply path If a diaphragm having a pattern layer laminated on the thermoplastic layer at a position other than is used, the diaphragm is placed on the main surface where the liquid supply path of the pressure chamber forming portion is formed, When the diaphragm is pressurized and heated and bonded onto the pressure chamber forming portion, the pressure is concentrated on the pattern layer of the diaphragm and unnecessary pressure is applied to the portion facing the liquid supply path where the pattern layer is not formed. It has been found that the liquid supply path is not blocked, and that the diaphragm can be easily bonded to the pressure chamber forming portion in which the pressure chamber is formed.

  That is, the printer device according to the first aspect of the present invention includes a pressure chamber forming portion having a pressure chamber and a liquid supply path for supplying a liquid to the pressure chamber, a discharge nozzle communicating with the pressure chamber, and the pressure chamber. And a piezoelectric element disposed corresponding to the pressure chamber via the vibration plate, wherein the vibration plate covers the pressure chamber and has an adhesive thermoplastic layer; And a pattern layer laminated on the thermoplastic layer at a position other than at least a portion facing the pressure chamber and a portion facing the liquid supply path.

  In the printer device of the second invention of the present invention, the first pressure chamber into which the ejection medium is introduced, the first liquid supply path for supplying the liquid to the first pressure chamber, and the quantitative medium are introduced. A pressure chamber forming portion having a second pressure chamber and a second liquid supply path for supplying a liquid to the second pressure chamber, a discharge nozzle communicating with the first pressure chamber, and the second pressure chamber A quantitative nozzle communicating with the pressure chamber, a diaphragm covering the first pressure chamber and the second pressure chamber, and the first pressure chamber and the second pressure chamber via the diaphragm, respectively. A printer device having a piezoelectric element to be disposed and causing a fixed amount medium to ooze from the fixed amount nozzle toward the discharge nozzle and then discharging the discharge medium from the discharge nozzle to mix and discharge the fixed amount medium and the discharge medium In the above, the diaphragm includes the first pressure chamber and the second pressure chamber. Covering, adhesive thermoplastic layer, at least positions opposite to the first pressure chamber and the second pressure chamber, and positions other than the facing portions of the first liquid supply path and the second liquid supply path And a pattern layer laminated on the thermoplastic layer.

  In the printer devices of the first and second inventions, the pattern layer is preferably made of metal. In the printer devices of the first and second inventions, the thickness of the pattern layer is preferably 15 [μm] or more. Although it is this pattern layer, if the thickness is less than 15 [μm], there is a high possibility that the diaphragm is buried in the diaphragm when heated and pressed, which is not preferable. On the other hand, if it is too thick, it becomes impossible to form the pattern layer with high accuracy, which is not preferable. Further, in the printer devices of the first and second inventions, it is preferable that the thermoplastic layer is made of a polyimide material. Furthermore, in the printer apparatus according to the first and second inventions, the thermoplastic layer is preferably made of a material having a glass transition point of 180 [deg.] C. to 250 [deg.] C. In this case, the thermoplastic layer and the pattern A thin film may be provided between the layers.

  In the printer device according to the first aspect of the present invention, as the diaphragm, the thermoplastic layer covering the pressure chamber and having adhesiveness, and at least a position other than the facing portion of the pressure chamber and the facing portion of the liquid supply path, A vibration plate having a pattern layer laminated on the thermoplastic layer is used. In the printer device of the second invention, the first and second pressure chambers are covered as the vibration plate and also have adhesiveness. A diaphragm having a pattern layer laminated on the thermoplastic layer at a position other than a facing portion between the plastic layer and at least the facing portion between the first and second pressure chambers and the facing portion between the first and second liquid supply paths. In any of these printer apparatuses, the diaphragm is placed on the main surface of the pressure chamber forming portion where the liquid supply path is formed, and the thermoplastic layer of the diaphragm is pressurized and heated. When bonding on the pressure chamber forming part, the pressure is An unnecessary pressure is not applied to the portion facing the liquid supply path that is applied to the turn layer and the pattern layer is not formed, and the liquid supply path is not blocked by the thermoplastic layer, and the pressure The bonding operation of the diaphragm to the pressure chamber forming portion in which the chamber is formed is easily performed.

In the printer device according to the first aspect of the present invention, as the diaphragm, the thermoplastic layer covering the pressure chamber and having adhesiveness, and at least a position other than the facing portion of the pressure chamber and the facing portion of the liquid supply path, A vibration plate having a pattern layer laminated on the thermoplastic layer is used. In the printer device of the second invention, the first and second pressure chambers are covered as the vibration plate and also have adhesiveness. A diaphragm having a pattern layer laminated on the thermoplastic layer at a position other than a facing portion between the plastic layer and at least the facing portion between the first and second pressure chambers and the facing portion between the first and second liquid supply paths. In any of these printer apparatuses, the diaphragm is placed on the main surface of the pressure chamber forming portion where the liquid supply path is formed, and the thermoplastic layer of the diaphragm is pressurized and heated. When bonding on the pressure chamber forming part, the pressure is An unnecessary pressure is not applied to the portion facing the liquid supply path that is applied to the turn layer and the pattern layer is not formed, and the liquid supply path is not blocked by the thermoplastic layer, and the pressure The bonding operation of the diaphragm to the pressure chamber forming portion in which the chamber is formed is easily performed.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

1. Embodiments Corresponding to First and Second Inventions (1) First Example In this example, the present invention is applied to an ink jet printer apparatus that ejects only ink, that is, corresponds to the first invention. An example is described.
(1-1) Configuration of Inkjet Printer Device First, the overall configuration of the inkjet printer device will be described. As shown in FIG. 1, a serial type inkjet printer apparatus 10 to which the present invention is applied is configured. That is, the drum 15 can be driven to rotate based on the rotational output given to the drum 15 from the motor 11 through the pulley 12, the belt 13 and the pulley 14 sequentially.

  A paper presser 16 is arranged on the outer periphery of the drum 15 in parallel with the axial direction of the drum 15, and the print paper 17 as a printing material wound around the drum 15 is transferred to the drum 15 by the paper presser 16. It can be pressed against the drum 15.

  A feed screw 18 is disposed on the outer periphery of the drum 15 in parallel with the axial direction of the drum 15, and a print head 19 that is an ink jet print head is screwed to the feed screw 18. The print head 19 can be moved in the axial direction of the drum 15 by being driven to rotate.

  Here, in the case of the inkjet printer 10, the motor 11, the drive motor (not shown) of the feed screw 18 and the print head 19 are all head drive, head feed control, drum rotation control 20 (hereinafter referred to as a control unit 20). Is driven by the control unit 20 based on an input signal S1 composed of print data and a control signal.

  As shown in FIG. 2, the control unit 20 actually has a signal processing control circuit 21 having a microcomputer configuration including a CPU (Central Processing Unit) or a DSP (Digital Signal Processor), and is based on the supplied input signal S1. Then, the signal processing control circuit 21 generates a drive signal S2 having a pulse wave shape and supplies it to the print head 19 through the driver 22 as the drive signal S3, thereby driving the print head 19 based on the drive signal S3. Thus, characters, figures and the like based on the input signal S1 are recorded on the print paper 17.

  At this time, the signal processing control circuit 21 records the print data obtained on the basis of the input signal S1 in the line buffer memory or the memory 23 having the frame memory configuration as necessary, and then reads out the print data as needed. The correction data stored in the ROM (Read Only Memory) map format in the correction circuit 24 is read out as necessary, and γ correction of the print data or color in the case of color is performed based on the correction data. Correction and the like are performed.

  Further, the signal processing control circuit 21 generates a control signal S4 based on the input signal S1, and sends them to the corresponding motor 11 or the drive motor of the feed screw 18 as the drive control signal S5 via the drive control unit 25, respectively. By doing so, the drive motors of the motor 11 and the feed screw 19 are driven and controlled, and thus the rotational operations of the drum 15 and the feed screw 18 are controlled.

  Thus, in this ink jet printer apparatus 10, when the print head 19 is located at the origin position during operation, the drive motor of the feed screw 18 is driven based on the drive control signal S 5 supplied from the control unit 20 to feed the feed screw 18. Is rotated at a predetermined angular speed to move the print head 19 in the axial direction of the drum 15 at a constant speed. At this time, the print head 19 is driven based on the drive signal S3 supplied from the control unit 20, thereby Characters, graphics, and the like based on the input signal S1 are printed on the print paper 17 for one line.

  Next, when printing for one line is completed, the motor 11 is driven based on the drive control signal S5 supplied from the control unit 20 to rotate the drum 15 by a predetermined angle, thereby feeding the print paper 17 for one line. At this time, the drive motor of the feed screw 18 is driven based on the drive control signal S5 supplied from the control unit 20 to rotate the feed screw 18, thereby returning the print head 19 to the origin position and thereafter the same operation. repeat.

In this way, in this ink jet printer apparatus 10, the printing paper 17 is sequentially printed line by line based on the input signal S1 supplied to the control unit 20, and thus the characters and graphics based on the input signal S1. Etc. can be printed on the printing paper 17 and printed.
(1-2) Configuration of Inkjet Printhead The configuration of the printhead 19 (inkjet printhead) is shown in FIGS.

  As shown in FIGS. 3 and 4, the print head 19 has a pressure chamber forming portion 31 and a diaphragm 32 sequentially stacked on one surface 30 </ b> A of an orifice plate 30 that is a nozzle forming member, and the diaphragm 32. A plurality of piezoelectric elements 33 are formed on the top.

  In the print head 19 of this example, the pressure chamber forming portion 31 is formed using, for example, a stainless material, and an opening formed along the Y direction (the direction indicated by the arrow y1 in the drawing) on one surface 31A. An ink buffer tank 40 that is a portion, a plurality of pressure chambers 41 that are concave portions sequentially formed at a predetermined first pitch along the ink buffer tank 40 (along the Y direction), and each pressure chamber 41 A plurality of groove-like liquid supply passages 42 that communicate with the ink buffer tank 40 are provided. Further, a nozzle introduction hole 43 that is a through hole is provided at the tip of each pressure chamber 41.

  Further, the ink buffer tank 40 is connected to an ink tank (not shown) via an ink supply pipe (not shown). Thus, the ink supplied from the ink tank to the ink buffer tank 40 via the ink supply pipe is transferred to the corresponding liquid. Each pressure chamber 41 can be introduced through a supply path 42.

  On the other hand, the orifice plate 30 is formed by using an organic film in this example, and the orifice plate 30 corresponds to each nozzle introduction hole 43 and communicates with each nozzle introduction hole 43. A plurality of discharge nozzles 44 are bored at the same first pitch as the pressure chambers 41 along the Y direction. As a result, in the print head 19, the ink respectively supplied to each pressure chamber 41 can be discharged from the corresponding discharge nozzle 44 to the outside via the corresponding nozzle introduction hole 43.

  Further, in the diaphragm 32, a plurality of protrusions 51 are laminated on one surface 50A of an adhesive thermoplastic layer 50 formed of a thermoplastic material, and the thermoplastic layer 50 is a pressure chamber forming portion. The first surface 31A is adhered to the first surface 31A so as to cover the first surface 31A.

  As is apparent from FIG. 4, each of the protrusions 51 corresponds to each pressure chamber 41, and faces the central portion of the corresponding pressure chamber 41 in the width direction (Y direction) via the thermoplastic layer 50. Thus, the length is formed on the thermoplastic layer 50 so as to be shorter than the length of the pressure chamber 41. Thereby, in this print head 19, for example, even when the width of the piezoelectric element 33 is wider than the width of the pressure chamber 41 and / or the length of the piezoelectric element 33 is longer than the length of the pressure chamber 41, each piezoelectric element 33. Can be applied to the thermoplastic layer 50 effectively.

  Further, the piezoelectric elements 33 are formed by sequentially laminating piezoelectric materials and conductive materials alternately, and correspond to the respective pressure chambers 41 so as to face the corresponding pressure chambers 41 through the diaphragm 32. Are fixed to the thermoplastic layer 50 via the corresponding protrusions 51 of the diaphragm 32.

  In this case, in each piezoelectric element 33, a first electrode (not shown) that receives a drive signal from the control unit is formed on the upper surface on the upper side in FIG. 3, and the lower surface on the lower side in FIG. Second electrodes (not shown) that are grounded are formed, and the diaphragm 32 is applied when a drive voltage based on the drive signal S3 from the control unit 20 shown in FIGS. 1 and 2 is applied to the first electrode. Is deformed in the Z direction (the direction indicated by the arrow z1 in the drawing), which is the direction in which the pressure chamber 41 is pulled up from the corresponding pressure chamber 41.

  Thus, when the print head 19 is operated, when the drive voltage S3 is applied to the first electrode of the corresponding piezoelectric element 33 based on the drive signal S3 supplied from the control unit 20 shown in FIGS. The piezoelectric element 33 is deformed in the direction in which the diaphragm 32 is pulled up, that is, in the Z direction (the direction indicated by the arrow z1 in the figure) to displace the diaphragm 32, thereby increasing the volume of the corresponding pressure chamber 41. Thereafter, when the drive voltage falls, the piezoelectric element 33 returns from the deformed state, and the diaphragm 32 is returned to the original position so as to increase the pressure in the corresponding pressure chamber 41, and thus the pressure. The ink in the pressure chamber 41 can be discharged to the outside through the nozzle introduction hole 43 and the corresponding discharge nozzle 44 sequentially.

  In addition to this configuration, in the case of this print head 19, as shown in FIG. 4, the pressure chamber 41 and the liquid supply path are respectively provided on one surface of the thermoplastic layer 50 of the vibration plate 32 so as to correspond to each pressure chamber 41. A pattern layer 52 made up of U-shaped protrusions is laminated so as to surround the periphery of 42.

  That is, in the print head 19 of the ink jet printer apparatus 10 of this example, as the diaphragm, the thermoplastic layer 50 that covers the pressure chamber 41 and also has adhesiveness, and at least the facing portion of the pressure chamber 41 and the liquid supply path 42 The diaphragm 32 having the pattern layer 52 laminated on the thermoplastic layer 50 at a position other than the facing portion is used.

  Thus, in this print head 19, the vibration plate 32 is positioned and placed on the one surface 31 </ b> A of the pressure chamber forming portion 31, and then the pressure plate is formed by pressurizing and heating the vibration plate 32 (thermoplastic layer 50). When adhering onto the one surface 31A of the part 31, the pressure is concentrated and applied to the pattern layer 52 of the diaphragm 32, and unnecessary pressure is applied to the part facing the liquid supply path 42 where the pattern layer 52 is not formed. In addition, the liquid supply path 42 is not blocked by the thermoplastic layer 50, and the operation of bonding the diaphragm 32 to the pressure chamber forming portion 31 in which the pressure chamber 41 is formed is easily performed.

In the case of this example, each pattern layer 52 of the diaphragm 32 is formed with a thickness of 15 [μm] or more. As a result, in the print head 19, even when the diaphragm 32 is pressed and heated on the one surface 31 </ b> A of the pressure chamber forming portion 31, even if the thermoplastic layer 50 of the diaphragm 32 is deformed, the thermoplastic layer 50. Thus, it is possible to more reliably prevent unnecessary pressure from being applied to the portions facing the pressure chambers 41 and the liquid supply passages 42, thereby further reducing the occurrence of defects in the process. (1-3) Manufacturing Method of Inkjet Print Head A manufacturing method of the print head 19 will be described with reference to FIGS.

  That is, first, an ink buffer tank 40, a liquid supply path 42, a pressure chamber 41, and a nozzle introduction hole 43 are formed by etching a plate material made of stainless steel having a predetermined size, as shown in FIG. Thus, the pressure chamber forming portion 31 is formed.

  Next, as shown in FIG. 5 (A), a film-like member 60 such as an organic film, which is the basis of the orifice plate 30, is fixed to the other surface 31B of the pressure chamber forming portion 31 and FIG. As shown in B), the orifice plate 30 is fixed to the other surface 31B of the pressure chamber forming portion 31 by forming a discharge nozzle 44 having a through-hole by a excimer laser or the like at a predetermined position of the film-like member 60. The pressure chamber member 61 is formed.

  On the other hand, separately from this, a laminate 63 is prepared in which a metal layer 62 made of Cu or Ni or the like is formed on one surface 50A of a thermoplastic layer 50 made of a thermoplastic material as shown in FIG. The metal layer 62 of the laminate 63 is etched to leave only the protrusions 51 and the pattern layer 52 as shown in FIG. 6B, and the protrusions 51 and the pattern layer 52 described above are formed on the one surface 50A of the thermoplastic layer 50. The diaphragms 32 are formed to be stacked.

  The laminated plate 63 is formed by bonding a plate made of Cu or Ni or the like on the thermoplastic layer 50 using an adhesive, or forming the metal layer 62 on the thermoplastic layer 50 by plating. The thermoplastic layer 50 can be formed by laminating or by applying a thermoplastic material on the metal layer 62 made of a plate of Cu or Ni.

  Further, as the material of the thermoplastic layer 50 of the laminated plate 63, it is desirable to use polyimide that is chemically stable with respect to ink, and in this way, a general technique for manufacturing a flexible printed circuit board is used as it is. Therefore, there is an advantage that the diaphragm 32 can be manufactured at low cost. In addition, as such a material, it is possible to use a thermoplastic polyimide film NEOFREX (trade name) manufactured by Mitsui Toatsu Chemical Co., Ltd., which is excellent in chemical resistance and heat resistance.

  Further, as the material of the thermoplastic layer 50, a material having a glass transition point of 180 [° C.] to 250 [° C.] can be used, and in this way, the press temperature is lowered in the subsequent pressurizing and heating bonding step. be able to.

  Further, as shown in FIG. 8, the thermoplastic layer 50 of the laminated plate 63 is a laminated structure of an organic film 65 and a thin film 64 which are thermoplastic layers made of a material having a glass transition point of 180 [° C.] to 250 [° C.]. The laminated plate 63 may be formed so as to be fixed to the plate constituting the metal layer 62 via the thin film 64, and thus formed on the thermoplastic layer 50. The accuracy of the protruding portion 51 and the pattern layer 52 to be improved can be easily increased.

  On the other hand, as a patterning method for the metal layer 62 of the laminated plate 63, a photosensitive material such as a dry film or a liquid resist is laminated or applied on the metal layer 62, and then the mask corresponding to the pattern is used for the dry film. After exposure and development, etching can be performed using the remaining photosensitive material as a mask. Specifically, when the metal layer 62 is formed of copper, a dry film resist for printed circuit board wiring is used as a resist material, and an aqueous ferric chloride solution of about 10 to 50% is used as an etching solution. Further, the protrusion 51 and the pattern layer 52 described above can be formed using a sodium hydroxide aqueous solution of about 2 to 5% as a resist material stripping solution.

  Subsequently, as shown in FIG. 7 (FIG. A), on one surface 61A of the pressure chamber member 61 manufactured through the steps described with reference to FIGS. 5A and 5B (on one surface 31A of the pressure chamber forming portion 31). Next, after positioning and placing the diaphragm 32 manufactured through the steps described with reference to FIGS. 6A and 6B, the thermoplastic layer 50 of the diaphragm 32 is heated and pressurized to thereby pressurize the diaphragm 32. It adheres on one surface 31A of the chamber forming part 31. In this case, when the diaphragm 32 is bonded to the pressure chamber forming portion 31, the bonding function can be enhanced by performing degreasing cleaning and drying treatment at about 90 to 120 [deg.] C. on the diaphragm 32.

Here, in practice, the diaphragm 32 is bonded to the pressure chamber member 61 as shown in FIG. 9 by placing the diaphragm 32 on one surface 61A of the pressure chamber member 61 (on one surface 31A of the pressure chamber forming portion 31). What is positioned and placed is sandwiched between the heated first and second plates 70A and 70B of the press device. Specifically, for example, when the thermoplastic layer 50 of the diaphragm 32 is formed using the above-mentioned neoprex, the temperature of the first and second plates 70A and 70B of the press device is set to about 230 [° C.]. The pressure is adjusted so that a pressure of about 20 to 30 [kg / cm ² ] is applied in the bonding area between the diaphragm 32 and the pressure chamber member 61.

  That is, in the print head of the printer apparatus of this example, as the vibration plate, the thermoplastic layer 50 that covers the pressure chamber 41 and also has adhesiveness, at least the facing portion of the pressure chamber 41 and the facing portion of the liquid supply path 42. Since the diaphragm 32 having the pattern layer 52 laminated on the thermoplastic layer 50 at a position other than the above is used, the diaphragm 32 is attached to the pressure chamber member 61 (pressure chamber forming portion 31) as described above. It is placed on one surface 61A (one surface 31A) on which the liquid supply path 42 is formed, and the thermoplastic layer 50 of the diaphragm 32 is pressurized and heated on the pressure chamber member 61 (pressure chamber forming portion 31). At the time of bonding, the pressure is concentrated and applied to the pattern layer 52 of the vibration plate 32, and no unnecessary pressure is applied to the portion facing the liquid supply path 42 where the pattern layer 52 is not formed. Supply path 4 It is never become blocked, and the bonding operation of the diaphragm 32 to the pressure chamber member 61 in which the pressure chambers 42 are formed (the pressure chamber forming portion 31) is easily performed.

Next, as shown in FIG. 7B, the piezoelectric elements 33 are fixed to the respective protrusions 51 of the vibration plate 32 of the head constituting portion including the vibration plate 32 and the pressure chamber member 61 formed as described above. . Thereby, the print head 19 shown in FIG. 3 can be obtained.
(1-4) Operation and Effect of First Embodiment In the above configuration, in the inkjet printer apparatus 10 shown in FIG. 1, the controller 20 is driven based on the input signal S1 supplied as shown in FIG. By generating the signal S3 and sending it to the print head 19, a pulsed drive voltage is applied to the first electrode of the corresponding piezoelectric element 33 of the print head 19 as shown in FIG.

  In this case, in the corresponding piezoelectric element 33, when a pulsed driving voltage is applied to the first electrode, a positive electric field is generated in the polarization direction based on the driving voltage, and thus in FIG. 10A. It is displaced in the direction indicated by the arrow A1, that is, the direction in which the diaphragm 32 is pulled with respect to the pressure chamber 41 (Z direction), in other words, the direction in which the pressure chamber 41 is expanded. At this time, in the vicinity of the tip of the discharge nozzle 44, a meniscus is formed at a position where the surface tension of the ink 71 is balanced. Therefore, even after the piezoelectric element 33 pulls up the diaphragm 32, the meniscus position is as shown in FIG. (Ie, the tip position of the discharge nozzle 44).

  Thereafter, in this piezoelectric element 33, since the drive voltage applied to the first electrode falls, the piezoelectric element 33 is displaced in the direction indicated by the arrow A2 as shown in FIG. The pressure in the corresponding pressure chamber 41 is increased by returning the diaphragm 32 to the original position, and the ink 71 in the pressure chamber 41 is sequentially passed through the nozzle introduction hole 43 and the discharge nozzle 44 by this pressure. To discharge outside.

  Here, in the print head 19, as described above, the vibration plate 32 is formed using the thermoplastic layer 50 having adhesiveness made of a thermoplastic material. For this reason, the vibration plate 32 is formed on one surface of the pressure chamber forming portion 31. When adhering to 31A, an adhesive only for adhesion of liquid or the like, and an adhesive having photosensitivity and adhesiveness such as a dry film are not required.

  Therefore, the print head 19 can easily perform the bonding process of bonding the diaphragm 32 to the one surface 31A of the pressure chamber forming portion 31, and does not require an expensive apparatus such as an exposure apparatus in this process. Manufacturing cost can be reduced.

  Further, in the print head 19, a U-shaped pattern layer 52 is formed on the thermoplastic layer 50 of the vibration plate 32 at a position other than at least a portion facing the pressure chamber 41 and a portion facing the liquid supply path 42. Therefore, the pressure applied to the pressure chamber member 61 via the vibration plate 32 during the process of bonding the vibration plate 32 onto the one surface 31A of the pressure chamber forming portion 31 is shown in FIG. 52 can be concentrated in the lower region portion 61B. Therefore, in this print head 19, it is not necessary at a portion of the diaphragm 32 (thermoplastic layer 50) facing the liquid supply path 42 in the bonding process of the diaphragm 32 to the pressure chamber forming portion 31. It is possible to prevent the pressure from being applied, and to reliably prevent the liquid supply paths 42 from being blocked by the thermoplastic layer 50 of the diaphragm 32.

  Further, in the print head 19, a portion where the pattern layer 52 is formed to apply pressure to the thermoplastic layer 50 of the vibration plate 32 during the bonding process of the vibration plate 32 to the one surface 31 </ b> A of the pressure chamber forming portion 31 as described above. Therefore, it is possible to reduce the pressure generation force of the press device.

According to the above configuration, the diaphragm 32 is formed using the thermoplastic layer 50, and at least a portion facing the pressure chamber 41 and a portion facing the liquid supply path 42 on one surface 50 </ b> A of the thermoplastic layer 50. Since the U-shaped pattern layer 52 is formed at the position, the bonding work of the diaphragm 32 to the one surface 31A of the pressure chamber forming portion 31 can be facilitated, and the pressure chamber forming portion can be used during the bonding step. The liquid supply path 42 of the pressure chamber forming section 31 can be remarkably reduced from being blocked, and thus the bonding operation of the diaphragm 32 to the one surface 31A of the pressure chamber forming section 31 can be performed by the liquid supply path 42 of the pressure chamber forming section 31. It is possible to realize a printer device that can be easily performed without blocking. (2) Second Embodiment In this embodiment, the present invention is applied to a “carrier jet” printer apparatus in which ink is quantitatively mixed with a diluent, and these are mixed and discharged, that is, corresponds to the second invention. An example will be described.
(2-1) Configuration of “Carrier Jet” Printer Device FIG. 11, in which parts corresponding to those in FIG. 1 are assigned the same reference numerals, shows a “carrier jet” printer device 80 to which the present invention is applied. 1 except that a print head 81, which is a “carrier jet” print head, is provided instead of the print head 19 shown in FIG. 1, and a control unit 82 is provided instead of the control unit 20. The configuration is the same as that of the ink jet printer apparatus 10 of the first embodiment.

  In this case, in the print head 81, in order to give a gradation to each dot as described above, the ink is mixed with the diluent for discharge for each dot, and the first piezoelectric for ink discharge is discharged. An element and a second piezoelectric element for discharging a dilution liquid are provided.

  Therefore, the controller 82 includes a plurality of first drivers 83A for driving the first piezoelectric elements, respectively, as shown in FIG. A plurality of second drivers 83B for respectively driving the second piezoelectric elements are provided. Thus, in the control unit 82, the signal processing control circuit 84 controls each of the first or second drivers 83A and 83B. Each of the first and second piezoelectric elements of the print head 81 is driven and controlled via each of them.

  Actually, the signal processing control circuit 84 has a microcomputer configuration including a CPU or a DSP, and each first piezoelectric element for obtaining a gradation specified for each dot based on the supplied input signal S1. The drive voltage value of each element is calculated, and a first drive signal S10A having a pulse waveform having the calculated drive voltage value is generated for each first piezoelectric element. The first drive signal S11A is applied to the corresponding first piezoelectric element of the print head 81 via the driver 83A.

  At this time, the signal processing control circuit 84 generates a plurality of second drive signals S10B having a pulse waveform having a predetermined voltage for each dot based on the supplied input signal S1, and each of the second drive signals S10B corresponds to each of the second drive signals S10B. The second drive signal S11B is applied to the corresponding second piezoelectric element of the print head 81 through each of the two drivers 83B.

In this way, the control unit 82 is configured to eject the ink and the diluted liquid in an amount corresponding to the gradation designated for each dot from the print head 81, and thus input to the print head 81 for each dot. Gradation printing and printing based on the signal S1 are performed.
(2-2) Configuration of “Carrier Jet” Print Head The configuration of the print head 81 (“carrier jet” print head) is shown in FIGS. 13 and 14.

  As shown in FIGS. 13 and 14, the print head 81 has a pressure chamber forming portion 91 and a diaphragm 92 sequentially stacked on one surface 90 </ b> A of the orifice plate 90, and a plurality of first heads on the diaphragm 92. The second piezoelectric elements 93A and 93B are fixed to each other.

  In the print head 81 of this example, the pressure chamber forming portion 91 is formed by using, for example, a stainless material, and the one surface 91A is provided at both ends along the Y direction (the direction indicated by the arrow arrow y2 in the figure). The dilution buffer tank 101 and the ink buffer tank 100 each formed of the first or second opening formed respectively, and a predetermined amount along the corresponding dilution buffer buffer 101 or the ink buffer tank 100 (along the Y direction). A plurality of first and second pressure chambers 103 and 102 formed of concave portions sequentially formed at a first pitch, and a diluent buffer tank 101 corresponding to each of the first and second pressure chambers 103 and 102 individually. Alternatively, a plurality of groove-shaped first and second liquid supply paths 105 and 104 communicating with the ink buffer tank 100 are provided. In addition, a first nozzle introduction hole 107 and a second nozzle introduction hole 106 each formed as a through hole are provided at the distal ends of the first and second pressure chambers 105 and 104, respectively.

  Further, the diluent buffer tank 101 is connected to a diluent tank (not shown) via a diluent supply pipe (not shown), and the ink buffer tank 100 is connected to an ink tank (not shown) via an ink supply pipe (not shown). Thus, the diluent supplied from the diluent tank to the diluent buffer tank 101 via the diluent supply pipe can be introduced into each first pressure chamber 103 via the corresponding first liquid supply path 105. Ink supplied from the ink tank to the ink buffer tank 100 via the ink supply pipe can be introduced into each second pressure chamber 102 via the corresponding second liquid supply path 104.

  On the other hand, the orifice plate 90 is formed using an organic film, and communicates with the corresponding second nozzle introduction holes 106 so as to correspond to the respective second nozzle introduction holes 106 of the pressure chamber forming portion 91. As described above, a plurality of metering nozzles 108 are formed at the same pitch as that of the second pressure chamber 102 along the Y direction. In addition, the orifice plate 90 corresponds to each first nozzle introduction hole 107 of the pressure chamber forming portion 91, communicates with the corresponding first nozzle introduction hole 107, and corresponds to the quantitative nozzle 108. A plurality of discharge nozzles 109 are perforated along the Y direction at the same pitch as that of the second pressure chamber 105 so as to be aligned in the X direction.

  Thereby, in the print head 81, the ink respectively supplied to the second pressure chambers 102 can be discharged to the outside from the corresponding fixed nozzle 108 through the corresponding second nozzle introduction hole 106. The diluent supplied to each first pressure chamber 103 can be discharged from the corresponding discharge nozzle 109 to the outside through the corresponding first nozzle introduction hole 107.

  In this print head 81, each fixed nozzle 108 is formed with a predetermined inclination so as to gradually approach the corresponding discharge nozzle 109 as it goes to the other surface 90B of the orifice plate 90. As a result, in the print head 81 which is this “carrier jet” print head, the ink droplets and the diluting liquid droplets discharged from the fixed and discharge nozzles 108 and 109 are mixed and discharged to the outside as one droplet. Thus, droplets having an ink concentration corresponding to the mixing ratio between the amount of ink discharged from the fixed amount nozzle 108 and the amount of diluted liquid discharged from the discharge nozzle 109 can be discharged. .

  On the other hand, in the diaphragm 92, a plurality of first and second protrusions 111B and 111A are laminated on the one surface 110A of the thermoplastic layer 110 made of a thermoplastic material and having adhesive properties, and a pressure chamber forming portion is formed. A pressure chamber is formed so as to integrally cover the ink buffer tank 100, the dilution buffer tank 101, the second liquid supply path 104, the first liquid supply path 105, and the first and second pressure chambers 103 and 102. The portion 91 is bonded onto one surface 91A.

  The first protrusions 111B correspond to the first pressure chambers 103 so as to face the center portions in the width direction of the corresponding first pressure chambers 103 via the thermoplastic layer 110, respectively. And it is provided on the thermoplastic layer 110 so that length may become shorter than the length of the corresponding 1st pressure chamber 103. FIG. Similarly, the second protrusions 111A correspond to the second pressure chambers 102 in the width direction of the corresponding second pressure chambers 102, as is apparent in FIG. It is provided on one surface 110 </ b> A of the thermoplastic layer 110 so as to face the center portion through the thermoplastic layer 110 and to be shorter than the length of the corresponding second pressure chamber 102.

  Thereby, in this print head 81, for example, the width of the first and second piezoelectric elements 93B and 93A is wider than the width of the corresponding first and second pressure chambers 103 and 102, and / or Even when the lengths of the second piezoelectric elements 93B and 93A are longer than the corresponding lengths of the first and second pressure chambers 103 and 102, the vibration plates 92 are separated from the first and second piezoelectric elements 93B and 93A, respectively. Can be effectively transmitted to the thermoplastic layer 110.

  Further, the first and second piezoelectric elements 93B and 93A are formed by alternately laminating piezoelectric materials and conductive materials, respectively, and correspond to the first and second pressure chambers 103 and 102, respectively. The heat of the diaphragm 92 via the corresponding first and second protrusions 111B and 111A of the diaphragm 92 so as to face the corresponding first and second pressure chambers 103 and 102 via the diaphragm 92, respectively. It is fixed on one surface 110A of the plastic layer 110.

  In this case, each of the first and second piezoelectric elements 93B, 93A has a corresponding first or second drive signal S11A from the control unit 82 shown in FIGS. 11 and 12 on the upper surface in FIG. The first electrodes for receiving S11B are respectively formed, and the second lower electrode (not shown) that is grounded is formed on the lower surface in FIG. When a driving voltage based on the corresponding first or second driving signal S11A or S11B is applied to the first electrode, the diaphragm 92 is moved to the corresponding first or second pressure chamber 103 or 102, respectively. On the other hand, it is deformed in the Z direction (the direction indicated by the arrow z2 in the figure), which is the pulling direction.

  Thus, during operation, the print head 81 operates in the first or second piezoelectric element 93B, 93A based on the first and second drive signals S11A, S11B supplied from the control unit 82 shown in FIGS. When a pulsed driving voltage is applied to the first or second piezoelectric element 93B, 93A, the direction in which the diaphragm 92 is pulled with respect to the corresponding first or second pressure chamber 103, 102, that is, Z While the volume of the corresponding first and second pressure chambers 103 and 102 is expanded by being deformed in the direction (indicated by the arrow z2 in the figure), when the drive voltage falls thereafter, the first or second pressure chamber 103 or 102 is expanded. The piezoelectric elements 93B and 93A of the second state are restored from the deformed state, and the pressure in the first or second pressure chambers 103 and 102 is increased by returning the diaphragm 92 to the original position. Based on the pressure, the first and second nozzle introduction holes 107 and 106 corresponding to the dilution liquid and ink in the corresponding first and second pressure chambers 103 and 102, and the corresponding discharge nozzle 109 are provided. In addition, the liquid can be discharged to the outside through the metering nozzle 108.

  In addition to this configuration, in the case of this “carrier jet” jet print head 81, a corresponding second pressure is provided on one surface 110 </ b> A of the thermoplastic layer 110 of the diaphragm 92, corresponding to each second pressure chamber 102. A substantially U-shaped predetermined shape so as to surround the chamber 102 and the second liquid supply path 104 communicating with the chamber 102 and not to be positioned on the second pressure chamber 102 and the second liquid supply path 104. A second pattern layer 112A made of a thick protrusion is stacked. Similarly, on the one surface 110A of the thermoplastic layer 110 of the diaphragm 92, the corresponding first pressure chambers 103 and the respective first pressure chambers 103 communicating with the first pressure chambers 103 are associated with the first pressure chambers 103, respectively. It is formed of a substantially U-shaped protrusion having a predetermined thickness so as to surround the periphery of one liquid supply path 105 and not to be positioned on the first pressure chamber 103 and the first liquid supply path 105. The first pattern layer 112B is stacked.

  That is, in the print head 81 of the “carrier jet” printer device 80 of the present example, the first pressure chamber 103 and the second pressure chamber 102 are covered as the diaphragm, and the thermoplastic layer 110 having adhesiveness, and at least It is laminated on the thermoplastic layer at a position other than the facing portion between the first pressure chamber 103 and the second pressure chamber 102 and the facing portion between the first liquid supply path 105 and the second liquid supply path 104. Therefore, the diaphragm 92 having the pattern layer is used.

  Thus, in this print head 81, the diaphragm 92 is positioned and placed on the one surface 91A of the pressure chamber forming portion 91, and then the diaphragm 92 (thermoplastic layer 110) is pressurized and heated to form the pressure chamber. When adhering onto the one surface 91A of the portion 91, the pressure is concentratedly applied to the first and second pattern layers 112A and 112B of the diaphragm 92, and the first and second pattern layers 112A and 112B are formed. Unnecessary pressure is not applied to the portions facing the first and second liquid supply paths 105, 104 that are not performed, and the thermoplastic layer 110 blocks the first and second liquid supply paths 105, 104. In addition, the bonding operation of the diaphragm 92 to the pressure chamber forming portion 91 in which the first and second pressure chambers 103 and 102 are formed is easily performed.

In this example, each of the first and second pattern layers 112B and 112A of the diaphragm 92 is formed with a predetermined thickness of 15 [μm] or more. Thereby, in this print head 81, even when the diaphragm 92 is pressed and heated on the one surface 91A of the pressure chamber forming portion 91 and bonded, the thermoplastic layer 110 is deformed even if the thermoplastic layer 110 of the diaphragm 92 is deformed. It is more certain that unnecessary pressure is applied to portions of the first and second pressure chambers 103 and 102 of 110, which are opposed to the second liquid supply passage 104 and the first liquid supply passage 105, respectively. Thus, the occurrence of defects in the process can be further reduced.
(2-3) “Carrier Jet” Printhead Manufacturing Procedure A method for manufacturing the printhead 81 will be described with reference to FIGS.

  That is, by first etching a plate made of stainless steel having a predetermined size, as shown in FIG. 15A, the ink buffer tank 100, the diluent buffer tank 101, the second liquid supply path 104, and the first liquid supply path 104 are formed. The liquid supply path 105, the first and second pressure chambers 103 and 102, the second nozzle introduction hole 106, and the first nozzle introduction hole 107 are formed, and thus the pressure chamber forming portion 91 is formed.

  Next, as shown in FIG. 15A, a film-like member 120 such as an organic film serving as the basis of the orifice plate 90 is fixed to the other surface 91B side of the pressure chamber forming portion 91, and FIG. As shown in (B), the fixed amount nozzle 108 formed of a through-hole by an excimer laser or the like so as to communicate with the second nozzle introduction hole 106 or the first nozzle introduction hole 107 corresponding to a predetermined position of the film-like member 120. Alternatively, by forming the discharge nozzle 109, the pressure chamber member 121 in which the orifice plate 90 is fixed to the other surface 91B of the pressure chamber forming portion 91 is formed.

  In this case, in the print head 81, the interval between the fixed nozzle 108 and the discharge nozzle 109 is set to 100 [μm] or less for the purpose of widening the fixed mixing range of the ink and the diluting liquid, that is, widening the gradation range. It is desirable to do. For this reason, in the print head 81 of this example, the fixed nozzle 108 is formed obliquely as described above, so that the orifice plate 90 and the other pressure plates 103 and 102 can be reduced without reducing the distance between the corresponding first and second pressure chambers 103 and 102. The distance between the opening of the metering nozzle 108 and the opening of the discharge nozzle 109 on the surface 90B is narrowed. In practice, for example, the thickness of the film-like member 120 in FIG. 15A is 125 [μm], and the angle of the metering nozzle 108 is 60 [deg. Therefore, even when the distance between the corresponding first and second pressure chambers 103 and 102 is 200 [μm] or more, the distance between the metering nozzle 108 and the discharge nozzle 109 is 100 [μm] or less. Is possible.

  On the other hand, separately from this, a laminate 123 in which a metal layer 122 made of Cu or Ni or the like is formed on one surface 110A of a thermoplastic layer 110 made of a thermoplastic material as shown in FIG. As shown in FIG. 16B, the metal layer 122 of the laminated plate 123 is etched, and a plurality of first and second protrusions 111B corresponding to the first and second pressure chambers 103 and 102, respectively. 111A and the first and second pattern layers 112B and 112A, leaving the first and second protrusions 111B and 111A and the first and second pattern layers on the one surface 110A of the thermoplastic layer 110. The diaphragm 92 is formed by laminating 112B and 112A.

  In this laminated plate 123, a metal layer 122 is formed by adhering a plate made of Cu or Ni or the like on the thermoplastic layer 110 using an adhesive, or the metal layer 122 is formed on the thermoplastic layer 110 by plating. The thermoplastic layer 110 can be formed by laminating or by applying a thermoplastic member on the metal layer 122 made of a plate such as Cu or Ni.

  In addition, it is desirable to use polyimide that is chemically stable with respect to ink as the material of the thermoplastic layer 110 of the laminated plate 123. By doing so, the manufacturing technology of a general flexible printed circuit board can be used as it is. Since it can be used, there is an advantage that the diaphragm 92 can be manufactured at low cost. In addition, as such a material, it is possible to use a thermoplastic polyimide film NEOFREX (trade name) manufactured by Mitsui Toatsu Chemical Co., Ltd., which is excellent in chemical resistance and heat resistance.

  Further, as the material of the thermoplastic layer 110, a material having a glass transition point of 180 [° C.] to 250 [° C.] can be used. can do.

  Further, as shown in FIG. 18, the thermoplastic layer 110 of the laminate 123 is a laminate of an organic film 131 and a thin film 130 which are thermoplastic layers made of a material having a glass transition point of 180 [° C.] to 250 [° C.]. The laminated plate 63 may be formed so as to have a structure and be fixed to the plate constituting the metal layer 122 via the thin film 130, and thus, on the thermoplastic layer 110. The accuracy of the first and second protrusions 111B and 111A and the first and second pattern layers 112B and 112A to be formed can be easily increased.

  On the other hand, as a patterning method for the metal layer 122 of the laminated plate 123, a photosensitive material such as a dry film or a liquid resist is laminated or coated on the metal layer 122, and the photosensitive material is exposed and developed using a mask. Then, the metal layer 122 can be etched using the remaining photosensitive material as a mask. Specifically, when copper is used as the material of the metal layer 122, a dry film resist for printed circuit board wiring is used as a photosensitive material, and an aqueous ferric chloride solution of about 10 to 50% is used as an etching solution. Furthermore, the above-mentioned patterning can be performed using a sodium hydroxide aqueous solution of about 2 to 5% as a stripping solution for the photosensitive material.

  Subsequently, as shown in FIG. 17A, on one surface 121A of the pressure chamber member 121 manufactured through the steps described with reference to FIGS. 15A and 15B (on the one surface 91A of the pressure chamber forming portion 91). 16A and 16B, the vibration plate 92 manufactured through the steps described with reference to FIGS. 16A and 16B is the first or second corresponding to the first and second protrusions 111B and 111A of the vibration plate 92, respectively. After positioning and mounting so as to face the center of the pressure chambers 103 and 102 via the thermoplastic layer 110 of the diaphragm 92, the pressure chamber is formed by heating and pressurizing the thermoplastic layer 110 of the diaphragm 92. It adheres on one surface 91A of the part 91. In this case, when the diaphragm 92 is bonded onto the one surface 91A of the pressure chamber forming portion 91, the diaphragm 92 is subjected to degreasing cleaning and a drying process of about 90 to 120 [° C.] to enhance the bonding function. Can do.

Here, in practice, the bonding operation of the diaphragm 92 to the one surface 91A of the pressure chamber forming portion 91 vibrates on one surface 121A of the pressure chamber member 121 (one surface 91A of the pressure chamber forming portion 91) as shown in FIG. The plate 92 positioned and mounted can be sandwiched between the heated first and second plates 130A and 130B of the press device. Specifically, for example, when the above-mentioned neoprex is used as the thermoplastic layer 110 of the diaphragm 92, the temperature of the first and second plates 130A and 130B of the press apparatus is set to about 230 [° C.] The pressure is adjusted so that a pressure of about 20 to 30 [kg / cm ² ] is applied in the bonding area between the vibration plate 92 and the pressure chamber forming portion 91.

  That is, in the print head of the printer apparatus of this example, as the vibration plate, the first and second pressure chambers 103 and 102 are covered, the thermoplastic layer 110 having adhesiveness, and at least the first and second pressure chambers. 103 and 102 and first and second pattern layers 112B and 112A stacked on the thermoplastic layer 110 at positions other than the facing portions of the first and second liquid supply paths 105 and 104. Since the diaphragm 92 is used, the diaphragm 92 is placed on the one surface 121A on which the first and second liquid supply paths 105 and 104 of the pressure chamber member 121 (pressure chamber forming portion 91) are formed as described above. When the thermoplastic layer 110 of the diaphragm 92 is pressed and heated and bonded onto the pressure chamber member 121 (pressure chamber forming portion 91), the pressure is applied to the diaphragm 92. 1st and 2nd pattern The pressure applied to the first and second liquid supply paths 105 and 104 where the first and second pattern layers 112B and 112A are not formed is applied to the first and second pattern layers 112B and 112A in a concentrated manner. In addition, the first and second liquid supply paths 105 and 104 are not blocked by the thermoplastic layer 110, and the pressure chambers in which the first and second pressure chambers 103 and 102 are formed are provided. Bonding of the diaphragm 92 to the member 121 (pressure chamber forming portion 91) is easily performed.

Subsequently, as shown in FIG. 17B, the first and second protrusions 111B and 111A of the vibration plate 92 of the head constituting portion including the vibration plate 92 and the pressure chamber member 121 formed as described above are formed. The first and second piezoelectric elements 93B and 93A are fixed to each other. Thereby, the print head 81 shown in FIG. 13 can be obtained.
(2-4) Operation and Effect of Second Embodiment In the above-described configuration, in the “carrier jet” printer device 80 shown in FIG. 11, the control unit 82 is supplied with the input signal S1 as shown in FIG. A plurality of first and second drive signals S11A, S11B are formed and applied to the corresponding first or second piezoelectric element 93B, 93A of the print head 81, respectively.

  In the corresponding first and second piezoelectric elements 93B and 93A, a pulsed drive voltage is applied to the first electrode, and a positive electric field is generated in the polarization direction based on the drive voltage. Therefore, as shown in FIG. 20, the direction indicated by the arrow A3 in FIG. 20, that is, the direction in which the diaphragm 92 is pulled with respect to the corresponding first or second pressure chamber 103, 102 (Z direction), in other words, corresponds. The first or second pressure chamber 103 or 102 is displaced in the direction of expansion. At this time, in the vicinity of the tips of the discharge nozzle 109 and the fixed amount nozzle 108, a meniscus is formed at a position where the surface tension of the diluent 141 or the ink 140 is balanced, so that the corresponding first or first piezoelectric element 93B, 93A. Even after the diaphragm 92 is lifted, the position of the meniscus is stabilized at the position shown in FIG.

  Next, as shown in FIG. 21, since the drive voltage applied to the second piezoelectric element 93A falls, it is displaced in the direction indicated by arrow A4 in FIG. 21, that is, the second piezoelectric element 93A is moved from the displaced state to the original state. The pressure in the corresponding second pressure chambers 102 is raised by returning the diaphragm 92 to the original position, and the ink 140 in the second pressure chambers 102 is caused to correspond to the corresponding second pressure chambers 102 by this pressure. The nozzle introduction hole 106 and the fixed quantity nozzle 108 are sequentially discharged to the outside.

  In this case, since the drive voltage having a pulse waveform with a gradual fall is applied to the second piezoelectric element 93A, the ink 140 in the corresponding second pressure chamber 102 is ejected from the fixed nozzle 108. Instead, the metering nozzle 108 overflows near the tip. Then, the ink 140 comes into contact with the meniscus of the diluent 141 existing near the tip of the corresponding discharge nozzle 109 and mixes to form a mixed solution 142 having an ink concentration corresponding to the designated gradation.

  Subsequently, as shown in FIG. 22, immediately after the ink 140 is discharged from the metering nozzle 108, the drive voltage applied to the first piezoelectric element 93B falls and is displaced in the direction indicated by the arrow A4 in FIG. When the first piezoelectric element 93B returns from the deformed state, the pressure in the corresponding first pressure chamber 103 rises, and thus the liquid mixture 142 of the ink 140 and the diluent 141 is discharged from the corresponding discharge nozzle 109. The In this case, the fall of the drive voltage applied to the first piezoelectric element 93B changes abruptly, and the mixed solution 142 formed at the tip of the discharge nozzle 109 is one drop of mixed droplets as shown in FIG. 143 is discharged from the discharge nozzle 109.

  Here, in the case of this print head 81, the vibration plate 92 is formed using the thermoplastic layer 110 having an adhesive property made of a thermoplastic material as described above. For this reason, the vibration plate 92 is attached to the pressure chamber forming portion 91. When adhering to the one surface 91A, an adhesive only for adhesiveness such as a liquid or an adhesive having photosensitivity and adhesiveness such as a dry film is not required.

  Therefore, in this print head 81, the bonding process of bonding the diaphragm 92 to the one surface 91A of the pressure chamber forming portion 91 can be easily performed, and an expensive apparatus such as an exposure apparatus is not required in this process. Manufacturing cost can be reduced.

  In the print head 81, the second pressure chambers 102, the second liquid supply passages 104 communicating with the second pressure chambers 102, the first pressure chambers 103, and the second pressure chambers 102 are formed on the thermoplastic layer 110 of the vibration plate 92. Since the plurality of substantially U-shaped first and second pattern layers 112B and 112A are formed at positions other than the portion facing the first liquid supply path 105 communicating with the first liquid supply path 105, the vibration plate 92 is replaced with the pressure chamber forming portion. In the process of bonding to one surface 91A of 91, the pressure applied to the pressure chamber member 121 via the diaphragm 92 is shown below the first and second pattern layers 112B and 112A as shown in FIG. The area portion 121B can be concentrated.

  Therefore, in the print head 81, the second liquid supply path 104 or each of the pressure chamber forming portion 91 of the vibration plate 91 (thermoplastic layer 110) is used in the bonding process of the vibration plate 92 to the pressure chamber forming portion 91. Unnecessary pressure can be prevented from being applied to the portion facing the first liquid supply path 105, and accordingly, the second liquid supply path 104 and the first liquid supply path 105 correspond to the diaphragm 92. It can be surely prevented from being blocked by the thermoplastic layer 110.

  In the print head 81, as described above, the pressure applied to the thermoplastic layer 110 of the diaphragm 92 during the bonding process of the diaphragm 92 to the one surface 91A of the pressure chamber forming portion 91 is the first and second pattern layers. Since it can concentrate on 112B and 112A, the pressurization generating force of a press apparatus can be made small.

According to the above configuration, the diaphragm 92 is formed using the thermoplastic layer 110, and at least the second pressure chamber 102 and the second liquid supply communicating with the second pressure chamber 102 are provided on the one surface 110A of the thermoplastic layer 110. The first and second pattern layers 112B and 112A having a predetermined thickness are formed at positions other than the facing portion of the path 104, the first pressure chamber 103, and the first liquid supply path 105 communicating with the first pressure chamber 103. The diaphragm 92 can be easily bonded to the one surface 91A of the pressure chamber forming portion 91, and each second liquid supply path 104 and each first liquid of the pressure chamber forming portion 91 during the bonding step. The blocking of the supply path 105 can be remarkably reduced. Thus, the bonding operation of the vibration plate 92 to the one surface 91A of the pressure chamber forming section 91 can be performed by the second liquid supply paths 1 of the pressure chamber forming section 91. 4 and a printer device which can easily be done without blocking the respective first liquid supply path 105 can be realized.
(3) Other Embodiments In the first and second embodiments described above, the case where the first invention and the second invention are applied to a serial type printer is described. The present invention is not limited to this, and can be applied to various other types of printer devices such as a parallel type printer device.

  In the first and second embodiments described above, the piezoelectric element is used as a pressure raising means for raising the pressure in the pressure chamber 41 of the pressure chamber member 61 and the first and second pressure chambers 103 and 102 of the pressure chamber member 121. 33, the case where the first and second piezoelectric elements 93B and 93A are applied has been described. However, the present invention is not limited to this, and various other pressure raising means can be applied.

  Furthermore, in the first embodiment described above, the case where the pressure chamber member 61 is constituted by the orifice plate 50 and the pressure chamber forming portion 31 has been described. However, the present invention is not limited to this, and the pressure chamber forming portion is not limited thereto. And the orifice plate may be integrally formed.

  That is, as shown in FIG. 23, a pressure chamber forming portion 150 having an ink buffer tank 151, an ink supply path 152, a pressure chamber 153, a nozzle introduction hole 154, and a discharge nozzle 155 may be formed by an injection molding method. . At this time, if polyetherimide, polyethersulfone, or the like is used as the material of the pressure chamber forming section 150, the pressure chambers 153 in which the discharge nozzles 155 have a narrow pitch can be formed and the discharge nozzles 155 can be formed. Can also be formed by excimer laser processing.

  Similarly, in the above-described second embodiment, the case where the pressure forming unit 121 is configured by the orifice plate 90 and the pressure chamber forming unit 91 has been described, but the present invention is not limited to this, and the pressure chamber is not limited thereto. The part and the orifice plate may be integrally formed.

  That is, as shown in FIG. 24, the ink buffer tank 161, the second liquid supply path 162, the second pressure chamber 163, the second nozzle introduction hole 164, the metering nozzle 165, the diluent buffer tank 166, and the first The pressure chamber forming portion 160 having the liquid supply path 167, the first pressure chamber 168, the first nozzle introduction hole 169, and the discharge nozzle 170 may be formed by an injection molding method. At this time, if a material such as polyether imide or polyether sulfone is used as the material of the pressure chamber forming portion 160, the first and second pressure chambers 168, in which the discharge nozzle 170 and the metering nozzle 165 have a narrow pitch, 163 can be formed, and the discharge nozzle 170 and the metering nozzle 165 can also be formed by excimer laser processing.

  Furthermore, in the second embodiment described above, a case has been described in which the gradation specified for each dot is provided by adjusting the liquid amount of the ink 140. However, the present invention is not limited to this, and the dilution liquid is used. The gradation specified for each dot may be provided by adjusting the amount of liquid 141. That is, the dilution liquid may be on the fixed side and the ink may be on the ejection side. In this case, the configuration and operation of the “carrier jet” print head can be the same as in the second embodiment. In this case, although the expressive power of light color is lowered, it is advantageous because a sufficient ink density can be obtained for the shadow portion.

  Further, in the first and second embodiments described above, the pattern layer 52 and the first and second pattern layers 112B and 112A of the diaphragms 32 and 92 are the pressure chamber 41, the first and second pressure chambers 103, 102, the liquid supply path 42 communicating with these, and the case where the first and second liquid supply paths 105 and 104 are formed to have a U-shape in a portion other than the facing portion. In short, the point is that the pattern layer includes at least the pressure chamber 41, the first and second pressure chambers 103, 102, the liquid supply path 42 communicating with these, the first and second liquid supply paths 105, 104. The pattern layer may be formed in all regions on the thermoplastic layers 50 and 110 other than the facing portion as long as it is formed in a portion other than the facing portion. Therefore, it goes without saying that various other shapes can be applied as the shape of the pattern layer.

  Furthermore, in the first and second embodiments described above, the thermoplastic layers 50 and 110 are made of a material having a glass transition point of 180 [° C.] to 250 [° C.]. For comparison, a thermoplastic layer is formed from a polyimide adhesive film AS-2250 (trade name), which is a thermoplastic polyimide material manufactured by Hitachi Chemical Co., Ltd. having a glass transition point of 165 [° C.]. When a printer device similar to that of the second embodiment was manufactured, a large amount of fluid was observed at a pressure heating temperature of 180 [° C.]. If flow occurs in this manner, there is a high possibility that the liquid supply path will be blocked, which is not preferable. Further, for comparison, a thermoplastic layer is formed from DS3200 (trade name), which is a thermoplastic polyimide material of Yodogawa Paper Mill having a glass transition point of 172 [° C.], and the first and second embodiments are formed. When a printer device similar to that in Example 1 was produced, a large amount of fluid was observed at a pressure heating temperature of 220 [° C.]. If flow occurs in this manner, there is a high possibility that the liquid supply path will be blocked, which is not preferable. Moreover, when the pressure heating temperature was changed to 190 [° C.], a large amount of flow was still observed. If flow occurs in this manner, there is a high possibility that the liquid supply path will be blocked, which is not preferable. Furthermore, in this case, sufficient adhesive strength was not obtained. That is, as a material for forming the thermoplastic layer, it was confirmed that a material having a glass transition point of 180 [° C.] to 250 [° C.] is preferable.

2. Reference Example (1) First Reference Example of the Present Invention In this example, an example in which the present invention is applied to an ink jet printer apparatus that ejects only ink, that is, an example corresponding to the third invention will be described.
(1-1) Configuration of Inkjet Printer Device The overall configuration of the inkjet printer device of this example is the same as that of the first example in the embodiment corresponding to the first and second inventions described above. Therefore, the description is omitted here. That is, in the ink jet printer apparatus of this example, an ink jet print head described later is used instead of the print head 19 shown above. In the ink jet printer apparatus of this example, a control unit similar to the above-described control unit is used, so that this description is also omitted.
(1-2) Configuration of Inkjet Printhead Next, the configuration of the inkjet printhead of the inkjet printer apparatus of this example will be described. As shown in FIG. 25, this print head is mainly composed of a pressure chamber forming portion 231, a diaphragm 232, a piezoelectric element 233 that is a laminated piezoelectric element, and an orifice plate 234 that is a nozzle forming member.

  The pressure chamber forming portion 231 is formed by bonding the first member 235 and the second member 236 with an adhesive layer 237. The first member 235 and the second member 236 may be formed of, for example, stainless steel having a thickness of 0.1 [mm].

  First, the first member 235 is a plate-like member having a through hole portion 238 forming an ink buffer tank and a through hole portion 239 forming a pressure chamber at a predetermined position. One of the second members 236 is also a plate-like member, and a through-hole portion 240 that forms an ink buffer tank is formed at a position corresponding to the through-hole portion 238 that forms the ink buffer tank. At the same time, a groove portion 241 that communicates therewith and forms a pressure chamber is formed at a position corresponding to the through-hole portion 239 forming the pressure chamber so as to open toward the one main surface 236a. In the second member 236, the side surface of the through-hole portion 240 and the bottom surface of the groove portion 241 are connected, and the groove portion 242 forming the ink supply path is a main surface that faces the first member 235. A through hole 243 that forms a nozzle introduction hole is formed so as to penetrate from the bottom surface of the groove portion 241 to the one main surface 236b while opening to face the one main surface 236b that is opposite to the surface 236a. ing.

  In the print head of this example, the diaphragm 232 is disposed on the first member 235 side of the pressure chamber forming portion 231, and the orifice plate 234 is disposed on the second member 236 side. 231 is sandwiched between the diaphragm 232 and the orifice plate 234 in the thickness direction. Note that the diaphragm 232 may be formed of Neoflex (trade name) having a glass transition point of 250 [° C.] or less, for example, manufactured by Mitsui Toatsu Chemical Co., Ltd., which has excellent heat resistance and chemical resistance. The thickness may be about 20 [μm]. In the vibration plate 232, an ink supply port 244 having a smaller diameter is formed at a position corresponding to the through hole 238 serving as an ink buffer tank.

  Further, one orifice plate 234 may be formed by Neoprex (trade name) having a glass transition point of 250 [° C.] or less made by, for example, Mitsui Toatsu Chemical Co., Ltd., which has excellent heat resistance and chemical resistance, The thickness may be about 50 [μm]. Use of such a material is preferable because chemical stability is ensured. Further, in the orifice plate 234, a discharge nozzle 245 having a smaller diameter is formed at a position corresponding to the through hole 243 serving as a nozzle introduction hole. The discharge nozzle 245 may be formed as a hole having a circular cross section, for example.

  That is, by inserting the pressure chamber forming portion 231 in the thickness direction between the diaphragm 232 and the orifice plate 234, the through hole portion 238, the through hole portion 240, the groove portion 242, the groove portion 241, the through hole portion 239, and the through hole 243 are connected. The ink formed in the thickness direction from the diaphragm 232 side to the orifice plate 234 side of the pressure chamber forming portion 231 is closed by the cavity 232 and the orifice plate 234. A tank 252, a liquid supply path 246 connected to the tank 252 and formed in the in-plane direction of the pressure chamber forming portion 231, a pressure chamber 247 connected to the pressure chamber 247 formed on the diaphragm side, and the pressure chamber 247 connected to the orifice The nozzle introduction holes 248 that open to the plate 234 side are continuously formed. As described above, since the ink supply port 244 is formed in the vibration plate 232 and the discharge nozzle 245 is formed in the orifice plate 234, the ink supply port 244, the ink buffer tank 252, the liquid supply path 246, Ink flows in the order of the pressure chamber 247, the nozzle introduction hole 248, and the discharge nozzle 245.

  Further, in the print head of this example, a protrusion 249 is formed at a position corresponding to the pressure chamber 247 on the one main surface 232a opposite to the surface bonded to the pressure chamber forming portion 231 of the diaphragm 232. The piezoelectric element 233 is placed through the protrusion 249. The piezoelectric element 233 includes a piezoelectric element as described above, and examples of the piezoelectric element include an element in which piezoelectric members and conductive members are alternately stacked. At this time, the number of stacked piezoelectric members and conductive members may be any number.

  The protrusion 249 is formed to have a smaller area than the plane area of the pressure chamber 247 and the plane area of the piezoelectric element 233. Further, an ink supply pipe 250 connected to an ink tank (not shown) is connected to a position corresponding to the ink supply port 244 on one main surface 232a of the diaphragm 232.

  Furthermore, in the print head of this example, a liquid repellent film 251 is formed on one main surface 234a which is a nozzle opening surface of the orifice plate 234.

  In the printer apparatus of this example, as schematically shown in FIG. 26, the ink buffer tank 252 in the print head is a tubular member, and a plurality of the above-described ink buffer tanks 252 are arranged in the longitudinal direction. Such print heads are arranged in parallel at a predetermined interval, and the ink buffer tank 252 serves as a common ink distribution pipe for each print head. In these print heads, the liquid supply path 246 is connected so as to be orthogonal to the longitudinal direction of the ink buffer tank 252. For this reason, the discharge nozzle 245 of each print head opens on one surface. In other words, the ink is supplied from an ink tank (not shown) to the ink buffer tank 252 and from here to the liquid supply path 246 of each print head.

  In the printer apparatus of this example, the diaphragm 232 of the print head and the pressure chamber forming portion 231 are bonded with an adhesive layer made of a thermoplastic resin.

  Further, particularly in the printer apparatus of this example, the orifice plate 234 of the print head is bonded to the pressure chamber forming portion 231 by thermocompression bonding.

  Further, particularly in this printer apparatus, the first member 235 and the second member 236 constituting the pressure chamber forming portion 231 are bonded by the adhesive layer 237 made of a thermosetting resin as described above.

That is, in the printer device of this example, an adhesive layer 237 made of a thermoplastic resin is formed between the pressure chamber forming portion 231 and the vibration plate 232, and the pressure chamber forming portion 231 of the vibration plate 232 is formed. Adhesive strength against is sufficiently secured.
(1-3) Operation of First Reference Example Printing can be performed by the printer apparatus of this example as follows. That is, the piezoelectric element 233 used in the print head of the printer apparatus of this example has a property that when a drive voltage is applied, it is linearly displaced in a direction opposite to the direction indicated by the arrow M1 in FIG. Therefore, the diaphragm 232 is lifted around the protruding portion 249 bonded thereto, and the volume of the pressure chamber 247 is increased as shown in FIG.

  Further, since the piezoelectric element 233 has a property of linearly displacing in the direction indicated by the arrow M1 in FIG. 27 when the driving voltage is released, the diaphragm 232 is attached to the piezoelectric element 233 via the protrusion 249 bonded thereto. By pressing and curving, the volume of the pressure chamber 247 is reduced and the pressure in the pressure chamber 247 is increased. At this time, since the projection 249 has a planar area smaller than that of the piezoelectric element 233, the displacement of the piezoelectric element 233 is concentrated at a position corresponding to the pressure chamber 247 of the diaphragm 232. It is possible to communicate.

  Therefore, when printing is performed by this printer apparatus, first, a predetermined drive voltage is applied to the piezoelectric element 233. Then, as described above, the piezoelectric element is displaced in the direction opposite to the direction indicated by the arrow M1 in FIG. 27, and the volume of the pressure chamber 247 increases. As a result, the ink meniscus (not shown) formed at the tip of the discharge nozzle 245 once retracts to the pressure chamber 247 side, and when the displacement of the piezoelectric element 233 is settled, the vicinity of the tip of the discharge nozzle 245 is balanced with the surface tension. And the ink discharge standby state is established.

Subsequently, when the drive voltage applied to the piezoelectric element 233 is released, the piezoelectric element 233 is displaced in the direction indicated by the arrow M1 in FIG. 27 in order to return to the original shape. As a result, the pressure chamber 247 attempts to return to its original size, and the pressure in the pressure chamber 247 increases, so that ink is ejected from the ejection nozzle 245. At this time, the time change of the drive voltage applied to the piezoelectric element 233 is set so that ink can be ejected from the ejection nozzle 45.
(1-4) Manufacturing Method of Inkjet Print Head Next, a manufacturing method of the print head of the printer apparatus of this example will be described. First, the second member of the pressure chamber forming part is formed. That is, as shown in FIG. 28, after applying a resist such as a photosensitive dry film or a liquid resist material to one main surface 261a of a plate material 261 made of stainless steel having a thickness of approximately 0.1 mm, an ink buffer is formed. The resist 262 is formed by pattern exposure using a mask having a pattern that can be etched at portions corresponding to the formation positions of the through-hole portion for forming the tank and the groove portion for forming the pressure chamber.

  Similarly, the main surface 261b opposite to the one main surface 261a of the plate member 261 is similarly etched with a groove portion for forming a liquid supply path and a portion corresponding to the formation position of the groove portion for forming the nozzle introduction hole. Pattern exposure is performed using a mask having a possible pattern to form a resist 263.

  Subsequently, etching is performed by immersing the plate material 261 in an etching solution such as a ferric chloride aqueous solution for a predetermined time using the resists 262 and 263 as masks. As a result, as shown in FIG. 29, an ink buffer tank is formed, a through-hole portion 240 penetrating from one main surface 261a to the main surface 261b opposite to the main surface 261a, a pressure chamber is formed, and the one main surface 261a is faced. The groove portion 241 that is opened at the side, the side surface of the through-hole portion 240 and the bottom surface of the groove portion 241 are connected to form a liquid supply path, the groove portion 242 that opens to face one main surface 261b, the nozzle introduction hole is formed, and the groove portion 241 A through hole 243 penetrating from the bottom surface to one main surface 261b is formed.

  When etching is performed in this way, the etching amount from each of the principal surfaces 261 a and 261 b facing each other of the plate material 261 is selected to be about ½ of the thickness of the plate material 261. That is, in this example, since the thickness of the plate material 261 is 0.1 [mm], the etching amount from one main surface of the plate material 261 is set to about 0.055 [mm]. As a result, the through hole 240, the groove 241, the groove 242, and the through hole 243 can be stably formed while improving the dimensional accuracy.

  Further, since the etching amount from each surface of the plate material 261 is the same, a pressure chamber is formed, an etching condition for forming the groove portion 241 that opens toward the main surface 261a, and a liquid supply path are formed. The etching conditions can be set to the same conditions when forming the groove 242 that opens to the main surface 261b and the nozzle introduction hole, and forming the through hole 243 that opens to the one main surface 261b. It can be done easily and in a short time.

  Note that the through hole 243 serving as the nozzle introduction hole is larger than the diameter of the nozzle of the orifice plate formed in a later step to the extent that the pressure increase in the pressure chamber is not affected when pressure is applied to the pressure chamber. It forms so that it may become.

  Subsequently, the resists 262 and 263 are removed. When a dry film resist is used as the resists 262 and 263, for example, a 5% or less sodium hydroxide aqueous solution may be used. When a liquid resist material is used as the resists 262 and 263, for example, a dedicated alkaline solution is used. It ’s fine. As a result, as shown in FIG. 30, a second member 236 in which the through hole 240, the groove 241, the groove 242, and the through hole 243 are formed is formed.

Next, as shown in FIG. 31, a plate member 264 serving as an orifice plate is bonded to the one main surface 236b side where the groove portion 242 forming the liquid supply passage and the through hole 243 forming the nozzle introduction hole are opened by thermocompression bonding. The plate material 264 may be formed of, for example, Neoprex (trade name) having a glass transition point of 250 [° C.] or less manufactured by Mitsui Toatsu Chemical Co., Ltd., and the thickness may be about 50 [μm]. . As conditions for thermocompression bonding, it is preferable that the press temperature is about 230 [° C.] and the pressure is about 20 to 30 [kgf / cm ² ]. When thermocompression bonding is performed in this manner, the adhesive strength between the plate member 264 and the second member 236 can be increased, and efficient bonding can be achieved.

  In addition, if the plate member 264 and the second member 236 are bonded together without forming nozzles in advance as described above, the alignment accuracy is not required so much and the bonding is easily performed. Furthermore, in this example, since the plate material 264 and the second member 236 are bonded without using an adhesive, the adhesive does not block the groove portion 242 forming the liquid supply path.

  Next, as shown in FIG. 32, a liquid repellent treatment is performed on one main surface 264 a of the plate member 264 opposite to the surface facing the second member 236 to form a liquid repellent film 251. The liquid repellent film 251 is formed so as to repel ink and prevent ink from remaining on the periphery of the nozzle formed in the subsequent process, and when the nozzle is formed by an excimer laser in the subsequent process, And preferably made of a material that does not peel off. As such a material, for example, a modified polytetrafluoroethylene coating 958-207 (trade name) manufactured by DuPont Co., Ltd., in which a fluorine-based material is dispersed in a polyimide-based material, Materials with a water absorption of 0.4% or less, such as Upicoat FS-100L (trade name), which is a polyimide-based overcoat ink manufactured by Ube Industries, Ltd., and Upifine FP-100 (product), which is a polyimide coating material manufactured by the same company Furthermore, liquid repellent polybenzimidazole, for example, NPBI (trade name), which is a coating type polybenzimidazole material manufactured by Hoechst Co., Ltd., may be mentioned.

  Subsequently, an excimer laser is vertically irradiated from the second member 236 side through the groove portion 241 and the through hole 243 to form a nozzle that penetrates the plate member 264, and a through hole that becomes a nozzle introduction hole as shown in FIG. An orifice plate 234 having a discharge nozzle 245 at a position corresponding to 243 is completed. At this time, it goes without saying that a hole communicating with the discharge nozzle 245 is also formed in the liquid repellent film 251.

  In the manufacturing method of the printer apparatus of this example, since the plate material 264 that becomes the orifice plate 234 is made of resin, the excimer laser processability at the time of nozzle formation is very good, and the discharge nozzle 245 is provided. Easy to form. Furthermore, since the liquid repellent film 251 is also formed of a material excellent in excimer laser processability, a hole communicating with the discharge nozzle 245 is easily formed.

  Further, since the through hole 243 serving as the nozzle introduction hole has a diameter larger than that of the discharge nozzle 245, the alignment accuracy between the through hole 243 and the discharge nozzle 245 is relaxed, and the second member 236 is subjected to laser processing. The risk of shielding the laser is avoided.

  Further, by bonding the orifice plate 234 to the second member 236 in this way, the groove portion 242 and the through hole 243 are closed, and the liquid supply path 246 and the nozzle introduction hole 248 are formed. .

  Next, the first member of the pressure chamber forming portion is formed. That is, as shown in FIG. 34, a resist such as a photosensitive dry film or a liquid resist material is applied to the opposing main surfaces 271a and 271b of a plate material 271 made of stainless steel having a thickness of approximately 0.1 [mm]. Thereafter, pattern exposure is performed using a mask having a pattern capable of etching the portions corresponding to the formation positions of the through-hole portion for forming the ink buffer tank and the through-hole portion for forming the pressure chamber, and the resists 272 and 273 are exposed. Respectively.

  Subsequently, etching is performed by immersing the plate material 271 in an etching solution such as a ferric chloride aqueous solution for a predetermined time using the resists 272 and 273 as a mask.

  As a result, as shown in FIG. 35, a through-hole portion 238 that forms an ink buffer tank and a through-hole portion 239 that forms a pressure chamber are formed at predetermined positions of the plate member 271.

  At this time, the etching amount is selected so that the etching amount from each of the opposing main surfaces 271a and 271b of the plate material 271 becomes about ½ of the thickness of the plate material 271. That is, in this example, since the thickness of the plate material 271 is 0.1 [mm], the etching amount from one side of the plate material 271 is set to about 0.055 [mm]. In this way, it is possible to improve the dimensional accuracy of the through-hole part 238 and the through-hole part 239 and to form them stably.

  Subsequently, the resists 272 and 273 are removed. When a dry film resist is used as the resists 272 and 273, for example, a 5% or less sodium hydroxide aqueous solution may be used. When a liquid resist material is used as the resists 272 and 273, for example, a dedicated alkaline solution is used. It ’s fine. As a result, as shown in FIG. 36, the first member 235 in which the through hole 238 and the through hole 239 are formed is formed.

  Next, as shown in FIG. 37, the diaphragm 232 is bonded to the main surface 235a of the first member 235 opposite to the surface to be bonded to the second member by thermocompression bonding. The diaphragm 232 may be formed of, for example, Neoprex (trade name) having a glass transition point of 250 [° C.] or less manufactured by Mitsui Toatsu Chemical Industries, Ltd., and the thickness is about 20 [μm]. good. The diaphragm 232 has a protrusion 249 having a planar area smaller than that of the pressure chamber and a piezoelectric element stacked in a subsequent process at a position corresponding to the pressure chamber. The protrusion 249 is formed of a metal foil film material such as Cu and Ni having a thickness of about 18 [μm] on the vibration plate 232 made of the resin and then formed in the same manner as the process for forming the printed wiring board. The foil film can be formed by etching. Needless to say, an ink supply port 244 communicating with a smaller diameter than this is formed in the vibration plate 232 at a position corresponding to the through hole 238 serving as an ink buffer tank.

  As a result, an adhesive layer made of a thermoplastic resin is formed between the first member 235 and the diaphragm 232, although it is a part of the diaphragm 232.

As conditions for thermocompression bonding, it is preferable that the press temperature is about 230 [° C.] and the pressure is about 20 to 30 [kgf / cm ² ]. When thermocompression bonding is performed in this manner, the bonding strength between the diaphragm 232 and the first member 235 can be increased and the bonding can be performed efficiently.

  Further, the diaphragm 232 having the protrusions 249 can be formed more easily by using the following materials. As such a material, as shown in FIG. 38, the glass transition point made by Mitsui Toatsu Chemical Industry Co., Ltd. having a thickness of about 20 [μm] is made of Neoprex (trade name) having a temperature of 250 [° C.] or less. An example is a metal wrapping film (trade name) manufactured by Mitsui Toatsu Chemical Co., Ltd., in which a metal foil film 282 made of Cu is formed on the film 281 with a thickness of about 18 [μm]. The film 281 has a glass transition point of 250 [° C.] or less and a first resin layer 281a exhibiting adhesiveness in a temperature range of about 220 [° C.] to 230 [° C.], and a glass transition point of 300 [ Second resin layer 281b, which is a polyimide material that does not exhibit adhesiveness at temperatures not lower than 300 ° C. and a glass transition point not higher than 300 ° C. and 270 ° C. to 280 ° C. A third resin layer 281c exhibiting adhesiveness in a temperature range of about a degree is laminated, and a metal foil film 282 is bonded onto the third resin layer 281c. Since this material does not use an adhesive that softens at a relatively low temperature, the protrusion 249 can be formed on the diaphragm 232 as a heat-resistant structure.

  Subsequently, the first member 235 and the second member 236 are bonded with a thermosetting resin. That is, as shown in FIG. 39, the first member 235 and the second member 236 are aligned with the positions of the through hole 238 and the through hole 240, and the positions of the through hole 239 and the groove 241 are aligned. The first member 235 and the second member 236 are bonded together by an adhesive layer 237 made of a thermosetting resin, and the pressure chamber forming portion 231 is completed.

  By bonding the first member 235 and the second member 236 in this manner, the ink buffer tank 252 with both ends of the through-hole portion 238 and the through-hole portion 240 covered is formed, and the through-hole portion 239 and the groove portion 241 are formed. A pressure chamber 247 is formed. Then, the ink buffer tank 252, the liquid supply path 246, the pressure chamber 247, and the nozzle introduction hole 248 are continuously formed.

  Subsequently, the piezoelectric element 233 is bonded to the protrusion 249 using, for example, an epoxy-based adhesive, the ink supply pipe 250 is connected to the ink supply port 244 of the vibration plate 232, and the print head as shown in FIG. Complete.

In the print head manufacturing method of this example, the diaphragm 232 is previously bonded to the first member 235 with a thermoplastic resin, and the orifice plate 234 is bonded to the second member 236 in advance. Thereafter, the first member 235 and the second member 236 constituting the pressure chamber forming portion 231 are bonded together by an adhesive layer 237 made of a thermosetting resin. The thermoplastic resin that bonds the member 235 and the diaphragm 232 is not affected, and heat or the like is not applied to the liquid repellent film 251 of the orifice plate 234 bonded to the second member 236. The selection range of liquid repellent film is expanded. (1-5) Effect of First Reference Example Therefore, in the printer apparatus of this example, the diaphragm 232 and the pressure chamber forming portion 231 are bonded to each other with a thermoplastic resin in the print head. Since the adhesive strength is ensured and the liquid repellent film 251 is not affected by heat, the liquid repellent film 251 is not required to have much heat resistance, and the liquid repellent film 251 has a liquid repellent performance in accordance with actual use conditions. It is possible to widen the selection range of the liquid repellent film 251 and to improve the productivity.

  Further, in the printer device of this example, the groove 242 that forms the liquid supply path 246 is formed on the orifice plate 234 side in the print head, so that the second member 236 and the first member 235 are bonded. In the process, the groove 242 is not blocked by the adhesive, and an increase in the flow resistance of the liquid supply path 246 due to clogging by the adhesive can be avoided, thereby obtaining high reliability. Can do.

  Further, in the printer device of this example, since the liquid supply path 246 is formed on the orifice plate 234 side in the print head, the selection range of the thermoplastic resin that bonds between the diaphragm 232 and the first member 235, Here, the range of the material for forming the diaphragm 232 is widened, and the productivity is improved.

  Furthermore, in the printer device of this example, the first member 235 and the second member 236 constituting the pressure chamber forming portion 231 in the print head are bonded by a thermosetting resin such as epoxy, for example. Since both the first member 235 and the second member 236 are mechanically rigid members as compared with the diaphragm 232, it is possible to perform bonding without applying much pressure. It is possible to prevent warpage that occurs during bonding.

  That is, in the printer apparatus of this example, the first member 235 and the second member 236 are easily bonded without increasing the temperature and pressure in the print head. The restriction on the selection range of the agent is reduced, the deterioration of the performance of the liquid repellent film is reduced, and it is possible to reduce the occurrence of process defects such as the liquid repellent film adhering to the bonding jig, thereby improving productivity. .

Further, in the printer device of this example, the pressure chamber forming portion 231 is formed of stainless steel and the orifice plate 234 is formed of resin in the print head, and both the pressure chamber forming portion and the orifice plate are formed of resin. Compared to the case, it is possible to suppress the deformation of the orifice plate 234 when the pressure is applied to the pressure chamber 247. In this example, since the second member 236 is also present below the pressure chamber 247, it is possible to stably discharge ink from the discharge nozzle 245.
(2) Second Reference Example In the present embodiment, the present invention is applied to a “carrier jet” printer apparatus in which ink is used as a quantification medium, and a diluent is used as an ejection medium and ink is mixed with the diluent and ejected. An embodiment corresponding to the fourth invention will be described.
(2-1) Configuration of “Carrier Jet” Printer Device The overall configuration of the “carrier jet” printer device of this example is the second embodiment in the embodiment corresponding to the first and second inventions described above. Since it is the same as the example, the description is omitted here. That is, in the “carrier jet” printer apparatus of this example, a “carrier jet” print head described later is used instead of the print head 81 shown above. The “carrier jet” printer apparatus of this example also uses a control unit similar to the above-described control unit, and thus description thereof will be omitted.

FIG. 40 shows a driving circuit when a “carrier jet” print head is used. That is, digital halftone data is supplied from another block and sent to the first driver 291 and the second driver 292 by the serial-parallel conversion circuit 311. When the digital halftone data supplied from the serial / parallel conversion circuit 311 is equal to or less than a predetermined threshold value, the determination and the discharge are not performed. When the print timing comes, a print trigger is output from the other block, and the timing control circuit 312 detects it, and at a predetermined timing, the quantification unit control signal and the discharge control signal are sent to the first driver 291 and the second driver 292, respectively. Output.
(2-2) Configuration of “Carrier Jet” Print Head Next, the configuration of the “carrier jet” print head of the “carrier jet” printer apparatus of this example will be described. As shown in FIG. 41, the print head of this example is mainly composed of a pressure chamber forming portion 321, a diaphragm 322, first and second piezoelectric elements 323a and 323b that are laminated piezoelectric elements, and an orifice plate 324. Is.

  The pressure chamber forming portion 321 is formed by bonding a first member 325 and a second member 326 with an adhesive layer 127. The first member 325 and the second member 326 may be formed of, for example, stainless steel having a thickness of about 0.1 [mm]. First, the first member 325 has a through-hole portion 328 constituting an ink buffer tank and a through-hole portion 329 constituting a second pressure chamber at a predetermined position, and a diluent buffer at a predetermined position. This is a plate-like member having a through-hole portion 338 constituting a tank and a through-hole portion 339 constituting a first pressure chamber. In the first member 325, through-hole portions 329 and 339 are formed in the vicinity of a substantially central portion with a predetermined interval, and these through-hole portions 329 and 339 are formed with a predetermined interval. Through-hole portions 328 and 338 are formed so as to sandwich each other.

  One second member 326 is also a plate-like member, and a through-hole portion 330 that forms an ink buffer tank is formed at a position corresponding to the through-hole portion 328 that forms the ink buffer tank. At the same time, a groove portion 331 that communicates with and forms a pressure chamber is formed at a position corresponding to the through-hole portion 329 forming the second pressure chamber so as to open toward the one main surface 326a. In addition, in the second member 326, a through-hole portion 340 that forms a diluent buffer tank is formed at a position corresponding to the through-hole portion 338 that forms the diluent buffer tank, and forms a diluent buffer tank. A groove portion 341 that communicates therewith and forms the first pressure chamber is formed at a position corresponding to the through-hole portion 339 that forms the first pressure chamber so as to open toward the one main surface 326a.

  Further, in the second member 326, the groove portion 332 that connects the side surface of the through-hole portion 330 and the bottom surface of the groove portion 331 and forms the second liquid supply path has a surface facing the first member 325. The through hole 333 that forms the second nozzle introduction hole is formed from the bottom surface of the groove portion 331 to the one main surface 326b. The through hole 333 is formed so as to open toward the one main surface 326b that is opposite to the one main surface 326a. It is formed to penetrate. Furthermore, in the second member 326, the groove portion 342 that connects the side surface of the through-hole portion 340 and the bottom surface of the groove portion 341 and forms the first liquid supply path is a surface facing the first member 325. The through hole 343 that forms the first nozzle introduction hole is formed from the bottom surface of the groove portion 341 to the one principal surface 326b. It is formed so as to penetrate through.

  In the print head of this example, the diaphragm 322 is disposed on the first member 325 side of the pressure chamber forming portion 321, the orifice plate 324 is disposed on the second member 326 side, and the pressure chamber forming portion is disposed. 321 is sandwiched between the diaphragm 322 and the orifice plate 324 in the thickness direction. Note that the diaphragm 322 may be formed of Neoflex (trade name) having a glass transition point of 250 [° C.] or less, for example, manufactured by Mitsui Toatsu Chemical Co., Ltd., which has excellent heat resistance and chemical resistance. The thickness may be about 20 [μm]. In the diaphragm 322, an ink supply port 334 having a smaller diameter is formed at a position corresponding to the through hole 328 serving as an ink buffer tank, and at a position corresponding to the through hole 338 serving as a diluent buffer tank. A diluent supply port 354 having a smaller diameter is formed.

  Further, one orifice plate 324 may be formed of Neoflex (trade name) having a glass transition point of 250 [° C.] or less made by, for example, Mitsui Toatsu Chemical Co., Ltd., which has excellent heat resistance and chemical resistance, The thickness may be about 50 [μm]. Use of such a material is preferable because chemical stability is ensured. Further, in the orifice plate 324, a fixed nozzle 335 having a smaller diameter is formed at a position corresponding to the through hole 333 serving as the second nozzle introduction hole, and the through hole 343 serving as the first nozzle introduction hole is formed in the orifice plate 324. A discharge nozzle 355 having a smaller diameter is formed at a corresponding position. The fixed nozzle 335 and the discharge nozzle 355 may be formed, for example, as holes having a circular cross section. For example, the discharge nozzle 355 is formed in the thickness direction of the orifice plate so that the opening tips are adjacent to each other. It is preferable that the nozzle 335 is formed so as to gradually approach the tip of the discharge nozzle 355 opening.

  That is, by inserting the pressure chamber forming portion 321 in the thickness direction between the diaphragm 322 and the orifice plate 324, the through hole portion 328, the through hole portion 330, the groove portion 332, the groove portion 331, the through hole portion 329, and the through hole 333 are connected. The ink formed in the thickness direction from the vibration plate 322 side of the pressure chamber forming portion 321 to the orifice plate 324 side is closed by the cavity formed by the operation, and is closed by the vibration plate 322 and the orifice plate 324. A tank 352, a second liquid supply path 346 connected to the tank 352 and formed in the in-plane direction of the pressure chamber forming portion 321; a second pressure chamber 247 connected to the tank 352 and formed on the diaphragm side; The second nozzle introduction hole 348 connected to the pressure chamber 247 and opened to the orifice plate 324 side is continuously formed.

  As described above, since the ink supply port 334 is formed in the vibration plate 322 and the fixed amount nozzle 335 is formed in the orifice plate 324, the ink supply port 334, the ink buffer tank 352, the second liquid supply. Ink flows in the order of the path 346, the second pressure chamber 347, the second nozzle introduction hole 348, and the metering nozzle 335.

  Similarly, a cavity formed by connecting the through-hole portion 338, the through-hole portion 340, the groove portion 342, the groove portion 341, the through-hole portion 339, and the through-hole 343 is blocked by the vibration plate 322 and the orifice plate 324. The diluent buffer tank 362 formed in the thickness direction from the diaphragm 322 side to the orifice plate 324 side of the pressure chamber forming portion 321, and connected to this is formed in the in-plane direction of the pressure chamber forming portion 321. One liquid supply path 356, a first pressure chamber 357 connected to the first pressure chamber 357 and formed on the diaphragm side, and a first nozzle introduction hole connected to the first pressure chamber 357 and opened to the orifice plate 324 side. 158 will be formed continuously.

  Similarly, since a diluent supply port 354 is formed in the diaphragm 322 and a discharge nozzle 355 is formed in the orifice plate 324, the diluent supply port 354, the diluent buffer tank 362, the first The dilution liquid flows in the order of the liquid supply path 356, the first pressure chamber 357, the first nozzle introduction hole 358, and the discharge nozzle 355.

  Further, in the print head of this example, the second protrusion is located at a position corresponding to the second pressure chamber 347 of the one main surface 322a opposite to the surface bonded to the pressure chamber forming portion 321 of the diaphragm 322. 349 is formed, and the second piezoelectric element 323b is placed through the second protrusion 349. Further, a first protrusion 359 is also formed at a position corresponding to the first pressure chamber 357, and the first piezoelectric element 323 a is placed through the first protrusion 359. Note that examples of the first and second piezoelectric elements 323a and 323b include piezoelectric elements in which piezoelectric members and conductive members are alternately stacked. At this time, the number of stacked piezoelectric members and conductive members may be any number.

  The first and second protrusions 359 and 349 are smaller than the plane area of the first pressure chamber 357 and the second pressure chamber 347 and the plane area of the first and second piezoelectric elements 323a and 323b. It is formed as. Further, an ink supply pipe 350 connected to an ink tank (not shown) is connected to a position corresponding to the ink supply port 334 of the main surface 322a of the vibration plate 322, and is illustrated to a position corresponding to the diluent supply port 354. A diluent supply pipe 360 connected to the diluent tank that is not connected is connected.

  Furthermore, in the print head of this example, a liquid repellent film 351 is formed on one main surface 324a which is the nozzle opening surface of the orifice plate 324.

  In the printer apparatus of this example, as schematically shown in FIG. 42, the ink buffer tank 352 and the diluent buffer tank 362 in the print head are formed as tubular members. A plurality of print heads as described above are arranged in parallel with a predetermined interval in the longitudinal direction of the diluent buffer tank 362, and the ink buffer tank 352 serves as a common ink distribution pipe for each print head. The buffer tank 362 is also a common diluent distribution pipe for each print head. In these print heads, the second liquid supply path 346 is connected to the ink buffer tank 352 and the first liquid supply path 356 is connected to the diluent buffer tank 362 in the same manner as the print head described above. It is connected. For this reason, the fixed quantity nozzle 335 and the discharge nozzle 355 of each print head are opened on one surface so as to be adjacent to each other.

  That is, in the printer apparatus of this example, ink is supplied from an ink tank (not shown) to the ink buffer tank 352, and from here, is supplied to the second liquid supply path 346 of each print head. It is supplied from a diluent tank (not shown) to the diluent buffer tank 362 and from here to the first liquid supply path 356 of each print head.

  In the printer apparatus of this example, the diaphragm 322 of the print head and the pressure chamber forming portion 321 are bonded with an adhesive layer made of a thermoplastic resin.

  Further, particularly in the printer apparatus of this example, the orifice plate 324 of the print head is bonded to the pressure chamber forming portion 321 by thermocompression bonding.

  Further, particularly in the printer device of the present invention, the first member 325 and the second member 326 constituting the pressure chamber forming portion 321 are bonded by the adhesive layer 327 made of a thermosetting resin as described above. Yes.

That is, in the printer apparatus of this example, an adhesive layer 327 made of a thermoplastic resin is formed between the pressure chamber forming portion 321 and the vibration plate 322, and the pressure chamber forming portion 321 of the vibration plate 322 is formed. Adhesive strength against is sufficiently secured.
(2-3) Operation of Second Reference Example In order to perform printing with the printer apparatus of this example, the following may be performed. That is, in the second piezoelectric element 323b, which is a piezoelectric element used in the print head of the printer apparatus of this example, when a driving voltage is applied, the direction is opposite to the direction indicated by the arrow M2 in FIG. Since it has the property of being linearly displaced, the diaphragm 322 is lifted around the second protrusion 349 bonded thereto, and the volume of the second pressure chamber 347 increases as shown in FIG. It will be. The same applies to the first piezoelectric element 323a. When a drive voltage is applied, the first piezoelectric element 323a is linearly displaced in a direction opposite to the direction indicated by the arrow M2 in FIG. The diaphragm 322 is lifted around the bonded first protrusion 359, and the volume of the first pressure chamber 357 increases as shown in FIG.

  Further, the first and second piezoelectric elements 323a and 323b have a property of linearly displacing in the direction indicated by an arrow M2 in FIG. 41 when the driving voltage is released. In addition, the diaphragm 322 is pressed and curved through the second protrusions 359 and 349 to reduce the volume of the first pressure chamber 357 or the second pressure chamber 347, thereby reducing the first pressure chamber 357 or the second pressure chamber 347. The pressure in the pressure chamber 347 is increased. At this time, the first and second protrusions 359 and 349 have a planar area smaller than that of the first and second piezoelectric elements 323a and 323b. The displacements of the piezoelectric elements 323a and 323b can be intensively transmitted to positions corresponding to the first pressure chamber 357 or the second pressure chamber 347 of the diaphragm 322.

Next, FIG. 44 shows drive voltage application timings when printing is performed by the printer apparatus having the above configuration. Here, the first and second piezoelectric elements 323a, as 323b, showing the application timing of the drive voltage in the case of using a piezoelectric element of so-called d ₃₁ mode.

  That is, as shown in FIG. 44A, the first piezoelectric element 323a provided at a position corresponding to the first pressure chamber 357 at the time shown in FIG. As shown in FIG. 44 (b), a second voltage provided at a position corresponding to the second pressure chamber 347 at the time indicated by (A) in the drawing is shown. For example, 10 [V] is applied in advance to the piezoelectric element 323b. Then, as shown in FIG. 43, the volume of the second pressure chamber 347 and the first pressure chamber 357 is increased. At this time, a meniscus is formed at the tip of both the discharge nozzle 355 and the fixed amount nozzle 335.

  Then, at the time of printing, the voltage of the second piezoelectric element 323b is gradually reduced to, for example, 5 [V] at the time indicated by (B) in FIG. For example, 150 [μsec] is maintained in this state. Then, the second piezoelectric element 323b gradually expands in the direction indicated by the arrow M2 in FIG. 41, and the second pressure chamber 347 is gradually pressurized through the diaphragm 322 as shown in FIG. Since the second pressure chamber 347 attempts to return to its original shape, an internal pressure is applied to the metering nozzle 335, so that ink oozes from the outside of the metering nozzle 335 to the vicinity of the opening of the ejection nozzle 355 and is combined with the diluted solution of the ejection nozzle 355. Note that the voltage at this time is set in accordance with the gradation of the image data, and the amount of ink corresponds to the image data.

  Thereafter, the voltage of the second piezoelectric element 323b is set to 10 at the time indicated by (C) in FIG. 44B so that the ink is drawn into the metering nozzle 335 and only the quantified ink remains in the vicinity of the opening of the discharge nozzle 355. Gradually return to [V]. Then, the second piezoelectric element 323b gradually decreases in the direction opposite to the direction indicated by the arrow M2 in FIG. 41, the internal pressure of the metering nozzle 335 is released, and the ink tries to return into the metering nozzle 335. As a result, only the quantified ink remains in the vicinity of the opening of the discharge nozzle 355.

  Next, in order to discharge the diluent from the discharge nozzle 355, as shown in FIG. 44A, the voltage of the first piezoelectric element 323a is set to, for example, 0 [V] at the time indicated by (D) in the figure. . Then, the first piezoelectric element 323a expands in the direction indicated by the arrow M2 in FIG. 41, the first pressure chamber 357 is pressurized via the diaphragm 322, and the first pressure chamber 357 returns to its original shape. In order to try, internal pressure is applied to the discharge nozzle 355. As a result, the dilution liquid is pushed out by the internal pressure in the discharge nozzle 355, and a mixed solution of this dilution liquid and the ink remaining in the vicinity of the opening of the discharge nozzle 355 is formed.

  Next, for example, 0 [V] is set for 50 [μsec] from the time indicated by (D) in FIG. 44A, and the voltage of the first piezoelectric element 323a is indicated at the time indicated by (E) in FIG. Is returned to, for example, 20 [V], the first piezoelectric element 323a is reduced in the direction opposite to the direction indicated by the arrow M2 in FIG. 41, the internal pressure of the discharge nozzle 355 is released, and the diluted liquid is discharged into the discharge nozzle 355. Trying to return. As a result, a constriction occurs between the diluted solution in the discharge nozzle 355 and the mixed solution, and finally the mixed solution is discharged from the discharge nozzle 355, and the mixed solution adheres to the printing paper and printing is performed.

  The internal pressures of the first pressure chamber 357 and the second pressure chamber 347 are restored to their original values, and the diluting liquid and the ink are again filled in the discharge nozzle 355 and the fixed amount nozzle 335, and the print standby state is resumed.

  In FIG. 44 (b), indicated by T1, the ink quantitative pulse width between the time indicated by (B) and the time indicated by (C) in the figure, and indicated by T2 in FIG. 44 (a). The diluent discharge pulse width between the time indicated by (D) and the time indicated by (E) in the figure, and the ink fixed voltage indicated by V in FIG. 44 (b) are variable.

  Then, as shown in FIGS. 44 (a) and 44 (b), printing is performed by repeating the above operation, and the printing cycle indicated by T3 in FIG. 44 (a) is set to 1 [msec], for example. It ’s fine.

That is, the signal of the drive circuit shown in FIG. 40 is output at the timing shown in FIG. 44 as described above, and a predetermined voltage is applied to the first piezoelectric element 323a and the second piezoelectric element 323b according to this. The
(2-4) “Carrier Jet” Printhead Manufacturing Method Next, a method for manufacturing the printhead of the printer apparatus of this example will be described. First, the second member of the pressure chamber forming part is formed. That is, as shown in FIG. 46, after applying a resist such as a photosensitive dry film or a liquid resist material to one main surface 371a of a plate material 371 made of stainless steel having a thickness of approximately 0.1 [mm], the ink Pattern exposure using a mask having a pattern capable of etching portions corresponding to the formation positions of through holes for forming the buffer tank and diluent buffer tank and grooves for forming the first and second pressure chambers Then, a resist 372 is formed.

  Similarly, a groove for forming the first and second liquid supply passages and the first and second nozzle introduction holes are formed on the main surface 371b opposite to one main surface 371a of the plate member 371. The resist 373 is formed by pattern exposure using a mask having a pattern that can be etched at a portion corresponding to the formation position of the through-hole.

  Subsequently, etching is performed by immersing the plate material 371 in an etching solution such as a ferric chloride aqueous solution for a predetermined time using the resists 372 and 373 as a mask. As a result, as shown in FIG. 47, an ink buffer tank is formed, a through-hole portion 330 penetrating from one main surface 371a to a main surface 371b opposite to the main surface 371a, a second pressure chamber is formed, and one main surface A groove portion 331 that opens to face 371a, a side surface of the through-hole portion 330 and a bottom surface of the groove portion 331 are connected to form a second liquid supply path, and a groove portion 332 that opens to face one main surface 371b, a second nozzle An introduction hole is formed, and a through hole 333 penetrating from the bottom surface of the groove portion 331 to the one main surface 371b is formed. In addition, as shown in FIG. 47, a diluent buffer tank is formed, a through-hole portion 340 penetrating from one main surface 371a to a main surface 371b opposite to the main surface 371a, and a first pressure chamber are formed. The groove portion 341 that opens toward the surface 371a, the side surface of the through-hole portion 340, and the bottom surface of the groove portion 341 are connected to form a first liquid supply path, and the groove portion 342 that opens toward the one main surface 371b, the first A nozzle introduction hole is formed, and a through hole 343 penetrating from the bottom surface of the groove 341 to the one main surface 371b is formed.

  When etching is performed in this manner, the etching amount from each of the principal surfaces 371a and 371b facing each other of the plate material 371 is selected to be about ½ of the thickness of the plate material 371. That is, in this example, since the thickness of the plate material 371 is 0.1 [mm], the etching amount from one main surface of the plate material 371 is set to about 0.055 [mm]. Accordingly, the through holes 330 and 340, the grooves 331 and 341, the grooves 332 and 342, and the through holes 333 and 343 can be stably formed while improving the dimensional accuracy.

  Further, since the etching amount from each surface of the plate material 371 is the same, the first and second pressure chambers are formed, and the etching conditions for forming the groove portions 341 and 331 that open toward the one main surface 371a, The first and second liquid supply passages are formed, grooves 342 and 332 that open to face one main surface 371b, first and second nozzle introduction holes are formed, and the opening that opens to face one main surface 371b. Since the etching conditions for forming the holes 343 and 333 can be set to the same conditions, the etching process can be performed easily and in a short time.

  Note that the through-hole 333 serving as the second nozzle introduction hole and the through-hole 343 serving as the first introduction hole correspond to the second pressure chamber or the first pressure chamber when the pressure is applied to the second pressure chamber or the first pressure chamber. It is formed so as to be larger than the diameter of the metering nozzle or the discharge nozzle of the orifice plate formed in a later process to such an extent that the pressure increase in the pressure chamber or the first pressure chamber is not affected.

  Subsequently, the resists 372 and 373 are removed. When a dry film resist is used as the resists 372 and 373, for example, a 5% or less sodium hydroxide aqueous solution may be used. When a liquid resist material is used as the resists 372 and 373, for example, a dedicated alkaline solution is used. It ’s fine. As a result, as shown in FIG. 48, the second member 326 in which the through hole portions 330 and 340, the groove portions 331 and 341, the groove portions 332 and 342, and the through holes 333 and 343 are formed is formed.

Next, as shown in FIG. 49, the groove 332 that forms the second liquid supply path and the through-hole 333 that forms the second nozzle introduction hole are opened, and the groove 342 that forms the first liquid supply path. A plate material 374 serving as an orifice plate is bonded to the one main surface 326b side where the through hole 343 forming the first nozzle introduction hole is opened by thermocompression bonding. The plate material 374 may be formed of, for example, Neoflex (trade name) having a glass transition point of 250 [° C.] or less manufactured by Mitsui Toatsu Chemical Industries, Ltd., and the thickness may be about 50 [μm]. . As conditions for thermocompression bonding, it is preferable that the press temperature is about 230 [° C.] and the pressure is about 20 to 30 [kgf / cm ² ]. When thermocompression bonding is performed in this manner, the bonding strength between the plate member 374 and the second member 326 can be increased and the bonding can be performed efficiently.

  In addition, if the plate member 374 and the second member 326 are bonded together without forming a nozzle in advance, the alignment accuracy is not required so much and the bonding is easily performed. Furthermore, in this example, since the plate material 374 and the second member 326 are bonded without using an adhesive, the adhesive forms the grooves 342 and 332 that form the first and second liquid supply paths. There is no blocking.

  Next, as shown in FIG. 50, a liquid repellent treatment is performed on one main surface 374a of the plate member 374 opposite to the surface facing the second member 326 to form a liquid repellent film 351. The liquid repellent film 351 is formed so as to repel ink and dilution liquid so as not to cause ink adhesion residue or dilution liquid adhesion residue around the nozzle formed in the subsequent process, and in the subsequent process by an excimer laser. When the nozzle is formed, the nozzle is preferably made of a material that does not generate burrs and peeling. As such a material, for example, a modified polytetrafluoroethylene coating 958-207 (trade name) manufactured by DuPont Co., Ltd., in which a fluorine-based material is dispersed in a polyimide-based material, Materials with a water absorption of 0.4% or less, such as Upicoat FS-100L (trade name), which is a polyimide-based overcoat ink manufactured by Ube Industries, Ltd., and Upifine FP-100 (product), which is a polyimide coating material manufactured by the same company Furthermore, liquid repellent polybenzimidazole, for example, NPBI (trade name), which is a coating type polybenzimidazole material manufactured by Hoechst Co., Ltd., may be mentioned.

  Subsequently, an excimer laser is vertically irradiated from the second member 326 side through the groove portion 341 and the through hole 343 to form a discharge nozzle 355 penetrating the plate member 374, and similarly, the groove portion from the second member 326 side. Excitation laser is irradiated obliquely through 331 and through-hole 333, penetrating plate material 374, and forming quantitative nozzle 335 such that its opening is adjacent to discharge nozzle 355 with a predetermined interval. As shown in 51, the fixed nozzle 335 is provided at a position corresponding to the through hole 333 serving as the second nozzle introduction hole, and the discharge nozzle 355 is provided at a position corresponding to the through hole 343 serving as the second nozzle introduction hole. The orifice plate 324 is completed. At this time, it goes without saying that holes are also formed in the liquid repellent film 351 so as to communicate with the quantitative nozzle 335 and the discharge nozzle 355.

  In the manufacturing method of the printer device of this example, since the plate material 374 used as the orifice plate 324 is made of resin, the excimer laser processability at the time of nozzle formation is very good. The discharge nozzle 355 is easily formed. Furthermore, since the liquid repellent film 351 is also formed of a material excellent in excimer laser processability, a hole communicating with the metering nozzle 335 and the discharge nozzle 355 is easily formed.

  Also, the through hole 333 serving as the second nozzle introduction hole has a larger diameter than the fixed nozzle 335, and the through hole 343 serving as the first nozzle introduction hole has a larger diameter than the discharge nozzle 355. Therefore, the alignment accuracy of the through hole 333 and the fixed amount nozzle 335, the through hole 343 and the discharge nozzle 355 is relaxed, and the risk of the second member 326 shielding the laser during laser processing is avoided.

  Further, the orifice plate 324 is bonded to the second member 326 in this manner, so that the groove 332 and the through hole 333 are closed, and the second liquid supply path 346 and the second nozzle introduction hole 348 are formed. At the same time, the groove 342 and the through hole 343 are closed, and the first liquid supply path 356 and the first nozzle introduction hole 358 are formed.

  Next, the first member of the pressure chamber forming portion is formed. That is, as shown in FIG. 52, a resist such as a photosensitive dry film or a liquid resist material is applied to the opposing main surfaces 381a and 381b of a plate material 381 made of stainless steel having a thickness of approximately 0.1 [mm]. Thereafter, a mask having a pattern capable of etching a portion corresponding to the formation position of the through hole portion for forming the ink buffer tank and the diluent buffer tank and the through hole portion for forming the first and second pressure chambers. Then, pattern exposure is performed using, thereby forming resists 382 and 383, respectively.

  Subsequently, etching is performed by immersing the plate material 381 in an etching solution such as a ferric chloride aqueous solution for a predetermined time using the resists 382 and 383 as masks.

  As a result, as shown in FIG. 53, a through-hole portion 328 forming an ink buffer tank and a through-hole portion 329 forming a second pressure chamber are formed at predetermined positions of the plate member 381, and the diluent buffer tank A through-hole portion 338 that forms the first pressure chamber and a through-hole portion 339 that forms the first pressure chamber are formed.

  At this time, the etching amount is selected such that the etching amount from each of the opposing main surfaces 381a and 381b of the plate material 381 is about ½ of the thickness of the plate material 381. That is, in this example, since the thickness of the plate material 381 is 0.1 [mm], the etching amount from one side of the plate material 381 is set to about 0.055 [mm]. In this way, it is possible to improve the dimensional accuracy of the through-hole portions 328 and 338 and the through-hole portions 329 and 339 and to form them stably.

  Subsequently, the resists 382 and 383 are removed. When a dry film resist is used as the resists 382 and 383, for example, a 5% or less sodium hydroxide aqueous solution may be used. When a liquid resist material is used as the resists 382 and 383, for example, a dedicated alkaline solution is used. It ’s fine. As a result, as shown in FIG. 54, the first member 325 in which the through-hole portions 328 and 338 and the through-hole portions 329 and 339 are formed is formed.

  Next, as shown in FIG. 55, the diaphragm 322 is bonded to the main surface 325a of the first member 325 opposite to the surface to be bonded to the second member by thermocompression bonding. The diaphragm 322 may be formed of, for example, Neoflex (trade name) having a glass transition point of 250 [° C.] or less manufactured by Mitsui Toatsu Chemical Industries, Ltd., and its thickness is about 20 [μm]. good. And as said diaphragm 322, the 1st protrusion of a plane area smaller than the plane area of the 1st piezoelectric element laminated | stacked by the said 1st pressure chamber and a post process in the position corresponding to a 1st pressure chamber. And a second protrusion 349 having a planar area smaller than that of the second pressure chamber and the second piezoelectric element stacked in a subsequent process at a position corresponding to the second pressure chamber. Shall have. In order to form the first and second protrusions 359 and 349, for example, after forming a metal foil film material such as Cu and Ni having a thickness of about 18 [μm] on the diaphragm 322 made of the resin, The metal foil film can be formed by etching in the same manner as the process for forming the printed wiring board. The diaphragm 322 has an ink supply port 334 communicating with a smaller diameter at a position corresponding to the through hole 328 serving as an ink buffer tank, and corresponds to the through hole 338 serving as a diluent buffer tank. It goes without saying that a diluent supply port 354 communicating with a smaller diameter than this is formed at the position.

  As a result, an adhesive layer made of a thermoplastic resin is formed between the first member 325 and the diaphragm 322, although it is a part of the diaphragm 322.

As conditions for thermocompression bonding, it is preferable that the press temperature is about 230 [° C.] and the pressure is about 20 to 30 [kgf / cm ² ]. When thermocompression bonding is performed in this manner, the bonding strength between the diaphragm 322 and the first member 325 can be increased and the bonding can be performed efficiently.

Further, the diaphragm 322 having the first and second protrusions 359 and 349 can be formed more easily by using the following materials. As such a material, as shown in FIG. 56, a glass transition point made by Mitsui Toatsu Chemical Co., Ltd. having a thickness of about 20 [μm] is made of Neoprex (trade name) having a temperature of 250 [° C.] or less. An example is a metal wrapping film (trade name) manufactured by Mitsui Toatsu Chemical Co., Ltd., in which a metal foil film 392 made of Cu is formed on the film 391 with a thickness of about 18 [μm].
The film 391 has a glass transition point of 250 [° C.] or less and a first resin layer 391 a that exhibits adhesion in a temperature range of about 220 [° C.] to 230 [° C.], and a glass transition point of 300 [ Second resin layer 391b, which is a polyimide material that does not exhibit adhesiveness at temperatures not lower than 300 ° C. and not higher than 300 ° C., and has a glass transition point of 300 ° C. or lower and 270 ° C. to 280 ° C. A third resin layer 391c showing adhesiveness in a temperature range of about a degree is laminated, and a metal foil film 392 is bonded onto the third resin layer 391c. Since this material does not use an adhesive that softens at a relatively low temperature, the first and second protrusions 159 and 149 can be formed on the diaphragm 322 as a heat-resistant structure. .

  Subsequently, the first member 325 and the second member 326 are bonded with a thermosetting resin. That is, as shown in FIG. 57, the first member 325 and the second member 326 are aligned with the through-hole portion 328 and the through-hole portion 330, and the through-hole portion 329 and the groove portion 331 are aligned with each other. The positions of the portion 338 and the through-hole portion 340 are aligned, and the positions of the through-hole portion 339 and the groove portion 341 are aligned, and an adhesive layer 327 made of a thermosetting resin is formed between the first member 325 and the second member 326. The pressure chamber forming portion 321 is completed by bonding.

  By adhering the first member 325 and the second member 326 in this manner, the ink buffer tank 352 in which both ends of the through-hole portion 328 and the through-hole portion 330 are covered is formed, and the through-hole portion 329 and the groove portion 331 are formed. A second pressure chamber 347 is formed. Then, the ink buffer tank 352, the second liquid supply path 346, the second pressure chamber 347, and the second nozzle introduction hole 348 are continuously formed.

  Similarly, a diluent buffer tank 362 is formed in which both ends of the through hole portion 338 and the through hole portion 340 are covered, and a first pressure chamber 357 including the through hole portion 339 and the groove portion 341 is formed. Then, the diluent buffer tank 362, the first liquid supply path 356, the first pressure chamber 357, and the first nozzle introduction hole 358 are continuously formed.

  Subsequently, for example, an epoxy adhesive is used to bond the second piezoelectric element 323 b to the second protrusion 349, and the ink supply pipe 350 is connected to the ink supply port 334 of the vibration plate 322. The first piezoelectric element 323a is bonded to the protrusion 359, and the diluent supply pipe 360 is connected to the diluent supply port 354 of the diaphragm 322, thereby completing the print head as shown in FIG.

In the print head manufacturing method of this example, the diaphragm 322 is bonded in advance to the first member 325 with a thermoplastic resin, and the orifice plate 324 is bonded in advance to the second member 326. Thereafter, the first member 325 and the second member 326 constituting the pressure chamber forming portion 321 are bonded together by the adhesive layer 327 made of a thermosetting resin. The thermoplastic resin that bonds the member 325 and the diaphragm 322 is not affected, and heat or the like is not applied to the liquid repellent film 351 of the orifice plate 324 that is bonded to the second member 326. The selection range of liquid repellent film is expanded.
(2-5) Effect of Second Reference Example Therefore, in the printer device of this example, the diaphragm 322 and the pressure chamber forming portion 321 are bonded to each other with a thermoplastic resin in the print head. Since the adhesive strength is ensured and the liquid repellent film 351 is not affected by heat, the liquid repellent film 351 is not required to have much heat resistance, and the liquid repellent film 351 having liquid repellent performance in accordance with the actual use conditions is used. It is possible to widen the selection range of the liquid repellent film, and the productivity is improved.

  In the printer device of this example, the groove 332 that forms the second liquid supply path 346 and the groove 342 that forms the first liquid supply path 356 are formed on the orifice plate 324 side in the print head. Therefore, in the bonding process between the second member 326 and the first member 325, the groove portions 332 and 342 are not blocked by the adhesive, and the second liquid supply caused by the clogging by the adhesive is performed. An increase in channel resistance of the channel 346 and the first liquid supply channel 356 can be avoided, and high reliability can be obtained.

  Furthermore, since the second liquid supply path 346 and the first liquid supply path 356 are formed on the orifice plate 324 side, the selection range of the thermoplastic resin that bonds the diaphragm 322 and the first member 325, Here, the selection range of the material for forming the diaphragm 322 is widened, and the productivity is improved.

  Furthermore, in the printer device of the present example, the first member 325 and the second member 326 constituting the pressure chamber forming portion 321 in the print head are bonded with a thermosetting resin such as epoxy, for example. Since both the first member 325 and the second member 326 are members that are mechanically rigid compared to the diaphragm 322, even if not much pressure is applied when performing bonding, It is possible to prevent warpage that occurs during bonding.

  That is, in the printer device of this example, the first member 325 and the second member 326 are easily bonded without increasing the temperature and pressure in the print head, and the bonding used for bonding is performed. The restriction on the selection range of the agent is reduced, the deterioration of the performance of the liquid repellent film is reduced, and it is possible to reduce the occurrence of process defects such as the liquid repellent film adhering to the bonding jig, thereby improving productivity. .

  Further, in the printer apparatus of this example, the pressure chamber forming portion 321 is formed of stainless steel and the orifice plate 324 is formed of resin in the print head, and both the pressure chamber forming portion and the orifice plate are formed of resin. Compared with the case, it is possible to suppress the deformation of the orifice plate 324 when the pressure is applied to the first and second pressure chambers 357 and 347. Further, in this example, since the second member 326 is also present below the first and second pressure chambers 357 and 347, the ink or dilution liquid from the metering nozzle 335 and the discharge nozzle 355 is removed. It is possible to discharge stably.

Furthermore, since the deformation of the orifice plate 324 can be suppressed as described above, the first and second pressure chambers 357 and 347 can be achieved even if the voltage applied to the first and second piezoelectric elements 323a and 323b is reduced. The internal pressure can be increased effectively and stably, and power consumption is reduced.
(3) Other Embodiments In the above-described examples of the print heads of the printer apparatuses of the first and second reference examples, the example in which the orifice plate is formed of one kind of resin material has been described. 58, a resin material 401 having a thickness of approximately 125 [μm] and a glass transition point of 250 [° C.] or more, for example, a resin material 401 made of Kapton (trade name) manufactured by DuPont Co., Ltd. It is made of a resin material having a thickness of about 7 [μm] on one principal surface 401a and having a glass transition point of 250 [° C.] or less, for example, Neoprex (trade name) manufactured by Mitsui Toatsu Chemical Co., Ltd. You may form with the board | plate material 403 comprised by apply | coating the resin material 402. FIG. Even in this case, the nozzle is formed by a technique such as excimer laser processing.

  When an orifice plate is formed of such a plate material 403, an orifice plate thicker than the above example is formed, so that the strength of the orifice plate can be further ensured and the length of the nozzle is increased. Therefore, the directionality of ejected ink droplets can be improved.

  If the orifice plate is formed of the plate material 403 made of the two kinds of resin materials as described above in the print head of the two-liquid mixing type printer device such as the above-mentioned “carrier jet” printer device, the fixed quantity is obtained. Since it is possible to provide a margin for the inclination angle of the nozzle and to easily widen the distance between the first and second pressure chambers, it is possible to reliably prevent ink leakage and diluent leakage.

Further, in the ink jet printer apparatus of the first reference example described above, an example in which a piezoelectric element that is a laminated piezo element is used as a pressure applying means to the pressure chamber has been described. The piezoelectric element may be used.
That is, the plane area of the pressure chamber 247 is substantially equal to the position corresponding to the pressure chamber 247 on the vibration plate 232 of the print head as shown in FIG. 59 having the same configuration as the print head shown in FIG. It is also possible to laminate the vibration plate 404 having a planar area and laminate the plate-like piezoelectric element 405 thereon. In FIG. 59, parts having the same configuration as in FIG. 25 are denoted by the same reference numerals, and description thereof is omitted.

  In this printer apparatus as well, the orifice plate may be an orifice plate made of the above-mentioned two layers of resin material, and the same effects as those described above can be obtained.

  The direction of polarization and voltage application of the piezoelectric element 405 is set so that when a voltage is applied to the piezoelectric element 405, the piezoelectric element 405 contracts in the in-plane direction of the diaphragm 404 and bends in the direction indicated by the arrow M3 in the figure. ing.

  Therefore, in this ink jet print head, when a driving voltage is applied to the piezoelectric element 405, the piezoelectric element 405 is bent in the direction indicated by the arrow M3 in FIG. 60 to press the diaphragm 404. The diaphragm 232 is curved. As a result, the volume of the pressure chamber 247 decreases, the pressure in the pressure chamber 247 increases, and ink is ejected from the ejection nozzle 245.

  In this case, the time change of the drive voltage applied to the piezoelectric element 405 is selected to be a voltage waveform that can eject ink from the ejection nozzle 245.

  The piezoelectric element as described above can also be applied to a print head of a two-liquid mixing type printer apparatus such as the aforementioned “carrier jet” printer apparatus. That is, the second pressure chamber 347 is located at a position corresponding to the second pressure chamber 347 on the vibration plate 322 of the print head as shown in FIG. 61, which has substantially the same configuration as the print head shown in FIG. A vibration plate 414 having a plane area substantially equal to the plane area of the first plate is laminated and a plate-like second piezoelectric element 415 is further laminated thereon, and this is positioned at a position corresponding to the first pressure chamber 357. Alternatively, the diaphragm 224 having a planar area substantially equal to the planar area of the first pressure chamber 357 may be formed by lamination, and the plate-like first piezoelectric element 225 may be further laminated thereon. In FIG. 61, portions having the same configuration as in FIG. 41 are denoted by the same reference numerals, and description thereof is omitted.

  In this printer apparatus as well, the orifice plate may be an orifice plate made of the above-mentioned two layers of resin material, and the same effects as those described above can be obtained.

  The directions of polarization and voltage application of the first and second piezoelectric elements 425 and 415 are the same as the first and second piezoelectric elements 425 and 425 when a voltage is applied to the first and second piezoelectric elements 425 and 415. 415 is set so as to contract in the in-plane direction of the diaphragms 424 and 414 and bend in the direction indicated by the arrow M4 in the drawing.

  Therefore, when printing is performed in the print head of the two-component mixed type printer apparatus, first, the driving voltage is not applied to the first and second piezoelectric elements 425 and 415, and the diluted solution and the ink are used. Meniscuses are formed at positions that balance the surface tension of the nozzles, in other words, in the vicinity of the tips of the discharge nozzle 355 and the metering nozzle 335, and a print standby state is established.

  Next, a drive voltage is applied to the second piezoelectric element 415 to quantify the ink. As a result, as shown in FIG. 62, the second piezoelectric element 415 is bent in the direction indicated by the arrow M4 in the drawing, and the portion corresponding to the second pressure chamber 347 of the diaphragm 322 is in the direction indicated by the arrow M4 in the drawing. As a result, the volume of the second pressure chamber 347 decreases and the pressure in the second pressure chamber 347 increases.

  Here, since the voltage value of the voltage applied to the second piezoelectric element 415 is set to a value corresponding to the gradation of the image data, an amount of ink corresponding to the image data is pushed out from the tip of the quantitative nozzle 335. It is.

  The ink pushed out from the metering nozzle 335 comes into contact with and mixes with a diluent forming a meniscus in the vicinity of the tip of the discharge nozzle 355.

  Next, the drive voltage applied to the second piezoelectric element 415 is released, and the ink in the second pressure chamber 347 is used as the original pressure, and the excess ink pushed out from the metering nozzle 335 is drawn and quantified. Only in the vicinity of the tip of the discharge nozzle 355.

  Subsequently, a driving voltage is applied to the first piezoelectric element 425, and the first piezoelectric element 425 is bent in the direction indicated by the arrow M4 in the drawing as shown in FIG. A portion corresponding to 357 is bent in the direction indicated by arrow M4 in the figure. As a result, the volume of the first pressure chamber 357 decreases, the pressure in the first pressure chamber 357 increases, and the mixed solution having the ink concentration corresponding to the image data described above is discharged from the discharge nozzle 355. The

  Here, the time change of the drive voltage applied to the first piezoelectric element 425 is set so that the mixed solution can be discharged from the discharge nozzle 355.

  Furthermore, in the print head of the two-liquid mixing type printer apparatus described so far, the example has been described in which ink is used as a quantitative medium and dilution liquid is used as an ejection medium. However, the present invention is not limited thereto, and ink is ejected from the ejection medium. Needless to say, the present invention can also be applied to a printer apparatus having a print head using a diluent as a quantitative medium.

  Further, in the above-described example of the ink jet printer apparatus, the example in which the liquid supply path 246 of the print head is provided on the orifice plate 234 side has been described. As shown in FIG. The liquid supply path 416 is formed on the first member 235 of the pressure chamber forming portion 231, that is, formed on the vibration plate 232 side of the print head having substantially the same configuration as the print head shown in FIG. The same effect as in the above example may be obtained. In FIG. 64, parts having the same configuration as in FIG. 25 are denoted by the same reference numerals, and description thereof is omitted. That is, also in this print head, since the liquid supply path 416 is covered with the thermoplastic adhesive, the flow path is not blocked when the adhesive is cured.

  The first member 235 having the liquid supply path 416 is formed in the same manner as the second member 236 of the print head described above.

  Also in this print head, the orifice plate may be formed by the plate material made of the two kinds of resin materials described above, and the same effect as in the above case can be obtained.

  Further, in this print head, the same effect as described above can be obtained by using a single-plate piezoelectric element instead of the piezoelectric element 233 which is a laminated piezoelectric element.

  Furthermore, in the above-described ink jet printer apparatus, both the first and second members 235 and 236 of the pressure chamber forming portion 231 are formed by etching a stainless steel member. The present invention can also be applied to a printer apparatus in which an orifice plate that also serves as the second member is formed by injection molding. That is, as shown in FIG. 65, in the print head having substantially the same configuration as the print head shown in FIG. 64, the orifice plate 417 and the first member 235 that also serve as the second member described above. May be bonded by an adhesive layer 237 to constitute a print head. In FIG. 65, parts having the same configuration as in FIG. 64 are denoted by the same reference numerals, and description thereof is omitted. In this example, a groove portion that forms part of the pressure chamber, a through hole that forms a nozzle introduction hole, and a recess 418 in which the nozzle is integrated are formed in the orifice plate 417. Even in this case, the same effect as before can be obtained.

  Examples of the material constituting the orifice plate 417 to be injection-molded include polyetherimide, polysulfone, polyimide, and polybenzimidazole. Also in this print head, the diaphragm 232 is made of a thermoplastic material, and the diaphragm 232 is bonded to the first member 235 by thermocompression bonding, so that it is the same as that of the printer apparatus described so far. An effect is obtained. Further, since the adhesion between the orifice plate 417 and the first member 235 is performed by the adhesive layer 237 made of a thermosetting resin, the thermal expansion coefficient of the orifice plate 417 and the first member 235 is greatly different. No warpage or the like due to the difference in thermal expansion coefficient.

  In the example of the two-liquid mixing type printer described above, an example in which the second liquid supply path 346 and the first liquid supply path 356 of the print head are provided on the orifice plate 324 side has been described. As shown in FIG. 66, the first and second liquid supply paths are formed on the vibration plate 322 side of the print head having the same configuration as the print head shown in FIG. 41, that is, the pressure chamber. The first and second liquid supply paths 420 and 419 may be formed in the first member 325 of the forming portion 321, and the same effect as in the above example can be obtained. 66, portions having the same configuration as in FIG. 41 are denoted by the same reference numerals, and description thereof is omitted. That is, also in this print head, since the first and second liquid supply paths 420 and 419 are covered with the thermoplastic adhesive, the flow path is not blocked when the adhesive is cured. Absent.

  The first member 325 having the first and second liquid supply paths 420 and 419 is formed in the same manner as the second member 326 of the print head described above.

  Also in this print head, the orifice plate may be formed by the plate material made of the two kinds of resin materials described above, and the same effect as in the above case can be obtained.

  Further, in this print head, the same effect as described above can be obtained even if a single-plate piezoelectric element is used instead of the first and second piezoelectric elements 323a and 323b which are laminated piezoelectric elements.

  Furthermore, in the above-described two-liquid mixing type printer device, both the first and second members 325 and 326 of the pressure chamber forming portion 321 are formed by etching a stainless steel member. The present invention can also be applied to a printer apparatus in which an orifice plate that also serves as a second member is formed by injection molding. That is, as shown in FIG. 67, the orifice plate 421 and the first member 325 that also serve as the second member described above in the print head having substantially the same configuration as the print head previously shown in FIG. May be bonded by an adhesive layer 327 to constitute a print head. In the present example, the orifice plate 421 has a groove part forming a part of the second pressure chamber, a through hole forming a second nozzle introduction hole, and a concave part 422 in which the metering nozzle is integrated, and a first pressure. A recess 423 in which the groove forming the chamber, the through-hole forming the first nozzle introduction hole, and the discharge nozzle are integrated is formed. Even in this case, the same effect as before can be obtained.

  Examples of the material constituting the orifice plate 421 to be injection-molded include polyetherimide, polysulfone, polyimide, and polybenzimidazole. Also in this print head, the diaphragm 322 is made of a thermoplastic material, and the diaphragm 322 is bonded to the first member 325 by thermocompression bonding. An effect is obtained. Furthermore, since the adhesion between the orifice plate 421 and the first member 325 is performed by the adhesive layer 327 made of thermosetting resin, the thermal expansion coefficient of the orifice plate 421 and the first member 325 is greatly different. No warpage or the like due to the difference in thermal expansion coefficient.

  Further, in the above-described manufacturing method of the ink jet printer device, a method of bonding the pressure chamber forming portion 231 to the first member 235 after forming the protrusion 249 on the vibration plate 232 is shown. However, the present invention is not limited to this, and as shown in FIG. 68, the metal foil 426 is bonded to the first member 235 on the vibration plate 232 made of a thermoplastic material, and then the protrusion is formed. A part may be formed. In addition, as what laminated the above thermoplastic materials and metal foil, the metal wrapping film (brand name) by Mitsui Toatsu Chemicals, Inc. is mentioned, for example.

  In order to form the protrusions as described above, first, as shown in FIG. 69, a mask 427 is formed with a dry film or the like at a predetermined position where the protrusions of the metal foil 426 on the diaphragm 232 are formed. . Then, after etching portions other than the portion where the mask 427 is formed on the metal foil 426 by immersing in an etching solution such as ferric chloride aqueous solution, for example, the mask 427 is peeled off, and as shown in FIG. The protruding portion 249 may be formed at the position.

  In order to form the ink supply port 244 at a position corresponding to the through hole portion 238 in the vibration plate 232, a predetermined portion of the vibration plate 232 may be removed by punching or the like.

  As described above, when the protrusion 249 is formed after the vibration plate 232 and the first member 235 are bonded, the alignment of the protrusion 249 and the pressure chamber is performed in the mask forming process shown in FIG. Alignment is performed using an exposure apparatus. That is, the alignment accuracy can be improved as compared with the case where the alignment with the pressure chamber is performed using the bonding jig after the protrusion is formed as described above.

  Furthermore, the through holes and the protrusions of the first member may be formed after bonding the plate member forming the first member and the diaphragm to which the metal foil is bonded.

  That is, as shown in FIG. 71, the vibration plate 232 is bonded onto the plate member 271 forming the first member in a state where the metal foil 426 is bonded to the vibration plate 232 made of a thermoplastic material. In addition, as what laminated the above thermoplastic materials and metal foil, the metal wrapping film (brand name) by Mitsui Toatsu Chemicals, Inc. is mentioned, for example.

  Next, as shown in FIG. 72, a mask 427 is formed with a dry film or the like at a predetermined position where the protrusion of the metal foil 426 on the vibration plate 232 is formed, and each through-hole can be formed on the plate material 271. Such a mask 428 is formed of a dry film or the like. Then, by immersing in an etching solution such as ferric chloride aqueous solution, for example, the portion other than the portion where the mask 427 is formed of the metal foil 426 is etched, and the portion other than the portion where the mask 428 is formed is etched. Next, the masks 427 and 428 are peeled off, and as shown in FIG. 73, a projection 249 is formed at a predetermined position of the diaphragm 232, and a first member 235 in which the through holes 238 and 239 are formed is formed. You may do it.

  In order to form the ink supply port 244 at a position corresponding to the through hole portion 238 in the vibration plate 232, a predetermined portion of the vibration plate 232 may be removed by punching or the like.

  As described above, when the protruding portion 249 and the through-hole portions 238 and 239 are formed after the vibration plate 232 and the plate material 271 are bonded, the alignment of the protruding portion 249 and the through-hole portion 239 forming the pressure chamber is shown in FIG. Therefore, alignment is performed using an exposure apparatus. That is, the alignment accuracy can be improved as compared with the case where the alignment between the protrusion and the through hole is performed using the bonding jig after the protrusion and the through hole are formed as described above. At this time, if a double-sided exposure apparatus is used, both sides can be exposed at the same time, so that the alignment accuracy can be further improved.

  It should be noted that such a method of forming the protrusion or the through hole is applicable to a method for manufacturing a two-liquid mixing type printer device such as the above-described “carrier jet” printer device. It is possible to improve the alignment accuracy of the first pressure chamber, the second protrusion, and the second pressure chamber.

  Further, in the above-described printer device of the first reference example, even if the pattern layer is laminated on the adhesive layer made of the thermoplastic resin at least at a position other than the portion facing the pressure chamber and the portion facing the liquid supply path. good.

  That is, as shown in FIG. 74, in the print head having a configuration substantially the same as the print head of the printer apparatus shown in FIG. 25, at least the pressure chamber 247 and the liquid supply path 246 on one main surface 232a of the diaphragm 232 The pattern layer 430 may be provided at a position other than the facing portion. As a result, the pattern layer 430 as described above is formed on an adhesive layer made of a thermoplastic resin (not shown) between the diaphragm 232 and the first member 235 constituting the pressure chamber forming portion 231. In FIG. 74, parts having the same configuration as in FIG. 25 are denoted by the same reference numerals, and description thereof is omitted.

  The printer device having such a print head has the same effect as the printer device of the first reference example described above. In addition, when the print head is manufactured, the diaphragm 232 is attached to the first pressure chamber forming portion 231. When placed on the member 235 and bonded with an adhesive layer made of a thermoplastic resin, the pressure of heating and pressure is concentrated and applied to the pattern layer 430 of the diaphragm 232 to form a pressure chamber 247. The bonding operation of the diaphragm 232 to the pressure chamber forming portion 231 is easily performed.

  Further, if such a pattern layer is formed in the print head in which the liquid supply path 416 previously shown in FIG. 64 is formed on the diaphragm 232 side, the pattern layer is formed during heating and pressurization. It is more preferable that unnecessary pressure is not applied to the portion facing the liquid supply path 416 that is not performed, and the liquid supply path 416 is not blocked by the adhesive layer made of thermoplastic resin.

  Furthermore, in the printer apparatus of the second reference example described above, at least a position other than the facing portion with the first and second pressure chambers and the facing portion with the first and second liquid supply paths is more than the thermoplastic resin. A pattern layer may be laminated on the adhesive layer.

  That is, as shown in FIG. 75, in the print head having a configuration substantially the same as the print head of the printer apparatus shown in FIG. 41, at least the first and second pressure chambers 357 on the one main surface 322a of the diaphragm 322, The pattern layer 431 may be provided at a position other than the portion facing the 347 and the first and second liquid supply paths 356 and 346. As a result, the pattern layer 431 as described above is formed on an adhesive layer made of a thermoplastic resin (not shown) between the diaphragm 322 and the first member 325 constituting the pressure chamber forming portion 321. 75, parts having the same configuration as in FIG. 41 are denoted by the same reference numerals, and description thereof is omitted.

  The printer device having such a print head has the same effect as the printer device of the second reference example described above. In addition, when the print head is manufactured, the diaphragm 322 is used as the first pressure chamber forming portion 321. When placed on the member 325 and bonded between them by an adhesive layer made of a thermoplastic resin, the pressure of heat and pressure is concentratedly applied to the pattern layer 431 of the diaphragm 322, and the first and second The bonding operation of the diaphragm 322 to the pressure chamber forming portion 321 in which the pressure chambers 357 and 347 are formed is easily performed.

  Furthermore, in the first and second embodiments described above, an example in which the present invention is applied to a serial type printer apparatus has been described. However, the present invention is a so-called line type printer apparatus or drum rotary type printer apparatus. It is applicable to.

  The line type printer device has a configuration as shown in FIG. In FIG. 76, portions corresponding to those in FIG. 1 are denoted by the same reference numerals, and description thereof is omitted.

  In this line type printer liquid jet recording apparatus, a line head 432 in which a number of print heads (not shown) are arranged in a line is fixed in the axial direction of the drum 15. In this line type printer device, the line head 432 simultaneously performs printing for one line, and when printing for one line is completed, the drum 15 is rotated by one line in the direction indicated by the arrow m in the figure. The next line is printed. In this case, a method of printing all lines at once, dividing into a plurality of blocks, or alternately printing every other line can be considered.

  One drum rotating type printer device has a structure as shown in FIG. 77 corresponding to those in FIG. 1 are denoted by the same reference numerals, and the description thereof is omitted. In this drum rotation type printer device, when the drum 15 rotates, droplets containing ink are ejected from the print head 19 in synchronization with the rotation, and an image is formed on the print paper 17. When the drum 15 rotates once in the direction indicated by the arrow m in the drawing and one line of printing is completed on the print paper 17 in the circumferential direction, the feed screw 18 rotates and the print head unit 3 is moved by the arrow M ′ in the drawing. The next row is printed by moving one pitch in the indicated direction. In this case, there is a method in which the drum 17 and the feed screw 18 are simultaneously rotated, and the print head 19 is gradually moved while printing. In the case of a multi-nozzle head or a configuration in which the same place is printed several times, spiral printing is performed while simultaneously rotating the drum 17 and the feed screw 18 together.

  Further, in the printer device of the first and second reference examples, the second member constituting the pressure chamber forming portion is also provided with a groove portion that forms the pressure chamber, or the first and second pressure chambers are provided. Although the example in which the groove part to be formed is provided is shown, even if the depth of the groove part provided in the second member is made as shallow as possible, the effect of the present invention is not affected. Therefore, the second member does not have to be provided with grooves for forming these pressure chambers. If the nozzle introduction hole formed in the second member communicates with these pressure chambers, the present invention The effect is obtained.

  Further, in the printer devices of the first and second reference examples, the sizes of the diaphragm 232 and the diaphragm 322 are adjusted to the size of the upper surface of the first member 235 or the upper surface of the first member 325, respectively. Although the size is such that it can be bonded, these diaphragms only need to be of a size that can be bonded to positions corresponding to the pressure chamber 247 and the first and second pressure chambers 157 and 147. In this way, since the diaphragm can be made smaller, the bonding process between the diaphragm and the first member becomes easier.

  Furthermore, in the printer devices of the first and second reference examples, the first members 235 and 325 and the second members 236 and 326 are mainly formed of plate members 261 271 371 having a thickness of 0.1 mm. However, there is no particular problem even if the thickness of the plate members 261, 271, 371, 381 is other than 0.1 [mm]. However, in the above example, since each through hole, groove, and through hole are formed by etching, the thickness of the plate members 261, 271, 371, 381 should be 0.07 [mm] or more. preferable. In this case, the pressure chamber 247 and the first and second pressure chambers 357 and 347 can have sufficient strength to increase the pressure.

Further, in the printer devices of the first and second reference examples, the thermocompression bonding conditions between the orifice plate 234 and the second member 236 and between the orifice plate 324 and the second member 326 are set at a press temperature of 230 [° C. The pressure is about 20 to 30 kgf / cm ^2, but the thermocompression bonding conditions are not limited to the above conditions, and may be conditions that can obtain the adhesive strength between the adherends. It ’s fine.

  In the printer devices of the first and second reference examples, the example in which the nozzle is processed by excimer laser processing has been described. However, this nozzle processing is not limited to this, and various lasers other than a carbon dioxide laser are used. It can be performed by applied processing.

  Furthermore, in the printer device of the first and second reference examples, the pressure chamber 247, the first and second pressure chambers 357, 347, the liquid supply path 246, the first and second liquid supply paths 356, 346 are provided. Various changes can be made to the configuration and shape. Further, if it can be replaced by other means, it may be replaced.

  Furthermore, in the printer devices of the first and second reference examples, the shapes of the discharge nozzles 245 and 355 and the fixed nozzle 335 can be variously changed. Further, if it can be replaced by other means, it may be replaced.

  Further, in the printer devices of the first and second reference examples, the pressure chamber forming portions 231 and 321 are described as being formed by a metal plate that is a stainless steel plate that has been subjected to groove processing and hole processing. Various other metal plates can be used as the metal plate. Further, if it can be replaced by other means, it may be replaced.

  Furthermore, in the printer devices of the first and second reference examples, various materials can be used as the material for forming the orifice plates 234 and 324 in addition to the materials described above. Further, if it can be replaced by other means, it may be replaced.

  Furthermore, in the printer devices of the first and second reference examples, ink is supplied from a not-shown ink tank or dilution liquid tank to the liquid supply path or the second liquid supply path, or the dilution liquid is supplied to the first liquid supply path. An ink buffer tank or a diluent buffer tank is used as a means for supplying the liquid supply path. In these ink buffer tank or diluent buffer tank, various changes in shape or configuration are possible for the diluent. Further, if it can be replaced by other means, it may be replaced.

It is a principal part schematic perspective view which shows an example of a printer apparatus. FIG. 3 is a block diagram illustrating a configuration of a control unit as an example of a printer apparatus. It is a principal part schematic sectional drawing which shows an example of a print head. It is a principal part schematic plan view which shows an example of a print head. FIG. 9 is a cross-sectional view illustrating an example of a method for manufacturing a print head and illustrating a step of forming a pressure chamber forming portion. FIG. 10 is a cross-sectional view illustrating an example of a method for manufacturing a print head and illustrating a process of forming a diaphragm. FIG. 10 is a cross-sectional view illustrating an example of a method for manufacturing a print head and illustrating a process of completing the print head. It is sectional drawing which shows an example of a thermoplastic layer. It is a principal part expanded sectional view which shows the process of adhere | attaching a diaphragm to a pressure chamber member. It is a principal part schematic sectional drawing which shows operation | movement of an example of a print head. It is a principal part schematic perspective view which shows the other example of a printer apparatus. It is a block diagram which shows the structure of the control part of the other example of a printer apparatus. It is a principal part schematic sectional drawing which shows the other example of a print head. It is a principal part schematic plan view which shows the other example of a print head. FIG. 10 is a cross-sectional view showing another example of the method for manufacturing a print head and showing a process of forming a pressure chamber forming portion. FIG. 10 is a cross-sectional view illustrating another example of a method for manufacturing a print head and illustrating a process of forming a diaphragm. FIG. 9 is a cross-sectional view illustrating another example of a method for manufacturing a print head and illustrating a process of completing the print head. It is sectional drawing which shows the other example of a thermoplastic layer. It is a principal part expanded sectional view which shows the process of adhere | attaching a diaphragm to a pressure chamber member. It is a principal part schematic sectional drawing which shows operation | movement of the other example of a print head. It is a principal part schematic sectional drawing which shows operation | movement of the other example of a print head. It is a principal part schematic sectional drawing which shows operation | movement of the other example of a print head. It is sectional drawing which shows an example of a pressure chamber formation part. It is sectional drawing which shows the other example of a pressure chamber formation part. It is a principal part schematic sectional drawing which shows the further another example of a print head. It is a principal part schematic plan view which shows another example of a print head. It is a principal part schematic sectional drawing which shows the state which the volume of the ink pressure chamber of the further another example of the print head increased. It is a principal part schematic sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the process of forming a resist on a board | plate material. It is a principal part schematic sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the etched state. It is a principal part schematic sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the process of forming a 2nd member. It is a principal part schematic sectional drawing which shows the further example of the manufacturing method of a print head in order of a process, and shows the process of arrange | positioning a board | plate material on the 2nd member. FIG. 7 is a schematic cross-sectional view of a main part showing a step of forming a liquid repellent film, showing still another example of a method for manufacturing a print head in the order of steps. It is sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the process of completing an orifice plate. It is a principal part schematic sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the process of forming a resist on a board | plate material. It is a principal part schematic sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the etched state. FIG. 7 is a schematic cross-sectional view of a main part showing a step of forming a first member, showing still another example of a method for manufacturing a print head in the order of steps. FIG. 7 is a schematic cross-sectional view of a main part illustrating a step of arranging a diaphragm on a first member, showing still another example of a method for manufacturing a print head in the order of steps. FIG. 10 is a schematic cross-sectional view of a main part illustrating a material for forming a diaphragm, showing still another example of a method for manufacturing a print head in the order of steps. It is a principal part schematic sectional drawing which shows the process of adhere | attaching between the 1st member and the 2nd member which shows the further another example of the manufacturing method of a print head in order of a process. FIG. 3 is a circuit block diagram illustrating a drive circuit for a print head. It is a principal part schematic sectional drawing which shows the further another example of a print head. It is a principal part schematic plan view which shows another example of a print head. It is a principal part schematic sectional drawing which shows the state which the volume of the 1st and 2nd pressure chamber of the further another example of the print head increased. 6 is a chart showing application timing of a print head drive voltage. It is a principal part schematic sectional drawing which shows the state which the volume of the 2nd pressure chamber of the further another example of the print head returned to the original. It is a principal part schematic sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the process of forming a resist on a board | plate material. It is a principal part schematic sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the etched state. It is a principal part schematic sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the process of forming a 2nd member. It is a principal part schematic sectional drawing which shows the further example of the manufacturing method of a print head in order of a process, and shows the process of arrange | positioning a board | plate material on the 2nd member. FIG. 7 is a schematic cross-sectional view of a main part showing a step of forming a liquid repellent film, showing still another example of a method for manufacturing a print head in the order of steps. It is sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the process of completing an orifice plate. It is a principal part schematic sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the process of forming a resist on a board | plate material. It is a principal part schematic sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the etched state. FIG. 7 is a schematic cross-sectional view of a main part showing a step of forming a first member, showing still another example of a method for manufacturing a print head in the order of steps. FIG. 7 is a schematic cross-sectional view of a main part illustrating a step of arranging a diaphragm on a first member, showing still another example of a method for manufacturing a print head in the order of steps. FIG. 10 is a schematic cross-sectional view of a main part illustrating a material for forming a diaphragm, showing still another example of a method for manufacturing a print head in the order of steps. It is a principal part schematic sectional drawing which shows the process of adhere | attaching between the 1st member and the 2nd member which shows the further another example of the manufacturing method of a print head in order of a process. It is sectional drawing which shows an example of the material which can be used for an orifice plate. It is a principal part schematic sectional drawing which shows the further another example of a print head. It is a principal part schematic sectional drawing which shows the state in which the volume of the pressure chamber is reducing in the further another example of a print head. It is a principal part schematic sectional drawing which shows the further another example of a print head. It is a principal part schematic sectional drawing which shows the state in which the volume of the 2nd pressure chamber is reducing in the further another example of a print head. It is a principal part schematic sectional drawing which shows the state in which the volume of the 1st pressure chamber is reducing in the further another example of a print head. It is a principal part schematic sectional drawing which shows the further another example of a print head. It is a principal part schematic sectional drawing which shows the further another example of a print head. It is a principal part schematic sectional drawing which shows the further another example of a print head. It is a principal part schematic sectional drawing which shows the further another example of a print head. FIG. 7 is a schematic cross-sectional view of a main part illustrating a process of bonding a first member and a diaphragm on which a metal foil is formed, showing still another example of a method for manufacturing a print head in order of processes. It is a principal part schematic sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the process of forming a mask on metal foil. FIG. 7 is a schematic cross-sectional view of a main part showing a step of forming a protrusion, showing still another example of a method for manufacturing a print head in the order of steps. It is sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and adhere | attaches the diaphragm and metal plate in which metal foil was formed. It is sectional drawing which shows the further example of the manufacturing method of a print head in order of a process, and shows the process of forming a mask on metal foil and a stainless steel member. It is sectional drawing which shows the further another example of the manufacturing method of a print head in order of a process, and shows the process of forming a projection part and a through-hole. It is a principal part schematic sectional drawing which shows the further another example of a print head. It is a principal part schematic sectional drawing which shows the further another example of a print head. It is a principal part schematic perspective view which shows the further another example of a printer apparatus. It is a principal part schematic perspective view which shows the further another example of a printer apparatus. It is a principal part schematic sectional drawing which shows the conventional print head. It is a principal part schematic plan view which shows the conventional print head.

Claims (12)

A pressure chamber forming section having a pressure chamber and a liquid supply path for supplying a liquid to the pressure chamber;
A discharge nozzle communicating with the pressure chamber;
A diaphragm covering the pressure chamber;
In a printer device having a piezoelectric element disposed corresponding to the pressure chamber via the diaphragm,
The diaphragm covers the pressure chamber and is laminated on the thermoplastic layer at a position other than the thermoplastic layer having adhesiveness and at least a portion facing the pressure chamber and a portion facing the liquid supply path. A printer device comprising a pattern layer.   2. The printer apparatus according to claim 1, wherein the pattern layer is made of metal.   2. The printer device according to claim 1, wherein the thickness of the pattern layer is 15 [μm] or more.   2. The printer apparatus according to claim 1, wherein the thermoplastic layer is made of a polyimide material.   2. A printer apparatus according to claim 1, wherein the thermoplastic layer is made of a material having a glass transition point of 180 [deg.] C. to 250 [[deg.] C.].   6. The printer apparatus according to claim 5, further comprising a thin film between the thermoplastic layer and the pattern layer. A first pressure chamber into which the discharge medium is introduced, a first liquid supply path for supplying a liquid to the first pressure chamber, a second pressure chamber into which the quantitative medium is introduced, and the second pressure chamber A pressure chamber forming section having a second liquid supply path for supplying a liquid;
A discharge nozzle communicating with the first pressure chamber;
A metering nozzle communicating with the second pressure chamber;
A diaphragm covering the first pressure chamber and the second pressure chamber;
A piezoelectric element disposed corresponding to each of the first pressure chamber and the second pressure chamber via the diaphragm,
In the printer device that causes the quantitative medium to ooze from the quantitative nozzle toward the discharge nozzle, and then discharges the discharge medium from the discharge nozzle to mix and discharge the quantitative medium and the discharge medium.
The diaphragm covers the first pressure chamber and the second pressure chamber, and has an adhesive thermoplastic layer, at least a portion facing the first pressure chamber and the second pressure chamber, and the first pressure chamber. And a pattern layer laminated on the thermoplastic layer at a position other than a portion facing the liquid supply path and the second liquid supply path.   8. The printer apparatus according to claim 7, wherein the pattern layer is made of metal.   8. The printer apparatus according to claim 7, wherein the thickness of the pattern layer is 15 [μm] or more.   8. The printer apparatus according to claim 7, wherein the thermoplastic layer is made of a polyimide material.   8. A printer apparatus according to claim 7, wherein the thermoplastic layer is made of a material having a glass transition point of 180 [deg.] C. to 250 [[deg.] C.].   12. The printer apparatus according to claim 11, further comprising a thin film between the thermoplastic layer and the pattern layer.

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