JPH10272774A - Printer and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To protect the opening of an ink jet hole against damage while preventing a liquid repellent processing film from being stripped by forming a liquid repellent processing film having adhesion in the vicinity of the opening and bonding an ink jet hole protective member having an opening larger than the ink jet hole using the liquid repellent processing film as an adhesive. SOLUTION: An ink jet hole forming member, i.e., an orifice plate 33, is bonded to the major surface 31b of an ink pressure chamber forming member 31 and a liquid repellent processing film 42 is formed on the periphery of a part where an ink jet hole 33a is opened. An ink jet hole protective member 43 having an opening 43a larger than the opening of the ink jet hole 33a is bonded onto the major surface of the orifice plate 33 using the the liquid repellent processing film 42 as an adhesive. Nickel, polyimide, or the like, is used as the material. According to the arrangement, no damage occur in the vicinity of the opening 43a and the liquid repellent processing film 42 is prevented from being stripped. Furthermore, accuracy of the ink jet hole 33a and liquid repellence are prevented from degrading due to spreading out of adhesive because additional adhesive is not required.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printer and a method of manufacturing the same, and more particularly to a printer suitable for application to an on-demand type ink jet printer (hereinafter simply referred to as an ink jet printer) and a method of manufacturing the same. .

[0002]

2. Description of the Related Art Conventionally, this type of ink jet printer is a printer which prints an image on a recording medium such as paper or film by discharging ink droplets from ink discharge holes in response to a recording signal. In recent years, it has been rapidly spreading because it can realize cost reduction and cost reduction.

In this ink jet printer, as a method of discharging ink droplets, for example, there are a method using a heating element and a method using a piezoelectric element.

In the method using a heating element, ink droplets are ejected from ink ejection holes by the pressure of bubbles generated by heating and boiling the ink by the heating element. Further, in the method using a piezoelectric element, the piezoelectric element is deformed and pressure is applied to an ink pressure chamber filled with ink, so that the ink liquid flows from the ink ejection hole through the ink discharge hole formed in the ink pressure chamber. This is to discharge droplets.

[0005] In this method using a piezoelectric element, a laminated piezoelectric element in which three or more piezoelectric elements bonded to a vibrating plate are laminated is linearly displaced, so that an ink pressure chamber is interposed through the vibrating plate. There is a method of pressing the ink pressure chamber by applying a voltage to a single-plate type piezoelectric element bonded to the vibration plate or a piezoelectric element laminated in two layers, thereby bending the vibration plate. .

In recent years, the creation of documents using a computer called desktop publishing has become popular, and there has been an increasing demand to output not only characters and figures but also color natural images such as photographs with characters and figures. Have been doing. In order to punish such a high-quality natural image, it is important to reproduce halftones.

Here, in order to reproduce the halftone, the diameter of the print dot is expressed as variable by changing the voltage and pulse width applied to the piezoelectric element or the heating element and controlling the droplet size of the solution to be ejected. There is a method in which one pixel is constituted by a matrix composed of, for example, 4 × 4 dots without changing the dot diameter, and gradation expression is performed in a unit of this matrix using a so-called dither method.

However, in a method of controlling the droplet size of a solution to be discharged by changing a voltage or a pulse width applied to a piezoelectric element or a heating element in a print head of an ink-jet printer, the method of applying the voltage to the piezoelectric element or the heating element is not known. If the voltage or pulse width is too low, it becomes impossible to eject ink, so that there is a limit to the minimum droplet diameter. As a result, particularly low-density expression cannot be performed, and the number of gradation steps that can be expressed is reduced.

Further, by a method of expressing gradation using the dither method, for example, when one pixel is constituted by a 4 × 4 matrix, a density of 17 gradations can be expressed. When printing at the density, the resolution is 1
/ 4, the roughness becomes noticeable. As described above, there are still practically insufficient points for printing out a natural image in any of the methods.

Therefore, recently, a "carrier jet" printer has been proposed as an improvement over the above disadvantages of the ink jet printer. In this "carrier jet" printer, a print head is provided with ink discharge holes for quantifying and discharging ink and diluent discharge holes for discharging diluent. The “carrier jet” printer device mixes the ink discharged from the ink discharge holes and the diluent discharged from the diluent discharge holes to change the ink density, so that a gradation is provided in the dot. I have to.

[0011] This "carrier jet" printer also requires a droplet discharging function similar to that of an ink jet printer, and the method of discharging droplets is a method using a piezoelectric element or a method similar to the ink jet printer. A method using a heating element is generally used.

[0012]

By the way, in a "carrier jet" printer, ink and a diluting liquid are used in order to accurately express a gradation corresponding to image data.
In the standby state, it is necessary to be surely separated. For this reason, in a “carrier jet” printer, a member having the property of repelling ink and diluent is applied to a region sandwiched between the ink discharge hole and the diluent discharge hole, and the ink and the diluent are mixed in this region. It is necessary to prevent this from happening.

In an ink jet printer that discharges only ink, if ink adheres to the periphery of the ink discharge hole, an unstable state of the discharge direction is caused. Therefore, in the ink jet printer device, it is necessary to apply a member having a property of repelling ink to a region around the ink ejection hole so that the ink does not adhere to this region.

As a member having a property of repelling ink and a diluting liquid, a member using Teflon or the like is generally used, and as a member capable of performing ablation processing using excimer laser light, Japanese Patent Publication No. 6-328698. As disclosed in Japanese Patent Application Laid-Open No. H11-284, a material in which a material that absorbs the wavelength of an excimer laser is distributed in Teflon is used.

However, in the case where a liquid repellent film is formed in a region sandwiched between an ink discharge hole and a diluent discharge hole by using a member as disclosed in Japanese Patent Publication No. 6-328698, an excimer A condition range that satisfies both the processability using a laser and the liquid repellency repelling ink and diluent is narrowed, and a problem arises in that either property must be sacrificed to some extent.

Further, in order to stabilize the discharge of the ink and the diluting liquid, and to maintain the stable state, the shapes of the ink discharging holes and the diluting liquid discharging holes are accurately formed, and the use of the product after the production is performed. Even in such a case, it is necessary to prevent the occurrence of scratches and the like at the openings of the ink ejection holes and the diluting solution ejection holes, and to prevent peeling of the liquid-repellent treatment film described above.

As a method for preventing the opening of the ink discharge hole and the diluent liquid discharge hole from being damaged when the product is used, a member having the ink discharge hole and the diluent liquid discharge hole (hereinafter referred to as a discharge hole) is used. When the forming member is a metal material, a member that protects the ink discharge holes and the diluent discharge holes by performing plating processing near the openings of the ink discharge holes and the diluent discharge holes (hereinafter referred to as discharge hole protection). And a method of forming a discharge hole protection member made of a Teflon-based liquid repellent material near the openings of the ink discharge holes and the diluent discharge holes by printing.

However, in these methods, when an organic material excellent in excimer laser processability is used as the discharge hole forming member, the organic material is generally difficult to plate, and the excimer laser processability is high. Most of organic materials having excellent heat resistance are not heat-resistant to the calcination temperature of Teflon-based materials, and thus are difficult to apply.

As a method of preventing the opening of the ink ejection hole and the diluting liquid ejection hole from being damaged when the product is used, as disclosed in JP-A-5-155027, There is a method of forming a discharge hole protection member near the opening of the diluent discharge hole by electric discharge machining, photo etching, punching, laser processing, or the like.

However, according to these methods, it is difficult to keep the surface state of the surface on which the ejection hole protection member is formed flat, and it is difficult to prevent scratches and the like from occurring at the manufacturing stage, and at the same time, it is necessary to use a nozzle. In the case of forming using an excimer laser, application is difficult because an organic material is used for the ejection hole forming member.

Further, as a method for preventing the opening of the ink discharge hole and the diluting liquid discharge hole from being damaged when the product is used, as disclosed in JP-A-4-234665, There is a method in which a metal plate having an opening having a diameter larger than these opening diameters is attached to the vicinity of the opening of the diluting liquid discharge hole, and then the metal plate is subjected to a liquid repellent treatment.

However, in this method, since the liquid repellent treatment is performed on the surface having the step, it is difficult to uniformly perform the liquid repellent treatment near the openings of the ink discharge holes and the diluent discharge holes.

When a method of bonding a metal plate using an adhesive after performing the liquid repellent treatment is used, the liquid repellent treatment is performed in the vicinity of the openings of the ink discharge holes and the diluent discharge holes. It is applied uniformly, but the adhesive used for bonding the metal plate protrudes from the bonding area of the metal plate and overflows around the openings of the ink discharge holes and the diluent discharge holes. Therefore, there is a high risk that the hole accuracy may be deteriorated. Therefore, when such a method is used, the manufacturing conditions must be strict, and it is difficult to increase the manufacturing yield.

Accordingly, the present invention provides a liquid repellent material which is uniformly formed around a nozzle opening even when a material other than a metal material, particularly an organic material having excellent laser workability is used as a discharge hole forming member. In addition, by forming a discharge hole protection member around the openings of the ink discharge holes and the diluting liquid discharge holes, the ink discharge holes and the dilution liquid can be formed during the manufacturing process and in the use state of the product after the manufacturing. Easily prevent the occurrence of scratches and the like at the opening of the liquid discharge hole,
Further, it is another object of the present invention to provide a printer device and a method of manufacturing the same, which can easily prevent the liquid-repellent treatment film formed near the openings of the ink discharge holes and the diluting liquid discharge holes from being peeled off.

[0025]

SUMMARY OF THE INVENTION A printer device according to the present invention has been proposed to achieve the above-mentioned object, and has a diaphragm joined to one principal surface of a pressure chamber forming member and the other being joined to the other. An ink ejection hole forming member made of an organic material is joined to the main surface of the ink jet head, and an ink ejection hole communicating with the ink pressure chamber of the pressure chamber forming member is formed in the ink ejection hole forming member. In a printer device in which ink in a pressure chamber is ejected from an ink ejection hole, a liquid-repellent treatment film having an adhesive property is formed at least in the vicinity of the opening of the ink ejection hole. An ink ejection hole protection member having an opening whose diameter is larger than that of the hole is joined.

The printer constructed as above is
Since the liquid-repellent film prevents the ink from adhering in the vicinity of the opening of the ink discharge hole, the ink discharge direction can be stabilized. Further, in this printer device, since the ink ejection hole protection member protects the vicinity of the opening of the ink ejection hole, the occurrence of scratches and the like near the opening of the ink ejection hole is suppressed.

Further, since the liquid repellent treatment film having an adhesive property acts as an adhesive for bonding the ink ejection hole forming member and the ink ejection hole protection member, it is not necessary to newly use an adhesive. The deterioration of the hole accuracy of the ink ejection hole due to the protrusion and the deterioration of the liquid repellency near the opening of the ink ejection hole are prevented.

Further, since the ink ejection hole protection member is joined via the liquid repellency treatment film, the liquid repellency treatment film is covered by the ink ejection hole protection member, and the peeling failure of the liquid repellency treatment film occurs. Etc. are prevented.

Further, in the printer according to the present invention, the diaphragm is joined to one main surface of the pressure chamber forming member, and the discharge hole forming member made of an organic material is joined to the other main surface. An ink ejection hole communicating with the ink pressure chamber of the pressure chamber forming member is formed in the forming member, and a diluting liquid ejection hole communicating with the diluting liquid pressure chamber of the pressure chamber forming member is formed. In a printer device in which the ink in the pressure chamber is discharged from the ink discharge hole and the diluent in the diluent pressure chamber is discharged from the diluent discharge hole, at least the opening of the ink discharge hole and the vicinity of the diluent discharge hole are provided. A discharge hole protection member having an adhesive formed with a liquid-repellent treatment film, and using the liquid-repellent treatment film as an adhesive, the opening having a larger diameter than the ink discharge hole and the diluent discharge hole; It is characterized by being joined.

The printer constructed as above is
Since the liquid-repellent film prevents adhesion of the ink and the diluting liquid in a region sandwiched between the ink discharging holes and the diluting liquid discharging holes,
Separation of the ink and the diluent in the standby state is reliably performed.

Further, in this printer device, since the discharge hole protection member protects the vicinity of the opening of the ink discharge hole and the diluting liquid discharge hole, scratches and the like are generated near the opening of the ink discharge hole and the diluting liquid discharge hole. Is suppressed.

Further, since the liquid-repellent treatment film having an adhesive property acts as an adhesive for bonding the ejection hole forming member and the ejection hole protection member, it is not necessary to use a new adhesive.
The deterioration of the hole accuracy of the ink ejection holes and the diluting liquid ejection holes due to the protrusion of the adhesive and the deterioration of the liquid repellency near the openings of the ink ejection holes and the diluting liquid ejection holes are prevented.

Further, since the discharge hole protective member is joined via the liquid repellent film, the liquid repellent film is covered by the discharge hole protective member, and the peeling failure of the liquid repellent film can be prevented. Is prevented.

In the method of manufacturing a printer according to the present invention, the diaphragm is joined to one main surface of the pressure chamber forming member, and the ink discharge hole forming member made of an organic material is joined to the other main surface. In the printer device, an ink discharge hole communicating with the ink pressure chamber of the pressure chamber forming member is formed in the ink discharge hole forming member so that ink in the ink pressure chamber is discharged from the ink discharge hole by displacement of the vibration plate. In the manufacturing method, a liquid-repellent treatment film forming step of forming a liquid-repellent treatment film having adhesiveness at least in the vicinity of the opening of the ink ejection hole, and using the liquid-repellent treatment film as an adhesive, in the vicinity of the opening of the ink ejection hole An ink discharge hole protection member bonding step of bonding an ink discharge hole protection member having an opening having a diameter larger than that of the ink discharge hole.

According to this method of manufacturing a printer, since the ink discharge hole protecting member is formed without using a method such as plating or electric discharge machining, the ink discharge hole forming member has excellent laser workability. Even if an organic material is used, the ink ejection hole protection member can be easily formed.

In addition, since the ink ejection hole protection member is adhered to the ink ejection hole forming member using the liquid repellent treatment film having adhesiveness as an adhesive, the hole accuracy of the ink ejection holes is deteriorated due to the protrusion of the adhesive. In addition, deterioration of the liquid repellency in the vicinity of the opening of the ink ejection hole is prevented.

Further, by using the liquid repellent treatment film as an adhesive for bonding the ink ejection hole protection member to the ink ejection hole forming member, the liquid repellency treatment film is covered by the ink ejection hole protection member. Defects such as peeling of the processing film are prevented.

In the method of manufacturing a printer according to the present invention, the diaphragm is joined to one main surface of the pressure chamber forming member, and the discharge hole forming member made of an organic material is joined to the other main surface. An ink discharge hole communicating with the ink pressure chamber of the pressure chamber forming member is formed in the discharge hole forming member, and a diluent discharge hole communicating with the diluent pressure chamber of the pressure chamber forming member is formed. In a method of manufacturing a printer device, in which ink in a pressure chamber is discharged from an ink discharge hole and diluent in a diluent pressure chamber is discharged from a diluent discharge hole, at least an opening of the ink discharge hole and the diluent pressure chamber A liquid-repellent treatment film forming step of forming an adhesive liquid-repellent treatment film in the vicinity of the liquid-repellent treatment film; Diameter than the discharge hole and the diluent ejection hole is characterized by having a discharge hole protecting member bonding step of bonding the discharge hole protecting member having an opening which is large.

According to this method of manufacturing a printer device, the discharge hole protecting member is formed without using a method such as plating or electric discharge machining. Even if a material is used, the discharge hole protection member can be easily formed.

Further, since the discharge hole protecting member is bonded to the discharge hole forming member by using the liquid repellent treatment film having adhesiveness as an adhesive, the holes of the ink discharge holes and the diluting liquid discharge holes due to the protrusion of the adhesive. It is possible to prevent deterioration of accuracy and liquid repellency near the openings of the ink discharge holes and the diluent discharge holes.

Further, by using the liquid-repellent treatment film as an adhesive for bonding the discharge-hole protective member to the discharge-hole forming member, the liquid-repellent treatment film is covered by the discharge-hole protective member. Peeling failure and the like are prevented.

[0042]

Embodiments of the present invention will be described below in detail with reference to the drawings.

(First Embodiment) In the present embodiment, an example in which the present invention is applied to a serial type ink jet printer will be described.

As shown in FIG. 1, a serial type ink jet printer 1 (hereinafter abbreviated as “printer 1”) is provided at a predetermined position on the outer periphery of a cylindrical drum 2 in parallel with the drum 2. The paper pressure controller 3 is provided in such a manner. In the printer device 1, the printing paper 4 as a printing material is sandwiched between the drum 2 and the paper pressing controller 3, and the printing paper 4 is pressed and fixed to the drum 2.

In the printer 1, a feed screw 5 is provided at a position slightly apart from the outer periphery of the drum 2 so as to be parallel to the drum 2.
An ink jet print head 7 is attached via a support member 6 screwed to the feed screw 5. When the feed screw 5 rotates, the inkjet print head 7 moves in the axial direction of the drum 2 shown by an arrow A in FIG. 1 together with the support member 6 screwed to the feed screw 5.

The drum 2 is linked to a motor 11 via a first pulley 8, a belt 9, and a second pulley 10, and the direction indicated by an arrow B in FIG. To rotate.

The printer 1 is controlled by a control unit 20, as shown in FIG. The control unit 20 includes a signal processing control circuit 21, a driver 22, a memory 23, a drive control unit 24, and a correction circuit 25. The signal processing control circuit 21 has a CPU (Central Pr
ocessing Unit) or DSP (Digital Signal Proccess)
When print data, an operation unit signal, and an external control signal are received as input signals S1 from the outside, the print data is aligned in the print order, and the print data aligned in the print order is transmitted to the driver 22 together with the ejection signal. The print head 7 is sent to the inkjet print head 7 via the control unit, and the drive of the inkjet print head 7 is controlled.

In this case, the printing order differs depending on the configuration of the ink jet print head 7 and the printing unit, and also has a relationship with the input order of the printing data. Therefore, if necessary, a line buffer memory or a one-screen memory configuration is used. Is temporarily recorded in the memory 23 and read out from the memory 23 as appropriate.

The signal processing control circuit 21 processes the input signal S1 by software, and sends the processed signal to the drive control unit 24 as a control signal.

The drive control unit 24 includes a signal processing control circuit 21
When receiving the control signal sent from the printer, the controller controls the driving and synchronization of the motor for rotating the motor 11 and the feed screw 5, and also controls the cleaning of the ink jet print head 7, the supply and discharge of the printing paper 4, and the like. It has been done.

When the printer device 1 has a multi-head configuration, the signal processing control circuit 21 performs γ correction, color correction in the case of color printing, and variation correction of each ink jet print head 7 by the correction circuit 25. The correction circuit 25 stores predetermined correction data in a ROM (read o
The data is stored in a map format, and the signal processing control circuit 21 reads the data in accordance with external conditions, for example, ink ejection hole numbers, temperatures, input signals, and the like.

When the printer device 1 has a multi-head configuration and has a very large number of ink ejection holes, an IC (integrated circuit) is mounted on the ink jet print head 7 to reduce the number of wires connected to the ink jet print head 7. I try to reduce it.

The printer 1 configured as described above
The drive control unit 24 receives the control signal sent from the signal processing control circuit 21 to drive the motor,
The feed screw 5 rotates. When the feed screw 5 rotates, the printer 1 moves the inkjet print head 7 along with the support member 6 in the axial direction of the drum 2 while discharging ink, and moves the print paper 4 pressed against the drum 2 against the print paper 4. To print. Here, the printing direction in which the inkjet print head 7 moves in the axial direction of the drum 2 to print on the printing paper 4 may be the same direction or the reciprocating direction.

When the ink jet print head 7 moves in the axial direction of the drum 2 and prints one line on the print paper 4, the motor 11 is controlled by the drive control unit 24. The rotation causes the drum 2 to rotate by one line in the direction indicated by the arrow B in FIG. 1 to perform the next printing.

Next, the ink jet print head 7 will be described.

The ink jet print head 7 is shown in FIG.
As shown in FIG. 7, a vibration plate 32 is adhered to one main surface 31a of a plate-shaped ink pressure chamber forming member 31, and the other main surface 31b of the ink pressure chamber forming member 31 is formed.
, A plate-shaped orifice plate 33 is bonded. In the inkjet print head 7, a laminated piezo 35 is joined to one main surface 32a of the vibration plate 32 via a projection 34.

The ink pressure chamber forming member 31 is formed of a metal plate such as stainless steel having a thickness of about 0.1 mm. The ink pressure chamber forming member 31 includes:
Ink pressure chamber 3 for applying a predetermined pressure to the ink to be filled
1c, an ink passage 31d communicating with one end of the ink pressure chamber 31c, and serving as a passage for supplying ink to the ink pressure chamber 31c; and an ink pressure chamber formed at the other end of the ink pressure chamber 31c. An ink introduction hole 31e serving as a through hole for guiding the ink filled in the ink 31c to the ink ejection hole 33a.
And an ink buffer tank 31f for distributing ink to the ink flow path 31d, and a connection hole 31g for guiding ink supplied from the ink supply pipe 36 into the ink buffer tank 31f.

The ink pressure chamber 31c is formed from the vicinity of the center in the thickness direction of the ink pressure chamber forming member 31 to the one main surface 31a side of the ink pressure chamber forming member 31. The ink introduction hole 31e is formed on the other end side of the ink pressure chamber 31c, and is formed from near the center in the thickness direction of the ink pressure chamber forming member 31 to the other main surface 31b side of the ink pressure chamber forming member 31. .

The ink passage 31d is provided with an ink introduction hole 31e.
Similarly, the ink pressure chamber forming member 31 is formed from the vicinity of the center in the thickness direction to the other main surface 31b side of the ink pressure chamber forming member 31. The ink flow path 31d is separated from the ink introduction hole 31e by a first member 31h described later. The ink flow path 31d is formed such that a part on the first member 31h side communicates with one end side of the ink pressure chamber 31c.

Similarly to the ink introduction hole 31e and the ink flow path 31d, the ink buffer tank 31f extends from near the center in the thickness direction of the ink pressure chamber forming member 31 to the other main surface 31b side of the ink pressure chamber forming member 31. Is formed. Here, the ink buffer tank 31f
As shown in FIG. 4, is a single linear pipe communicating with the plurality of ink flow paths 31d, and has a function of supplying ink to each ink flow path 31d.

The connection hole 31g is provided in the ink buffer tank 3
1f, from the vicinity of the center in the thickness direction of the ink pressure chamber forming member 31 so as to communicate with the ink pressure chamber forming member 31.
1 is formed to the one main surface 31a side.

Here, the ink pressure chamber forming member 31 includes:
Forming a bottom surface of the ink pressure chamber 31c and a part of the other main surface 31b of the ink pressure chamber forming member 31,
Further, one side of the ink introduction hole 31e and the ink flow path 3
1d, the ink introduction holes 31 are in contact with one side surface, respectively.
e, a first member 31h separating the ink flow path 31d from the first member 31e.
The upper surface of the ink flow path 31d and a part of the one main surface 31a of the ink pressure chamber forming member 31 are formed, and are in contact with one side surface of the ink pressure chamber 31c and one side surface of the connection hole 31g. A second member 31i that separates the ink pressure chamber 31c from the connection hole 31g; and a second member 31i that contacts the other side of the ink pressure chamber 31c and the other side of the ink introduction hole 31e, respectively.
A third member 31j forming a part of one main surface 31a and a part of the other main surface 31b;
A fourth member 31k is formed which is in contact with one side surface of the ink pressure chamber forming member 31 and a part of the other main surface 31b of the ink pressure chamber forming member 31, respectively. . And these first to fourth
The spaces partitioned by the members 31h, 31i, 31j, and 31k are ink pressure chambers 31c, ink introduction holes 31e, ink flow paths 31d, and ink buffer tanks 31, respectively.
f and a connection hole 31g.

The other main surface 31b of the ink pressure chamber forming member 31 has an ink introduction hole 31e and an ink passage 31.
An orifice plate 33, which is an ink ejection hole forming member, is bonded by thermocompression so as to cover d and the ink buffer tank 31f. This orifice plate 3
As No. 3, neoprex (manufactured by Mitsui Toatsu Chemicals, Inc.) which is excellent in heat resistance and chemical resistance is used, and one having a thickness of about 50 μm and a glass transition point of 250 ° C. or less is used.

A liquid-repellent film 42 is formed on at least the portion of the orifice plate 33 where an ink discharge hole 33a described later is opened. As the material of the lyophobic treatment film 42, a material having excellent chemical resistance and laser workability and having effective lyophobicity and adhesion is used. Specifically, a polyimide adhesive film, trade name: UPA -N221 (manufactured by Ube Industries, Ltd.) is used, and has a thickness of about 5 μm and is formed at least around the portion of the orifice plate 33 where the ink discharge holes 33a are opened.

The material of the liquid-repellent treatment film 42 is made of a polyimide material having water repellency, and more preferably, polyimide siloxane. Furthermore, in the polyimide siloxane, a part of the aromatic hydrocarbon bonded to the nitrogen of the imide bond is replaced by the siloxane, and the content of Si to the polyimide is 3% by weight to 25% by weight. Preferably, there is.

The material of the lyophobic film 42 is 23
Water absorption after immersion in water for 24 hours at
% Is desirable. That is, in order to discharge the ink stably, it is preferable that the surface tension of the liquid repellent treatment film 42 is as small as possible. As a result of various studies on the surface tension of the liquid repellent film 42, it was found that the smaller the water absorption, the lower the surface tension.

As a result of investigating the relationship between the water absorption and the surface tension measured by the water immersion method at 23 ° C. for 24 hours,
If the water absorption is 0.4% or less, the surface tension is 31 dy.
ne / cm or less, which proved to be suitable as the liquid-repellent treatment film 42 of the inkjet print head 7.

Further, even if the surface tension is 31 dyne / cm or less, a material having a water absorption exceeding 0.4% as measured by a water immersion method at 23 ° C. for 24 hours can obtain a good liquid repellency. Thus, it was found that the material was not suitable as a material for the liquid repellent treatment film 42 of the inkjet print head 7.

As described above, the lyophobic treatment film 42 is
Water absorption after immersion in water for 24 hours at
% Of a water-repellent polyimide material.

As these polyimide-based materials, besides UPA-N221 described above, a polyimide adhesive film, trade name: UPA-N111 (manufactured by Ube Industries, Ltd.) or trade name: UPA-T222 (Ube-T222) Kosan Co., Ltd.) and UPA-T208 (trade name).

By using these liquid-repellent organic material films as the material of the liquid-repellent film 42, the surface tension of the liquid-repellent treatment can be reduced to 31 Dyne / cm or less.

The orifice plate 33 and the lyophobic film 42 have a circular cross section for discharging ink supplied from the ink liquid chamber 31c through the ink introduction hole 31e, for example, in a circular shape. And an ink ejection hole 33a having a predetermined diameter is formed.

After the lyophobic treatment film 42 is formed on the orifice plate 33, the ink discharge holes 33 a are irradiated with laser light from the orifice plate 33 side.
The orifice plate 33 on which the lyophobic film 42 is formed is formed.

The orifice plate 33 and the liquid repellent film 4
The ink ejection holes 33a formed in the nozzle 2 are laser-processed after forming the liquid-repellent treatment film 42 on the orifice plate 33, and thus have a continuous shape without boundaries.

As described above, the material of the orifice plate 33 and the liquid-repellent treatment film 42 is excellent in laser workability, especially when excimer laser light is used as the wavelength of laser light. Since such a material is used, processing can be performed efficiently.

Then, on the main surface of the orifice plate 33 on which the lyophobic film 42 is formed, an opening 43a having a diameter larger than that of the above-described ink discharge hole 33a.
The ink ejection hole protection member 43 having the
Is glued as an adhesive. The thickness of the ink ejection hole protection member is about 15 μm.

The material of the ink ejection hole protection member 43 does not need to be excellent in laser workability, so that there is some method of forming the opening 43a and any material having chemical resistance can be used. Any of them may be used. For example, a metal material formed into a shape having an opening 43a by electroforming using a nickel material, or an organic material formed from a polyimide material and having an opening 43a formed by a method such as a punching method is used. .

It is preferable that a liquid-repellent material is formed on the main surface of the ink discharge hole protection member 43. Here, as described above, when a metal material made of nickel is used as the material of the ink ejection hole protection member 43, the method of forming the liquid repellent material includes fluorine-containing nickel plating or fluorine eutectoid plating. There is a way. When an organic material made of polyimide is used as the material of the ink ejection hole protection member 43, a Teflon material such as ethylene tetrafluoride / polypropylene hexafluoride is applied as a method of forming the liquid repellent material. There is a method of firing.

Here, the liquid repellent material formed on the main surface of the ink discharge hole protection member 43 does not have to be the same as the method of forming the ink discharge holes 33a because of the method of forming the openings 43a. It is not necessary to have excellent characteristics.

Here, the ink introduction hole 31e is formed to be larger than the diameter of the ink ejection hole 33a.

Further, as shown in FIG. 4, it is desirable that the diameter A1 of the opening 43a of the ink discharge hole protection member 43 is a value close to the diameter D1 of the ink introduction hole 31e. In particular, the opening 43 of the ink ejection hole protection member 43
It is desirable that the diameter A1 of a is substantially the same as the width C1 of the ink pressure chamber 31c. In this manner, the diameter of the opening 43a of the ink ejection hole protection member 43 is
By making the diameter substantially the same as the width dimension of 1c, the pressure applied when the ink ejection hole protection member 43 is joined to the orifice plate 33 on which the liquid repellent treatment film 42 is formed can be made uniform.

On the other hand, on one main surface 31a side of the ink pressure chamber forming member 31, a diaphragm 32 made of a polyimide material is coated with an adhesive such as an epoxy adhesive so as to cover the ink pressure chamber 31c. Is glued through.

The vibration plate 32 has a through hole 32b at a position corresponding to the connection hole 31g of the ink pressure chamber forming member 31. An ink supply pipe 36 connected to an ink tank (not shown) is attached to the through hole 32b. Therefore, the ink introduced from the ink tank is supplied to the ink supply pipe 36 and the ink buffer tank 31f.
Is supplied to the ink flow path 31d through the
The ink pressure chamber 31c is filled through d.

As the diaphragm 32, similarly to the orifice plate 33, Neoflex (manufactured by Mitsui Toatsu Chemical Co., Ltd.) having excellent heat resistance and chemical resistance is used. Those having a point of 250 ° C. or less are used.

A plate-shaped projection 34 is formed at a position corresponding to the ink pressure chamber 31c on one main surface 32a of the vibration plate 32. A laminated piezo 35 is adhered to the main surface 34a of the projection 34 via an adhesive (not shown). The size of the main surface 34a of the protrusion 34 is set to be smaller than the main surface 35a bonded to the protrusion 34 of the laminated piezo 35 and the opening area of the ink pressure chamber 31c.

The laminated piezo 35 is formed by alternately laminating piezoelectric members and conductive members. Here, the number of stacked piezoelectric members and conductive members is not limited, and may be any number of layers.

As shown in FIG. 5A, when a driving voltage is applied to this laminated piezo 35, an arrow A in FIG.
The diaphragm 32 is displaced linearly in the direction shown by
The volume of the ink pressure chamber 31c is increased by lifting the portion to which the adhesive layer 4 is bonded as a center.

When the driving voltage is released as shown in FIG. 5B, the laminated piezo 35 moves to the direction indicated by the arrow B in FIG. 5B.
By virtue of being displaced linearly in the direction shown by the arrow and pressing the projections 34, the diaphragm 32 is curved and the ink pressure chamber 31 is bent.
c, thereby reducing the ink pressure chamber 31c.
It is designed to increase the internal pressure. in this case,
The size of the projection 34 is one of the main surfaces 35 of the laminated piezo 35.
Since it is formed smaller than a, the displacement of the laminated piezo 35 can be intensively transmitted to a position of the diaphragm 32 corresponding to the ink pressure chamber 31c.

Here, the ink jet print head 7
Will be described.

When a predetermined driving voltage is applied to the laminated piezo 35, the laminated piezo 35 is displaced in a direction indicated by an arrow A in FIG. With the displacement of the laminated piezo 35, the portion of the vibration plate 32 corresponding to the ink pressure chamber 31c is lifted in the direction indicated by the arrow A in FIG. 5A, so that the volume of the ink pressure chamber 31c increases. At this time,
The meniscus at the tip of the ink discharge hole 33a once retreats toward the ink pressure chamber 31c, but once the displacement of the laminated piezo 35 is reduced, it becomes stable near the tip of the ink discharge hole 33a due to equilibrium with the surface tension and waits for ink discharge. State.

At the time of ink ejection, the laminated piezo 35
Is released, and as a result, the laminated piezo 35 is displaced in the direction indicated by the arrow B in FIG. 5B. With the displacement of the laminated piezo 35, the diaphragm 32
It is displaced in the direction indicated by arrow B in FIG. Due to the displacement of the vibration plate 32, the volume of the ink pressure chamber 31c decreases and the pressure in the ink pressure chamber 31c increases, and as a result, ink is ejected from the ink ejection holes 33a. Here, the change over time of the driving voltage applied to the laminated piezo 35 is set so that a desired amount of ink can be ejected from the ink ejection hole 33a.

The printer 1 configured as described above
Is a liquid repellent treatment film 42 of the inkjet print head 7
Prevents the ink from adhering in the vicinity of the opening of the ink ejection hole 33a, so that the ink ejection direction can be stabilized.

Further, in this printer 1, since the ink ejection hole protection member 43 of the ink jet print head 7 protects the vicinity of the opening of the ink ejection hole 33a, the occurrence of a flaw or the like near the opening of the ink ejection hole 33a occurs. As a result, the stability of the ink ejection state can be ensured.

Further, the printer 1 has a liquid repellent treatment film 42 having an adhesive property of the ink jet print head 7.
Is the orifice plate 33 and the ink ejection hole protection member 43
Since it acts as an adhesive for adhering the ink ejection hole 33, it is not necessary to use a new adhesive, and the accuracy of the ink ejection holes 33a is deteriorated due to the protrusion of the adhesive, and the ink ejection holes 33
The deterioration of the liquid repellency in the vicinity of the opening a is prevented.

Further, in the printer 1, the ink jet print head 7 joins the ink ejection hole protection member 43 via the liquid repellent treatment film 42.
The lyophobic treatment film 42 is covered by the ink ejection hole protection member 43, and the peeling failure of the lyophobic treatment film 42 is prevented.

Next, a method of manufacturing the ink jet print head 7 applied to the printer 1 will be described with reference to FIGS.
This will be described with reference to FIGS. First, FIG.
As shown in FIG. 3, after applying a resist such as a photosensitive dry film or a liquid resist material to one main surface 38a of a metal member 38 such as stainless steel having a thickness of about 0.1 mm, the ink pressure chamber 31c and The pattern exposure is performed using a mask having a pattern corresponding to the connection hole 31g, and a resist such as a photosensitive dry film or a liquid resist material is applied to the other main surface 38b of the metal member 38. Pattern exposure is performed using a mask having a pattern corresponding to 31e, the ink flow path 31d, and the ink buffer tank 31f.

Next, as shown in FIG. 6B, a resist 39 having a pattern corresponding to the ink pressure chamber 31c and the connection hole 31g, an ink introduction hole 31e, and an ink flow path 31 are formed.
d and a resist 40 having a pattern corresponding to the ink buffer tank 31f as a mask,
Is immersed in an etching solution composed of, for example, an aqueous ferric chloride solution for a predetermined period of time to perform etching.
8, an ink pressure chamber 31c and a connection hole 31g are formed on one main surface 38a, and the other main surface 3a of the metal member 38 is formed.
8b, an ink introduction hole 31e, an ink flow path 31d, and an ink buffer tank 31f are formed. Thereby, the above-described ink pressure chamber forming member 31 is obtained.

In this case, one main surface 38 of the metal member 38
The amount of etching from a and the other main surface 38b is both set to be about half the thickness of the metal member 38. In the present embodiment, since the thickness of the metal member 38 is set to 0.1 mm, the amount of etching from one side of the metal member 38 is set to be about 0.055 mm. By setting the etching amount in this way, the dimensional accuracy of the ink pressure chamber 31c, the connection hole 31g, the ink introduction hole 31e, the ink flow path 31d, and the ink buffer tank 31f can be improved, and these can be stably formed. Can be formed.

Since the amount of etching from one main surface 38a of the metal member 38 is the same as the amount of etching from the other main surface 38b, the one main surface 38a of the metal member 38 has the ink pressure chamber 31c and the connection hole. The etching conditions for forming 31g and the etching conditions for forming the ink introduction hole 31e, the ink flow path 31d, and the ink buffer tank 31f in the other main surface 38b of the metal member 38 are set to be substantially the same. This etching step can be performed easily and in a short time.

Here, the width of the ink introduction hole 31e is
When the pressure is applied to the ink pressure chamber 31c, it is formed to be larger than the diameter of the ink ejection hole 33a so as not to affect the pressure rise in the ink pressure chamber 31c.

Next, as shown in FIG. 6C, the resists 39 and 40 are removed. In this case, the resists 39, 4
When a dry film resist is used as 0, a 5% or less aqueous solution of sodium hydroxide is used as a remover, and when a liquid resist material is used as the resists 39 and 40, a remover such as a special alkali is used. Use solution. After the resists 39 and 40 are removed, a resin material 41 such as Neoflex (manufactured by Mitsui Toatsu Chemicals, Inc.) having a thickness of about 50 μm and a glass transition point of 250 ° C. or less is applied to the ink pressure chamber forming member 31. Is bonded to the other main surface 31b by thermocompression bonding. This thermocompression bonding is 23
20-30 kgf / cm at a press temperature of about 0 ° C
^{This is} performed by applying about ² pressures. By setting the conditions of the thermocompression bonding as described above, the adhesive strength between the ink pressure chamber forming member 31 and the resin material 41 can be increased, and the two can be efficiently bonded.

In this case, since the ink ejection holes 33a are not formed in the resin material 41, in the step of bonding the resin material 41 to the ink pressure chamber forming member 31,
The bonding process can be performed easily because high-precision alignment accuracy is not required. Further, since the resin material 41 is bonded to the ink pressure chamber forming member 31 without using an adhesive, it is possible to avoid a problem that the adhesive blocks the ink flow path 31d.

Next, as shown in FIG. 6D, a lyophobic treatment film 42 having lyophobicity and adhesiveness is formed on the surface of the resin material 41 facing the ink pressure chamber forming member 31. The liquid-repellent film 42 repels ink, does not cause ink to remain around the opening of the ink ejection hole 33a, and generates burrs and peeling when the ink ejection hole 33a is formed by excimer laser. For example, a polyimide adhesive film, trade name: UPA-N221 (manufactured by Ube Industries, Ltd.) or the like is used. Then, a polyimide adhesive film in a solution state is applied on the main surface of the resin material 41 by a spin coating method, or a polyimide adhesive film in a semi-cured state is bonded on the main surface of the resin material 41 by a lamination method. To form a liquid repellent film 42.

The lyophobic film 42 is formed by applying a polyimide adhesive film in a solution state on the main surface of the resin material 41 by spin coating, or by laminating a semi-cured polyimide adhesive film by a laminating method. After adhering to the main surface of No. 41, the surface tension can be reduced to 31 Dyne / cm or less by performing a thermosetting treatment at a temperature of about 180 ° C. for about 10 minutes.

Further, as the material of the liquid repellent treatment film 42, the above-mentioned polyimide adhesive film, trade name: UPA-N2
21 (manufactured by Ube Industries), polyimide adhesive film, trade name: UPA-N111 (manufactured by Ube Industries), polyimide adhesive film, trade name: UPA-T
222 (Ube Industries, Ltd.), polyimide adhesive film, trade name: UPA-T208 (Ube Industries, Ltd.)
Etc. may be used.

As the material of the liquid repellent film 42, trade name: U
When PA-N111 is used, the resin material 41
After applying or adhering on the main surface of the substrate, a thermosetting treatment is performed at a temperature of about 200 ° C. for about 15 minutes, whereby the surface tension can be reduced to 31 Dyne / cm or less.

As the material of the liquid repellent film 42, trade name: UPA-T222 or trade name: UPA-T208
In the case where is used, since the adhesiveness is lost if a complete thermosetting treatment is performed, heat treatment is performed at a temperature of about 100 ° C. for about 1 hour, and only the liquid repellent treatment film 42 is dried.

Next, as shown in FIG. 6 (E), the liquid repellent film 42 is used as an adhesive to apply
The ink ejection hole protection member 43 having a thickness of m is bonded. The ink ejection hole protection member 43 has an opening 43 having a diameter larger than the opening diameter of the ink ejection hole 33a in advance.
a is formed in advance.

The ink discharge hole protection member 43 does not need to use a material having excellent laser workability.
Any method may be used as long as there is a method for forming the material and the material has chemical resistance. For example,
Using a nickel material, a metal material formed into a shape having an opening 43a by electroforming, or a polyimide material, using a method such as a punching method.
an organic material on which a is formed;

Here, when the above-mentioned polyimide adhesive film, trade name: UPA-N221, is used as the liquid repellent film 42, at a temperature of 180.degree.
By applying a pressure of about ² cm ^{2 for} about 1 to 5 minutes, adhesion between the ink discharge hole protection member 43 and the resin material 41 can be performed with good adhesion.

When the above-mentioned polyimide adhesive film, trade name: UPA-N111, is used as the liquid-repellent film 42, the liquid repellency treatment film 42 has a pressure of 20 kg / c at 230 ° C.
By applying a pressure of about m ^{2 for} about 1 to 5 minutes, adhesion between the ink ejection hole protection member 43 and the resin material 41 can be performed.

Further, as the lyophobic treatment film 42, the above-mentioned polyimide adhesive film, trade name: UPA-T22
2 or trade name: When UPA-T208 is used,
By applying a pressure of about 10 kg / cm ^{2 at} a temperature of 160 ° C. for about 2 hours, it is possible to perform adhesion between the ink discharge hole protecting member 43 and the resin material 41 with adhesion, and to perform the liquid repellent treatment film 42. Surface tension of 31 Dy
ne / cm or less.

Although not shown, it is desirable to form a liquid repellent material on the main surface of the ink discharge hole protection member 43. Here, as described above, when a metal material made of nickel is used as the material of the ink ejection hole protection member 43, the method of forming the liquid repellent material includes fluorine-containing nickel plating or fluorine eutectoid plating. There is a way. Also, the ink ejection hole protection member 43
In the case where an organic material made of polyimide is used as the material, there is a method of forming a liquid-repellent material by applying a Teflon material such as an ethylene tetrafluoride / polypropylene hexafluoride copolymer and baking it.

Here, the liquid repellent material formed on the surface 43b of the ink discharge hole protection member 43 does not need to be the same as the method of forming the ink discharge holes 33a because the method of forming the openings 43a is excimer laser processing. It is not necessary to have excellent characteristics.

Next, as shown in FIG. 6 (F), the resin material 41 is moved from one main surface 31a of the ink pressure chamber forming member 31 through the ink pressure chamber 31c and the ink introduction hole 31e.
Is irradiated vertically with an excimer laser to the resin material 4
The ink ejection holes 33a are formed in the first and second liquid repellent treatment films 42. Thereby, the above-mentioned orifice plate 33 is obtained. Here, since the resin material 41 is used as the material of the orifice plate 33, the ink ejection holes 33 are used.
a can be easily formed. In addition, the liquid repellent treatment film 4
Also in the case of No. 2, since a material excellent in excimer laser workability is selected, the formation of the ink ejection holes 33a becomes easy. Further, the ink introduction hole 31e is
Since the diameter is larger than the diameter of “a”, the accuracy of alignment between the resin material 41 and the ink pressure chamber forming member 31 during laser processing can be relaxed, and the laser can be controlled by the ink pressure chamber forming member 31 during laser processing. The risk of being shielded can be avoided.

Next, as shown in FIG. 7A, a diaphragm 3 made of Neoflex (manufactured by Mitsui Toatsu Chemicals Co., Ltd.) or the like having a thickness of about 20 μm and a glass transition point of 250 ° C. or less is used.
2 is bonded to one main surface 31a of the ink pressure chamber forming member 31 by thermocompression bonding with the protrusion 34 formed on one main surface thereof. This thermocompression bonding is 230 ° C
This is carried out by applying a pressure of about ²⁰ to 30 kgf / cm ^{2 at} a pressing temperature of about. By setting the conditions of the thermocompression bonding as described above, the ink pressure chamber forming member 31 is formed.
The adhesive strength between the vibration plate and the vibration plate 32 can be increased, and both can be efficiently bonded. The projections 34 are formed on a film such as Neoflex, which becomes the diaphragm 32, by forming a metal foil film material such as Cu and Ni so as to have a thickness of about 18 μm, and then forming a known printed board. It can be formed through the same steps as the process.

A metal foil film material such as Cu and Ni is formed on a film such as Neoflex to be the diaphragm 32. Specifically, as shown in FIG. With a glass transition point of 250
A material in which a Cu material having a film thickness of about 18 μm is formed on a film made of Neoflex having a temperature of not more than
Trade name: metal wrapping film (manufactured by Mitsui Toatsu Chemicals, Inc.) or the like can be used.

This metal wrapping film is
A first layer 32e made of neoprex having a glass transition point of 250 ° C. or lower and exhibiting adhesiveness in a temperature range of about 220 ° C. to 230 ° C., and a glass transition point of 300 ° C. or lower. A third layer 32c made of neoflex which exhibits adhesiveness in a temperature range of about 270 ° C. to 280 ° C., and a polyimide material having a glass transition point of 300 ° C. or more and no adhesiveness at a temperature of 300 ° C. or less. The laminated body 32α of the second layer 32d and the Cu material are bonded together. Therefore, since the metal wrapping film does not use an adhesive which softens at a low temperature, the protrusions 3
4 can be formed as a heat-resistant structure.

In the ink jet print head 7 of the printer 1 according to the present embodiment, the ink flow path 31d is
Since the ink pressure chamber forming member 31 is not formed so as to be open on one main surface 31a, it is used as an adhesive for the diaphragm 32.
It is not necessary to use the above-mentioned thermoplastic adhesive, and an adhesive that cures at a low temperature, for example, an epoxy-based adhesive, is used to form one main surface 31a of the ink pressure chamber forming member 31.
Alternatively, the vibration plate 32 may be bonded.

As described above, since the opening 43a having a diameter larger than the opening of the ink discharge hole 33a is formed in the ink discharge hole protection member 43,
In the bonding process of the vibration plate 32, the projection 34, and the laminated piezo 35, the ink ejection holes 33a and the orifice plate 33
It is possible to prevent pressure from being directly applied to the vicinity of the position where the ink ejection holes 33a are formed, to reduce the probability of occurrence of scratches and the like as much as possible, and to prevent the liquid-repellent material from peeling off.

The diameter of the opening 43a formed in the ink discharge hole protection member 43 is set to a value close to the diameter of the ink introduction hole 31e.
Since the width is substantially equal to the width of 1 c, pressure is uniformly applied to the portion where the opening 43 a of the ink discharge hole protection member 43 is not formed in the bonding process of the vibration plate 32 or the like.

Next, as shown in FIG. 7 (B), a laminated piezo 35
Then, the ink supply pipe 36 is aligned with the position where the through hole 32b is formed, and the one main surface 32 of the diaphragm 32 is
Adhere on a. Thus, the ink jet print head 7 can be obtained.

The above description is based on the ink ejection hole protection member 43.
After bonding, the resin material 41 is formed using an excimer laser.
In addition, an example has been described in which the ink ejection holes 33a are formed in the liquid repellent treatment film 42, and then the vibration plate 32 and the like are bonded. However, the present invention is not limited to this example, and as shown in FIG. After forming the ink ejection holes 33a in the resin material 41 and the liquid repellent treatment film 42, the ink ejection hole protection member 43, the vibration plate 32, and the like may be bonded.

That is, first, as shown in FIG. 9A, after forming the liquid repellent film 42 on the main surface of the resin material 41, the resin material 41 and the liquid repellent film 42 are irradiated with laser light. The orifice plate 33 is obtained by forming the ink ejection holes 33a.

Then, as shown in FIG. 9B, when the vibration plate 32 and the like are bonded, the ink ejection hole protection member 4
3 is bonded.

As described above, by simultaneously performing the step of bonding the vibration plate 32 and the step of bonding the ink ejection hole protection member 43, the number of steps can be reduced and the productivity can be improved.

Also in this case, since the opening portion 43a having a diameter larger than the opening diameter of the ink ejection hole 33a is formed in the ink ejection hole protection member 43, the diaphragm 32, the protrusion 34, In the bonding step of the laminated piezo 35, it is possible to avoid applying pressure directly to the ink ejection holes 33a and the vicinity of the positions where the ink ejection holes 33a are formed in the orifice plate 33, and to reduce the probability of occurrence of scratches and the like as much as possible. Poor peeling of the liquid material can be prevented.

The diameter of the opening 43a formed in the ink discharge hole protection member 43 is set to a value close to the diameter of the ink introduction hole 31e.
Since the width is substantially equal to the width of 1 c, pressure is uniformly applied to the portion where the opening 43 a of the ink discharge hole protection member 43 is not formed in the bonding process of the vibration plate 32 or the like.

According to the method of manufacturing a printer device according to the present invention as described above, the ink discharge hole protection member 43 is formed without using a method such as plating or electric discharge machining. Even if an organic material excellent in laser workability is used for 33, the ink discharge hole protection member 43 can be easily formed.

Further, since the ink ejection hole protection member 43 is adhered to the orifice plate 33 using the liquid repellent treatment film 42 having adhesiveness as an adhesive, the hole accuracy of the ink ejection holes 33a due to the protrusion of the adhesive. Is prevented from deteriorating.

Further, by using the liquid repellent treatment film 42 as an adhesive for bonding the ink ejection hole protection member 43 to the orifice plate 33, the ink repellency treatment film 42 is covered by the ink ejection hole protection member 43. The peeling failure or the like of the liquid repellent treatment film 42 is prevented.

(Second Embodiment) In this embodiment, an example in which the present invention is applied to a serial type "carrier jet" printer will be described.

A serial type “carrier jet” printer 50 (hereinafter abbreviated as “printer 50”).
As shown in FIG. 10, a paper pressure controller 52 is provided at a predetermined position on the outer periphery of a cylindrical drum 51 so as to be parallel to the drum 51. And
The printer device 50 includes a printing paper 53 as a printing material by a drum 51 and a paper pressure controller 52.
Between the drum 5 and the drum 5
1 is fixed by pressing.

Further, the printer device 50 includes the drum 5
A feed screw 54 is provided at a position slightly apart from the outer periphery of the feed screw 1 so as to be parallel to the drum 51. The feed screw 54 is connected to the feed screw 54 via a support member 55 screwed to the feed screw. A "Carrier Jet" printhead 56 is attached. The “carrier jet” print head 56 is adapted to move in the axial direction of the drum 51 indicated by an arrow A in FIG. 10 together with the support member 55 screwed to the feed screw 54 by the rotation of the feed screw 54. I have.

The drum 51 has a first pulley 57,
It is linked to a motor 60 via a belt 58 and a second pulley 59, and according to the rotation of the motor 60, FIG.
It rotates in the direction indicated by the middle arrow B.

[0136] The printer device 50 shown in FIG.
Are controlled by the control unit 61 as shown in FIG. In the control unit 61, the signal processing control circuit 21, the memory 23, the control driving unit 24, and the correction circuit 25
Signal processing control circuit 21, memory 23, control drive unit 2 in control unit 20 of printer device 1 according to the first embodiment.
4. Since the configuration is the same as that of the correction circuit 25, a detailed description of these components will be omitted.

The control unit 61 of the printer device 50 according to the present embodiment has a first driver 62 for discharging ink and a second driver 63 for discharging diluent. In practice, the first driver 62 and the second driver 63
Are provided in accordance with the numbers of the ink ejection holes and the diluting liquid ejection holes, respectively. The first driver 62 drives and controls a first piezo element (a fixed amount side) provided for discharging ink from the ink discharge holes, as will be described later. The second piezo element (discharge side) provided for discharging the diluting liquid from the discharge hole is driven and controlled.

As shown in FIG. 12, the first driver 62 and the second driver 63 are controlled by a serial / parallel conversion circuit 64 and a timing control circuit 65 provided in the signal processing control circuit 21, respectively. Accordingly, the corresponding first piezo element and second piezo element are driven and controlled.

That is, the serial / parallel conversion circuit 64
Sends the digital halftone data D1 to each of the first driver 62 and the second driver 63.

Upon receiving the print trigger signal T1, the timing control circuit 65 sends a timing signal to each of the first driver 62 and each of the second drivers 63 at a predetermined timing. This print trigger signal T1 is sent to the timing control circuit 65 when the print timing comes.

Each of the first and second drivers 62 and 63
Respectively applies a drive signal (drive voltage) corresponding to data from the serial / parallel conversion circuit 64 to the corresponding first piezo element and second piezo element at a timing corresponding to the timing signal from the timing control circuit 65, respectively. Send out. Here, the timing control circuit 65 includes a first piezo element and a second piezo element (in this case, the first piezo element and the second piezo element are respectively connected to a pair of ink ejection holes and dilution liquid ejection holes. The timing of the driving voltage applied to the
First, the timing shown in FIG.
And a timing signal is sent to the second drivers 62 and 63.

[0142] In this example, the discharge period is 1 msec (frequency 1 kH _z), quantitative mixing and discharge of the ink droplet is performed during this time. Also, a serial / parallel conversion circuit 6
When the digital halftone data D1 given from No. 4 is equal to or smaller than a predetermined threshold value, the ink amount and the ejection are not performed.

Next, the "carrier jet" print head 56 will be described.

"Carrier Jet" Print Head 56
As shown in FIG. 14, a vibration plate 72 is bonded to one main surface 71a of a plate-shaped ink pressure chamber forming member 71, and the other main surface 71 of the pressure chamber forming member 71
A plate-shaped orifice plate 73 is bonded to b. Then, "Carrier Jet" print head 5
Reference numeral 6 denotes a first laminated piezo 76 (corresponding to the first piezo element described above) and a second laminated piezo 77 (described above) on one main surface 72a of the diaphragm 72 via the projections 74 and 75. (Corresponding to a second piezo element).

The pressure chamber forming member 71 has a thickness of about 0.1 m.
It is formed of a metal plate such as stainless steel of about m.
The pressure chamber forming member 71 communicates with one end of the ink pressure chamber 71c for applying a predetermined pressure to the ink to be filled, and supplies ink to the ink pressure chamber 71c. Ink passage 71 serving as a passage
d and the ink formed in the other end of the ink pressure chamber 71c to fill the ink pressure chamber 71c with the ink ejection holes 73a.
An ink introduction hole 71e serving as a through hole for guiding ink to the ink passage 71d, an ink buffer tank 71f for supplying ink to the ink flow path 71d, and a first ink supply passage for guiding ink supplied from the ink supply pipe 78 into the ink buffer tank 71f. And connection holes 71g. The pressure chamber forming member 71 communicates with one end of the diluent pressure chamber 71h for applying a predetermined pressure to the diluent to be filled, and communicates the diluent with the diluent pressure chamber 71h. A diluent flow path 71i serving as a passage for supplying the diluent pressure chamber 71h, and a through hole formed on the other end side of the diluent pressure chamber 71h to guide the diluent filled in the diluent pressure chamber 71h to the diluent discharge hole 73b. And a diluent buffer tank 71k for distributing diluent to the diluent flow path 71i, and a diluent supplied from the diluent supply pipe 79 into the diluent buffer tank 71k. Second connection holes 71l are formed respectively.

[0146] The ink pressure chamber 71c is
1 from near the center in the thickness direction.
1 is formed to the one main surface 71a side. The ink introduction hole 71e is formed at the other end of the ink pressure chamber 71c, and is formed from near the center in the thickness direction of the pressure chamber forming member 71 to the other main surface 71b of the pressure chamber forming member 71.

The ink flow path 71d is provided with an ink introduction hole 71e.
Similarly, the pressure chamber forming member 71 is formed from the vicinity of the center in the thickness direction to the other main surface 71b of the pressure chamber forming member 71. Then, the ink flow path 71d
Is separated from the ink introduction hole 71e by the first member 71m. The ink flow path 71d is formed so that a part on the first member 71m side communicates with one end side of the ink pressure chamber 71c.

The ink buffer tank 71f is also formed from the vicinity of the center in the thickness direction of the pressure chamber forming member 71 to the other main surface 71b side of the pressure chamber forming member 71, similarly to the ink introduction hole 71e and the ink flow path 71d. ing. Here, as shown in FIG. 15, the ink buffer tank 71f is a single linear pipe communicating with the plurality of ink flow paths 71d, and has a function of supplying ink to each ink flow path 71d. I have.

The first connection hole 71g is formed from near the center in the thickness direction of the pressure chamber forming member 71 to one of the main surfaces 71a of the pressure chamber forming member 71 so as to communicate with the ink buffer tank 71f. I have.

Here, the pressure chamber forming member 71 constitutes a bottom surface of the ink pressure chamber 71c, a part of the other main surface 71b of the pressure chamber forming member 71, and one of the ink introduction holes 71e. A first member 71m that contacts the side surface of the ink passage 71d and one side surface of the ink flow passage 71d to separate the ink introduction hole 71e from the ink flow passage 71d; 71
And one side surface of the ink pressure chamber 71c and one side surface of the first connection hole 71g, respectively, so that the ink pressure chamber 71c and the first connection hole 71g are in contact with each other. Member 71n separating one side of the ink buffer tank 71f and the first connection hole 71g
And a third member 71o that forms part of one main surface 71a and the other main surface 71b of the pressure chamber forming member 71, respectively.
The first to third members 71m, 71n, 7
1o and a space partitioned by a seventh member 71s described later are an ink pressure chamber 71c, an ink introduction hole 71e, an ink flow path 71d, and an ink buffer tank 71, respectively.
f and the first connection hole 71g.

The diluent pressure chamber 71h is provided with the pressure chamber forming member 7
1 from near the center in the thickness direction.
1 is formed to the one main surface 71a side. The diluent introduction hole 71j is formed on the other end side of the diluent pressure chamber 71h, and is formed from near the center in the thickness direction of the pressure chamber forming member 71 to the other main surface 71b of the pressure chamber forming member 71.

The diluent flow passage 71i is provided with a diluent introduction hole 71j.
Similarly, the pressure chamber forming member 71 is formed from the vicinity of the center in the thickness direction to the other main surface 71b of the pressure chamber forming member 71. Then, the diluent flow path 71i
The diluent introduction hole 7 is formed by a fourth member 71p described later.
1j. The diluent flow path 71i is
Part of the fourth member 71p is formed so as to communicate with one end of the diluent pressure chamber 71h.

Similarly to the diluent introduction hole 71j and the diluent flow path 71i, the diluent buffer tank 71k is also located near the center in the thickness direction of the pressure chamber forming member 71 on the other main surface 71b side of the pressure chamber forming member 71. Is formed. Here, the diluent buffer tank 71k is, like the ink buffer tank 71f, a single linear pipe communicating with the plurality of diluent flow paths 71i, as shown in FIG. 71i has a function of distributing ink.

The second connection hole 71l is formed from near the center in the thickness direction of the pressure chamber forming member 71 to one of the main surfaces 71a of the pressure chamber forming member 71 so as to communicate with the diluent buffer tank 71k. ing.

Here, the pressure chamber forming member 71 constitutes a bottom surface of the diluting liquid pressure chamber 71h and a part of the other main surface 71b of the pressure chamber forming member 71, and has a diluting liquid introducing hole 71j. And a fourth member 71p separating the diluent introduction hole 71j and the diluent flow path 71i from each other and in contact with one side of the diluent flow path 71i and an upper surface of the diluent flow path 71i. At the same time, the pressure chamber forming member 71
Of the diluent pressure chamber 71h and the second connection hole 71l. A fifth member 71q separating the hole 71l, one side surface of the diluent buffer tank 71k, and a second connection hole 71l;
And a sixth member 71r that forms part of one main surface 71a and the other main surface 71b of the pressure chamber forming member 71, respectively.

The pressure chamber forming member 71 includes the other side of the ink pressure chamber 71c, the other side of the ink introduction hole 71e, the other side of the diluent pressure chamber 71h, and the other side of the diluent introduction hole 71j. And a seventh member 71s that forms a part of one main surface 71a and the other main surface 71b of the pressure chamber forming member 71 is formed.

Then, the fourth to seventh members 71
The space partitioned by p, 71q, 71r, 71s is
Each of the diluent pressure chamber 71h, the diluent introduction hole 71j, the diluent flow path 71i, the diluent buffer tank 71k, and the second
711l.

The other main surface 7 of the pressure chamber forming member 71
1b, an orifice plate 73 serving as a discharge hole forming member covers the ink introduction hole 71e, the ink flow path 71d, the ink buffer tank 71f, the diluent introduction hole 71i, the diluent flow path 71j, and the diluent buffer tank 71k. Are bonded by thermocompression bonding. As the orifice plate 73, Neoflex (manufactured by Mitsui Toatsu Chemicals) having excellent heat resistance and chemical resistance is used.
Those having a thickness of about 50 μm and a glass transition point of 250 ° C. or less are used.

A liquid-repellent film 67 is formed on at least the portion of the orifice plate 73 where the later-described ink discharge holes 73a and diluent discharge holes 73b are opened. As a material of the liquid repellent treatment film 67,
Those having excellent chemical resistance and laser workability and having effective liquid repellency and adhesiveness are used. Specifically, a polyimide adhesive film, trade name: UPA-N221 (manufactured by Ube Industries, Ltd.) is used. The orifice plate 73 is formed with a thickness of about 5 μm around at least the portion where the ink discharge holes 73 a and the diluent discharge holes 73 b are opened.

The material of the liquid-repellent treatment film 67 is made of a water-repellent material made of a polyimide material, and more preferably, polyimide siloxane. Furthermore, in the polyimide siloxane, a part of the aromatic hydrocarbon bonded to the nitrogen of the imide bond is replaced by the siloxane, and the content of Si to the polyimide is 3% by weight to 25% by weight. Preferably, there is.

The material of the lyophobic film 67 is 23
Water absorption after immersion in water for 24 hours at
% Is desirable. That is, in order to discharge ink stably, it is preferable that the surface tension of the liquid repellent treatment film 67 is as small as possible. As a result of various studies on the surface tension of the liquid repellent film 67, it was found that the smaller the water absorption, the lower the surface tension.

Then, as a result of investigating the relationship between the water absorption and the surface tension measured by the water immersion method at 23 ° C. for 24 hours,
If the water absorption is 0.4% or less, the surface tension is 31 dy.
Ne / cm or less, which proved to be suitable as the liquid-repellent treatment film 42 of the “carrier jet” print head 56.

Even if the surface tension is 31 dyne / cm or less, if the water absorption exceeds 0.4% as measured by a water immersion method at 23 ° C. for 24 hours, a good lyophobic effect can be obtained. Thus, it was found that the material was not suitable as a material for the liquid-repellent treatment film 42 of the “carrier jet” print head 56.

As described above, the lyophobic treatment film 42 is
Water absorption after immersion in water for 24 hours at
% Of a water-repellent polyimide material.

As these polyimide-based materials, in addition to the above-mentioned UPA-N221, a polyimide adhesive film, trade name: UPA-N111 (manufactured by Ube Industries) or trade name: UPA-T222 (Ube-T222) Kosan Co., Ltd.) and UPA-T208 (trade name).

By using these liquid-repellent organic material films as the material of the liquid-repellent treatment film 67, the surface tension of the liquid-repellent treatment can be reduced to 31 Dyne / cm or less.

The orifice plate 73 and the liquid repellent film 6
7, an ink pressure chamber 7 communicates with the ink introduction hole 71e.
Ink ejection hole 73a having a predetermined diameter for ejecting ink supplied from ink 1c through ink introduction hole 71e.
Are obliquely formed so as to face a diluting liquid discharge hole 73b described later. Further, the orifice plate 73 and the liquid repellent film 67 communicate with the diluent introduction hole 71j, and a diluent discharge hole for discharging diluent supplied from the diluent pressure chamber 71h through the diluent introduction hole 71j. 73b is drilled so that the cross-sectional shape is, for example, a circular shape having a predetermined diameter.

The ink-repellent film 73 is formed on the orifice plate 73 by irradiating a laser beam from the orifice plate 73 after forming the liquid-repellent film 67 on the orifice plate 73. The orifice plate 73 is drilled.

The orifice plate 73 and the liquid repellent film 6
The ink ejection holes 73a and the diluting solution ejection holes 73b formed in the orifice plate 73 are provided on the orifice plate 73.
Is formed and then laser-processed, so that it is formed in a continuous shape without boundaries.

As described above, the material of the orifice plate 73 and the liquid-repellent treatment film 67 is excellent in laser workability, especially in the case of using excimer laser light as the wavelength of laser light. Since such a material is used, processing can be performed efficiently.

Then, on the main surface of the orifice plate 73 on which the lyophobic treatment film 67 is formed, an opening 68a having a diameter larger than that of the above-described ink discharge holes 73a and diluent discharge holes 73b. Discharge hole protection member 68 having
Are bonded using the liquid-repellent treatment film 67 as an adhesive. The ejection hole protection member 68 has a thickness of about 15 μm.

Since the material of the discharge hole protecting member 68 does not need to be excellent in laser workability, any method for forming the opening 68a exists and any material having chemical resistance can be used. Either one may be used. For example, the opening 68a is formed by electroforming using a nickel material.
Or an organic material in which an opening 68a is formed by a method such as a punching method using a polyimide material and a polyimide material.

The main surface of the discharge hole protection member 68
It is desirable that a liquid-repellent material be formed. Here, as described above, when a metal material made of nickel is used as the material of the discharge hole protection member 68, the method of forming the lyophobic material includes fluorine-containing nickel plating or fluorine eutectoid plating. Exists. Also,
In the case where an organic material made of polyimide is used as the material of the discharge hole protection member 68, a Teflon material such as ethylene tetrafluoride / polypropylene hexafluoride is applied and fired as a method of forming a liquid repellent material. There is a way.

Here, the liquid repellent material formed on the main surface of the discharge hole protection member 68 does not need to have the same method of forming the openings 68a as the method of forming the ink discharge holes 73a and the diluting liquid discharge holes 73b. Therefore, it is not necessary to have excellent excimer laser processing characteristics.

Here, the ink introduction hole 71d is formed so as to be larger than the diameter of the ink ejection hole 73a, and the diluent introduction hole 71i is formed so as to be larger than the diameter of the diluent ejection hole 73b.

The opening 68a of the discharge hole protecting member 68
As shown in FIG. 15, the shape of the
The opening 3a and the opening of the diluting liquid discharge hole 73b are formed in a substantially elliptical shape so as to be covered by one opening.

The opening 68a of the discharge hole protecting member 68
It is desirable that the diameter A2 of the short axis direction is a value close to the diameter D2 of the ink introduction hole 71d and the diameter I1 of the diluent introduction hole 71i. In particular, it is desirable that the diameter A2 of the opening 68a of the ink discharge hole protection member 68 in the minor axis direction is substantially the same as the width C2 of the ink pressure chamber 71c and the width H1 of the diluent pressure chamber 71h. in this way,
By making the diameter of the opening 68a of the ink ejection hole protection member 68 in the short axis direction substantially the same as the width of the ink pressure chamber 71c, the ejection hole protection member 68 is formed on the orifice plate on which the liquid repellent film 67 is formed. The pressure applied at the time of joining to 73 can be equalized.

On the other hand, one main surface 7 of the pressure chamber forming member 71
1a side, the ink pressure chamber 71c and the diluent pressure chamber 71
The diaphragm 72 is bonded via an adhesive so as to cover h.

The vibrating plate 72 includes a pressure chamber forming member 71.
A first through hole 72b and a second through hole 72c are formed at positions corresponding to the first connection hole 71g and the second connection hole 71l, respectively. An ink supply pipe 78 and a diluent supply pipe 79 connected to an ink tank and a diluent tank (not shown) are attached to the first and second through holes 72b and 72c, respectively. Accordingly, the ink supplied from the ink tank is supplied to the ink flow path 71 via the ink supply pipe 78 and the ink buffer tank 71f.
The diluent supplied to the ink pressure chamber 71c through the ink flow path 71d and supplied from the diluent tank is supplied to the diluent supply pipe 79 and the diluent buffer tank 71k.
Is supplied to the diluent flow path 71i through the
The diluent pressure chamber 71h is filled through i.

As the diaphragm 72, similarly to the orifice plate 73, Neoflex (manufactured by Mitsui Toatsu Chemicals, Inc.) having excellent heat resistance and chemical resistance is used. Those having a point of 250 ° C. or less are used.

A plate-like first projection 74 and a second projection 75 are provided at positions on one main surface 72a of the vibration plate 72 corresponding to the ink pressure chamber 71c and the diluent pressure chamber 71h, respectively. Each is formed. The first laminated piezo 76 is bonded to the main surface 74a of the first protrusion 74 via an adhesive (not shown), and the main surface 75a of the second protrusion 75 is bonded to an adhesive (not shown). Through
The second laminated piezo 77 is bonded. The main surface 74a of the first protrusion 74 and the main surface 75 of the second protrusion 75
The size of “a” is the first and second laminated piezos 7 respectively.
The main surfaces 76a and 77a to which the first and second protrusions 74 and 75 are bonded are set to be smaller than the opening areas of the ink pressure chamber 71c and the diluent pressure chamber 71h.

The first laminated piezo 76 is formed by alternately laminating piezoelectric members and conductive members. Here, the number of stacked piezoelectric members and conductive members is not limited, and may be any number of layers.

The first laminated piezo 76 is formed as shown in FIG.
As shown in FIG. 16A, when the driving voltage is applied, FIG.
(A) The volume of the ink pressure chamber 71c is increased by linearly displacing in the direction indicated by the middle arrow A and lifting the diaphragm 72 around the portion where the first protrusion 74 is bonded. Has been made.

The first laminated piezo 76 is the same as that shown in FIG.
When the driving voltage is released as shown in FIG.
(B) By linearly displacing in the direction indicated by the middle arrow B and pressing the first projection 74, the diaphragm 72 is curved to reduce the volume of the ink pressure chamber 71c. The pressure in the chamber 71c is increased. In this case, since the size of the first projection 74 is formed smaller than one main surface 76a of the first laminated piezo 76, the displacement of the first laminated piezo 76 is The transmission can be made intensively to the position corresponding to the pressure chamber 71c.

The second laminated piezo 77, like the first laminated piezo 76, is formed by alternately laminating piezoelectric members and conductive members. The number of the second laminated piezo 77 is also not limited to the number of laminated piezoelectric members and conductive members, and may be any number of layers.

This second laminated piezo 77 is shown in FIG.
As shown in FIG. 16A, when the driving voltage is applied, FIG.
(A) The volume of the diluent pressure chamber 71h is increased by linearly displacing in the direction indicated by the middle arrow A and lifting the diaphragm 72 around the portion where the second protrusion 75 is bonded. It has been made like that.

The second laminated piezo 77 is shown in FIG.
When the drive voltage is released as shown in FIG.
(C) The diaphragm 72 is bent by linearly displacing in the direction indicated by the middle arrow C and pressing the second projection 75, thereby reducing the volume of the diluent pressure chamber 71h. The pressure in the liquid pressure chamber 71h is increased. In this case, the size of the second protrusion 75 is the second
Is formed smaller than one main surface 77a of the laminated piezo 77, the displacement of the second laminated piezo 77 can be intensively transmitted to a position corresponding to the diluent pressure chamber 71h of the diaphragm 72. it can.

The operation of the "carrier jet" print head 56 will now be described.

When a predetermined drive voltage is applied to the first and second laminated piezos 76 and 77, the first and second laminated piezos 76 and 77 are displaced in the direction indicated by arrow A in FIG. I do. With the displacement of the first and second laminated piezos 76 and 77, portions of the vibration plate 72 corresponding to the ink pressure chamber 71c and the diluent pressure chamber 71h are lifted in the direction indicated by the arrow A in FIG. Therefore, the volumes of the ink pressure chamber 71c and the diluent pressure chamber 71h increase.

Ink pressure chamber 71c and diluent pressure chamber 71
When the volume of h increases, the meniscus of the ink and the diluting liquid near the ink discharging hole 73a and the diluting liquid discharging hole 73b becomes
Each of the ink pressure chamber 71c and the diluent pressure chamber 71
h, the first and second laminated piezos 76, 7
When the displacement of 7 has subsided, it becomes stable near the tips of the ink ejection holes 73a and the diluting solution ejection holes 73b by balance with the surface tension.

At the time of ink quantification, the drive voltage applied to the first laminated piezo 76 is released, and as a result, the first laminated piezo 76 is displaced in the direction indicated by arrow B in FIG. I do. With the displacement of the first laminated piezo 76, the diaphragm 72 is displaced in the direction indicated by the arrow B in FIG. Due to the displacement of the vibration plate 72, the volume of the ink pressure chamber 71c decreases, and the pressure in the ink liquid chamber 71c increases.

Here, the time change of the driving voltage applied to the first laminated piezo 76 is set gently so that the ink does not fly from the ink discharge holes 73a, and the ink is made to fly from the ink discharge holes 73a. Is ejected without being discharged.

Further, the voltage value for releasing the drive voltage applied to the first laminated piezo 76 is set to a value corresponding to the gradation of the image data, and the ink pushed out from the tip of the ink ejection hole 73a is set. The amount is set to an amount corresponding to the image data.

The ink discharged from the ink discharge holes 73a is mixed with the diluent forming the meniscus in the vicinity of the tip of the diluent discharge hole 73b.

At the time of ink ejection, the driving voltage applied to the second laminated piezo 77 is released, and as a result, the second laminated piezo 77 is displaced in the direction indicated by the arrow C in FIG. I do. With the displacement of the second laminated piezo 77, the diaphragm 72 is displaced in the direction indicated by the arrow C in FIG. Due to the displacement of the vibration plate 72, the volume of the diluent pressure chamber 71h decreases, and the pressure in the diluent pressure chamber 71h increases. As a result, the mixing having the ink density corresponding to the image data from the diluent discharge hole 73b. The solution is discharged. Here, the time change of the drive voltage applied to the second laminated piezo 77 is set so that a desired amount of the mixed solution can be discharged from the diluent discharge hole 73b.

The printer device 50 configured as described above
The liquid-repellent treatment film 67 having the adhesive property of the “carrier jet” print head 56 prevents the ink and the diluting liquid from adhering to the area sandwiched between the ink discharging holes 73a and the diluting liquid discharging holes 73b. Thus, the separation of the ink and the diluent can be reliably performed.

In addition, the printer device 50 is provided with the ejection hole protecting member 68 of the “carrier jet” print head 56.
Protects the vicinity of the openings of the ink discharge holes 73a and the diluent discharge holes 73b, so that the occurrence of scratches and the like near the openings of the ink discharge holes 73a and the diluent discharge holes 73b is suppressed, and the ejection of the ink and the diluent is performed. State stability can be ensured.

In the printer device 50, the lyophobic film 67 having the adhesive property of the "carrier jet" print head 56 acts as an adhesive for bonding the orifice plate 73 and the discharge hole protecting member 68. It is not necessary to newly use an adhesive, the deterioration of the hole accuracy of the ink ejection hole 73a and the diluent ejection hole 73b due to the protrusion of the adhesive, and the ink ejection hole 73a and the diluent ejection hole 73b.
Of the liquid repellency near the opening is prevented.

Further, in the printer device 50, since the “carrier jet” print head 56 is bonded to the outlet hole protecting member 68 via the liquid repellent treatment film 67, the ejection hole protecting member 68 Since the processing film 67 is covered, the peeling failure of the liquid repellent processing film 67 is prevented.

Next, a method of manufacturing the “carrier jet” print head 56 will be described with reference to FIGS.

First, as shown in FIG. 17A, a resist such as a photosensitive dry film or a liquid resist material is applied to one main surface 82a of a metal member 82 such as stainless steel having a thickness of about 0.1 mm. Is applied, the ink pressure chamber 7
1c, the first connection hole 71g, the diluent pressure chamber 71h, and the pattern exposure using a mask having a pattern corresponding to the second connection hole 71l, and the other main surface 82b of the metal member 82 is exposed to light, for example. After applying a resist such as a volatile dry film or a liquid resist material, the ink introduction holes 7
1e, ink flow path 71d, ink buffer tank 71
f, pattern exposure is performed using a mask having a pattern corresponding to the diluent introduction hole 71j, the diluent flow path 71i, and the diluent buffer tank 71k.

Next, as shown in FIG. 17B, the ink pressure chamber 71c, the first connection hole 71g, and the diluent pressure chamber 71c
h, a resist 83 having a pattern corresponding to the second connection hole 71l, an ink introduction hole 71e, an ink flow path 71
d, ink buffer tank 71f, diluent introduction hole 71
j, diluent flow path 71i and diluent buffer tank 71k
The metal member 82 is immersed in an etching solution composed of, for example, an aqueous ferric chloride solution for a predetermined period of time using the resist 84 having a pattern corresponding to the pattern as a mask, and etching is performed on one main surface 82a of the metal member 82. A pressure chamber 71c, a first connection hole 71g, a diluent pressure chamber 71h, and a second connection hole 71l are formed. In the other main surface 82b of the metal member 82, an ink introduction hole 71e, an ink flow path 71d, an ink buffer tank 71f, a diluent introduction hole 7
1j, diluent flow path 71i and diluent buffer tank 71
Form k. Thereby, the above-described pressure chamber forming member 7
1 is obtained.

In this case, one main surface 82 of metal member 82
The amount of etching from “a” and the other main surface 82 b is both set to be about 強 of the thickness of the metal member 82. In the present embodiment, since the thickness of the metal member 82 is set to 0.1 mm, the amount of etching from one side of the metal member 82 is set to be about 0.055 mm. By setting the etching amount in this manner, the ink pressure chamber 71c, the first connection hole 71g, the ink introduction hole 71e, the ink flow path 71d, the ink buffer tank 71f, the diluent pressure chamber 71h, the second connection hole 71
1, the dimensional accuracy of the diluent introduction hole 71j, the diluent flow path 71i, and the diluent buffer tank 71k can be improved, and these can be formed stably.

Since the amount of etching from one main surface 82a of the metal member 82 is the same as the amount of etching from the other main surface 82b, the ink pressure chamber 71c and the first Conditions for forming the connection hole 71g, the diluting liquid pressure chamber 71h, and the second connection hole 71l, the ink introduction hole 71e, the ink flow path 71d, and the ink buffer tank in the other main surface 82b of the metal member 82. Etching conditions for forming the diluent introduction hole 71j, the diluent flow path 71i, and the diluent buffer tank 71k can be set to substantially the same conditions, and this etching step can be performed easily and in a short time. it can.

Here, the widths of the ink introduction holes 71e and the diluent introduction holes 71j are such that when the pressures are applied to the ink pressure chambers 71c and the diluent pressure chambers 71h, respectively, The ink discharge hole 73a and the diluent discharge hole 7
3b are formed to be larger than the respective diameters.

Next, as shown in FIG. 17C, the resists 83 and 84 are removed. In this case, the resist 83,
When a dry film resist is used as 84,
When a 5% or less aqueous solution of sodium hydroxide is used as the remover and a liquid resist material is used as the resists 83 and 84, for example, a dedicated alkaline solution is used as the remover. After the resists 83 and 84 are removed, a resin material 85 such as Neoflex (manufactured by Mitsui Toatsu Chemicals, Inc.) having a thickness of about 50 μm and a glass transition point of 250 ° C. or less is applied to the pressure chamber forming member 71. The other main surface 71
b is bonded by thermocompression bonding. This thermocompression bonding is 230 ° C
This is carried out by applying a pressure of about ²⁰ to 30 kgf / cm ^{2 at} a pressing temperature of about. By setting the conditions of the thermocompression bonding in this manner, the adhesive strength between the pressure chamber forming member 71 and the resin material 85 can be increased, and
Both can be efficiently bonded.

In this case, since the resin material 85 is not formed with the ink discharge holes 73a and the diluting liquid discharge holes 73b, the process of bonding the resin material 85 to the pressure chamber forming member 71 requires high precision. Since the positioning accuracy is not required, the bonding process can be performed easily. Further, since the resin material 85 is bonded to the pressure chamber forming member 71 without using an adhesive, it is possible to avoid a disadvantage that the adhesive blocks the ink flow path 71d and the diluent flow path 71i.

Next, as shown in FIG. 17D, a lyophobic treatment film 67 having lyophobicity and adhesiveness is formed on the surface of the resin material 85 facing the pressure chamber forming member 71. The liquid-repellent film 67 repels the ink and the diluting liquid, does not cause the ink and the diluting liquid to remain around the ink discharging holes 73a and the diluting liquid discharging holes 73b, and uses the excimer laser to discharge the ink discharging holes 73a and 73a. Diluent discharge hole 73b
It is desirable to use a material that does not generate burrs, peeling, and the like in the case of forming a film. For example, a polyimide adhesive film, trade name: UPA-N221 (manufactured by Ube Industries, Ltd.) or the like is used. Then, a polyimide adhesive film in a solution state is applied on the main surface of the resin material 85 by a spin coating method, or a polyimide adhesive film in a semi-cured state is adhered on the main surface of the resin material 85 by a lamination method. To form a liquid-repellent treatment film 67.

The liquid-repellent treatment film 67 is formed by applying a polyimide adhesive film in a solution state on the main surface of the resin material 85 by spin coating, or by laminating a semi-cured polyimide adhesive film by a lamination method. After bonding on the main surface of the substrate 85, a thermal curing treatment is performed for about 10 minutes at a temperature of about 180 ° C., so that the surface tension can be reduced to 31 Dyne / cm or less.

The material of the liquid repellent treatment film 67 is the above-mentioned polyimide adhesive film, trade name: UPA-N2
21 (manufactured by Ube Industries), polyimide adhesive film, trade name: UPA-N111 (manufactured by Ube Industries), polyimide adhesive film, trade name: UPA-T
222 (Ube Industries, Ltd.), polyimide adhesive film, trade name: UPA-T208 (Ube Industries, Ltd.)
Etc. may be used.

As a material of the liquid repellent film 67, trade name: U
When PA-N111 is used, the resin material 85
After applying or adhering on the main surface of the substrate, a thermosetting treatment is performed at a temperature of about 200 ° C. for about 15 minutes, whereby the surface tension can be reduced to 31 Dyne / cm or less.

As the material of the liquid-repellent treatment film 67, trade name: UPA-T222 or trade name: UPA-T208
In the case where is used, since the adhesiveness is lost if a complete thermosetting treatment is performed, heat treatment is performed at a temperature of about 100 ° C. for about 1 hour, and only the liquid repellent treatment film 67 is dried.

Next, as shown in FIG. 17 (E), the liquid repellent film 67 is used as an adhesive to apply
The ejection hole protection member 68 having a thickness of μm is bonded. The discharge hole protection member 68 is formed in advance with an opening 68a having a diameter larger than the diameters of the ink discharge holes 73a and the diluent discharge holes 73b.

It is not necessary to use a material excellent in laser workability for the discharge hole protecting member 68, and any material can be used as long as there is any method for forming the opening 68a and the material has chemical resistance. It does not matter. For example, a metal material formed using an nickel material and having an opening 68a by electroforming, or an organic material formed using a polyimide material and having an opening 68a formed by a punching method or the like can be used. .

Here, when the above-mentioned polyimide adhesive film, trade name: UPA-N221, is used as the lyophobic treatment film 67, at a temperature of 180.degree.
By applying a pressure of about ² cm ^{2 for} about 1 to 5 minutes, the ejection hole protecting member 68 and the resin material 85 can be adhered with close contact.

When the above-mentioned polyimide adhesive film, trade name: UPA-N111, is used as the liquid-repellent film 67, at a temperature of 230 ° C., 20 kg / c.
By applying a pressure of about m ^{2 for} about 1 to 5 minutes, it is possible to bond the ejection hole protection member 68 and the resin material 85 with adhesiveness.

Further, as the lyophobic treatment film 67, the above-mentioned polyimide adhesive film, trade name: UPA-T22
2 or trade name: When UPA-T208 is used,
By applying a pressure of about 10 kg / cm ^{2 at} a temperature of 160 ° C. for about 2 hours, the ejection hole protecting member 68 and the resin material 85 can be adhered to each other with good adhesion. Surface tension of 31 Dyne /
cm or less.

Although not shown, a liquid-repellent material is preferably formed on the main surface of the discharge hole protecting member 68. Here, as described above, when a metal material made of nickel is used as the material of the discharge hole protection member 68, the method of forming the lyophobic material includes fluorine-containing nickel plating or fluorine eutectoid plating. Exists. Further, when an organic material made of polyimide is used as the material of the discharge hole protection member 68, as a method of forming the liquid repellent material, a Teflon material such as ethylene tetrafluoride / hexafluoropropylene copolymer is applied, There is a method of firing.

Here, the surface 68b of the discharge hole protecting member 68
The liquid-repellent material formed on the substrate does not need to have the same excimer laser processing characteristics because the method of forming the opening 68a does not need to be the same as the method of forming the ink discharge holes 73a and the diluent discharge holes 73b.

Next, as shown in FIG. 17F, the ink pressure chamber 7 is moved from one main surface 71a side of the pressure chamber forming member 71.
An excimer laser is obliquely applied to the resin material 85 via the ink inlet 1e and the ink introduction hole 71e to form an ink ejection hole 73a in the resin material 85 and the lyophobic treatment film 67. The excimer laser is vertically irradiated on the resin material 85 from the main surface 71a side through the diluent pressure chamber 71h and the diluent introduction hole 71j, and the diluent discharge holes 73b are formed on the resin material 85 and the lyophobic treatment film 67. To form As a result, the orifice plate 7
3 is obtained. Here, since the resin material 85 is used as the material of the orifice plate 73, the ink discharge holes 73a and the diluent discharge holes 73b can be easily formed. Also, since a material having excellent excimer laser workability is selected for the liquid repellent film 67, the ink discharge holes 73a and the diluent discharge holes 73b can be easily formed.
Further, the ink introduction hole 71e and the diluent introduction hole 71j
Is larger than the diameters of the ink ejection holes 73a and the diluting solution ejection holes 73b, so that the accuracy of alignment between the resin material 85 and the pressure chamber forming member 71 during laser processing can be eased, and laser processing can be performed. Sometimes the pressure chamber forming member 71
The risk of the laser being shielded can be avoided.

Next, as shown in FIG. 18A, a diaphragm 72 made of Neoflex (manufactured by Mitsui Toatsu Chemicals Co., Ltd.) or the like having a thickness of about 20 μm and a glass transition point of 250 ° C. or less is used. In a state where the first projection 74 and the second projection 75 are formed on one of the main surfaces, the pressure chamber forming member 7 is formed.
The first main surface 71a is bonded by thermocompression bonding.
This thermocompression bonding is performed at a pressing temperature of about 230 ° C. for 20 minutes.
It is performed by applying a pressure of about 30 kgf / cm ² . By setting the conditions of the thermocompression bonding as described above, the adhesive strength between the ink pressure chamber forming member 71 and the vibration plate 72 can be increased, and both can be efficiently bonded. The first protrusions 74 and the second protrusions 75 are formed on a film such as Neoflex, which is to be the vibration plate 72, by using a metal foil film material such as Cu and Ni so that the plate thickness is about 18 μm. After that, it can be formed by going through the same steps as a known process of forming a printed circuit board.

As a film made of a metal foil film material such as Cu and Ni on a film of Neoflex or the like serving as the diaphragm 72, specifically, as shown in FIG. With a glass transition point of 25
Using a material (for example, trade name: metal wrapping film (manufactured by Mitsui Toatsu Chemical Industry Co., Ltd.)) in which a Cu material having a thickness of about 18 μm is formed on a film made of Neoflex at a temperature of 0 ° C. or less. Can be.

This metal wrapping film is
A first layer 72f made of neoflex having a glass transition point of 250 ° C. or lower and exhibiting adhesiveness in a temperature range of about 220 ° C. to 230 ° C., and a glass transition point of 300 ° C. or lower. A third layer 72d made of neoflex, which exhibits adhesiveness in a temperature range of about 270 ° C to 280 ° C, and a polyimide material having a glass transition point of 300 ° C or higher and not exhibiting adhesiveness at a temperature of 300 ° C or lower. The laminated body 72α of the second layer 72e and the Cu material are bonded together. Therefore, since the metal wrapping film does not use an adhesive that softens at a low temperature, the first protrusion 74 and the second protrusion 75 are formed on the diaphragm 72 as a heat-resistant structure. be able to.

In the “carrier jet” print head 56 of the printer device 50 according to the present embodiment, the ink flow path 71 d and the diluent flow path 71 i have the pressure chamber forming member 71.
Since it is not formed so as to open on one of the main surfaces 71a,
It is not necessary to use the above-mentioned thermoplastic adhesive as the adhesive for the diaphragm 72, and the pressure chamber forming member 71 may be formed using an adhesive that cures at a low temperature, for example, an epoxy-based adhesive.
The diaphragm 72 may be bonded to one of the main surfaces 71a.

As described above, the discharge hole protection member 6
8 is formed with an opening 68a having a diameter larger than the diameters of the ink ejection holes 73a and the diluting liquid ejection holes 73b.
4 and 75, and the first and second laminated piezos 76 and 77 in the bonding process.
b, ink ejection holes 73 in orifice plate 73
It is possible to prevent pressure from being directly applied to the vicinity of the formation position a and the vicinity of the formation position of the diluting liquid discharge hole 73b, to reduce the probability of occurrence of scratches and the like as much as possible, and to prevent peeling failure of the liquid repellent material. Can be.

The diameter of the opening 68a formed in the ejection hole protection member 68 in the short axis direction is the same as that of the ink introduction hole 71.
e and a value close to the diameter of the diluting liquid introduction hole 71j, and in particular, the dimensions are substantially equal to the widths of the ink pressure chamber 71c and the diluting liquid pressure chamber 71h. At a portion where the portion 68a is not formed, pressure is uniformly applied in the bonding step of the diaphragm 72 and the like.

Next, as shown in FIG. 18B, the first laminated piezo 76 is adhered to the first projection 74 using, for example, an epoxy adhesive, and the second projection 75
Then, a second laminated piezo 77 is adhered, and then the ink supply pipe 78 is adhered to one of the main surfaces 72a of the vibration plate 72 so as to be aligned with the position where the first through hole 72b is formed. The tube 79 is aligned with the position where the second through hole 72c is formed, and is adhered onto one main surface 72a of the diaphragm 72. Thus, a "carrier jet" printhead 56 can be obtained.

In the above description, after the discharge hole protecting member 68 is bonded, the ink discharge holes 73a and the diluent discharge holes 7 are formed in the resin material 85 and the lyophobic film 67 using an excimer laser.
3b is formed, and then the diaphragm 72 and the like are bonded. However, the present invention is not limited to this example. As shown in FIG. After forming the ink discharge holes 73a and the diluent discharge holes 73b in the film 67, the discharge hole protection member 68 and the vibration plate 72 may be bonded.

That is, first, as shown in FIG. 20A, after forming the liquid repellent treatment film 67 on the main surface of the resin material 85, the resin material 85 and the liquid repellent treatment film 67 are irradiated with laser light. The orifice plate 73 is obtained by forming the ink discharge holes 73a and the diluent discharge holes 73b.

Then, as shown in FIG. 20 (B), when bonding the vibration plate 72 and the like, the discharge hole protection member 68 is bonded at the same time.

As described above, by simultaneously performing the step of bonding the vibration plate 72 and the like and the step of bonding the ejection hole protecting member 68, the number of steps can be reduced and the productivity can be improved.

In this case as well, the discharge hole protection member 68
Is formed with an opening 68a having a diameter larger than the opening diameter of the ink discharge hole 73a and the diluting liquid discharge hole 73b, so that the diaphragm 72 and the first and second protrusions 7 are formed.
4 and 75, and the first and second laminated piezos 76 and 77 in the bonding process.
b, ink ejection holes 73 in orifice plate 73
It is possible to prevent pressure from being directly applied to the vicinity of the formation position a and the vicinity of the formation position of the diluting liquid discharge hole 73b, to reduce the probability of occurrence of scratches and the like as much as possible, and to prevent peeling failure of the liquid repellent material. Can be.

The diameter of the opening 68a formed in the ejection hole protection member 68 in the short axis direction is the same as that of the ink introduction hole 71.
e and a value close to the diameter of the diluting liquid introduction hole 71j, and in particular, the dimensions are substantially equal to the widths of the ink pressure chamber 71c and the diluting liquid pressure chamber 71h. At a portion where the portion 68a is not formed, pressure is uniformly applied in the bonding step of the diaphragm 72 and the like.

According to the method of manufacturing a printer device according to the present invention as described above, since the discharge hole protecting member 68 is formed without using a method such as plating or electric discharge machining, the orifice plate 73 is formed. Even if an organic material having excellent laser workability is used, the discharge hole protection member 68 can be easily formed.

Further, since the ejection hole protection member 68 is adhered to the orifice plate 73 by using the liquid repellent treatment film 67 having adhesiveness as an adhesive, the ink ejection holes 73a and the diluting solution ejection by the protrusion of the adhesive. Deterioration of the hole accuracy of the hole 73b and the ink discharge hole 73a
Deterioration of the liquid repellency near the opening 3b is prevented.

Further, by using the liquid-repellent treatment film 67 as an adhesive for adhering the discharge hole protection member 68 to the orifice plate 73, the liquid-repellent treatment film 67 is covered by the discharge hole protection member 68. The peeling failure of the processing film 67 is prevented.

(Other Embodiments) In the first embodiment described above, an example was described in which the orifice plate 33 made of neoflex having a glass transition point of 250 ° C. or less was used. However, the present invention is not limited to this. Even if an orifice plate 91 as shown in FIG. 21 is used instead of the orifice plate 33 applied in the first embodiment, the same effect as in the above-described first embodiment can be obtained. Can be obtained.

The orifice plate 91 has a thickness of about 125 μm and a thickness of about 7 μm on one main surface of a first resin material 92 made of Kapton (manufactured by DuPont) having a glass transition point of 250 ° C. or higher. And a second resin material 93 made of neoflex having a glass transition point of 250 ° C. or lower is applied. When the orifice plate 91 is applied, an ink discharge hole 33a communicating with the ink introduction hole 31e is formed in the orifice plate 91.

The orifice plate 91 has a thickness equal to that of the orifice plate 3 applied in the first embodiment.
3, the strength can be further enhanced as compared with the orifice plate 33, and the length of the ink ejection holes 33a can be increased.
The directionality of the ejected ink droplets can be improved.

In the first embodiment described above,
Ink jet print head 7 adapted to apply pressure to ink pressure chamber 31c using laminated piezo 35
Was applied to the printer device 1, but the present invention is not limited to this example. Instead of the ink jet print head 7 applied in the first embodiment, FIGS. Even when such an ink jet print head 100 is applied, the same effects as those of the above-described first embodiment can be obtained. Note that FIG.
2, in FIG. 23, the same components as those of the ink jet print head 7 shown in FIG.

The ink jet print head 100
Also in the above, the above-described orifice plate 91 can be applied instead of the orifice plate 33. When the orifice plate 91 is applied, the above-described effects such as enhancing the directionality of the ejected ink droplets can be obtained. it can.

[0242] The ink jet print head 100 includes:
Ink pressure chamber 3 on one main surface 32a of diaphragm 32
A vibration plate 101 is adhered to a position corresponding to 1c, and a plate-like piezoelectric element 102 is mounted on the vibration plate 101.
Are laminated.

The direction of polarization and voltage application of the piezoelectric element 102 is such that, when a voltage is applied to the piezoelectric element 102, the piezoelectric element 102 contracts in the in-plane direction of the vibration plate 101 and moves in the direction indicated by arrow A in FIG. It is set to bend.

Accordingly, when a drive voltage is applied to the piezoelectric element 102 in the initial state shown in FIG.
As shown in FIG. 23, the piezoelectric element 102 bends in the direction indicated by the arrow A in FIG. As a result, the volume of the ink pressure chamber 31c decreases, the pressure in the ink pressure chamber 31c increases, and ink is ejected from the ink ejection holes 33a.

In this case, the change over time of the drive voltage applied to the piezoelectric element 102 is set to a voltage waveform such that a desired amount of ink can be ejected from the ink ejection holes 33a.

Further, in the above-described second embodiment, an example was described in which the orifice plate 73 made of Neoflex having a glass transition point of 250 ° C. or less was used, but the present invention is not limited to this example. Not the second
By applying the orifice plate 91 shown in FIG. 21 instead of the orifice plate 73 applied to the embodiment, the same effect as in the above-described second embodiment can be obtained.

In particular, when the orifice plate 91 is used in the "carrier jet" print head 56, the inclination angle of the ink ejection hole 73a can be given a margin and the ink pressure chamber 71c and the diluent pressure chamber 71h can be separated. Since the interval can be easily widened, it is possible to reliably prevent ink leakage and diluent liquid leakage.

In this case, an ink discharge hole 73a and a diluent discharge hole 73b are formed in the orifice plate 91 and communicate with the ink inlet 71e and the diluent inlet 71j, respectively.

In the above-described second embodiment, the ink pressure chamber 71c and the diluent pressure chamber 7 are respectively provided by using the first laminated piezo 76 and the second laminated piezo 77.
Although the example in which the “carrier jet” print head 56 adapted to apply pressure to 1 h is applied to the printer device 50 has been described, the present invention is not limited to this example, and the second embodiment is not limited to this example. The same effects as in the above-described second embodiment can be obtained by applying a “carrier jet” print head 110 as shown in FIGS. 24 and 25 instead of the applied “carrier jet” print head 56. Can be. 24 and 25, the same components as those of the “carrier jet” print head 56 shown in FIG. 14 are denoted by the same reference numerals.

In this “carrier jet” print head 110, the above-mentioned orifice plate 91 can be used instead of the orifice plate 73. When the orifice plate 91 is used, ink leakage and diluent leakage can be reliably prevented. The above-described effects such as prevention can be obtained.

“Carrier Jet” Print Head 11
0 indicates that the first diaphragm 111 and the second diaphragm 112 are bonded at positions corresponding to the ink pressure chamber 71c and the diluent pressure chamber 71h on one main surface 72a of the diaphragm 72, respectively. A plate-shaped first piezoelectric element 113 is laminated on the first diaphragm 111, and a plate-shaped second piezoelectric element 114 is laminated on the second diaphragm 112.

The first and second piezoelectric elements 113 and 11
The polarization and voltage application directions in FIG. 4 are such that when a voltage is applied to the first and second piezoelectric elements 113 and 114, the first piezoelectric element 113 contracts in the in-plane direction of the first diaphragm 111. 2
4, the second piezoelectric element 114 shrinks in the in-plane direction of the second diaphragm 112 and the second piezoelectric element 114 shrinks in the direction indicated by the arrow A in FIG.
Is set to bend in the direction indicated by.

In the “carrier jet” print head 110, in the ejection standby state shown in FIG. 25A, no drive voltage is applied to the first and second piezoelectric elements 113 and 114, and the ink and the diluent A meniscus is formed at a position that balances the surface tension, that is, in the vicinity of the tips of the ink discharge holes 73a and the diluent discharge holes 73b.

In the “carrier jet” print head 110, a driving voltage is applied to the first piezoelectric element 113 at the time of ink metering shown in FIG. As a result, the first piezoelectric element 113 and the first diaphragm 111 bend in the direction indicated by the arrow A in FIG. 25B, and the portion of the diaphragm 72 corresponding to the ink pressure chamber 71c is indicated by the arrow A. Bend in the direction. As a result, the volume of the ink pressure chamber 71c decreases, and the pressure in the ink pressure chamber 71c increases.

Here, since the voltage value of the voltage applied to the first piezoelectric element 113 is set to a value corresponding to the gradation of the image data, the amount of ink pushed out from the tip of the ink ejection hole 73a is The amount depends on the data.

The ink pushed out from the ink discharge holes 73a is mixed with the diluent forming the meniscus in the vicinity of the tip of the diluent discharge holes 73b.

At the time of ink ejection, a drive voltage is applied to the second piezoelectric element 114. As a result, the second piezoelectric element 114 and the second diaphragm 112 move from the state shown in FIG.
By bending in the direction indicated by the middle arrow B, the portion of the diaphragm 72 corresponding to the diluent pressure chamber 71h is curved in the direction indicated by the arrow B. As a result, the volume of the diluent pressure chamber 71h decreases, the pressure in the diluent pressure chamber 71h increases, and
A mixed solution having an ink concentration corresponding to the image data is ejected from b.

Here, the change over time of the drive voltage applied to the second piezoelectric element 114 is set so that a mixed solution having a desired concentration can be discharged from the diluent discharge hole 73b.

That is, similar to the driving method shown in FIG. 12, the serial / parallel converter 64 converts the digital halftone data D1 into the first halftone data at the timing shown in FIG.
To the second driver 61 and the second driver 62.

Further, in the above-described second embodiment, an example in which the ink is set on the fixed amount side and the diluting liquid is set on the discharge side has been described. However, the present invention is not limited to this example. Even if the ink is set on the ejection side and the diluent is set on the fixed amount side, the same effect as in the above-described second embodiment can be obtained.

In the first embodiment, the ink pressure chamber forming member 31 is provided with the orifice plate 3.
The present invention is not limited to this example, and the ink pressure chamber forming member 31 and the orifice plate 3 have been described.
Instead of 3, an ink jet print head 201 using an injection molded part 131 having the functions of an ink pressure chamber forming member 31 and an orifice plate 33 as shown in FIG. 27 is also the same as in the first embodiment described above. The effect can be obtained.

In this case, as the material of the injection-molded part 131, polyetherimide, polysulfone, polyimide, polybenzimidazole and the like can be applied.

FIG. 27 shows the ink pressure chamber 131c.
As an example of a means for increasing the pressure, an inkjet print head 201 using a laminated piezo 35 is exemplified.
The means for increasing the pressure of the ink pressure chamber 131c is not limited to this, and various pressure increasing means can be applied.

In the above-described second embodiment, the "carrier jet" print head 56 in which the orifice plate 73 is bonded to the pressure chamber forming member 71 has been described, but the present invention is not limited to this example. Instead, instead of the pressure chamber forming member 71 and the orifice plate 73, a "carrier jet" print head using an injection molded part 171 having the functions of the pressure chamber forming member 71 and the orifice plate 73 as shown in FIG. 2
11 can also obtain the same effect as the above-described second embodiment.

In this case, as the material of the injection molded part 171, polyetherimide, polysulfone, polyimide, polybenzimidazole or the like can be applied.

FIG. 28 shows the ink pressure chamber 171c.
As a means for increasing the pressure of the diluent pressure chamber 171h, a “carrier jet” print head 211 using first and second laminated piezos 76 and 77 is exemplified.
The means for increasing the pressures of the ink pressure chamber 171c and the diluent pressure chamber 171h is not limited to this.
Various pressure increasing means are applicable.

Also, in the first and second embodiments described above, examples in which the present invention is applied to the serial type printers 1 and 50 have been described. However, the present invention is not limited to this example. 29 and a rotary drum type printer device 130 as shown in FIG. 30. 26 and FIG. 30, the same components as those of the serial type printer device 1 shown in FIG. 1 are denoted by the same reference numerals.

The line type printer device 120 is provided with a line head 121 having a large number of print heads arranged in a line and fixed along the axial direction. This line type printer device 120 includes a line head 121.
, The printing of one line is performed simultaneously, and when the printing is completed, the drum is rotated by one line to print the next line. In this case, a method of printing all lines at once, dividing the data into a plurality of blocks, and alternately printing every other line are conceivable.

An ink jet print head 100 as shown in FIGS. 22 and 23 may be applied to the line type printer device 120.

When the drum 2 rotates, the drum rotation type printer device 130 synchronizes with the rotation of the
The ink is ejected from the print paper 4 to form an image on the print paper 4. When the drum 2 completes one rotation and printing of one line on the printing paper 4 in the circumferential direction is completed, the feed screw 5 rotates to move the print head 6 by one pitch, and the next printing is performed. In this case, the drum 2 and the feed screw 5 may be simultaneously rotated to gradually move the print head 6 while printing. In the case of a multi-ink ejection hole head or a configuration in which printing is performed several times in the same place, spiral printing is performed while simultaneously rotating the drum 2 and the feed screw 5 simultaneously.

Here, the "carrier jet" print head 55 applied in the second embodiment may be applied to the line type printer device 120 and the rotary drum type printer device 130. FIG.
"Carrier jet" printhead 11 as shown
0 may be applied.

In the above-described first and second embodiments, the ink pressure chamber forming member 31 and the pressure chamber forming member 71 are formed by using the metal members 38 and 82 such as stainless steel having a thickness of about 0.1 mm. Although each of the examples has been described, the present invention is not limited to this example, and various other numerical values can be applied to the thickness of the metal members 38 and 82. Since the chambers and holes in the ink pressure chamber forming member 31 and the pressure chamber forming member 71 are formed by etching as described above, the metal members 38 and 8 are used.
It is desirable that the thickness of No. 2 be set to 0.07 mm or more. Thus, the thickness of the metal members 38 and 82 is set to 0.0
By setting the distance to 7 mm or more, the metal members 38, 82
In addition, sufficient strength can be provided to increase the pressure in the ink pressure chamber 31c, the ink pressure chamber 71c, and the diluent pressure chamber 71h.

In the first and second embodiments described above, when the pressing temperature is about 230 ° C.,
At a pressure of 30 kgf / cm ² , the orifice plate 33
And 73 have been described by thermocompression bonding to the ink pressure chamber forming member 31 and the pressure chamber forming member 71, respectively. However, the present invention is not limited to this example, as long as the adhesive strength can be obtained. Alternatively, the orifice plates 33 and 73 may be thermocompression-bonded to the ink pressure chamber forming member 31 and the pressure chamber forming member 71, respectively, at various other values.

In the first and second embodiments described above, the ink discharge holes 33a are formed in the resin material 41 and the ink discharge holes 7 are formed in the resin material 85 by using an excimer laser.
3a and the example in which the diluting liquid discharge holes 73b are formed, respectively, but the present invention is not limited to this example, and the ink discharge holes 33a and the ink discharge holes 73a are formed using various lasers such as a carbon dioxide laser. , Diluent discharge hole 73
b may be formed.

In the first and second embodiments described above, examples are described in which the ink pressure chamber 31c and the ink pressure chamber 71c are used as ink chambers filled with ink and to which a predetermined pressure is applied. However, the present invention is not limited to this example, and various other ink chambers can be applied as the ink chamber.

In the first and second embodiments, the ink flow paths 31d and 71e are used as the ink flow paths for supplying the ink supplied from the ink supply source to the respective ink chambers. Although the example in which it is used has been described, the present invention is not limited to this example, and various other ink flow paths can be applied as the ink flow path.

In the first and second embodiments described above, when pressure is applied to each ink flow path, ink supplied from each ink chamber is ejected onto a recording medium. Although the example using the ink ejection holes 33a and 73a as the ejection holes has been described, the present invention is not limited to this example, and various other ink ejection holes can be applied as the ink ejection holes. .

In the second embodiment described above, the diluent pressure chamber 71h is used as a plurality of diluent chambers which are filled with a diluent mixed with ink at the time of ejection and to which a predetermined pressure is applied. Although the embodiments described above have been described, the present invention is not limited to this example, and various other diluent chambers can be applied as the diluent chamber.

In the above-described second embodiment, the diluent flow paths 71i are used as diluent flow paths for supplying diluent supplied from the diluent supply source to the respective diluent chambers.
Has been described, but the present invention is not limited to this example, and various other diluent flow paths can be applied as the diluent flow path.

In the above-described second embodiment, when a pressure is applied to each diluent flow path, the diluent supplied from each diluent chamber is discharged to the recording medium. Although the example in which the diluting liquid discharge hole 73b is used as the liquid discharging hole has been described, the present invention is not limited to this example, and various other diluting liquid discharging holes can be applied as the diluting liquid discharging hole. .

In the first and second embodiments, the ink pressure chamber forming member 31 is formed as a metal plate formed by forming a hole in each ink chamber and each ink flow path.
An example using the pressure chamber forming member 71 has been described. However, the present invention is not limited to this example, and a metal plate formed by forming a hole in each ink chamber and each ink flow path may be used. Various metal plates can be applied.

In the first and second embodiments described above, the orifice plates 33 and 73 are used as plate-like resin materials having ink discharge holes for discharging ink.
However, the present invention is not limited to this example, and various other resin materials may be used as a plate-shaped resin material having ink ejection holes for ejecting ink. Can be.

In the first and second embodiments described above, the resin material having a glass transition point of 250 ° C. or less is an orifice made of Neoflex having a thickness of about 50 μm and a glass transition point of 250 ° C. or less. Plate 33, 73
Has been described, but the present invention is not limited to this example, and various other resin materials can be applied as long as the resin has a glass transition point of 250 ° C. or lower.

[0284] In the above-described embodiment, the first resin material having a glass transition point of 250 ° C or higher and the second resin material having a glass transition point of 250 ° C or lower are laminated. Although an example using the orifice plate 91 has been described, the present invention is not limited to this example, and a first resin material having a glass transition point of 250 ° C. or more and a first resin material having a glass transition point of 250 ° C. or less are used. Various other resin materials can be used as the resin material obtained by laminating the second resin material.

In the first and second embodiments described above, the ink buffer tank 31 is used as the ink distribution means for distributing the ink supplied from the ink supply source.
Although an example using f and the ink buffer tank 71f has been described, the present invention is not limited to this example, and various other ink distribution means can be applied as the ink distribution means.

In the above-described second embodiment, the diluent buffer tank 71k is used as diluent distribution means for distributing diluent supplied from the diluent supply source and mixed with ink at the time of ejection. I explained an example,
The present invention is not limited to this example, and various other diluting liquid distributing means can be applied as the diluting liquid distributing means.

[0287]

According to the printer apparatus of the present invention, the liquid-repellent film prevents the ink from adhering near the opening of the ink discharge hole, so that the ink discharge direction can be stabilized.

Further, in this printer device, since the ink discharge hole protecting member protects the vicinity of the opening of the ink discharge hole,
The occurrence of scratches and the like in the vicinity of the opening of the ink ejection hole is suppressed, and the stability of the ink ejection state can be ensured.

Further, in this printer device, since the ink ejection hole protecting member is bonded to the ink ejection hole forming member using the liquid repellent film as an adhesive, the ink ejection hole forming member using an organic material can be used. However, since the ink ejection hole protecting member can be easily formed, and it is not necessary to newly use an adhesive, the accuracy of the ink ejection holes is deteriorated due to the protrusion of the adhesive, and the repellency near the opening of the ink ejection hole is reduced. Deterioration of liquid property is prevented.

Further, in this printer device, the ink ejection hole protection member is bonded to the ink ejection hole forming member via the liquid repellency treatment film, so that the ink ejection hole protection member covers the liquid repellency treatment film. That is, the peeling failure of the liquid repellent film is prevented.

Further, in the printer according to the present invention, the liquid repellent film prevents the ink and the diluting liquid from adhering near the opening of the ink discharging hole and the diluting liquid discharging light. And mixing of the ink and the diluent in the boundary region with the image data can be prevented, and the gradation corresponding to the image data can be accurately reproduced.

Further, in this printer device, since the discharge hole protection member protects the vicinity of the opening of the ink discharge hole and the diluting liquid discharge hole, the occurrence of scratches or the like near the opening of the ink discharge hole and the diluting liquid discharge hole is prevented. As a result, the stability of the ejection state of the ink and the diluent can be ensured.

Further, in this printer device, the discharge hole forming member is bonded to the discharge hole forming member by using the liquid repellent film as an adhesive, so that it can be easily applied to the discharge hole forming member using an organic material. Since the discharge hole protecting member can be formed at the same time, and it is not necessary to newly use an adhesive, the precision of the ink discharge holes and the diluent discharge holes is deteriorated due to the protrusion of the adhesive, and the ink discharge holes and the diluent discharge holes are deteriorated. Of the liquid repellency near the opening is prevented.

Further, in this printer device, since the discharge hole protecting member is bonded to the discharge hole forming member via the liquid repellent film, the liquid repellent film is covered by the discharge hole protecting member. In addition, it is possible to prevent the liquid-repellent film from peeling off.

Further, according to the method of manufacturing a printer device according to the present invention, since the ink discharge hole protecting member is formed without using a plating method or an electric discharge machining method, the ink discharge hole forming member is formed. Even if an organic material having excellent laser workability is used, the ink discharge hole protecting member can be easily formed.

Further, since the ink ejection hole protection member is adhered to the ink ejection hole forming member by using the liquid repellent treatment film having adhesiveness as an adhesive, the hole accuracy of the ink ejection hole due to the protrusion of the adhesive is improved. Deterioration and deterioration of the liquid repellency near the opening of the ink ejection hole are prevented.

Further, by using the liquid-repellent treatment film as an adhesive for bonding the ink-discharge-hole protective member to the ink-discharge-hole forming member, the liquid-repellent treatment film is covered by the ink-discharge-hole protective member. Defects such as peeling of the processing film are prevented.

Further, according to the method of manufacturing a printer device according to the present invention, since the discharge hole protecting member is formed without using a plating method or an electric discharge machining method, the discharge hole forming member is formed by laser machining. Even if an organic material having excellent properties is used, the discharge hole protecting member can be easily formed.

Also, since the ejection hole protection member is adhered to the ejection hole forming member by using the liquid repellent treatment film having adhesiveness as an adhesive, the ink ejection hole and the diluting liquid ejection hole due to the protrusion of the adhesive are formed. Deterioration of the hole precision and deterioration of the liquid repellency near the openings of the ink discharge holes and the diluent discharge holes are prevented.

Further, by using the liquid-repellent treatment film as an adhesive for bonding the discharge-hole protective member to the discharge-hole forming member, the liquid-repellent treatment film is covered by the discharge-hole protective member. Peeling failure and the like are prevented.

[Brief description of the drawings]

FIG. 1 is a perspective view of a main part of a serial type ink jet printer according to a first embodiment of the present invention.

FIG. 2 is a configuration explanatory diagram illustrating a configuration of a control unit of the printer device.

FIG. 3 is a longitudinal sectional view of an ink jet print head of the printer device.

FIG. 4 is a plan view schematically showing an ink jet print head of the printer device.

FIGS. 5A and 5B are diagrams for explaining the operation of the ink jet print head of the printer device, wherein FIG. 5A is a longitudinal sectional view showing a state where the volume of the ink pressure chamber is increased, and FIG.
FIG. 3 is a longitudinal sectional view showing a state where the volume of the ink pressure chamber is reduced.

FIG. 6 is a view for explaining a manufacturing process of the ink jet print head of the printer device, in which (A) is a longitudinal sectional view showing a state where a resist is formed on a metal member;
(B) is a longitudinal sectional view showing a state where etching is performed using the resist as a mask, and (C) is a longitudinal sectional view showing a state where a resin material is adhered to the metal member from which the resist has been removed; (D) is a longitudinal sectional view showing a state in which a lyophobic treatment film is formed on the resin material, and (E) is an ink ejection hole protection member formed on the resin material using a stick machine treatment film as an adhesive. It is a longitudinal sectional view showing a state of bonding,
(F) is a longitudinal sectional view showing a state in which ink ejection holes are formed in the resin material and the liquid repellent treatment film.

FIG. 7 is a view for explaining a manufacturing process of the ink jet print head of the printer device. FIG. 7 (A) shows that a diaphragm having a projection formed on one main surface of the metal member is bonded by thermocompression bonding. FIG. 4B is a longitudinal sectional view showing a state in which a through hole is formed in the diaphragm, and FIG. 4B shows a state in which a laminated piezo is adhered to the protrusion, and an ink supply tube is adhered to the diaphragm in accordance with the through hole. FIG.

FIG. 8 is a longitudinal sectional view showing another example of the vibration plate and the protrusion.

9A and 9B are diagrams illustrating another example of the manufacturing process of the ink jet print head of the printer device, wherein FIG.
FIG. 4B is a vertical cross-sectional view showing a state in which ink ejection holes are formed in an orifice plate and a liquid repellent treatment film, and FIG. FIG.

FIG. 10 is a perspective view of a main part of a serial type “carrier jet” printer device according to a second embodiment of the present invention.

FIG. 11 is a configuration explanatory diagram showing a configuration of a control unit of the printer device.

FIG. 12 is a diagram illustrating the operation of the control unit.

FIG. 13 is a diagram illustrating timings of drive voltages applied to a first piezo element and a second piezo element.

FIG. 14 is a longitudinal sectional view of a “carrier jet” print head of the printer device.

FIG. 15 is a plan view schematically showing a “carrier jet” print head of the printer apparatus.

FIG. 16 is a view for explaining the operation of the “carrier jet” print head of the printer apparatus, where (A) is a longitudinal sectional view showing a state where the volumes of the ink pressure chamber and the diluent pressure chamber are increased; (B) is a longitudinal sectional view showing a state where the volume of the ink pressure chamber is reduced, and (C) is a longitudinal sectional view showing a state where the volume of the diluent pressure chamber is reduced.

FIG. 17 is a diagram illustrating a manufacturing process of a “carrier jet” print head of the printer device, wherein FIG.
It is a longitudinal cross-sectional view which shows the state which formed the resist on the metal member, (B) is a longitudinal cross-sectional view which shows the state which performed the etching using the said resist as a mask, (C) is the metal which removed the said resist. It is a longitudinal cross-sectional view which shows the state which bonded the resin material to the member, (D) is a longitudinal cross-sectional view which shows the state which formed the lyophobic processing film on the said resin material, (E)
FIG. 5F is a longitudinal sectional view showing a state in which the ejection hole protection member is bonded to the resin material using the liquid repellent treatment film as an adhesive;
FIG. 3 is a longitudinal sectional view showing a state in which ink ejection holes and diluent ejection holes are formed in the resin material and the liquid repellent treatment film.

FIG. 18 is a diagram illustrating a manufacturing process of a “carrier jet” print head of the printer device, wherein (A) is
A diaphragm having a first projection and a second projection formed on one main surface of the metal member is bonded by thermocompression bonding, and a first through hole and a second through hole are formed in the diaphragm. FIG. 4B is a longitudinal sectional view showing a state in which the first laminated piezo is adhered to the first projection, the second laminated piezo is adhered to the second projection, FIG. 9 is a longitudinal sectional view showing a state in which an ink supply pipe is bonded to the diaphragm in accordance with the through hole, and a diluent supply pipe is bonded to the diaphragm in accordance with the second through hole.

FIG. 19 is a longitudinal sectional view showing another example of the diaphragm to which the first projection and the second projection are joined.

FIG. 20 is a diagram illustrating another example of the manufacturing process of the “carrier jet” print head of the printer device,
(A) is a longitudinal sectional view showing a state in which an ink discharge hole and a diluent discharge hole are formed in an orifice plate and a liquid repellent treatment film, and (B) is a view in which first and second protrusions are formed. It is a longitudinal cross-sectional view showing the state where the diaphragm and the discharge hole protection member were joined to the metal member.

FIG. 21 is a longitudinal sectional view showing another example of the resin material.

FIG. 22 is a longitudinal sectional view showing another example of the inkjet print head.

23A and 23B are diagrams illustrating an operation of the ink jet print head, FIG. 23A is a longitudinal sectional view illustrating an initial state of the ink jet print head, and FIG.
FIG. 3 is a longitudinal sectional view showing a state where the volume of the ink pressure chamber is reduced.

FIG. 24 is a longitudinal sectional view showing another example of a “carrier jet” print head.

FIGS. 25A and 25B are diagrams for explaining the operation of the “carrier jet” print head, FIG. 25A is a longitudinal sectional view showing the initial state of the “carrier jet” print head, and FIG. It is a longitudinal section showing the state where the volume of the chamber was reduced, and (C) is a longitudinal section showing the state where the volume of the diluent pressure chamber was reduced.

FIG. 26 is a diagram illustrating timings of driving voltages applied to a first piezo element and a second piezo element.

FIG. 27 is a longitudinal sectional view showing another example of the ink jet print head of the printer device.

FIG. 28 is a longitudinal sectional view showing another example of the “carrier jet” print head of the printer device.

FIG. 29 is a perspective view of a main part of the line printer.

FIG. 30 is a perspective view of a main part of a drum rotary printer.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Serial-type inkjet printer apparatus, 31 Ink pressure chamber forming member, 31c Ink pressure chamber, 31e
Ink introduction hole, 33 orifice plate, 33a ink ejection hole, 42 liquid repellent treatment film, 43 ink ejection hole protection member, 43a opening, 50 serial type "carrier jet" printer, 67 liquid repellent treatment film, 68 ejection hole protection Member, 68a opening, 71 pressure chamber forming member,
71c ink pressure chamber, 71d ink introduction hole, 71h
Diluent pressure chamber, 71j diluent introduction hole, 73 orifice plate, 73a ink discharge hole, 73b diluent discharge hole,

Claims (40)

[Claims] 1. A vibration plate is joined to one main surface of a pressure chamber forming member, and an ink ejection hole forming member made of an organic material is joined to the other main surface, and the pressure chamber is attached to the ink ejection hole forming member. In a printer device, an ink ejection hole communicating with an ink pressure chamber of a forming member is formed, and ink in the ink pressure chamber is ejected from the ink ejection hole by displacement of the vibration plate. A liquid repellent treatment film having an adhesive property is formed in the vicinity of the portion, and an ink ejection hole protection member having an opening having a diameter larger than the ink ejection hole is bonded using the liquid repellent treatment film as an adhesive. A printer device. 2. The printer device according to claim 1, wherein the ink ejection holes are formed by laser processing the ink ejection hole forming member. 3. The printer according to claim 1, wherein the diameter of the opening of the ink discharge hole protection member is substantially equal to the width of the ink pressure chamber. 4. The printer device according to claim 1, wherein the liquid-repellent film is made of a liquid-repellent polyimide material. 5. The printer device according to claim 4, wherein the polyimide material having liquid repellency has a water absorption of 0.4% or less after immersion in water at 23 ° C. for 24 hours. 6. The printer device according to claim 4, wherein the polyimide material having liquid repellency is a material containing polyimide siloxane. 7. The printer device according to claim 1, wherein the ink ejection hole protection member is made of a metal material containing nickel as a main component. 8. The printer device according to claim 7, wherein a fluorine-containing nickel plating layer is formed on a surface of the ink discharge hole protection member. 9. The printer device according to claim 7, wherein a fluorine-containing nickel eutectoid plating layer is formed on a surface of the ink discharge hole protection member. 10. A diaphragm is joined to one main surface of the pressure chamber forming member, and a discharge hole forming member made of an organic material is joined to the other main surface, and the pressure chamber forming member is joined to the discharge hole forming member. An ink discharge hole communicating with the ink pressure chamber is formed, and a diluent discharge hole communicating with the diluent pressure chamber of the pressure chamber forming member is formed. Wherein the diluent in the diluent pressure chamber is discharged from the diluent discharge hole while the diluent in the diluent pressure chamber is discharged from the ink discharge hole, and at least the opening of the ink discharge hole and the vicinity of the opening of the diluent discharge hole Is formed with a liquid-repellent treatment film having adhesiveness, and the liquid-repellent treatment film is used as an adhesive and has an opening having a diameter larger than that of the ink discharge hole and the diluent discharge hole. Printer apparatus characterized by pores protective member is bonded. 11. The printer device according to claim 10, wherein the ink discharge holes and the diluent discharge holes are formed by laser processing the discharge hole forming member. 12. The printer according to claim 10, wherein the diameter of the opening of the discharge hole protection member is substantially equal to the width of the ink pressure chamber and the diluent pressure chamber. 13. The printer device according to claim 10, wherein the liquid-repellent treatment film is made of a liquid-repellent polyimide-based material. 14. The printer device according to claim 13, wherein the polyimide material having liquid repellency has a water absorption of 0.4% or less after immersion in water at 23 ° C. for 24 hours. 15. The printer according to claim 13, wherein the liquid-repellent polyimide-based material is a material containing polyimidesiloxane. 16. The discharge hole protecting member is made of a metal material containing nickel as a main component.
0. The printer according to item 0. 17. The printer according to claim 16, wherein a fluorine-containing nickel plating layer is formed on a surface of the discharge hole protection member. 18. The printer device according to claim 16, wherein a fluorine-containing nickel eutectoid plating layer is formed on a surface of the discharge hole protecting member. 19. A pressure plate forming member, wherein a vibration plate is joined to one main surface and an ink ejection hole forming member made of an organic material is joined to the other main surface, and the pressure chamber forming member is joined to the ink ejection hole forming member. A method of manufacturing a printer device, wherein an ink discharge hole communicating with an ink pressure chamber of a member is formed so that ink in the ink pressure chamber is discharged from the ink discharge hole by displacement of the vibration plate. A liquid-repellent treatment film forming step of forming a liquid-repellent treatment film having adhesiveness in the vicinity of the opening of the discharge hole; and using the liquid-repellent treatment film as an adhesive, in the vicinity of the opening of the ink discharge hole. And a step of bonding an ink discharge hole protecting member having an opening having a large diameter. 20. The method according to claim 19, wherein the ink ejection hole is formed by laser processing the ink ejection hole forming member. 21. The method according to claim 19, wherein the ink ejection hole protection member is bonded to the ink ejection hole forming member by hot pressing. 22. The method according to claim 19, wherein the opening of the ink discharge hole protection member is formed so that the diameter thereof is substantially equal to the width of the ink pressure chamber. . 23. The manufacturing method of a printer device according to claim 19, wherein the step of bonding the ink discharge hole protection member is performed simultaneously with the joining of the vibration plate to one main surface of the pressure chamber forming member. Method. 24. The method according to claim 19, wherein the liquid repellent film is made of a polyimide material having liquid repellency. 25. The printer according to claim 24, wherein the polyimide material having liquid repellency has a water absorption of 0.4% or less after immersion in water at 23 ° C. for 24 hours. Production method. 26. The method according to claim 24, wherein the liquid-repellent polyimide-based material is a material containing polyimidesiloxane. 27. The method according to claim 19, wherein the ink ejection hole protection member is made of a metal material containing nickel as a main component. 28. The surface of the ink ejection hole protection member,
The method according to claim 27, further comprising a step of forming a fluorine-containing nickel plating layer. 29. The surface of the ink ejection hole protection member,
The method for manufacturing a printer device according to claim 27, further comprising a step of forming a fluorine-containing nickel eutectoid plating layer. 30. A vibration plate is joined to one main surface of the pressure chamber forming member, and a discharge hole forming member made of an organic material is joined to the other main surface of the pressure chamber forming member. An ink discharge hole communicating with the ink pressure chamber is formed, and a diluent discharge hole communicating with the diluent pressure chamber of the pressure chamber forming member is formed. In the method of manufacturing a printer device, wherein the diluent is discharged from the discharge hole and the diluent in the diluent pressure chamber is discharged from the diluent discharge hole, at least in the vicinity of the opening of the ink discharge hole and the diluent pressure chamber. A liquid-repellent treatment film forming step of forming a liquid-repellent treatment film having an adhesive property; and Method of manufacturing a printing apparatus and having a discharge hole protecting member bonding step of ink ejection holes and diameter than the diluent discharge hole to adhere the discharge hole protecting member having an opening which is large. 31. The method according to claim 30, wherein the ink ejection holes and the diluting liquid ejection holes are formed by laser processing the ejection hole forming member. 32. The method according to claim 30, wherein the discharge hole protecting member is bonded to the discharge hole forming member by hot pressing. 33. The opening of the discharge hole protection member is formed such that its diameter is substantially equal to the width of the ink pressure chamber and the diluent pressure chamber.
0. A method for manufacturing a printer device according to item 0. 34. The method according to claim 30, wherein the step of bonding the discharge hole protecting member is performed simultaneously when the diaphragm is joined to one main surface of the pressure chamber forming member. . 35. The method according to claim 30, wherein the liquid-repellent treatment film is made of a liquid-repellent polyimide-based material. 36. The printer device according to claim 35, wherein the polyimide material having liquid repellency has a water absorption of 0.4% or less after immersion in water at 23 ° C. for 24 hours. Production method. 37. The method according to claim 35, wherein the polyimide material having liquid repellency is a material containing polyimide siloxane. 38. The discharge hole protection member is made of a metal material containing nickel as a main component.
0. A method for manufacturing a printer device according to item 0. 39. The method according to claim 38, further comprising the step of forming a fluorine-containing nickel plating layer on the surface of the discharge hole protection member. 40. The method according to claim 38, further comprising the step of forming a fluorine-containing nickel eutectoid plating layer on the surface of the discharge hole protecting member.