JPH1081022A - Printer device and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately represent a medium tone and reduce cost to a comparatively lower level to deal with a low price trend. SOLUTION: Pressure is applied to a metered medium in a metered medium pressure chamber 4 filled with the metered medium using a piezo element 20, and the metered medium is mixed with a jetting medium in a jetting medium nozzle 2 which communicates with the metered medium pressure chamber 9 filled with the jetting medium. Further, pressure is applied to the jetting medium contained in the pressure chamber 9 with the help of a heating element 23 to jet a mixed liquid droplet of the metered medium and the jetting medium. The piezo element 20 may be used as a means for applying pressure to the jetting medium and the heating element 23 may be used as a means for applying pressure to the metered medium. In addition, a nozzle 1 for the metered medium and the jetting medium nozzle 2 are preferably of such a configuration that these nozzles 1, 2 are opened at mutually adjacent positions. Besides, both pressure chamber 4 for the metered medium and heating element 23 are preferably of the monolithic form using a single member of a heating element plate 90.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printer for mixing and discharging a fixed amount medium and a discharge medium, and a method for manufacturing the same. More specifically, by using a heating element and a piezo element in combination as a pressure applying means for discharging the quantitative medium and the discharging medium, gradation expression can be accurately performed, and the manufacturing cost can be kept relatively low. And a method of manufacturing the same.

[0002]

2. Description of the Related Art In recent years, documents such as desktop publishing have been actively used in offices and the like. Recently, not only characters and figures but also color images such as photographs have been developed. There has been an increasing demand for outputting natural images together with characters and figures. Along with this, it is required to print a high-quality natural image, and gradation expression by halftone display is important.

A so-called on-demand type in which ink droplets are ejected from nozzles only when necessary during printing in accordance with a control signal in accordance with a recording signal and are adhered to a recording material such as paper or film to perform recording. In recent years, the printer device has been rapidly spreading because of the possibility of miniaturization and cost reduction.

As described above, various methods have been proposed for discharging ink droplets from nozzles.
A method using a piezo element or a method using a heating element is generally used. The former is a method in which pressure is applied to ink to discharge it by deformation of a piezo element. The latter is a method in which the ink in the nozzle is heated and vaporized by the heating element, and the ink is ejected at the pressure of bubbles generated.

Various methods have been proposed as methods for simulating the above-described gray scale display by halftone display with an on-demand type printer apparatus which discharges the above-described ink droplets. That is, the first method is to control the size of a droplet to be ejected by changing the voltage or pulse width of a voltage pulse applied to a piezo element or a heating element, and to express gradation by changing the diameter of a print dot. Can be

As a second method, one pixel is constituted by a matrix composed of, for example, 4 × 4 dots without changing the dot diameter, and gradation is expressed by a so-called dither method or the like in units of the matrix. Is mentioned.

[0007]

However, in the above first method, if the voltage or pulse width applied to the piezo element or the heating element is too low, the ink will not be ejected, and the minimum droplet diameter is limited. There is a drawback that the number of gradation steps that can be expressed is small, and it is particularly difficult to express low density. Therefore, it is unsatisfactory to print out a natural image.

On the other hand, in the second method, when one pixel is constituted by a 4 × 4 matrix, a density of 17 gradations can be expressed. For example, the same dot density as in the first method is used. When printed, the resolution is reduced to 1/4, and the roughness is conspicuous, which is also unsatisfactory for printing out a natural image.

In view of the above, there has been proposed a printer called a carrier jet printer which performs printing by discharging a mixed liquid obtained by quantitatively mixing a diluting liquid and ink. In this carrier jet printer, one of the diluent and the ink, for example, the ink is quantified in a predetermined amount in accordance with a desired gradation, and the quantified ink is mixed with a diluent that is a transparent solvent, for example. Printing is performed by discharging the mixed liquid at a constant amount.

The above-described carrier jet printer can modulate the ink concentration of the mixed liquid by the ratio of the amount of the ink to the amount of the diluting liquid, and can change the ink concentration for each dot to be printed. Yes, it is possible to perform printing using the gray scale in the dot.

The above-described carrier jet printer is disclosed in Japanese Patent Application Laid-Open No. Hei 5-201024 (US Pat. No. 961982). One that performs quantitative mixing has been proposed.

[0012] The above-mentioned electroosmosis means that a porous membrane is provided so as to partition a container filled with an electrolyte solution into, for example, left and right, and an electrode plate is inserted into each of the left and right electrolyte solutions. Is a phenomenon in which the electrolyte solution moves from one side to the other side via the porous diaphragm when is applied.

In the above-mentioned electroosmosis, since the amount of permeation (the amount of movement) of the electrolyte solution is proportional to the amount of electricity flowing, the amount of movement is controlled by controlling the amount of electricity. If it is moved, it is possible to perform relatively accurate quantitative mixing with the solution on the discharge side. That is, if one of the electrolyte solutions is used as an ink and the other is used as a transparent solvent, and for example, the ink is used as the metering side, relatively accurate quantitative mixing with the transparent solvent on the ejection side can be performed.

However, since the frequency response of the electroosmosis phenomenon is slower than, for example, a piezo element or a heating element, it has been difficult to increase the printing speed. In electroosmosis, since an electrolyte solution is used,
When water is used as the transparent solvent, there is a problem that bubbles are generated due to electrolysis, which hinders printing and impairs the recording characteristics of the printer device.

In order to solve such a problem, a piezo element is used for quantitatively mixing a quantifying medium, for example, an ink, with a discharge medium, for example, a diluting liquid, and a piezo element is also used for discharging these mixed liquids. There has been proposed a device or a printer device which uses a heating element for quantitatively mixing a fixed amount medium such as an ink with a discharge medium such as a diluting liquid and uses the heating element also for discharging these mixed liquids.

However, in a printer device using a piezo element for quantification of a quantification medium and ejection of a mixed liquid, accurate quantification and mixing can be performed because the piezo element has good responsiveness to changes in voltage and pulse width. However, since the cost of the piezo element is relatively high, the cost of the printer is also high, and it has been difficult to cope with a reduction in the price of the printer.

On the other hand, in a printer device which uses a heating element for quantification of a quantitative medium and discharge of a mixed liquid, the heating element is relatively inexpensive, so that it is easy to respond to a reduction in price, but the voltage and pulse width are easily adjusted. However, since the response of the heating element to the change in the temperature is not as good as that of the piezo element, it is difficult to perform accurate quantitative mixing, especially on the low concentration side, and the power consumption increases.

In the above-described printer, the mixing of the quantifying medium and the ejection medium is performed inside the nozzle for ejecting the mixed liquid, and the mixing of the quantifying medium and the ejection medium is not performed. There is a disadvantage that it is not always easy to prevent spontaneous mixing of the quantitation medium and the ejection medium during standby or unnecessary mixing due to mutual pressure interference between the quantitation medium and the ejection medium during operation.

Therefore, the present invention has been proposed in view of the conventional situation, and a printer device capable of accurately expressing halftones, having a relatively low cost, and capable of coping with low prices. And a method for producing the same.

[0020]

In order to achieve the above object, the present invention provides a discharge medium pressure chamber filled with a discharge medium, a discharge medium nozzle communicating therewith, and a fixed medium pressure filled with a fixed medium. And at least a chamber, and applying pressure to the quantification medium in the quantification medium pressure chamber by the first pressure applying means, and mixing the quantification medium with the ejection medium in the ejection medium nozzle,
In a printer apparatus for applying a pressure to a discharge medium in a discharge medium pressure chamber by a second pressure applying means to discharge a mixed droplet of a fixed medium and a discharge medium, the first pressure applying means and the second pressure applying means One of them is a piezo element and the other is a heating element.

In the printer of the present invention,
Preferably, the first pressure applying means is a piezo element.

In the printer of the present invention,
A quantitation medium nozzle communicating with the quantitation medium pressure chamber is opened so as to be adjacent to the ejection medium nozzle, and the quantitation medium is exuded from the quantification medium nozzle toward the ejection medium nozzle, and the quantitation medium is ejected from the ejection medium nozzle. It is preferable to mix with the ejection medium in the nozzle.

Further, in the printer device of the present invention, the pressure chamber plate in which a pressure chamber in which a piezo element is used as a pressure applying means is formed at a predetermined position on a base having a through hole at a predetermined position. A heating element plate on which a heating element is formed is disposed at a predetermined position, and a piezo element is disposed through a through hole of the base. It is preferable to be disposed on the upper side via a diaphragm.

Further, in this case, when at least one pressure chamber plate and at least two heating element plates are used, the pressure chamber plate is sandwiched between the heating element plates and arranged on the base. Is preferred.

Further, according to the method of manufacturing a printer of the present invention, a recess for forming a first pressure chamber is formed at a predetermined position on a substrate, and a heating element is formed at a predetermined position on the substrate. A partition layer having a first through hole communicating with the concave portion and a second through hole exposing the heating element is formed thereon, and the first through hole is formed on the partition layer at a position corresponding to the first through hole. An orifice plate having a second nozzle is disposed at a position corresponding to the first nozzle and the second through-hole, and a first pressure chamber is formed by the recess and the first through-hole, and a first pressure chamber communicating with the first pressure chamber is formed. In addition to forming a nozzle, a second pressure chamber in which a heating element is disposed by a second through hole is formed, and a second nozzle communicating with the second pressure chamber is formed.

In this case, the first pressure chamber is a fixed-medium pressure chamber, the first nozzle is a fixed-medium nozzle,
It is preferable that the second pressure chamber be a discharge medium pressure chamber and the second nozzle be a discharge medium nozzle.

In the printer of the present invention, the first pressure applying means for applying pressure to the fixed medium pressure chamber filled with the fixed medium and the pressure is applied to the discharge medium pressure chamber filled with the discharged medium. Since one of the second pressure applying means is a piezo element and the other is a heating element, cost is reduced and power consumption is reduced.

Then, in the printer of the present invention,
If the piezo element is used as the first pressure applying means for applying pressure to the quantitation medium pressure chamber, since the piezo element has good responsiveness to changes in voltage and pulse width, the quantification medium is ejected from the ejection medium nozzle. The applied pressure at the time of mixing with the medium is accurately controlled, and accurate quantitative mixing is performed.

Further, in the printer of the present invention, the quantitation medium nozzle communicating with the quantitation medium pressure chamber has an opening so as to be adjacent to the ejection medium nozzle, and the quantitation medium nozzle is directed from the quantification medium nozzle toward the ejection medium nozzle. If the medium is exuded and the quantitation medium is mixed with the ejection medium in the ejection medium nozzle, natural mixing of the quantification medium and the ejection medium at the time of operation standby, or the quantification medium side and the ejection medium side at the time of operation are performed. Unnecessary mixing due to mutual pressure interference is easily prevented.

Further, the printer of the present invention is formed by forming a concave portion for forming a first pressure chamber at a predetermined position on a substrate, forming a heating element at a predetermined position on the substrate, and further forming a heating element thereon. A partition layer having a first through-hole communicating with the recess and a second through-hole exposing the heating element is formed, and a first nozzle and a first nozzle are formed thereon at positions corresponding to the first through-hole. An orifice plate having a second nozzle is arranged at a position corresponding to the second through hole, a first pressure chamber is formed by the recess and the first through hole, and a first nozzle communicating with the first pressure chamber is formed. At the same time, if the second pressure chamber in which the heating element is disposed by the second through hole is formed and the second nozzle communicating with the second pressure chamber is formed, the first pressure chamber can be manufactured.
And the second pressure chamber are formed at the same time,
The manufacturing process is shortened. Further, since these are simultaneously formed, the number of steps requiring alignment is reduced, and manufacturing defects are less likely to occur, thereby improving the manufacturing yield.

[0031]

Embodiments of the present invention will be described below in detail with reference to the drawings.

The print head of the printer of this embodiment is
As shown in the plan view of FIG. 1, eight nozzle sets 3 which are combinations of the quantitative medium nozzles 1 and the discharge medium nozzles 2 are arranged so that the quantitative medium nozzles 1 and the discharge medium nozzles 2 are adjacent to each other. In FIG. 1, these nozzle sets 3 are open facing the same surface on the back side of the paper.

To the quantification medium nozzles 1, quantification medium pressure chambers 4 are connected via nozzle communication passages 5, respectively. It is connected to the liquid chamber 7. Further, a fixed-medium supply hole 8 for connection to a not-shown fixed-medium tank is formed in the common-measurement-medium liquid chamber 7.

That is, the quantification medium is supplied from a quantification medium tank (not shown) to the quantification medium supply liquid chamber 7 through the quantification medium supply hole 8, and from the quantification medium supply liquid chamber 7 to each quantification medium supply path 6 The fixed-medium pressure chamber 4 is supplied to the fixed-medium pressure chambers 4, and the fixed-medium medium nozzles 1 are filled from the fixed-medium pressure chambers 4 through the nozzle communication paths 5.

A discharge medium pressure chamber 9 is connected to one of the discharge medium nozzles 2 on the bottom side, which is the paper surface side in FIG. 1, and these discharge medium pressure chambers 9 are connected to the discharge medium supply passage 10. It is connected to the discharge medium common liquid chamber 11 through the. A discharge medium supply hole 12 for connecting to a discharge medium tank (not shown) is formed in the discharge medium common liquid chamber 11.

That is, the discharge medium is supplied from a discharge medium tank (not shown) to the discharge medium supply liquid chamber 11 through the discharge medium supply hole 12, and from the discharge medium supply liquid chamber 11 to each discharge medium supply path 10 through each discharge medium supply path 10. The liquid is supplied to the discharge medium pressure chambers 9, and is filled into the discharge medium nozzles 2 from each discharge medium pressure chamber 9.

FIG. 2 is a cross-sectional view of the printer device of the present embodiment shown in FIG. 1 at the position indicated by AA 'in the drawing. As shown in FIG. 2, the printer device of the present embodiment includes an orifice plate 13 in which a fixed-medium nozzle 1 and a discharge-medium nozzle 2 are formed as through holes in the thickness direction, and a nozzle connection not shown in FIG. Passage 5, fixed medium supply path 6, fixed medium common supply path 7, discharge medium pressure chamber 9, discharge medium supply path 10,
A partition 14 that forms the common supply path 11 for the discharge medium, a pressure chamber plate 15 and a heating element plate 16 in which the fixed-medium pressure chamber 4 is formed, a diaphragm 17 and a base 18 are laminated. At this time, the pressure chamber plate 15
The heating element plate 16 and the heating element plate 16 are formed as members having substantially the same thickness, and are arranged so that the ends thereof abut each other.

That is, the orifice plate 13 shown in FIG.
The main surface 13a at the middle and lower sides is the back side of the paper surface in FIG. 1, and the quantitative medium nozzle 1 and the discharge medium nozzle 2 are opened facing this surface. In addition, the upper main surface 1 of the base 18 in FIG.
8a is the paper surface side in FIG. The fixed medium supply hole 8 and the discharge medium supply hole 12 shown in FIG. 1 penetrate the pressure chamber plate 15 or the heating element plate 16, the vibration plate 17, and the base 18 in the thickness direction as shown in FIG. It is formed.

Further, in the printer of this embodiment,
A through-hole 19 is formed in a portion of the base 18 corresponding to the fixed-medium pressure chamber 4, and a part of the vibration plate 17 is exposed in the through-hole 19.
The piezo element 20 is disposed on the upper side 7. In this example, the piezo element 20 is a so-called laminated piezo element, and is of a type that is displaced in a direction perpendicular to the diaphragm 17.

That is, FIG. 3 is a cross-sectional view of the printer device of the present embodiment shown in FIG.
The piezo elements 20 are arranged at positions corresponding to the respective fixed-medium pressure chambers 4 on the vibration plate 17.

Next, FIG. 4 shows the quantitative medium nozzle 1, the discharge medium nozzle 2, the quantitative medium pressure chamber 4,
FIG. 3 is an enlarged plan view of a main part, showing a part of the vicinity of the ejection medium pressure chamber 9 cut away.

In the printer of this embodiment, as described above, the quantitation medium common liquid chamber 7 and the quantification medium pressure chamber 4 are connected via the quantification medium supply passage 6, and the quantification medium pressure chamber 4
The quantitation medium nozzle 1 is connected to the quantitation medium nozzle 1 through the nozzle communication path 5, and the quantitation medium 21 is filled up to the tip of the quantification medium nozzle 1 therethrough.

In the printer of this embodiment, as described above, the discharge medium common liquid chamber 11 and the discharge medium pressure chamber 9 are used.
Are connected via a discharge medium supply passage 10, the discharge medium pressure chamber 9 is formed so as to form the bottom side of the discharge medium nozzle 2, and the discharge medium 22 is filled up to the tip of the discharge medium nozzle 2 through these. You.

Next, FIG. 5 shows a cross-sectional view of the printer device of the present embodiment shown in FIG. 4 taken along the line CC 'in FIG. FIG. 5 is an enlarged view of the main part of FIG. 2 described above. As shown in FIG. 5, the ejection medium nozzle 2 is provided with an orifice plate 13.
The quantitative medium nozzle 1 is formed as a through-hole oblique to the thickness direction of the orifice plate 13, and is further enlarged in FIG. 6A. As described above, the quantitative medium nozzle 1 is formed so as to approach the discharge medium nozzle 2 toward the one main surface 13a of the orifice plate 13. Further, as shown in FIG. 6B, the fixed-medium medium nozzle 1 is formed as a through-hole having a circular cross section, the opening in the oblique direction becomes elliptical, and the discharge medium nozzle 2 is formed as a through-hole having a circular cross section. .

As shown in FIGS. 5 and 6, on the orifice plate 13, the nozzle communication path 5, the fixed medium supply path 6, the fixed medium common liquid chamber 7, and the discharge A partition wall 14 having a through hole having a shape corresponding to the medium pressure chamber 9, the discharge medium supply path 10, and the discharge medium common liquid chamber 11.
Are laminated.

As shown in FIGS. 5 and 6, a pressure chamber plate 15 having a through hole for forming the discharge medium pressure chamber 4 and a main surface 16a on the side of the partition 14 are provided on the partition 14. The heating element 2 is located at a position corresponding to the ejection medium pressure chamber 9.
The heat generating element plates 16 on which the heat generating element 3 is formed are stacked so that their ends face each other. The pressure chamber plate 15 and the heating element plate 16 are members having substantially the same thickness as described above, and form one surface in a stacked state. In addition, a convex portion 24 is formed on the partition wall 14 side of the through-hole corresponding to the fixed-medium pressure chamber 4 of the pressure chamber plate 15.

As shown in FIG. 7 which is a cross-sectional view taken along the line DD 'in FIG. 4, the convex portion 24 has a fixed medium pressure It is formed so that the depth of the chamber 4 in the thickness direction of the pressure chamber plate 15 is reduced.

Further, as shown in FIG. 5, a vibration plate 17 is disposed on the pressure chamber plate 15 and the heating element plate 16, and in this vibration plate 17, as shown in FIGS. In a portion corresponding to the fixed-medium pressure chamber 4, a concave portion 25 is formed along the outer peripheral edge of this portion, and a protrusion 26 is formed inside the concave portion 25. The projection 26 has a substantially planar elliptical shape as shown in FIG.

As shown in FIGS. 1 to 3, 5 and 7, a through hole 19 is provided on the diaphragm 17 so as to expose the diaphragm 17 at a position corresponding to the fixed-medium pressure chamber 4. Are laminated.

As shown in FIGS. 4, 5 and 7, a piezo element 20 is arranged on the projection 26. As shown in FIG. The piezo element 20 is of a type that is displaced in a direction perpendicular to the diaphragm 17 as described above, and the opposite side to the diaphragm 17 is fixed to a support member (not shown), and the piezoelectric element 20 is displaced with the support member as a fixed end. Have been like to be. By arranging the piezo element 20 in this manner, the piezo element 20
Even if an alignment error between the diaphragm 17 and the diaphragm 17 occurs, a certain portion of the diaphragm 17 can be displaced. In addition, since the convex portion 24 is formed substantially at the center also in the fixed-medium pressure chamber 4 which is a lower portion of the vibration plate 17, the pressure applied by the deformation of the piezo element 20 causes the pressure in the fixed-medium pressure chamber to be lower. The pressure change is significant.

Further, in the printer of the present embodiment,
As shown in FIG. 1, there are provided external connection terminals 27 for connecting driving means and the like, first positioning holes 28, second positioning holes 29, and elongated holes 30 for alignment during assembly. ing.

Next, the printing operation of the above-described printer will be described together with the driving voltage waveform. Here, using the layered piezoelectric element as a piezoelectric element 20, utilizing a displacement in the lamination direction (the so-called d ₃₁ direction) direction perpendicular to that to the stacking direction utilizing the displacement of the (so-called d ₃₃ direction) An example of using the latter will be described.
In such a piezo element 20, since a displacement in the contraction direction is generated by applying a voltage, a positive voltage is applied in advance, and when the quantitative medium is extruded, the voltage is reduced to extend the piezo element 20. .

First, as shown in FIG. 8A, the quantitation medium 21 and the discharge medium 22 are filled as described above, and the meniscus m of the quantification medium 21 is
₁ is formed, and the discharge medium 2 is
A second meniscus m ₂ is formed. In the printer of the present embodiment, since the quantitation medium nozzle 1 and the ejection medium nozzle 2 are formed independently of each other, the quantitation medium 21 and the ejection medium 22 do not come into contact with each other in this state, and are naturally in the standby state. No mixing. At this time, as shown in FIG. 9, the driving voltage waveform of the piezo element 20 shown in FIG. 9A is maintained at, for example, 10 V at the time shown in FIG. 9A, and the driving voltage waveform of the heating element 23 shown in FIG. The drive voltage is maintained at 0 V at the point indicated by (a) in the figure. Note that FIG.
, The vertical axis represents voltage, and the horizontal axis represents time.

Next, at the time shown by (b) in FIG. 9, the drive voltage of the piezo element 20 is gradually reduced. Here, it is assumed that the temperature is lowered over a period of 20 μsec. Then, since the printer of the present example has the configuration as described above, the piezo element 20 is
7 so as to press the projection 26, the diaphragm 17 bends to apply pressure to the fixed-medium pressure chamber 4, and is inclined toward the discharge medium nozzle 2 as shown in FIG. From the formed measuring medium nozzle 1, the measuring medium 21 is extruded toward the discharge medium nozzle 2.

Further, the driving voltage of the piezo element 20 is set to 0 V at the time point shown by (c) in FIG. 9, and the driving voltage of the piezo element 20 is held at 0 V for 20 μsec from the time point shown by (c). Then, as shown in FIG. 8C, the quantitative medium 21 is extruded, comes into contact with the discharge medium 22 in the discharge medium nozzle 2, and is connected by surface tension.

Subsequently, at a time point slightly earlier than the time point shown in FIG. 9D, the drive voltage of the heating element 23 shown in FIG. 9B is set to 5 V, and the drive voltage of the piezo element 20 is returned to the original 10 V. Start to gradually raise to return. FIG. 8D shows a state at a time point indicated by (d) in FIG. 9 in which a little time has passed in this state. That is, air bubbles 31 are generated on the heating element 23 by so-called film boiling, and pressure is applied to the discharge medium 22 in the discharge medium pressure chamber 9, and the discharge medium 22 in the discharge medium nozzle 2 is pushed out. Then, since the drive voltage of the piezo element 20 is gradually increased,
The piezo element 20 starts to contract gradually, and attempts to draw the quantitative medium 21 into the quantitative medium nozzle 1. At this time, the quantitation medium 21 in contact with the ejection medium 22 in the ejection medium nozzle 2
Is extruded together with the ejection medium 22.

Then, when the driving voltage of the heating element 23 is maintained at 5 V from the time point shown in FIG. 9D to the time point shown in FIG. 9E, as shown in FIG.
The upper bubble 31 grows to the maximum volume. Here, the drive voltage of the heating element 23 is set to 0 at the time indicated by (e) in FIG.
When V is reached, the bubble 31 starts to contract. Note that FIG.
At the time point shown in the middle (e), the drive voltage to the piezo element 20 is gradually increased, and as shown in FIG. Is drawn into the fixed amount medium nozzle 1.

Then, at the time shown in FIG. 9 (f) while the drive voltage of the piezo element 20 is gradually increased, for example, as shown in FIG.
The constant-volume medium 21 is drawn into the inside, and since the driving voltage to the heating element 23 is set to 0 V, the bubbles 31 on the heating element 23 rapidly contract, and the ejection medium 22 is moved into the ejection medium nozzle 2. The ejection medium 22 is drawn in and constricted with the ejection medium 22 extruded from the ejection medium nozzle 2.

Further, the driving voltage of the piezo element 20 is set to 10
When the voltage is returned to V (in this case, it is returned in 40 μsec), the piezo element 20 returns to the original shape, and at a time point (g) in FIG. 9 which is slightly later than this, FIG.
As shown in the figure, the quantitative medium 21 is filled in the quantitative medium nozzle 1. At the same time, the ejection medium 22 in the ejection medium nozzle 2 and the ejected ejection medium 22 are separated,
The ejection medium 22 partially mixed with the quantitative medium 21 flies toward a recording medium (not shown).

Thereafter, at the time point indicated by (h) in FIG. 9, as shown in FIG. 8 (h), the filling of the quantifying medium 21 into the quantifying medium nozzle 1 by the capillary force further proceeds, and The mixed droplet 32 in which the liquid and the ejection medium are mixed forms a spherical shape due to the surface tension, and continues to fly toward the recording medium. The discharge medium 22 is also gradually filled in the discharge medium nozzle 2.

Further, at the time point indicated by (i) in FIG. 9, as shown in FIG. 8 (i), the filling of the fixed quantity medium 21 in the fixed quantity medium nozzle 1 is completed and The meniscus m ₁ is formed at the same time, and the filling of the discharge medium 22 into the discharge medium nozzle 2 is substantially completed.

Further, at the time point indicated by (j) in FIG. 9, as shown in FIG. 8 (j), the filling of the discharge medium 22 in the discharge medium nozzle 2 is completed, and Also, a meniscus m ₂ is formed, and the state returns to the state shown in FIG. However, the meniscus m ₂ of the ejection medium 22 slightly vibrates due to inertia. In this example, the cycle until the next ejection operation, that is, the ejection cycle is set to 200 μsec.
c (frequency 5 kHz).

The specific shape and dimensions of the main parts of the printer of this embodiment are as follows.
Is 0.34 mm (75 dpi), and the piezo element 2
0 is 0.15 × 0.5 × 4 mm, the cross section of the discharge medium nozzle 2 is a circle having a diameter of 36 μm,
Is a circle having a diameter of 18 μm.

In the printer of this embodiment, since the fixed quantity medium nozzle 1 and the discharge medium nozzle 2 are independently provided without being connected to each other, the above-described operation can be performed, and the conventional two liquid Prevents natural mixing of the quantitation medium, for example, the ink, and the ejection medium, for example, the diluent, which were problematic in the mixed-type printer device, or the quantitation medium, for example, the ink, and the diluent, for example, during operation Prevention of unnecessary mixing due to mutual pressure interference on a certain ejection medium side can be realized with a simple configuration.

In the printer of the present embodiment, by changing the amplitude (voltage) of the driving pulse applied to the piezo element 20, the amount of the quantitative medium 21, that is, the concentration of the quantitative medium 21 in the mixed droplet 32 is changed. Can be changed for each dot, and a gradation expression in which the density is changed for each dot becomes possible.

Further, in the printer of the present embodiment, even if the width of the driving pulse applied to the piezo element 20 is increased or decreased, the gradation can be expressed by changing the density for each dot.

That is, in the printer of this embodiment, the ink 21 as the quantitative medium and the diluent 22 as the discharge medium are quantitatively mixed according to the given density data for each pixel, and the mixed ink droplets Is attached to the recording medium to perform printing, so that a halftone according to the density data can be reliably expressed with a simple configuration.

Further, in the printer of this embodiment, 1
Since high-gradation recording can be performed in pixel units, high-quality continuous gradation recording can be performed, and expression of density gradation by printing density in l-dot units, which was impossible in the past, is possible. Conventionally, in the modulation of the droplet size, there is a limit in reducing the droplet size, and especially the expressiveness of the low-density part has been extremely unsatisfactory. Therefore, high-quality gradation recording including high-density portions to low-density portions can be performed while keeping the droplets small.
Further, it is not necessary to use a pseudo area gradation method such as a so-called dither method, and it is possible to perform gradation recording without deteriorating the resolution.

Further, in the printer of this embodiment, since the ejection medium 22 is ejected by the heating element 23, the driving voltage is set to 5 V. However, instead of the heating element 23, a piezo element is used. Is usually required even higher voltage, and a voltage of, for example, 20, 40 V is required to perform the ejection operation. In the printer device of this example, the piezo element is used only for the operation of pushing out the fixed amount medium as described above, so that the maximum voltage can be set to 10 V and low voltage driving is required. It is advantageous.

The ejection of the ejection medium 22 is controlled by the heating element 23.
And the quantification of the quantification medium 21 is performed by the piezo element 20, so that the use of the piezo element, which is relatively expensive compared to the case where the piezo element is used for both the ejection of the ejection medium and the quantification of the quantification medium, is used. And an inexpensive printer can be provided.

Further, in the printer of this embodiment, since the quantification of the quantification medium 21 is performed by the piezo element 20, the quantification of the quantification medium 21 can be performed more accurately, and the high-quality continuous Gradation recording becomes possible.

Next, FIGS. 10 and 11 show a drive circuit of the print head of the printer of this embodiment. In the case of the printer device having the carrier jet print head of this example, it is controlled by the control unit 40 as shown in FIG. The control unit 40 includes a signal processing control circuit 41, a first
, A second driver 43, a memory 44, a correction circuit 45, and a control drive unit 46.
The signal processing control circuit 41 is a CPU or a DSP (Digit
al Signal Processor) configuration.

The first driver 42 and the second driver 43 are provided in accordance with the number of the fixed quantity medium nozzles 1 and the number of the discharge medium nozzles 2, respectively. First driver 42
Is for driving and controlling the piezo element 20 provided for exuding the quantitative medium 21 from the quantitative medium nozzle 1, and the second driver 43 is provided for discharging the discharge medium 22 from the discharge medium nozzle 2. The drive of the generated heating element 23 is controlled.

Each of the first driver 42 and the second driver 43 is controlled by a serial / parallel conversion circuit and a timing control circuit, which will be described later, provided in the signal processing control circuit 41. Drive control of the heating element.

Then, a signal input S1 for print data or the like is performed.
Is input to the signal processing control circuit 41 of the control unit 40, and is arranged in the printing order in the signal processing control circuit 41 and sent to the print head 47 via the first and second drivers 42 and 43. The printing order differs depending on the configuration of the print head 47 and the printing unit, and also has a relationship with the input order of print data. If necessary, the printing order is temporarily recorded in a memory 44 such as a line buffer memory or a one-screen memory, and then is taken out. The print head 47 receives a gradation signal and an ejection signal.

When the number of nozzles in the multi-head is very large, an IC is mounted on the print head 47 to reduce the number of wires connected to the print head 47.
In addition, a correction circuit 45 is connected to the signal processing control circuit 41, and performs γ correction, color correction in the case of color, and variation correction of each head. In general, predetermined correction data is stored in the correction circuit 45 in a ROM map format, and is taken out according to external conditions such as a nozzle number, a temperature, and an input signal.

As described above, the signal processing control circuit 41
It is common to process by software as a PU or DSP configuration, and the processed signal is sent to the control drive unit 46. The control drive unit 46 controls driving of a motor for rotating and driving a drum and a feed screw, synchronization, cleaning of a head, supply and discharge of print paper, and the like. Needless to say, the signals include operation unit signals and external control signals other than print data.

Next, FIG. 11 shows a drive circuit for the print head. First driver 42 and second driver 4
Numeral 3 controls the driving of the corresponding piezo element and heating element based on the control of the serial / parallel conversion circuit 48 and the timing control circuit 49 provided in the signal processing control circuit not shown in FIG. That is, the digital halftone data D1 is supplied from another block, and sent to the first driver 42 and the second driver 43 by the serial / parallel conversion circuit 48. When the digital halftone data D1 given by the serial / parallel conversion circuit 48 is equal to or smaller than a predetermined threshold value, the quantitative medium is not quantitatively discharged or discharged. When the print timing comes, a print trigger signal T1 is output from another block, the timing control circuit 49 detects it, and corresponds to a drive signal (drive voltage) corresponding to data from the serial / parallel conversion circuit 48 at a predetermined timing. To the piezo element and the heating element. Here, the timing control circuit 49 determines the timing of the driving voltage applied to the piezo element and the heating element (in this case, the piezo element and the heating element respectively correspond to a pair of fixed quantity nozzle and discharge nozzle). For example, a timing signal is sent to the first and second drivers 42 and 43 so that the timing is as shown in FIG.

Next, a method for manufacturing the above-described printer device of the present embodiment will be described. First, FIG.
As shown in (b) and (c), a fixed medium supply hole 51 and a discharge medium supply hole 5 are formed on a base 50 made of a stainless steel plate or the like by etching, machining, laser processing, or the like.
2. Through holes 53 for disposing piezo elements, first positioning holes 54 for positioning, second positioning holes 5
5. A long hole 56 is formed. FIG. 12 (b) is the same as FIG.
FIG. 12A is a cross-sectional view when cut along the line EE ′ in FIG. 12, and FIG. 12C is a cross-sectional view when FIG. 12A is cut along the line FF ′ in FIG.

Next, the diaphragm is separately prepared by an electroforming method of nickel or a method of etching a material for bonding nickel and copper (a so-called clad material), and the like, and FIGS. 13 (a), (b) and (b). As shown in FIG.
7 is aligned and adhered to the base 50 using the first positioning hole 54 and the elongated hole 56. However, FIG.
In (a), the diaphragm 57 is indicated by hatching for easy understanding. At this time, the recess 58, the protrusion 59, and the base 5
Needless to say, it has the same metering medium supply hole 51, discharge medium supply hole 52, first positioning hole 54, second positioning hole 55, and long hole 56 as those formed in FIG. 13B is a cross-sectional view of FIG. 13A taken along line GG ′ in FIG. 13A, and FIG.
FIG. 2A is a cross-sectional view when cut along HH ′ in FIG. Epoxy adhesives, anaerobic adhesives, and the like can be used as the adhesive used in the bonding step.

Subsequently, the pressure chamber plate is separately formed by etching stainless steel or the like, and FIG.
As shown in (a), (b) and (c), the pressure chamber plate 60 is positioned and adhered to a predetermined position on the diaphragm 57 using the second positioning holes 55 and the elongated holes 56. I do. However, in FIG. 14A, the pressure chamber plate 60 is indicated by hatching for easy understanding. Since this pressure chamber plate 60 is for forming a fixed-medium pressure chamber, it is arranged only on the vibration plate 57 at substantially the right half in the figure. At this time, the fixed-medium pressure chamber 8 is
4, a fixed-medium supply hole 51, a second positioning hole 55, and a long hole 56 similar to those formed on the convex portion 85 and the base 50.
Needless to say, FIG. 14B is a cross-sectional view of FIG. 14A taken along the line JJ ′ in FIG. 14C, and FIG. 14C is a sectional view of FIG.
FIG. 4 shows a cross-sectional view when cut by K ′.

Further, a heating element plate is prepared separately, and the heating element plate 61 is inserted into the first positioning hole 54 (not shown) as shown in FIGS. 15 (a), 15 (b) and 15 (c). Pin and end face 60 of pressure chamber plate 60
It is positioned and adhered to the diaphragm 57 using a.
However, in FIG. 15A, the heating element plate 61 is indicated by hatching for easy understanding. Since the heating element plate 61 is for disposing the heating element, it is disposed only on the substantially left half of the diaphragm 57 in the drawing, and has a thickness substantially equal to the thickness of the pressure chamber plate 60. The step between them is small, preferably within about 5 μm. At this time, it goes without saying that the heating element plate 61 has a heating element (not shown), a connection terminal 62 to the outside, a wiring 63 thereof, and a discharge medium supply hole 52 similar to that formed in the base 50. FIG. 15B is a cross-sectional view of FIG. 15A taken along line LL ′ in FIG. 15C, and FIG.
FIG. 3A is a cross-sectional view when cut along line MM ′ in FIG.

Next, as shown in FIGS. 16A, 16B and 16C, a partition 64 made of a photosensitive resin film, a so-called dry film resist, is formed on the pressure chamber plate 60 and the heating element plate 61. . However, FIG.
In FIG. 16, the partition 64 is shown by oblique lines for easy understanding, and the partition 64 is omitted in FIGS. 16 (b) and 16 (c). The partition wall 64 forms a side wall of the nozzle communication path 65, the fixed medium supply path 66, the fixed medium common liquid chamber 67, the discharge medium pressure chamber and the discharge medium supply path 68, and the discharge medium common liquid chamber 69. It has a through hole having a shape as shown in FIG. The partition wall 64 may be formed by performing alignment using a photosensitive resin film, a so-called dry film resist, using an alignment mark formed on the heating element plate 61 in advance, and then laminating and exposing and developing. . Further, it goes without saying that the partition 64 has the one formed on the base 50, the second positioning hole 55, and the elongated hole 56. Note that FIG.
16B is a cross-sectional view when FIG. 16A is cut along the line NN ′ in FIG. 16C, and FIG. 16C is a case where FIG. 16A is cut along the line PP ′ in FIG. FIG.

Further, an orifice plate is separately manufactured by a method described later, and the orifice plate is manufactured as shown in FIGS.
As shown in (c), the orifice plate 70 is aligned with the partition 64 using the second alignment hole 55 and the elongated hole 56, and is bonded by thermal lamination. However, in FIG. 17A, the orifice plate 70 is indicated by hatching for easy understanding, and FIG.
In FIGS. 7B and 7C, the illustration of the partition 64 is omitted. Needless to say, the orifice plate 70 has a fixed amount medium nozzle at a position corresponding to the nozzle communication path, and has a discharge medium nozzle, a second alignment hole 55, and a long hole 56 at a position corresponding to the discharge medium pressure chamber. No.
FIG. 17B is a cross-sectional view of FIG. 17A taken along the line QQ ′ in FIG. 17C, and FIG.
7 (a) is a cross-sectional view taken along the line RR 'in FIG. And the base 5 laminated in this process
The vibration plate 57, the pressure chamber plate 60, the heating element plate 61, the partition (not shown), and the orifice plate 70 are referred to as a plate assembly 71 for convenience.

Subsequently, as shown in FIGS. 18A, 18B and 18C, the base 50 of the plate
The head base assembly 72 is aligned and adhered to the side using the second alignment hole 55 and the elongated hole 56 to complete the main part of the head. FIG. 18 (b) is the same as FIG. 18 (a).
Is a cross-sectional view taken along line XX ′ in FIG.
FIG. 18C is a cross-sectional view of FIG. 18A taken along the line YY ′ in FIG.

However, in FIG. 18A, since the head base assembly 72 is on the back side of the drawing, illustration is omitted. This head base assembly 72 is shown in FIG.
As shown in (b) and (c), it mainly comprises a head base 73 and a piezo element 74. In the head base 73, a through hole 75 is formed at a position communicating with the through hole 53 of the base 50, and a piezo element support portion 76 is formed at the opening end side. A piezo element 74 is disposed in the through hole 75 so as to be positioned above the fixed-medium pressure chamber 84, and the other end is supported by the piezo element support portion 76.

Next, a method of manufacturing the orifice plate 70 as described above will be described. That is, as shown in FIG. 19, polysulfone, polyethersulfone,
In the thickness direction of the substrate 77, as shown by an arrow A in the figure, from one main surface 77a side of the substrate 77 which is a resin plate or a film of a resin such as polyetherimide, polyimide, polycarbonate, etc., toward the opposing main surface 77b side. Drilling is performed in an oblique direction with an excimer laser, a carbon dioxide laser or the like to form a quantitative medium nozzle 78, or as shown by an arrow B in the drawing, drilling is performed with an excimer laser or a carbon dioxide laser in the thickness direction of the substrate 77. By forming the ejection medium nozzle 79 in this way, it can be produced.

In the above method, for example, when excimer laser processing is used, the cross-sectional area of the hole is larger on the incident side than on the other side. Further, when forming a hole oblique to the thickness direction of the substrate, the substrate may be tilted and irradiated with excimer laser.

The positioning holes may be laser-processed similarly, or may be separately processed by machining, injection molding, or the like. Here, an example is shown in which the liquid-repellent film 80 is formed on the main surface 77b of the orifice plate 77 which is the nozzle opening surface. In this case, unnecessary wetting around the nozzle opening of the orifice plate 77 is prevented, and the effect of stabilizing the operation of mixing and discharging droplets is large.

Further, the orifice plate 70 is
It can also be manufactured by the following method. That is, first, a resist pattern is formed on a base material (not shown) according to the shapes of the opening 81 on the entrance side of the quantitative medium nozzle and the opening 82 on the entrance side of the discharge medium nozzle as shown in FIG. Then, a portion where the resist pattern is not formed is plated with nickel or the like to the same thickness as the resist pattern to form the first layer 88. Then, a resist pattern corresponding to the shape of the flow path 89 connecting the openings 81 and 82 as shown in FIG. 20 is formed thereon,
The portion where the resist pattern is not formed is plated with nickel or the like to the same thickness as the resist pattern to form a second layer 85.
To form Further, a resist pattern corresponding to the shape of the opening 86 which is connected to the flow path 89 as shown in FIG. A portion where the resist pattern is not formed is plated with nickel or the like at the same thickness as the resist pattern to form a third layer 87. Finally, the resist is removed with a removing solution or the like to complete the orifice plate. However, here, the manufacturing example of the orifice plate in which the nozzles for the quantitative medium and the nozzles for the ejection medium are not provided independently has been described.

Next, another example of the print head of the printer device to which the present invention is applied will be described. The major difference between the printer of the present embodiment and the above-described printer is that the above-described printer uses a pressure chamber plate and a heating element plate. It is a point that is integrated.

That is, as shown in FIG. 21, the pressure chamber plate 15 and the heating element plate 16 have substantially the same configuration as the print head of the printer shown in FIG. It is not divided and is formed only by the heating element plate 90. Note that, from FIG. 21 onward, the same components as those of the above-described printer are denoted by the same reference numerals, and description thereof will be omitted.

Next, FIG. 2 is a cross-sectional view of the printer device of the present example shown in FIG. 21 taken along the line aa 'in FIG.
2 and FIG. 23 is an enlarged plan view of a main part of the printer device shown in FIG.
FIG. 24 is a cross-sectional view taken along the line cc 'in FIG.
FIG. 25 is an enlarged cross-sectional view of a main part near the orifice plate 13. FIG.
It is formed by a heating element member 90 which is one member.

The printer of this embodiment is manufactured as follows. That is, since the printer device has substantially the same configuration as the printer device described above, the printer device is manufactured through the same process until the diaphragm is formed on the base. Here, the subsequent steps will be described.

That is, a heating element plate in which a fixed-medium pressure chamber and a heating element are formed is manufactured. First, as shown in FIG. 26, a silicon oxide layer 92 having a thickness of about 1 μm is formed on both opposing main surfaces 91a and 91b by, for example, thermal oxidation.
The Si single crystal substrate 91 (hereinafter, referred to as a single crystal substrate 93)
This is referred to as a Si substrate 91. The portion of the silicon oxide layer 92 corresponding to the fixed-medium pressure chamber on the one main surface 91a side is removed by selective etching.

As the Si substrate 91 used here, it is desirable to use a single crystal substrate having a (110) orientation in which a fine pattern through hole can be formed by anisotropic etching. Although an example using a single crystal substrate will be described, depending on the dimensions of the liquid chamber and the like, the processing method of through-hole processing, and the like, it is also possible to use single crystal substrates having various plane orientations which are usually commercially available. .

Next, as shown in FIG. 27, a TaAl film to be used as a resistance layer is formed on the silicon oxide layer 92 by, for example, a method such as sputtering, and a heat generating portion is formed together with a conductive layer pattern described later. A necessary resistive layer pattern 94 is formed by selective etching.

Further, as shown in FIG. 27, a conductive layer pattern 95 for supplying a current to the resistance layer pattern 94 is formed. The conductive layer pattern 95 may be formed by a lift-off method using two layers of titanium and gold.

Subsequently, as shown in FIG. 28, a passivation layer pattern 96 is formed of, for example, silicon nitride. At this time, the passivation layer pattern 96 is not formed at the connection portion 95a of the portion corresponding to the fixed-medium pressure chamber and the conductive layer pattern 95.

As a method of forming the passivation layer pattern 96 having such a shape, a method in which a silicon nitride layer is formed and then selective etching or a lift-off method or the like is used. In addition, the film formation of silicon nitride
For example, it may be performed by a sputtering method or the like. When a predetermined pattern is formed by selective etching after film formation, low-temperature plasma CVD or the like can be used for film formation.

Next, as shown in FIG. 28, a Ta layer pattern 97 for preventing so-called cavitation damage is formed on a portion of the passivation layer pattern 96 corresponding to the discharge medium pressure chamber. This may also be formed by, for example, forming a film using a sputtering method and patterning using a lift-off method, selective etching after the film formation, or the like.

Further, as shown in FIG. 29, a protective film layer 98 serving as a mask for silicon etching to be described later is formed of, for example, silicon oxide on portions other than the portion corresponding to the above-described quantitative medium pressure chamber and the connection portion 95a. To complete the heating element. The film may be formed by, for example, a sputtering method, and the patterning may be performed by a selective etching, a lift-off method, or the like.

Subsequently, using the silicon oxide layer and the silicon nitride layer formed in the above-described steps as a mask, for example, anisotropic wet etching using a potassium hydroxide solution is performed, as shown in FIG. A position corresponding to the medium pressure chamber is etched to form a through hole 99, thereby forming a fixed medium pressure chamber. At this time, the Si
If a portion corresponding to the through hole 99 of the silicon oxide layer 93 on the main surface 91b side of the substrate 91 is removed, a through hole including the silicon oxide layer 93 can be formed.

Thus, the heating element plate 90 having the heating element and the fixed-medium pressure chamber is completed. Also in this heating element plate, it is necessary to form the measurement medium supply hole 8 and the discharge medium supply hole 12, but these processings are separately formed by ultrasonic processing, or the through holes 99 forming the measurement medium pressure chamber are different. What is necessary is just to process simultaneously at the time of forming by anisotropic etching. However, in the case of the fixed-medium supply hole 8 and the ejection-medium supply hole 12, it is necessary to form a through-hole.
The portions of the silicon oxide layer 93 corresponding to these on the b side are removed in advance. The heating element plate 16 of the printer described above may be formed in a similar manner, and may be formed by a process excluding the process related to the fixed-medium pressure chamber.

Next, as described above, the partition wall 100 for forming the discharge medium pressure chamber and the like is laminated on the heating element plate 90 as shown in FIG. This partition has the same function as the partition 14 of the printer device described above,
As shown in FIG. 31, connection is made between a through-hole 101 for forming a discharge medium pressure chamber, a through-hole 102 serving as a nozzle communication path for connecting a fixed-medium pressure chamber and a fixed-medium nozzle, and a connection portion 95a. Has a through hole 103 for it.

Further, as shown in FIG.
0 and the discharge medium nozzle 10
5. An orifice plate 107 having a through hole 106 for connection with the connection portion 95a is provided.

Next, as shown in FIG. 32, the vibration plate 109 is disposed on the silicon oxide layer 93 on the one main surface 91b side of the Si substrate 91 via an adhesive layer. The vibration plate 109 is also the same as the vibration plate of the above-described printer device, and has a concave portion 111 and a protrusion 112 at a position corresponding to the fixed-medium pressure chamber 110.

Finally, as schematically shown in FIG. 33, a head base (not shown) is provided and
The printer device is completed by disposing the piezo element 113 on the projection 112 of the step 09.

It is needless to say that the same effects as those of the above-described printer can be obtained in the printer of this embodiment. Further, in the printer of the present embodiment, since the fixed-medium pressure chamber 4 and the heating element 23 are formed in the heating element plate 90, it is not necessary to separately prepare the pressure chamber plate and the heating element plate. The assembly process can be simplified. In the printer of the present embodiment, the number of steps of forming the through-holes 99 for forming the quantitative medium pressure chambers by anisotropic etching in the step of forming the heating element plate 90 is increased. As compared with the conventional printer, mass productivity is improved, and it is possible to provide a printer at a lower cost.

Further, another example of the printer device to which the present invention is applied will be described. Here, an example of a printer device having substantially the same configuration as the above-described printer device but having a larger number of nozzle sets than the above-described printer device will be described. That is, while the above-described printer apparatus has 16 nozzles and 8 nozzle sets, for example, the number of nozzles is 30, 64, 100, or a full line multi-head corresponding to the entire width of paper. A printer device having such a configuration will be described. However, here,
Among the printer apparatuses as described above, an example of a printer apparatus in which the number of nozzles is 32 and the number of nozzle sets is 16, and these nozzle sets are divided into eight sets and arranged in two rows will be described.

The printer of this embodiment has a configuration very similar to that of the printer shown in FIG. That is, as shown in FIG. 34, eight nozzle sets 123 which are combinations of the fixed quantity medium nozzle 121 and the discharge medium nozzle 122 similar to the nozzle set 3 of the printer apparatus shown in FIG.
Are fixed medium nozzles 121 and ejection medium nozzles 122
The first nozzle row 133 is arranged such that these nozzles are adjacent to each other, and these nozzles are opened on the same surface, and the same quantitative medium nozzle 141 as the first nozzle row 133 is provided.
And a second nozzle row 153 in which eight nozzle sets 143, which are combinations of the discharge medium nozzles 142, are arranged.

Also in the printer of this embodiment, the quantitation medium nozzles 121 of the first nozzle row 133 have the nozzle communication passage 125, the quantification medium pressure chamber 124, the quantification medium supply passage, similarly to the printer shown in FIG. It is connected to the fixed-medium common liquid chamber 127 via 126. In the printer device of this example, in particular, the quantitation medium nozzle 141 of the second nozzle row 153 also communicates with the quantitation medium common liquid chamber 127 via the nozzle communication path 145, the quantification medium pressure chamber 144, and the quantification medium supply path 146. It is connected. That is, the fixed-medium common liquid chamber 127 is connected to the first and second nozzle rows 133 and 153.
As a liquid chamber for supplying a quantitation medium to the first medium, the quantitation medium common liquid chamber 127 is sandwiched therebetween, and the first quantification medium nozzles 121 and 141 are located inside.
Nozzle row 133 and the second nozzle row 153 are arranged. Needless to say, the measurement medium supply hole 128 is also formed in the measurement medium common liquid chamber 127.

Further, in the printer of this embodiment, as in the printer shown in FIG.
The third discharge medium nozzle 122 includes a discharge medium pressure chamber 129,
Discharge medium common liquid chamber 131 through discharge medium supply path 130
Is connected to The ejection medium nozzle 142 of the second nozzle row 153 is also connected to the ejection medium common liquid chamber 151 via the ejection medium pressure chamber 149 and the ejection medium supply path 150. The ejection medium common liquid chambers 131 and 151
It is needless to say that the ejection medium supply holes 132 and 152 are respectively formed in the nozzles.

Then, also in the printer of this embodiment,
As in the printer shown in FIG.
Piezo elements 134 and 135 for applying pressure thereto are formed at positions corresponding to 24 and 144, respectively, and a heating element (not shown) is provided on the bottom side of the discharge medium pressure chambers 122 and 142. The other configuration is substantially the same as that of the printer shown in FIG.

In the printer of this embodiment, the pitches P ₁ and P ₂ between the nozzle sets 123 and 143 are １ ／ as shown in FIG.
It may be arranged so as to have a pitch, that is, shifted by 170 μm, and as a result, a resolution of 150 dpi may be obtained. If the resolution is insufficient, the printer apparatus of this embodiment uses two print heads as described above and shifts them so that the pitch between the nozzle sets of each print head is 1/4 pitch. If 32
It is also possible to use a nozzle of 300 dpi.

When two nozzle rows are provided as in this example, the configuration in which the piezo elements 134 and 135 are arranged inside and the heating elements are arranged outside is advantageous in laying out the wiring of the heating elements. is there. That is, the pressure chamber plate in which the fixed-medium pressure chambers of the first and second nozzle rows 133 and 153 are formed is sandwiched between the heating element plates in which the heating elements of the first and second nozzle rows 133 and 153 are formed. You can do it. It is advantageous to arrange the two nozzle rows as close as possible to reduce the buffer memory capacity of the print data to be sent to the head.

In the case of a layout in which the heating elements are arranged inside, if the distance between the nozzle rows is to be reduced, in the printer of this embodiment having the same configuration as the printer shown in FIG. Since the pressure chamber plate made of a material different from the above is disposed, it is difficult to extend the wiring to the outside. In addition, a method may be considered in which the heating element plate is also used without separating the pressure chamber plate and the heating element plate.In this case, however, the fixed-medium pressure chamber formed by anisotropic etching exists on the outside, and the wiring is formed. Can not be stretched outside.
Therefore, when the heating elements are arranged inside, it is necessary to reduce the arrangement pitch of the wiring, to provide a three-dimensional wiring, or the like, and the connection of the wiring to the connection terminal becomes complicated, which is not preferable.

The printer of this embodiment can be manufactured by the same method as the printer described above.

In the printer of this embodiment, the same effects as those of the conventional printer can be obtained, and further higher resolution can be achieved.

Next, still another example of the printer device to which the present invention is applied will be described. In the printer device of this example, the amount of the quantitative medium is determined by a heating element, and the discharge of the discharge medium is performed by a piezo element.

That is, as shown in FIG. 35, the printer has substantially the same configuration as that of the printer shown in FIG. 4, and has a configuration in which the positions of the fixed quantity medium nozzle 161 and the discharge medium nozzle 162 are interchanged.

The quantification medium 181 is provided in the quantification medium common liquid chamber 17.
1 is supplied to the fixed-medium pressure chamber 169 via the fixed-medium supply path 170, and from there, the fixed-medium nozzle 161 is filled.

The one discharge medium 182 is supplied from the discharge medium common liquid chamber 167 to the discharge medium pressure chamber 164 via the discharge medium supply path 166, and from here is filled into the discharge medium nozzle 162 via the nozzle communication path 165. The Rukoto.

Then, in the printer of this embodiment,
The piezo element 18 is located at a position corresponding to the ejection medium pressure chamber 164.
0 is formed, and a heating element 183 is formed at a position corresponding to the fixed-medium pressure chamber 169.

The printer shown in FIG. 35 is replaced by the line dd 'in FIG.
FIG. 36 shows a cross-sectional view taken at the position indicated by. The printer device of this example has substantially the same configuration as that of the printer device shown in FIG. 5, and the discharge medium nozzle 162 has a thickness of the orifice plate 173. Medium nozzle 161 is formed as an orifice plate 173.
As shown in an enlarged view in FIG. 37 (a), the quantitative medium nozzle 161 is provided on one main surface 1 of the orifice plate 173.
It is formed so as to approach the discharge medium nozzle 162 toward the side 73a. Further, as shown in FIG. 37 (b), the quantitative medium nozzle 161 is formed as a through hole having a circular cross section, the opening in the oblique direction becomes elliptical, and the discharge medium nozzle 162 is formed as a through hole having a circular cross section. .

As shown in FIGS. 36 and 37, the orifice plate 173 has a nozzle communication path 165, a discharge medium supply path 166, a discharge medium common liquid chamber 167, A partition wall 174 having a through hole having a shape corresponding to the medium pressure chamber 169, the measurement medium supply passage 170, and the measurement medium common liquid chamber 171 is stacked.

Further, as shown in FIG.
On 74, a heating element 183 is formed at a position corresponding to the discharge medium pressure chamber 169 on the main surface 176 a on the partition wall 174 side having a pressure chamber plate 175 having a through hole for forming the quantitative medium pressure chamber 164. Heating element plate 17
6 are stacked so that the ends thereof abut each other. The pressure chamber plate 175 and the heating element plate 176 are members having substantially the same thickness as described above, and form one surface in a stacked state. In addition, a projection 184 is formed on the partition wall 174 side of the through-hole corresponding to the fixed-medium pressure chamber 164 of the pressure chamber plate 175.

As shown in FIG. 38, which is a cross-sectional view taken along the line ee 'in FIG. 35, the convex portion 184 has a fixed medium pressure It is formed so that the depth of the chamber 164 in the thickness direction of the pressure chamber plate 175 is reduced.

The remaining part has the same configuration as that of the above-described printer, and thus the description is omitted.

The printer of this embodiment may be manufactured by applying the above-described manufacturing method so that the positions of the quantitative medium nozzle and the discharge medium nozzle are reversed.

In the printer device of this example, since the heating element is used for the quantification of the quantification medium, the accurate quantification performance of a very small amount of ink is slightly inferior, but the cost and power consumption are reduced. The same effects as those of the above-described printer device can be obtained. In addition, since the piezo element is used for discharging the discharge medium as compared with the above-described printer device, the discharge droplet amount can be controlled with high accuracy, and gradation expression is performed using so-called area modulation together. By doing so, it is possible to perform gradation expression more favorably.

Further, still another example of the printer device to which the present invention is applied will be described. The printer device of this example is
An example in which a so-called single-plate piezo element is used as a piezo element instead of a laminated piezo element will be described. That is, as shown in FIG. 39, it has substantially the same configuration as the printer device shown in FIG. 4, and a flat rectangular single-plate piezo is placed on the quantitative medium pressure chamber 4 instead of the piezo element 20 which is a laminated piezo element. Element 190 is used. Note that f in FIG.
FIG. 40 shows a cross-sectional view taken at the position indicated by −f ′, and FIG. 41 shows a cross-sectional view taken at the position indicated by gg ′ in FIG. 39. In FIGS. , 5,6
Portions having the same configuration as those described above are denoted by the same reference numerals, and description thereof will be omitted.

The diaphragm 17 of the single-plate piezo element 190
Electrodes are formed on the main surface on the side and the main surface on the opposite side. When a drive signal is applied to this electrode, the piezo element 190 contracts in the in-plane direction, the diaphragm 17 bends in the direction indicated by the arrow C in FIGS. 40 and 41, and pushes out the fixed amount medium in the fixed amount medium pressure chamber 4. .

The operation of mixing and discharging the metering medium and the discharge medium of the printer of this embodiment is the same as that in the case of using the above-described laminated piezo element. The printer of this embodiment is manufactured in substantially the same manner as the printer described above. However, when manufacturing the printer device of the present embodiment, it is necessary to form a single-plate piezo element 190 on the diaphragm 17 in advance. As a method of forming the single-plate piezo element 190 in this manner, a method in which a piezo element in which a plate-like electrode is formed in advance is bonded by adhesion, a paste-like electrode, a piezo is printed, and a material such as glass or ceramic is used. For example, a method of applying the composition to a diaphragm made of and baking it.

The printer of this embodiment has the same effects as those of the printer described above. Further, in the printer of the present embodiment, since a single-plate piezo element is used as the piezo element instead of the stacked type, the cost can be reduced and a more inexpensive printer apparatus can be provided. Further, by using a single-plate piezo element as described above, the thickness of the piezo element can be reduced, so that the printer apparatus can be made thinner and the printer apparatus can be made smaller.

As the liquid jet recording apparatus on which the printer of the present invention is mounted, so-called serial type, line type,
A liquid jet recording device such as a drum rotary type is exemplified.

As shown in FIG. 42, the serial type liquid jet recording apparatus comprises a drum 202 on which a printing paper 201 as a printing medium is supported, and a printer of the present invention. This is mainly configured by a print head unit 203 that performs the following.

At this time, the printing paper 201 is applied to the paper pressure roller 20 provided in parallel with the axial direction of the drum 202.
4 is pressed and held on the drum 202. Also,
A feed screw 205 is provided near the outer periphery of the drum 202 in parallel with the axial direction of the drum 202. And
The print head unit 203 is held by the feed screw 205. That is, the print head unit 20
3 moves in the axial direction of the drum 202 as indicated by an arrow M in the figure by rotation of the feed screw 205.

On the other hand, the drum 202 is driven to rotate by a motor 209 via a pulley 206, a belt 207, and a pulley 208 as shown by an arrow m in the drawing. Further, the rotation of the feed screw 205 and the motor 209 and the print head unit 203 are driven and controlled by a head drive, a head feed control, and a drum rotation control 210 based on print data and a control signal 211.

In the above configuration, when the print head unit 203 moves and performs printing for one line, the drum 202
Is rotated by one line to perform the next printing. Head 203
Moves and prints in one direction or in a reciprocating direction.

The line type liquid jet recording apparatus has a configuration as shown in FIG. In FIG. 43, portions corresponding to those in FIG. 42 are denoted by the same reference numerals, description thereof will be omitted, and illustration of a portion showing a control mechanism will be omitted.

This line type liquid jet recording apparatus is provided with a line head 212 having a large number of print heads (not shown) arranged in a line and fixed in the axial direction of the drum 202. In this line type liquid jet recording apparatus, the line head 212 simultaneously prints one line, and when the printing of one line is completed, the drum 202 is moved by one line in the direction indicated by the arrow m in the drawing. The next line is printed with only rotation. In this case, a method of printing all the lines at once, dividing the data into a plurality of blocks, or alternately printing every other line can be considered.

One drum rotary type liquid jet recording apparatus is
It has a configuration as shown in FIG. 44, parts corresponding to those in FIG. 43 are denoted by the same reference numerals, description thereof will be omitted, and illustration of parts showing the control mechanism will be omitted. In this liquid jet recording apparatus,
When the drum 202 rotates, ink is ejected from the print head unit 203 in synchronization with the rotation, and the printing paper 20
1, an image is formed. When the drum 202 makes one rotation in the direction indicated by the arrow m in the figure and completes one line of printing on the printing paper 201 in the circumferential direction, the feed screw 205 rotates to move the print head unit 203 by the arrow M 'in the figure. The print head is moved by one pitch in the direction shown, and the next row is printed. In this case, there is a method in which the drum 202 and the feed screw 205 are simultaneously rotated to gradually move the print head unit 203 while printing. In the case of a multi-nozzle head or a configuration in which the same location is printed several times, the drum 202 and the feed screw 2
Spiral printing is performed while simultaneously rotating the prints 05 and 05 simultaneously.

The specific embodiments to which the present invention is applied have been described above. Needless to say, various configurations other than the above-described embodiments can be adopted without departing from the gist of the present invention. The configuration is not particularly limited to the above-described range.

[0145]

According to the printer apparatus of the present invention, the first pressure applying means for applying pressure to the fixed-medium pressure chamber filled with the fixed medium and the pressure applied to the discharge-medium pressure chamber filled with the discharged medium are provided. Since one of the applied second pressure applying means is a piezo element and the other is a heating element, the cost can be reduced, the cost can be reduced, and the power consumption can be reduced.

In the printer of the present invention,
If the piezo element is used as the first pressure applying means for applying pressure to the quantitation medium pressure chamber, since the piezo element has good responsiveness to changes in voltage and pulse width, the quantification medium is ejected from the ejection medium nozzle. The applied pressure when mixing with the medium is accurately controlled, accurate quantitative mixing is performed, and halftone expression is performed accurately.

Further, in the printer of the present invention, the quantitation medium nozzle communicating with the quantitation medium pressure chamber has an opening so as to be adjacent to the discharge medium nozzle, and the quantitation medium nozzle is directed from the quantification medium nozzle toward the discharge medium nozzle. If the medium is exuded and the quantitation medium is mixed with the ejection medium in the ejection medium nozzle, natural mixing of the quantification medium and the ejection medium at the time of operation standby, or the quantification medium side and the ejection medium side at the time of operation are performed. Unnecessary mixing due to mutual pressure interference is easily prevented, accurate quantitative mixing is performed, and halftone expression is accurately performed.

Further, the printer of the present invention is formed by forming a concave portion for forming a first pressure chamber at a predetermined position on a substrate, forming a heating element at a predetermined position on the substrate, and further forming a heating element on the heat generating element. A partition layer having a first through-hole communicating with the recess and a second through-hole exposing the heating element is formed, and a first nozzle and a first nozzle are formed thereon at positions corresponding to the first through-hole. An orifice plate having a second nozzle is arranged at a position corresponding to the second through hole, a first pressure chamber is formed by the recess and the first through hole, and a first nozzle communicating with the first pressure chamber is formed. At the same time, if the second pressure chamber in which the heating element is disposed by the second through hole is formed and the second nozzle communicating with the second pressure chamber is formed, the first pressure chamber can be manufactured.
And the second pressure chamber are formed at the same time,
The manufacturing process is shortened. In addition, since these are formed simultaneously, the number of steps requiring alignment is also reduced, manufacturing defects are less likely to occur, manufacturing yield is improved, and productivity is improved.

[Brief description of the drawings]

FIG. 1 is a plan view showing a print head as an example of a printer device to which the present invention is applied.

FIG. 2 is a cross-sectional view illustrating a print head as an example of a printer device to which the present invention is applied.

FIG. 3 is a cross-sectional view illustrating a print head as an example of a printer device to which the present invention is applied.

FIG. 4 is a main part enlarged plan view showing a print head of an example of a printer device to which the present invention is applied.

FIG. 5 is an enlarged sectional view of a main part showing a print head of an example of a printer device to which the present invention is applied.

FIG. 6 is an enlarged sectional view of a main part showing a vicinity of a nozzle of a print head of an example of a printer apparatus to which the present invention is applied.

FIG. 7 is an enlarged sectional view of a main part showing a print head of an example of a printer device to which the present invention is applied.

FIG. 8 is an enlarged sectional view of a main part schematically showing an operation at the time of printing of an example of a printer apparatus to which the present invention is applied.

FIG. 9 is a timing chart showing a driving voltage waveform at the time of printing in an example of a printer device to which the present invention is applied.

FIG. 10 is a block diagram showing a drive circuit of a print head as an example of a printer device to which the present invention is applied.

FIG. 11 is a block diagram showing a drive circuit of a print head as an example of a printer device to which the present invention is applied.

12A and 12B are a plan view and a cross-sectional view illustrating a method of manufacturing a print head as an example of a printer apparatus to which the present invention is applied, in the order of steps, illustrating a step of forming holes in a base.

13A and 13B are a plan view and a cross-sectional view illustrating a method of manufacturing a print head as an example of a printer apparatus to which the present invention is applied, in the order of steps, illustrating a step of bonding a diaphragm.

FIG. 14 is a plan view and a cross-sectional view showing a method of manufacturing a print head as an example of a printer apparatus to which the present invention is applied, in the order of steps, showing a step of bonding a pressure chamber plate.

15A and 15B are a plan view and a cross-sectional view illustrating a method of manufacturing a print head as an example of a printer apparatus to which the present invention is applied, illustrating a step of bonding a heating element plate.

FIG. 16 is a plan view and a cross-sectional view showing a method of manufacturing a print head as an example of a printer device to which the present invention is applied, in the order of steps, showing steps of forming a partition.

FIG. 17 is a plan view and a cross-sectional view showing a method of manufacturing a print head as an example of a printer apparatus to which the present invention is applied, in the order of steps, showing a step of bonding an orifice plate.

18A and 18B are a plan view and a cross-sectional view illustrating a method of manufacturing a print head as an example of a printer apparatus to which the present invention is applied, in the order of steps, and illustrating a step of bonding a head base assembly.

FIG. 19 is a cross-sectional view schematically showing one example of a method for manufacturing an orifice plate.

FIG. 20 is a cross-sectional view schematically showing another example of the method for manufacturing the orifice plate.

FIG. 21 is a plan view showing a print head of another example of the printer device to which the present invention is applied.

FIG. 22 is a cross-sectional view showing a print head of another example of the printer device to which the present invention is applied.

FIG. 23 is a main part enlarged plan view showing a print head of another example of the printer device to which the present invention is applied.

FIG. 24 is an enlarged sectional view of a main part showing a print head of another example of the printer device to which the invention is applied.

FIG. 25 is an enlarged sectional view of a main part showing the vicinity of a nozzle of a print head of another example of the printer apparatus to which the present invention is applied.

FIG. 26 is a sectional view illustrating a manufacturing method of manufacturing the heating element plate in the order of steps, and illustrating a step of forming a silicon oxide layer.

FIG. 27 is a sectional view illustrating a method of manufacturing the heating element plate in the order of steps, and illustrating a step of forming a resistive layer pattern and a conductive layer pattern.

FIG. 28 shows a method of manufacturing a heating element plate in the order of steps, and includes a passivation layer pattern and a T
It is sectional drawing which shows the process of forming a layer pattern.

FIG. 29 is a cross-sectional view showing a manufacturing method of manufacturing the heating element plate in the order of steps, and showing a step of forming a protective film layer.

FIG. 30 is a sectional view illustrating a method of manufacturing the heating element plate in the order of steps, and illustrating a step of forming a through hole.

FIG. 31 is a cross-sectional view showing a step of disposing a partition and an orifice plate.

FIG. 32 is a cross-sectional view showing a step of disposing a diaphragm.

FIG. 33 is a cross-sectional view showing a step of disposing a piezo element.

FIG. 34 is a plan view showing a print head of still another example of the printer device to which the present invention is applied.

FIG. 35 is an enlarged plan view of a main part showing a print head of still another example of the printer device to which the present invention is applied.

FIG. 36 is a sectional view showing a print head of still another example of the printer device to which the present invention is applied.

FIG. 37 is an enlarged sectional view of a main part showing the vicinity of a nozzle of a print head of still another example of the printer apparatus to which the present invention is applied.

FIG. 38 is a sectional view showing a print head of still another example of the printer device to which the present invention is applied.

FIG. 39 is an enlarged plan view of a main part showing a print head of still another example of the printer device to which the present invention is applied.

FIG. 40 is an enlarged sectional view of a main part showing a print head of still another example of the printer device to which the present invention is applied.

FIG. 41 is an enlarged sectional view of a main part showing a print head of still another example of the printer device to which the present invention is applied.

FIG. 42 is a schematic perspective view of an essential part schematically showing an example of a liquid jet recording apparatus on which a printer device to which the present invention is applied is mounted.

FIG. 43 is a schematic perspective view of an essential part schematically showing another example of a liquid jet recording apparatus in which a printer device to which the present invention is applied is mounted.

FIG. 44 is a schematic perspective view of a main part schematically showing another example of a liquid jet recording apparatus in which a printer device to which the present invention is applied is mounted.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Quantitative medium nozzle, 2 Discharge medium nozzle, 3 nozzle group, 4 Quantitative medium pressure chamber, 9 Discharge medium pressure chamber, 20
Piezo element, 21 Quantitative medium, 22 Discharge medium, 23
Heating element, 32 mixed droplets, 90 heating element plate,
91 Si substrate, 99 through hole, 100 partition, 107
Orifice plate

Claims (7)

[Claims] A discharge medium pressure chamber filled with the discharge medium, a discharge medium nozzle communicating with the discharge medium pressure chamber, and a measurement medium pressure chamber filled with the measurement medium; Pressure is applied by the first pressure applying means, the quantitative medium is mixed with the discharge medium in the discharge medium nozzle, and the pressure is applied to the discharge medium in the discharge medium pressure chamber by the second pressure applying means, and the quantitative medium and the discharge medium are applied. The printer device according to claim 1, wherein one of the first pressure applying means and the second pressure applying means is a piezo element and the other is a heating element. 2. The printer according to claim 1, wherein the first pressure applying means is a piezo element. 3. A fixed-medium nozzle communicating with the fixed-medium pressure chamber is opened so as to be adjacent to the discharge medium nozzle, and the fixed-medium medium oozes from the fixed-medium nozzle toward the discharge medium nozzle. 2. The printer according to claim 1, wherein the quantitation medium is mixed with the ejection medium in the ejection medium nozzle. 4. A pressure chamber plate in which a pressure chamber in which a piezo element is used as a pressure applying means is formed at a predetermined position on a base having a through hole at a predetermined position. A heating element plate on which a heating element is formed is provided at a predetermined position, and a piezo element is arranged on the pressure chamber through a through hole of the base via the vibration plate. The printer device according to claim 1, wherein: 5. The printer according to claim 4, wherein the pressure chamber plate is disposed on the base while being sandwiched by the heating element plates. 6. A recess for forming a first pressure chamber is formed at a predetermined position on a substrate, a heating element is formed at a predetermined position on the substrate, and a first heating element is formed on the heating element and communicates with the recess. A partition layer having a second through-hole for exposing the through-hole and the heating element is formed, and a first nozzle and a second through-hole corresponding to the first through-hole at a position corresponding to the first through-hole are formed thereon. An orifice plate having a second nozzle is disposed at a position, a first pressure chamber is formed by the recess and the first through hole, a first nozzle communicating with the first pressure chamber is formed, and a second through hole is formed. Forming a second pressure chamber in which a heating element is disposed, and forming a second nozzle communicating with the second pressure chamber. 7. The constant pressure medium pressure chamber as the first pressure chamber,
7. The method according to claim 6, wherein the first nozzle is a metering medium nozzle, the second pressure chamber is a discharge medium pressure chamber, and the second nozzle is a discharge medium nozzle. .