JP2005121379A5 - - Google Patents
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- Publication number
- JP2005121379A5 JP2005121379A5 JP2003353475A JP2003353475A JP2005121379A5 JP 2005121379 A5 JP2005121379 A5 JP 2005121379A5 JP 2003353475 A JP2003353475 A JP 2003353475A JP 2003353475 A JP2003353475 A JP 2003353475A JP 2005121379 A5 JP2005121379 A5 JP 2005121379A5
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen concentration
- nno
- complex
- measuring
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 198
- 229910052757 nitrogen Inorganic materials 0.000 claims 99
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 58
- 229910052710 silicon Inorganic materials 0.000 claims 58
- 239000010703 silicon Substances 0.000 claims 58
- 239000013078 crystal Substances 0.000 claims 41
- 238000010521 absorption reaction Methods 0.000 claims 36
- 238000000034 method Methods 0.000 claims 26
- 238000006243 chemical reaction Methods 0.000 claims 18
- 235000012431 wafers Nutrition 0.000 claims 16
- 238000005259 measurement Methods 0.000 claims 13
- 238000000862 absorption spectrum Methods 0.000 claims 9
- 238000004519 manufacturing process Methods 0.000 claims 8
- 238000011156 evaluation Methods 0.000 claims 6
- 238000010438 heat treatment Methods 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 4
- 238000004364 calculation method Methods 0.000 claims 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003353475A JP2005121379A (ja) | 2003-10-14 | 2003-10-14 | シリコン結晶中の窒素濃度定量化方法、シリコン結晶の評価方法、および半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003353475A JP2005121379A (ja) | 2003-10-14 | 2003-10-14 | シリコン結晶中の窒素濃度定量化方法、シリコン結晶の評価方法、および半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005121379A JP2005121379A (ja) | 2005-05-12 |
| JP2005121379A5 true JP2005121379A5 (https=) | 2007-02-22 |
Family
ID=34611750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003353475A Pending JP2005121379A (ja) | 2003-10-14 | 2003-10-14 | シリコン結晶中の窒素濃度定量化方法、シリコン結晶の評価方法、および半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005121379A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114199820B (zh) * | 2021-12-07 | 2024-06-07 | 北京华亘安邦科技有限公司 | 一种气体浓度的检测方法和装置 |
-
2003
- 2003-10-14 JP JP2003353475A patent/JP2005121379A/ja active Pending
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