JP2005104746A5 - - Google Patents
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- Publication number
- JP2005104746A5 JP2005104746A5 JP2003336790A JP2003336790A JP2005104746A5 JP 2005104746 A5 JP2005104746 A5 JP 2005104746A5 JP 2003336790 A JP2003336790 A JP 2003336790A JP 2003336790 A JP2003336790 A JP 2003336790A JP 2005104746 A5 JP2005104746 A5 JP 2005104746A5
- Authority
- JP
- Japan
- Prior art keywords
- ceramic plate
- alumina ceramic
- content
- tio
- titanium oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 5
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003336790A JP4364593B2 (ja) | 2003-09-29 | 2003-09-29 | アルミナ質セラミック板及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003336790A JP4364593B2 (ja) | 2003-09-29 | 2003-09-29 | アルミナ質セラミック板及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005104746A JP2005104746A (ja) | 2005-04-21 |
| JP2005104746A5 true JP2005104746A5 (https=) | 2006-07-27 |
| JP4364593B2 JP4364593B2 (ja) | 2009-11-18 |
Family
ID=34532789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003336790A Expired - Fee Related JP4364593B2 (ja) | 2003-09-29 | 2003-09-29 | アルミナ質セラミック板及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4364593B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5203313B2 (ja) * | 2008-09-01 | 2013-06-05 | 日本碍子株式会社 | 酸化アルミニウム焼結体及びその製法 |
| JP5872998B2 (ja) | 2012-04-26 | 2016-03-01 | 日本特殊陶業株式会社 | アルミナ焼結体、それを備える部材、および半導体製造装置 |
| JP5775544B2 (ja) * | 2013-05-09 | 2015-09-09 | 日本特殊陶業株式会社 | 点火プラグ用絶縁体及び点火プラグ |
| JP6088346B2 (ja) | 2013-05-09 | 2017-03-01 | 新光電気工業株式会社 | 静電チャック及び半導体製造装置 |
-
2003
- 2003-09-29 JP JP2003336790A patent/JP4364593B2/ja not_active Expired - Fee Related
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