JP2017103389A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2017103389A5 JP2017103389A5 JP2015236642A JP2015236642A JP2017103389A5 JP 2017103389 A5 JP2017103389 A5 JP 2017103389A5 JP 2015236642 A JP2015236642 A JP 2015236642A JP 2015236642 A JP2015236642 A JP 2015236642A JP 2017103389 A5 JP2017103389 A5 JP 2017103389A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate body
- oxide
- electrostatic chuck
- der
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 17
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 8
- 239000000292 calcium oxide Substances 0.000 claims description 8
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 8
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000000395 magnesium oxide Substances 0.000 claims description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 4
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015236642A JP2017103389A (ja) | 2015-12-03 | 2015-12-03 | 静電チャック及び半導体製造装置 |
| US15/347,842 US20170162416A1 (en) | 2015-12-03 | 2016-11-10 | Electrostatic chuck and semiconductor manufacturing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015236642A JP2017103389A (ja) | 2015-12-03 | 2015-12-03 | 静電チャック及び半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017103389A JP2017103389A (ja) | 2017-06-08 |
| JP2017103389A5 true JP2017103389A5 (https=) | 2018-10-25 |
Family
ID=58800353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015236642A Pending JP2017103389A (ja) | 2015-12-03 | 2015-12-03 | 静電チャック及び半導体製造装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20170162416A1 (https=) |
| JP (1) | JP2017103389A (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7168430B2 (ja) * | 2018-12-04 | 2022-11-09 | 株式会社アイシン福井 | レーザ溶接装置 |
| JP7239307B2 (ja) * | 2018-12-04 | 2023-03-14 | 株式会社アイシン福井 | レーザ溶接装置 |
| JP7312712B2 (ja) * | 2020-02-07 | 2023-07-21 | 新光電気工業株式会社 | セラミックス基板、静電チャック、静電チャックの製造方法 |
| KR20230096465A (ko) | 2021-12-23 | 2023-06-30 | 주식회사 미코세라믹스 | 세라믹 서셉터의 제조 방법 |
| JP2024174805A (ja) | 2023-06-05 | 2024-12-17 | 株式会社神戸製鋼所 | 放熱材料、放熱部品、静電チャック及び放熱材料の製造方法 |
| CN121753541A (zh) * | 2023-08-22 | 2026-03-27 | 日本碍子株式会社 | 半导体制造装置用部件 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6088346B2 (ja) * | 2013-05-09 | 2017-03-01 | 新光電気工業株式会社 | 静電チャック及び半導体製造装置 |
-
2015
- 2015-12-03 JP JP2015236642A patent/JP2017103389A/ja active Pending
-
2016
- 2016-11-10 US US15/347,842 patent/US20170162416A1/en not_active Abandoned