JP2004526308A5 - - Google Patents

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Publication number
JP2004526308A5
JP2004526308A5 JP2002561265A JP2002561265A JP2004526308A5 JP 2004526308 A5 JP2004526308 A5 JP 2004526308A5 JP 2002561265 A JP2002561265 A JP 2002561265A JP 2002561265 A JP2002561265 A JP 2002561265A JP 2004526308 A5 JP2004526308 A5 JP 2004526308A5
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JP
Japan
Prior art keywords
polishing
coupling agent
polishing system
liquid carrier
hydroxy coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002561265A
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English (en)
Japanese (ja)
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JP2004526308A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2002/000205 external-priority patent/WO2002061810A1/en
Publication of JP2004526308A publication Critical patent/JP2004526308A/ja
Publication of JP2004526308A5 publication Critical patent/JP2004526308A5/ja
Pending legal-status Critical Current

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JP2002561265A 2001-01-16 2002-01-04 シュウ酸アンモニウムを含有する研磨系及び方法 Pending JP2004526308A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26192801P 2001-01-16 2001-01-16
PCT/US2002/000205 WO2002061810A1 (en) 2001-01-16 2002-01-04 Ammonium oxalate-containing polishing system and method

Publications (2)

Publication Number Publication Date
JP2004526308A JP2004526308A (ja) 2004-08-26
JP2004526308A5 true JP2004526308A5 (https=) 2005-12-22

Family

ID=22995488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002561265A Pending JP2004526308A (ja) 2001-01-16 2002-01-04 シュウ酸アンモニウムを含有する研磨系及び方法

Country Status (6)

Country Link
US (1) US20020125461A1 (https=)
EP (1) EP1356502A1 (https=)
JP (1) JP2004526308A (https=)
CN (1) CN1255854C (https=)
MY (1) MY127299A (https=)
WO (1) WO2002061810A1 (https=)

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CN104745087B (zh) * 2013-12-25 2018-07-24 安集微电子（上海）有限公司 一种化学机械抛光液以及抛光方法
CN104745083B (zh) * 2013-12-25 2018-09-14 安集微电子（上海）有限公司 一种化学机械抛光液以及抛光方法
CN104263248B (zh) * 2014-09-26 2016-06-29 深圳市力合材料有限公司 一种适用于低下压力的弱酸性铜抛光液

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