JP2004509429A5 - - Google Patents
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- Publication number
- JP2004509429A5 JP2004509429A5 JP2002508822A JP2002508822A JP2004509429A5 JP 2004509429 A5 JP2004509429 A5 JP 2004509429A5 JP 2002508822 A JP2002508822 A JP 2002508822A JP 2002508822 A JP2002508822 A JP 2002508822A JP 2004509429 A5 JP2004509429 A5 JP 2004509429A5
- Authority
- JP
- Japan
- Prior art keywords
- antenna
- conductors
- plasma reactor
- plasma
- symmetry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 description 22
- 239000003990 capacitor Substances 0.000 description 7
- 210000002381 Plasma Anatomy 0.000 description 6
- 230000001939 inductive effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Applications Claiming Priority (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/611,170 | 2000-07-06 | ||
US09/611,345 | 2000-07-06 | ||
US09/610,800 US6409933B1 (en) | 2000-07-06 | 2000-07-06 | Plasma reactor having a symmetric parallel conductor coil antenna |
US09/611,168 US6414648B1 (en) | 2000-07-06 | 2000-07-06 | Plasma reactor having a symmetric parallel conductor coil antenna |
US09/611,169 | 2000-07-06 | ||
US09/611,170 US6694915B1 (en) | 2000-07-06 | 2000-07-06 | Plasma reactor having a symmetrical parallel conductor coil antenna |
US09/610,800 | 2000-07-06 | ||
US09/611,168 | 2000-07-06 | ||
US09/611,345 US6462481B1 (en) | 2000-07-06 | 2000-07-06 | Plasma reactor having a symmetric parallel conductor coil antenna |
US09/611,169 US6685798B1 (en) | 2000-07-06 | 2000-07-06 | Plasma reactor having a symmetrical parallel conductor coil antenna |
PCT/US2001/020717 WO2002005308A2 (en) | 2000-07-06 | 2001-06-29 | A plasma reactor having a symmetric parallel conductor coil antenna |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2004509429A JP2004509429A (ja) | 2004-03-25 |
JP2004509429A5 true JP2004509429A5 (es) | 2008-08-14 |
JP5160717B2 JP5160717B2 (ja) | 2013-03-13 |
Family
ID=27541986
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002508822A Expired - Lifetime JP5160717B2 (ja) | 2000-07-06 | 2001-06-29 | 対称的な並列導体のコイルアンテナを有するプラズマリアクタ |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1301938A2 (es) |
JP (1) | JP5160717B2 (es) |
WO (1) | WO2002005308A2 (es) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3820188B2 (ja) | 2002-06-19 | 2006-09-13 | 三菱重工業株式会社 | プラズマ処理装置及びプラズマ処理方法 |
AU2002313941A1 (en) * | 2002-07-26 | 2004-02-16 | Plasmart Co. Ltd. | Inductively coupled plasma generator having lower aspect ratio |
US6852639B2 (en) | 2002-07-31 | 2005-02-08 | Infineon Technologies Ag | Etching processing method for a material layer |
KR100486724B1 (ko) | 2002-10-15 | 2005-05-03 | 삼성전자주식회사 | 사행 코일 안테나를 구비한 유도결합 플라즈마 발생장치 |
JP2006216903A (ja) * | 2005-02-07 | 2006-08-17 | Hitachi High-Technologies Corp | プラズマ処理装置 |
CN101136279B (zh) | 2006-08-28 | 2010-05-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 电感耦合线圈及电感耦合等离子体装置 |
JP5277473B2 (ja) | 2006-11-28 | 2013-08-28 | サムコ株式会社 | プラズマ処理装置 |
US8956500B2 (en) | 2007-04-24 | 2015-02-17 | Applied Materials, Inc. | Methods to eliminate “M-shape” etch rate profile in inductively coupled plasma reactor |
JP5229995B2 (ja) * | 2008-04-07 | 2013-07-03 | 株式会社アルバック | アンテナ、交流回路、及びプラズマ処理装置 |
JP5551343B2 (ja) * | 2008-05-14 | 2014-07-16 | 東京エレクトロン株式会社 | 誘導結合プラズマ処理装置 |
JP5231308B2 (ja) * | 2009-03-31 | 2013-07-10 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US20110094994A1 (en) * | 2009-10-26 | 2011-04-28 | Applied Materials, Inc. | Inductively coupled plasma apparatus |
US20110094683A1 (en) * | 2009-10-26 | 2011-04-28 | Applied Materials, Inc. | Rf feed structure for plasma processing |
JP5851682B2 (ja) | 2010-09-28 | 2016-02-03 | 東京エレクトロン株式会社 | プラズマ処理装置 |
KR101202957B1 (ko) * | 2010-10-19 | 2012-11-20 | 주성엔지니어링(주) | 플라즈마 발생용 안테나 및 이를 포함하는 기판처리장치 |
CN105408984B (zh) | 2014-02-06 | 2019-12-10 | 应用材料公司 | 用于启用轴对称以用于改进的流动传导性和均匀性的在线去耦合等离子体源腔室硬件设计 |
KR101712263B1 (ko) * | 2014-04-22 | 2017-03-03 | 김일욱 | 헬리컬공명플라즈마 안테나 및 이를 구비하는 플라즈마 발생 장치 |
JP2015159118A (ja) * | 2015-03-26 | 2015-09-03 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP6668384B2 (ja) * | 2015-06-15 | 2020-03-18 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | コイルアセンブリ、コイルアセンブリを用いてトレンチを形成する方法及びエッチングリアクタ |
KR101932117B1 (ko) * | 2017-08-11 | 2018-12-24 | 피에스케이 주식회사 | 기판 처리 장치, 기판 처리 방법 및 플라즈마 발생 유닛 |
US11521828B2 (en) * | 2017-10-09 | 2022-12-06 | Applied Materials, Inc. | Inductively coupled plasma source |
KR101972783B1 (ko) * | 2017-10-13 | 2019-08-16 | 주식회사 유진테크 | Icp 안테나 및 이를 포함하는 플라즈마 처리 장치 |
KR20220094272A (ko) * | 2020-12-28 | 2022-07-06 | 세메스 주식회사 | 기판 처리 장치 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS577100A (en) * | 1980-06-16 | 1982-01-14 | Nippon Electron Optics Lab | Plasma generator |
EP0468742B1 (en) * | 1990-07-24 | 1996-03-27 | Varian Australia Pty. Ltd. | Inductively coupled plasma spectroscopy |
US6074512A (en) * | 1991-06-27 | 2000-06-13 | Applied Materials, Inc. | Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners |
US5231334A (en) * | 1992-04-15 | 1993-07-27 | Texas Instruments Incorporated | Plasma source and method of manufacturing |
JP3105403B2 (ja) * | 1994-09-14 | 2000-10-30 | 松下電器産業株式会社 | プラズマ処理装置 |
US5753044A (en) * | 1995-02-15 | 1998-05-19 | Applied Materials, Inc. | RF plasma reactor with hybrid conductor and multi-radius dome ceiling |
ATE181637T1 (de) * | 1994-10-31 | 1999-07-15 | Applied Materials Inc | Plasmareaktoren zur halbleiterscheibenbehandlung |
US5919382A (en) * | 1994-10-31 | 1999-07-06 | Applied Materials, Inc. | Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor |
US5688357A (en) * | 1995-02-15 | 1997-11-18 | Applied Materials, Inc. | Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor |
US6252354B1 (en) * | 1996-11-04 | 2001-06-26 | Applied Materials, Inc. | RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control |
US6028395A (en) * | 1997-09-16 | 2000-02-22 | Lam Research Corporation | Vacuum plasma processor having coil with added conducting segments to its peripheral part |
US6028285A (en) * | 1997-11-19 | 2000-02-22 | Board Of Regents, The University Of Texas System | High density plasma source for semiconductor processing |
-
2001
- 2001-06-29 JP JP2002508822A patent/JP5160717B2/ja not_active Expired - Lifetime
- 2001-06-29 WO PCT/US2001/020717 patent/WO2002005308A2/en active Application Filing
- 2001-06-29 EP EP01950648A patent/EP1301938A2/en not_active Withdrawn
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