JPS577100A - Plasma generator - Google Patents

Plasma generator

Info

Publication number
JPS577100A
JPS577100A JP8113880A JP8113880A JPS577100A JP S577100 A JPS577100 A JP S577100A JP 8113880 A JP8113880 A JP 8113880A JP 8113880 A JP8113880 A JP 8113880A JP S577100 A JPS577100 A JP S577100A
Authority
JP
Japan
Prior art keywords
plasma generator
plasma
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8113880A
Other languages
Japanese (ja)
Other versions
JPS615280B2 (en
Inventor
Youzou Kindaichi
Kikuo Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP8113880A priority Critical patent/JPS577100A/en
Publication of JPS577100A publication Critical patent/JPS577100A/en
Publication of JPS615280B2 publication Critical patent/JPS615280B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP8113880A 1980-06-16 1980-06-16 Plasma generator Granted JPS577100A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8113880A JPS577100A (en) 1980-06-16 1980-06-16 Plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8113880A JPS577100A (en) 1980-06-16 1980-06-16 Plasma generator

Publications (2)

Publication Number Publication Date
JPS577100A true JPS577100A (en) 1982-01-14
JPS615280B2 JPS615280B2 (en) 1986-02-17

Family

ID=13738035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8113880A Granted JPS577100A (en) 1980-06-16 1980-06-16 Plasma generator

Country Status (1)

Country Link
JP (1) JPS577100A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004509429A (en) * 2000-07-06 2004-03-25 アプライド　マテリアルズ　インコーポレイテッド Plasma reactor with symmetrical parallel conductor coil antenna

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004509429A (en) * 2000-07-06 2004-03-25 アプライド　マテリアルズ　インコーポレイテッド Plasma reactor with symmetrical parallel conductor coil antenna

Also Published As

Publication number Publication date
JPS615280B2 (en) 1986-02-17

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