JP2004503680A5 - - Google Patents

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Publication number
JP2004503680A5
JP2004503680A5 JP2002512441A JP2002512441A JP2004503680A5 JP 2004503680 A5 JP2004503680 A5 JP 2004503680A5 JP 2002512441 A JP2002512441 A JP 2002512441A JP 2002512441 A JP2002512441 A JP 2002512441A JP 2004503680 A5 JP2004503680 A5 JP 2004503680A5
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JP
Japan
Prior art keywords
carbon
arc
sun
precursor material
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002512441A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004503680A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/AU2001/000869 external-priority patent/WO2002006554A1/en
Publication of JP2004503680A publication Critical patent/JP2004503680A/ja
Publication of JP2004503680A5 publication Critical patent/JP2004503680A5/ja
Pending legal-status Critical Current

Links

JP2002512441A 2000-07-17 2001-07-17 炭素及び炭素系材料の製造 Pending JP2004503680A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPR260700 2000-07-17
PCT/AU2001/000869 WO2002006554A1 (en) 2000-07-17 2001-07-17 Deposition of carbon and carbon-based materials

Publications (2)

Publication Number Publication Date
JP2004503680A JP2004503680A (ja) 2004-02-05
JP2004503680A5 true JP2004503680A5 (enExample) 2007-12-13

Family

ID=3826641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002512441A Pending JP2004503680A (ja) 2000-07-17 2001-07-17 炭素及び炭素系材料の製造

Country Status (4)

Country Link
US (1) US20030234176A1 (enExample)
EP (1) EP1303644A4 (enExample)
JP (1) JP2004503680A (enExample)
WO (1) WO2002006554A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6740586B1 (en) * 2002-11-06 2004-05-25 Advanced Technology Materials, Inc. Vapor delivery system for solid precursors and method of using same
DE102004041235A1 (de) * 2004-08-26 2006-03-02 Ina-Schaeffler Kg Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben
US9997338B2 (en) * 2005-03-24 2018-06-12 Oerlikon Surface Solutions Ag, Pfäffikon Method for operating a pulsed arc source
KR101499272B1 (ko) * 2007-05-25 2015-03-05 오를리콘 트레이딩 아크티엔게젤샤프트, 트뤼프바흐 진공 처리 장치 및 진공 처리 방법
US20130000545A1 (en) * 2011-06-28 2013-01-03 Nitride Solutions Inc. Device and method for producing bulk single crystals
KR20160054514A (ko) 2013-09-04 2016-05-16 니트라이드 솔루션즈 인크. 벌크 확산 결정 성장 방법
US11478851B2 (en) 2016-10-21 2022-10-25 General Electric Company Producing titanium alloy materials through reduction of titanium tetrachloride
AU2017345719B2 (en) 2016-10-21 2021-10-21 General Electric Company Producing titanium alloy materials through reduction of titanium tetrachloride
DE102020124269A1 (de) 2020-09-17 2022-03-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Vorrichtung und Verfahren zum Abscheiden harter Kohlenstoffschichten

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4565618A (en) * 1983-05-17 1986-01-21 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Apparatus for producing diamondlike carbon flakes
JPS63210099A (ja) * 1987-02-26 1988-08-31 Nissin Electric Co Ltd ダイヤモンド膜の作製方法
DE3941202A1 (de) * 1989-12-14 1990-06-07 Fried. Krupp Gmbh, 4300 Essen Verfahren zur erzeugung von schichten aus harten kohlenstoffmodifikationen und vorrichtung zur durchfuehrung des verfahrens
CA2065581C (en) * 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
US5580429A (en) * 1992-08-25 1996-12-03 Northeastern University Method for the deposition and modification of thin films using a combination of vacuum arcs and plasma immersion ion implantation
US5401543A (en) * 1993-11-09 1995-03-28 Minnesota Mining And Manufacturing Company Method for forming macroparticle-free DLC films by cathodic arc discharge
US5643343A (en) * 1993-11-23 1997-07-01 Selifanov; Oleg Vladimirovich Abrasive material for precision surface treatment and a method for the manufacturing thereof
JPH07206416A (ja) * 1994-01-20 1995-08-08 Tokai Carbon Co Ltd 黒鉛質超微粉の製造方法
JP2526408B2 (ja) * 1994-01-28 1996-08-21 工業技術院長 カ―ボンナノチュ―ブの連続製造方法及び装置
JP3383952B2 (ja) * 1994-02-08 2003-03-10 東海カーボン株式会社 フラーレンの連続製造法および装置
JPH0848510A (ja) * 1994-08-04 1996-02-20 Satoru Mieno アーク放電によるフラーレン自動合成装置
US5711773A (en) * 1994-11-17 1998-01-27 Plasmoteg Engineering Center Abrasive material for precision surface treatment and a method for the manufacturing thereof
JP3147007B2 (ja) * 1996-10-03 2001-03-19 村田機械株式会社 複合加工機およびその板材加工方法
WO1998040533A1 (fr) * 1997-03-13 1998-09-17 Komatsu Ltd. Dispositif et procede de traitement de surface

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