JP2004347913A - レジスト検査方法 - Google Patents
レジスト検査方法 Download PDFInfo
- Publication number
- JP2004347913A JP2004347913A JP2003145796A JP2003145796A JP2004347913A JP 2004347913 A JP2004347913 A JP 2004347913A JP 2003145796 A JP2003145796 A JP 2003145796A JP 2003145796 A JP2003145796 A JP 2003145796A JP 2004347913 A JP2004347913 A JP 2004347913A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- resist layer
- dry film
- exposed
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Photosensitive Polymer And Photoresist Processing (AREA)
- Materials For Photolithography (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003145796A JP2004347913A (ja) | 2003-05-23 | 2003-05-23 | レジスト検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003145796A JP2004347913A (ja) | 2003-05-23 | 2003-05-23 | レジスト検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004347913A true JP2004347913A (ja) | 2004-12-09 |
| JP2004347913A5 JP2004347913A5 (enExample) | 2005-10-27 |
Family
ID=33532839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003145796A Pending JP2004347913A (ja) | 2003-05-23 | 2003-05-23 | レジスト検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004347913A (enExample) |
-
2003
- 2003-05-23 JP JP2003145796A patent/JP2004347913A/ja active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050713 |
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| A02 | Decision of refusal |
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