JP2004325944A - 微小物体処理装置 - Google Patents

微小物体処理装置 Download PDF

Info

Publication number
JP2004325944A
JP2004325944A JP2003122463A JP2003122463A JP2004325944A JP 2004325944 A JP2004325944 A JP 2004325944A JP 2003122463 A JP2003122463 A JP 2003122463A JP 2003122463 A JP2003122463 A JP 2003122463A JP 2004325944 A JP2004325944 A JP 2004325944A
Authority
JP
Japan
Prior art keywords
pattern
hologram
substrate
optical tweezers
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003122463A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004325944A5 (enExample
Inventor
Hiroshi Maehara
広 前原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003122463A priority Critical patent/JP2004325944A/ja
Priority to US10/537,413 priority patent/US7295357B2/en
Priority to PCT/JP2004/005550 priority patent/WO2004097844A2/en
Publication of JP2004325944A publication Critical patent/JP2004325944A/ja
Publication of JP2004325944A5 publication Critical patent/JP2004325944A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22—Processes or apparatus for obtaining an optical image from holograms
    • G03H1/2202—Reconstruction geometries or arrangements
    • G03H1/2205—Reconstruction geometries or arrangements using downstream optical component
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/02—Details of features involved during the holographic process; Replication of holograms without interference recording
    • G03H1/024—Hologram nature or properties
    • G03H1/0244—Surface relief holograms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G03H2001/0077—Adaptation of holography to specific applications for optical manipulation, e.g. holographic optical tweezers [HOT]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0476—Holographic printer
    • G03H2001/0478—Serial printer, i.e. point oriented processing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/08—Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • G03H1/0841—Encoding method mapping the synthesized field into a restricted set of values representative of the modulator parameters, e.g. detour phase coding
    • G03H2001/085—Kinoform, i.e. phase only encoding wherein the computed field is processed into a distribution of phase differences
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22—Processes or apparatus for obtaining an optical image from holograms
    • G03H1/2202—Reconstruction geometries or arrangements
    • G03H1/2205—Reconstruction geometries or arrangements using downstream optical component
    • G03H2001/221—Element having optical power, e.g. field lens
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2210/00—Object characteristics
    • G03H2210/50—Nature of the object
    • G03H2210/55—Having particular size, e.g. irresolvable by the eye

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)
  • Manipulator (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Holo Graphy (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2003122463A 2003-04-25 2003-04-25 微小物体処理装置 Pending JP2004325944A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2003122463A JP2004325944A (ja) 2003-04-25 2003-04-25 微小物体処理装置
US10/537,413 US7295357B2 (en) 2003-04-25 2004-04-19 Apparatus for handling minute object
PCT/JP2004/005550 WO2004097844A2 (en) 2003-04-25 2004-04-19 Apparatus for handling minute object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003122463A JP2004325944A (ja) 2003-04-25 2003-04-25 微小物体処理装置

Publications (2)

Publication Number Publication Date
JP2004325944A true JP2004325944A (ja) 2004-11-18
JP2004325944A5 JP2004325944A5 (enExample) 2006-03-30

Family

ID=33410076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003122463A Pending JP2004325944A (ja) 2003-04-25 2003-04-25 微小物体処理装置

Country Status (3)

Country Link
US (1) US7295357B2 (enExample)
JP (1) JP2004325944A (enExample)
WO (1) WO2004097844A2 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006072279A (ja) * 2004-08-31 2006-03-16 Hamamatsu Photonics Kk 光パターン形成方法および装置、ならびに光ピンセット装置
US7387682B2 (en) 2003-01-21 2008-06-17 Seiko Epson Corporation Liquid drop discharge device, printer, printing method, and electro-optical device
JP2009534683A (ja) * 2006-04-26 2009-09-24 パーキンエルマー・シンガポール・ピーティーイー・リミテッド 減衰全反射（ａｔｒ）分光法用の付属品
JP2010517102A (ja) * 2007-01-26 2010-05-20 ニュー・ヨーク・ユニヴァーシティ ホログラフィックにトラップされた３次元構造のホログラフィック顕微鏡法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI352991B (en) * 2007-08-10 2011-11-21 Benq Materials Corp Disk structure, manufacturing method thereof and o
CN101377965B (zh) * 2007-08-31 2011-07-20 明基材料股份有限公司 盘片结构及其制造方法与应用其的光镊装置
US9163903B2 (en) 2012-09-06 2015-10-20 Raytheon Company Field boresighting using holographic laser projection
US9665065B2 (en) * 2012-09-06 2017-05-30 Raytheon Company Infrared laser holographic projector
CN108290286A (zh) * 2015-12-03 2018-07-17 Abb瑞士股份有限公司 用于教导工业机器人拾取零件的方法
CN110293536B (zh) * 2019-07-12 2020-09-18 哈尔滨工业大学 一种微纳机器人控制系统
CN116013575B (zh) * 2022-12-21 2023-08-22 深圳大学 一种基于水反常膨胀特性的低温光热镊操控系统及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6797942B2 (en) * 2001-09-13 2004-09-28 University Of Chicago Apparatus and process for the lateral deflection and separation of flowing particles by a static array of optical tweezers
US5939716A (en) * 1997-04-02 1999-08-17 Sandia Corporation Three-dimensional light trap for reflective particles
JP3468149B2 (ja) 1999-02-19 2003-11-17 松下電器産業株式会社 微細物体の操作装置および操作方法
US20030007894A1 (en) * 2001-04-27 2003-01-09 Genoptix Methods and apparatus for use of optical forces for identification, characterization and/or sorting of particles
JP2002219700A (ja) 2001-01-22 2002-08-06 Japan Science & Technology Corp 微小物体のマニピュレーション方法とその装置
US6416190B1 (en) * 2001-04-27 2002-07-09 University Of Chicago Apparatus for using optical tweezers to manipulate materials

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7387682B2 (en) 2003-01-21 2008-06-17 Seiko Epson Corporation Liquid drop discharge device, printer, printing method, and electro-optical device
JP2006072279A (ja) * 2004-08-31 2006-03-16 Hamamatsu Photonics Kk 光パターン形成方法および装置、ならびに光ピンセット装置
JP2009534683A (ja) * 2006-04-26 2009-09-24 パーキンエルマー・シンガポール・ピーティーイー・リミテッド 減衰全反射（ａｔｒ）分光法用の付属品
US8400711B2 (en) 2006-04-26 2013-03-19 Perkinelmer Singapore Pte Ltd. Accessory for attenuated total internal reflectance (ATR) spectroscopy
US8743456B2 (en) 2006-04-26 2014-06-03 Perkinelmer Singapore Pte Ltd. Systems and methods for attenuated total internal reflectance (ATR) spectroscopy
JP2010517102A (ja) * 2007-01-26 2010-05-20 ニュー・ヨーク・ユニヴァーシティ ホログラフィックにトラップされた３次元構造のホログラフィック顕微鏡法

Also Published As

Publication number Publication date
WO2004097844A2 (en) 2004-11-11
US20060092517A1 (en) 2006-05-04
WO2004097844A3 (en) 2005-02-24
US7295357B2 (en) 2007-11-13

Similar Documents

Publication Publication Date Title
US20200379356A1 (en) Method and system for nanoscale data recording
US4686162A (en) Optically structured filter and process for its production
EP3330798B1 (en) Maskless photolithographic system in cooperative working mode for cross-scale structure
TWI363373B (en) Writing method of mask substrate and charged particle beam writing apparatus
JP4668401B2 (ja) フォトリソグラフィシミュレーションによるレティクル検査方法及びシステム
Fourkas et al. 2-Colour photolithography
JP2004325944A (ja) 微小物体処理装置
JP2005191393A (ja) 露光方法及び装置
JP2004170410A (ja) ３次元構造の製作方法
JP2001284240A (ja) 照明光学系、および該照明光学系を備えた投影露光装置と該投影露光装置によるデバイスの製造方法
CN113805438A (zh) 单步法的深紫外微缩投影光刻并行制造系统及方法
JP3904765B2 (ja) リソグラフィ装置
US20080259328A1 (en) Reticle defect inspection apparatus and inspection method using thereof
JP4347009B2 (ja) 近接場光の発生方法、近接場露光用マスク、近接場露光方法、近接場露光装置、近接場光ヘッド
JP4612849B2 (ja) 露光方法、露光装置及びデバイス製造方法
JP3618856B2 (ja) Ｘ線露光装置、及びこれを用いたデバイス生産方法
JP3102077B2 (ja) 半導体デバイスの製造方法及び投影露光装置
JPH06204123A (ja) 照明装置及びそれを用いた投影露光装置
JPH06204114A (ja) 照明装置及びそれを用いた投影露光装置
JP3959238B2 (ja) 荷電ビーム描画方法と描画データ作成方法
KR100912366B1 (ko) 광학현미경을 이용한 포토리소그래피 시스템
JPH09190975A (ja) 露光装置及びそれを用いた素子製造方法
JP3327040B2 (ja) マルチドット回折格子パターンの作成方法及び装置
KR101728856B1 (ko) 전자빔 리소그래피 오버레이 방법 및 이를 위한 장치
CN116661041B (zh) 一种光栅定位标记制备方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060210

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060210

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090325

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20090715