JP2004318134A5 - - Google Patents

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Publication number
JP2004318134A5
JP2004318134A5 JP2004112414A JP2004112414A JP2004318134A5 JP 2004318134 A5 JP2004318134 A5 JP 2004318134A5 JP 2004112414 A JP2004112414 A JP 2004112414A JP 2004112414 A JP2004112414 A JP 2004112414A JP 2004318134 A5 JP2004318134 A5 JP 2004318134A5
Authority
JP
Japan
Prior art keywords
coupled
chamber
working liquid
piezoelectric element
piezoelectric elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004112414A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004318134A (ja
Filing date
Publication date
Priority claimed from US10/412,895 external-priority patent/US6961487B2/en
Application filed filed Critical
Publication of JP2004318134A publication Critical patent/JP2004318134A/ja
Publication of JP2004318134A5 publication Critical patent/JP2004318134A5/ja
Pending legal-status Critical Current

Links

JP2004112414A 2003-04-14 2004-04-06 プッシャ・モードで圧電駆動される液体金属光スイッチのための方法および構造 Pending JP2004318134A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/412,895 US6961487B2 (en) 2003-04-14 2003-04-14 Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch

Publications (2)

Publication Number Publication Date
JP2004318134A JP2004318134A (ja) 2004-11-11
JP2004318134A5 true JP2004318134A5 (enExample) 2007-05-17

Family

ID=32298252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004112414A Pending JP2004318134A (ja) 2003-04-14 2004-04-06 プッシャ・モードで圧電駆動される液体金属光スイッチのための方法および構造

Country Status (5)

Country Link
US (1) US6961487B2 (enExample)
JP (1) JP2004318134A (enExample)
DE (1) DE10361002A1 (enExample)
GB (1) GB2400680B (enExample)
TW (1) TW200421641A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2596298A1 (en) * 2005-08-31 2007-03-08 Matsushita Electric Works, Ltd. Relay device using conductive fluid
EP3406113B1 (en) * 2016-01-20 2020-09-09 Jaquet Technology Group AG Manufacturing method for a sensing element and sensor device

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